技术领域technical field
本发明涉及一种废气处理装置，特别是涉及一种燃烧式有害气体处理装置。The invention relates to a waste gas treatment device, in particular to a combustion type harmful gas treatment device.
背景技术Background technique
半导体工业制程中利用化学气相沉积(CVD,ChemicalVaporDeposition)技术生成磊晶，原理是用反应气体于基材上沉积薄膜，制程中需使用全氟化物(PFCs)气体作为反应室的清洗用途(ChamberClean)，而在蚀刻(Etch)过程也有使用PFCs气体。Chemical Vapor Deposition (CVD, Chemical Vapor Deposition) technology is used to generate epitaxy in the semiconductor industry process. The principle is to use reactive gases to deposit thin films on the substrate. During the process, perfluorinated compounds (PFCs) gases are used for cleaning the reaction chamber (ChamberClean) , and PFCs gas is also used in the etching (Etch) process.
但半导体制程中使用的全氟化物(PFCs)，如CF4、C2F6、NF3、SF6、CHF3及C3F8等，其F-C、F-S及F-N的分子键具有相当高的红外线吸收能力，为高温室效应气体，对温室效应的影响远高过CO2数倍，因此有愈来愈多国际组织管制PFCs气体的排放，及制定温室效应气体的减量计划。However, perfluorinated compounds (PFCs) used in semiconductor manufacturing processes, such as CF4 , C2 F6 , NF3 , SF6 , CHF3 and C3 F8 , etc., have very high molecular bonds of FC, FS and FN. Infrared absorption capacity is a high greenhouse effect gas, and its impact on the greenhouse effect is several times higher than that of CO2 . Therefore, more and more international organizations control the emission of PFCs gases and formulate reduction plans for greenhouse effect gases.
目前处理PFCs气体较为成熟的技术有燃烧法(热处理法)、触媒热裂解及电浆破坏等。燃烧法是用燃烧头产生高温火焰去除污染物气体；触媒热裂解法是利用触媒分解PFCs气体；电浆破坏是利用高能量的电子将PFCs气体的化学键激发或打断，让PFCs气体转化。At present, the relatively mature technologies for treating PFCs gas include combustion method (heat treatment method), catalytic pyrolysis and plasma destruction. The combustion method is to use the combustion head to generate a high-temperature flame to remove pollutant gases; the catalytic pyrolysis method is to use a catalyst to decompose the PFCs gas; the plasma destruction is to use high-energy electrons to excite or break the chemical bonds of the PFCs gas to transform the PFCs gas.
其中燃烧法目前多是燃烧瓦斯(天然气，甲烷)产生火焰以去除PFCs气体，然而瓦斯燃烧后会产生出二氧化碳(CO2)，二氧化碳也属于温室效应气体的一种，且瓦斯并不安定，在使用及储放上都需要多加留意，以免工安意外发生，因此利用瓦斯的燃烧法还是有克服的空间。Among them, the combustion method is currently burning gas (natural gas, methane) to generate flames to remove PFCs gas. However, after gas combustion, carbon dioxide (CO2 ) will be produced. Carbon dioxide is also a kind of greenhouse gas, and gas is not stable. More attention should be paid to use and storage to avoid industrial safety accidents. Therefore, there is still room for overcoming the combustion method using gas.
发明内容Contents of the invention
本发明的目的在于提供一种减少温室效应气体产生的燃烧式有害气体处理装置。The object of the present invention is to provide a combustion type harmful gas treatment device which reduces the generation of greenhouse effect gas.
本发明燃烧式有害气体处理装置，包含一个用于储存水液的储液槽，及一个与该储液槽相连接的燃烧单元。The combustion type harmful gas processing device of the present invention comprises a liquid storage tank for storing water liquid, and a combustion unit connected with the liquid storage tank.
该燃烧单元包括一个围绕出一个燃烧区的主管、一个用于将有害气体导入该主管的燃烧区的导引管、一个用于接受氢氧气体并朝该主管的燃烧区喷出氢氧焰的喷火头，及一个连通该主管并伸入该储液槽的水液内的排气管。The combustion unit includes a main pipe surrounding a combustion zone, a guide pipe for introducing harmful gas into the combustion zone of the main pipe, and a pipe for receiving hydrogen and oxygen gas and spraying hydrogen and oxygen flame toward the combustion zone of the main pipe. A fire nozzle, and an exhaust pipe that communicates with the main pipe and stretches into the water of the liquid storage tank.
本发明的目的及解决其技术问题还可采用于下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
较佳地，前述的该燃烧式有害气体处理装置还包含一个用于产生氢氧气体的氢氧气产生器，该氢氧气产生器包括一个盛装有电解水的电解槽、多个间隔设置在该电解槽内并浸泡在电解水中的电极板、一个连通该喷火头与电解槽并将氢氧气体导引至该喷火头的氢氧管，及一个电连接所述电极板且用于对电解水通电而电解产生氢氧气体的供电源。Preferably, the aforementioned combustion-type harmful gas treatment device also includes a hydrogen-oxygen generator for generating hydrogen-oxygen gas, and the hydrogen-oxygen generator includes an electrolytic cell filled with electrolyzed water, and a plurality of intervals are arranged in the electrolytic cell. An electrode plate immersed in the electrolyzed water in the tank, a hydrogen-oxygen tube that communicates the flame head with the electrolytic cell and guides the hydrogen-oxygen gas to the flame head, and a hydrogen-oxygen tube that is electrically connected to the electrode plate and used to energize the electrolyzed water And electrolysis produces the power supply of hydrogen and oxygen gas.
较佳地，前述的该燃烧式有害气体处理装置还包含一个洗涤单元，该洗涤单元包括一个在该主管与排气管末端间且朝该排气管内喷出水雾的第一喷雾件。Preferably, the aforementioned combustion-type harmful gas treatment device further includes a washing unit, and the washing unit includes a first spraying member that is between the main pipe and the end of the exhaust pipe and sprays water mist into the exhaust pipe.
较佳地，前述的燃烧式有害气体处理装置，其中该燃烧单元还包括一个连通该储液槽的辅助排气管，及一个连通该排气管与辅助排气管的连接管，该连接管的一端是朝向该第一喷雾件，前述的该第一喷雾件由该排气管朝该连接管的轴向喷出水雾。Preferably, the aforementioned combustion-type harmful gas treatment device, wherein the combustion unit further includes an auxiliary exhaust pipe communicating with the liquid storage tank, and a connecting pipe connecting the exhaust pipe and the auxiliary exhaust pipe, the connecting pipe One end is towards the first spray member, and the aforementioned first spray member sprays water mist from the exhaust pipe toward the axial direction of the connecting pipe.
较佳地，前述的燃烧式有害气体处理装置，其中该辅助排气管具有一个与该储液槽连通的进口段、一个相反该进口段的出口段，及一个连接该进口段与出口段的中间段，且该出口段是朝远离该储液槽的方向渐缩，该连接管的两端分别连接在排气管与辅助排气管的进口段。Preferably, the aforementioned combustion-type harmful gas treatment device, wherein the auxiliary exhaust pipe has an inlet section communicating with the liquid storage tank, an outlet section opposite to the inlet section, and an outlet section connecting the inlet section and the outlet section The middle section, and the outlet section tapers away from the liquid storage tank, and the two ends of the connecting pipe are respectively connected to the inlet section of the exhaust pipe and the auxiliary exhaust pipe.
较佳地，前述的燃烧式有害气体处理装置，其中该洗涤单元还包括至少一个设置在该辅助排气管的中间段且朝该辅助排气管的中间段内喷出水雾的第二喷雾件。Preferably, the aforementioned combustion-type harmful gas treatment device, wherein the washing unit further includes at least one second spray that is arranged in the middle section of the auxiliary exhaust pipe and sprays water mist toward the middle section of the auxiliary exhaust pipe. pieces.
本发明的有益效果在于：氢氧气体燃烧时，热值较瓦斯高，产生较高温的火焰，对有害气体的处理效率佳，且氢氧气体燃烧后产生的是水，更减少二氧化碳等温室气体的产生，相较燃烧瓦斯更为环保。The beneficial effect of the present invention is that: when the oxyhydrogen gas burns, the calorific value is higher than that of the gas, and a higher temperature flame is generated, and the treatment efficiency of the harmful gas is good, and water is produced after the oxyhydrogen gas is burned, which further reduces greenhouse gases such as carbon dioxide The generation of gas is more environmentally friendly than burning gas.
附图说明Description of drawings
图1是一示意图，说明本发明燃烧式有害气体处理装置的一较佳实施例。Fig. 1 is a schematic diagram illustrating a preferred embodiment of the combustion type harmful gas treatment device of the present invention.
具体实施方式Detailed ways
下面结合附图及实施例对本发明进行详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
参阅图1，为本发明燃烧式有害气体处理装置的一较佳实施例，包含一储液槽2、一与该储液槽2相连接的燃烧单元3、一设置在该燃烧单元3上的洗涤单元4，及一产生氢氧气体的氢氧气产生器5。Referring to Fig. 1, it is a preferred embodiment of the combustion type harmful gas treatment device of the present invention, comprising a liquid storage tank 2, a combustion unit 3 connected with the liquid storage tank 2, a combustion unit 3 arranged on the Washing unit 4, and a oxyhydrogen generator 5 for generating oxyhydrogen gas.
该储液槽2用于储存水液。该燃烧单元3包括一围绕出一燃烧区311的主管31、两个用于将有害气体导入该主管31的燃烧区311的导引管32、一用于接受氢氧气体并朝该主管31的燃烧区311喷出氢氧焰的喷火头33、一设置在该主管31上并伸入在该喷火头33端缘的点火器34、一连通该主管31并伸入该储液槽2的水液内的排气管35、一由该储液槽2向上延伸的辅助排气管36，及一连通该排气管35与辅助排气管36的连接管37。在实施上，导引管32也可以是一个。The liquid storage tank 2 is used to store water. This combustion unit 3 comprises a main pipe 31 surrounding a combustion zone 311, two guide pipes 32 for introducing harmful gases into the combustion zone 311 of the main pipe 31, one for accepting hydrogen and oxygen gas and moving towards the main pipe 31 Combustion zone 311 sprays the flame nozzle 33 of oxyhydrogen flame, one is arranged on this main pipe 31 and extends into the igniter 34 of this flame nozzle 33 edge, one connects this main pipe 31 and stretches into the water tank 2 An exhaust pipe 35 in the liquid, an auxiliary exhaust pipe 36 extending upward from the liquid storage tank 2 , and a connecting pipe 37 connecting the exhaust pipe 35 and the auxiliary exhaust pipe 36 . In practice, there may also be one guide tube 32 .
该辅助排气管36具有一与该储液槽2连通的进口段361、一相反该进口段361的出口段362，及一连接该进口段361与出口段362的中间段363，且该出口段362是朝远离该储液槽2的方向渐缩，其中该连接管37的两端分别连接在该排气管35与该辅助排气管36的进口段361。The auxiliary exhaust pipe 36 has an inlet section 361 communicating with the liquid storage tank 2, an outlet section 362 opposite the inlet section 361, and an intermediate section 363 connecting the inlet section 361 and the outlet section 362, and the outlet The section 362 is tapered away from the liquid storage tank 2 , and the two ends of the connecting pipe 37 are respectively connected to the inlet section 361 of the exhaust pipe 35 and the auxiliary exhaust pipe 36 .
本实施例中，该有害气体特别是指半导体制程中使用的全氟化物(PFCs)气体，如CF4、C2F6、NF3、SF6、CHF3及C3F8等，对于温室效应有重大影响的气体。In this embodiment, the harmful gas particularly refers to perfluorinated compound (PFCs) gases used in semiconductor manufacturing processes, such as CF4 , C2 F6 , NF3 , SF6 , CHF3 and C3 F8 , etc., for greenhouse Gases that have a significant impact on the effect.
该洗涤单元4包括一在该主管31与排气管35末端间且朝该排气管35内并喷出水雾的第一喷雾件41，及至少一个设置在该辅助排气管36的中间段363且朝该辅助排气管36的中间段363内喷出水雾的第二喷雾件42。本实施例中，该连接管37的一端是朝向该第一喷雾件41，该第一喷雾件41由该排气管35朝该连接管37的轴向喷出水雾，第二喷雾件42为两个，间隔设置在该辅助排气管36的中间段363且朝该辅助排气管36的中间段363内喷出水雾。The washing unit 4 includes a first spray member 41 that is between the main pipe 31 and the end of the exhaust pipe 35 and sprays water mist toward the inside of the exhaust pipe 35, and at least one is arranged in the middle of the auxiliary exhaust pipe 36. Section 363 and the second spray member 42 that sprays water mist toward the middle section 363 of the auxiliary exhaust pipe 36 . In this embodiment, one end of the connecting pipe 37 is towards the first spraying member 41, and the first spraying member 41 sprays water mist toward the axial direction of the connecting pipe 37 from the exhaust pipe 35, and the second spraying member 42 There are two, which are arranged at intervals in the middle section 363 of the auxiliary exhaust pipe 36 and spray water mist toward the middle section 363 of the auxiliary exhaust pipe 36 .
该氢氧气产生器5包括一盛装有电解水的电解槽51、多个间隔设置在该电解槽51内并浸泡在电解水中的电极板52、一连通该喷火头33与电解槽51并将氢氧气体导引至该喷火头33的氢氧管53，及一电连接所述电极板52且用于对电解水通电而电解产生氢氧气体的供电源54，该供电源54能与外界的电源(图未示)电连接。The oxygen gas generator 5 includes an electrolytic tank 51 filled with electrolyzed water, a plurality of electrode plates 52 that are arranged at intervals in the electrolyzed tank 51 and soaked in the electrolyzed water, a flame nozzle 33 that communicates with the electrolyzed tank 51 and discharges hydrogen. Oxygen gas is guided to the hydrogen-oxygen tube 53 of the flame nozzle 33, and a power supply 54 that is electrically connected to the electrode plate 52 and is used to electrolyze the electrolyzed water to generate hydrogen-oxygen gas. A power supply (not shown) is electrically connected.
由于氢氧气体在单位重量下的热值相较于瓦斯(天然气)高，且氢氧气体燃烧后产生的氢氧焰温度也较燃烧瓦斯的火焰的温度高，因此在加热、燃烧有害气体的处理效率上更佳，同时氢氧气体燃烧后产生的主产物是水，能够避免产生二氧化碳而继续造成温室效应。Since the calorific value per unit weight of oxyhydrogen gas is higher than that of gas (natural gas), and the temperature of the oxyhydrogen flame produced after the combustion of oxyhydrogen gas is also higher than the temperature of the flame burning gas, so in the process of heating and burning harmful gases The treatment efficiency is better, and at the same time, the main product produced after the hydrogen-oxygen gas is burned is water, which can avoid the production of carbon dioxide and continue to cause the greenhouse effect.
所以氢氧气产生器5以电解方式产生出氢氧气体，并沿该氢氧管53进入该喷火头33，该点火器34在该喷火头33端缘触发该氢氧气体燃烧，使喷火头33端缘形成朝向该燃烧区311的氢氧焰，同时，有害气体由所述导引管32进入燃烧单元3的主管31的燃烧区311，因此在该燃烧单元3的燃烧区311中，有害气体因高温产生的自由基与有害气体分解的氟(F)物种反应，形成氟化氢(HF)的最终产物，而氟化氢与水液接触后会形成氢氟酸，因此能将有害的氟留在水液中，所以当氟化氢经由该连接管37流向该辅助排气管36时，该第一喷雾件41与第二喷雾件42喷出的水雾洗涤氟化氢成为氢氟酸并流至储液槽2储存，让其余排放出的废气由该辅助排气管36排出时成为较干净、无害的气体，且该辅助排气管36的出口段362形成渐缩的外形，能够让水气凝结在管壁上，而有加强去除水气、除雾的功用，另外，通过该连接管37的设计，使燃烧后的气体不需直接进入该储液槽2，让该储液槽2不需考虑因燃烧后气体产生高温而有安全性的疑虑，且该第一喷雾件41除了有洗涤气体与降温的作用外，若气体经高温反应有结晶粉末状的副产品，该第一喷雾件41沿该连接管37轴向的喷雾方向也能够同时刷洗该连接管37，降低该连接管37因结晶副产品而阻塞的机会，让气体的流动顺畅。Therefore, the oxyhydrogen gas generator 5 produces oxyhydrogen gas by electrolysis, and enters the burner 33 along the oxyhydrogen tube 53, and the igniter 34 triggers the combustion of the oxyhydrogen gas at the edge of the burner 33, so that the burner 33 The end edge forms a hydrogen-oxygen flame towards the combustion zone 311. At the same time, the harmful gas enters the combustion zone 311 of the main pipe 31 of the combustion unit 3 by the guide pipe 32, so in the combustion zone 311 of the combustion unit 3, the harmful gas Free radicals generated by high temperature react with fluorine (F) species decomposed by harmful gases to form the final product of hydrogen fluoride (HF), and hydrogen fluoride will form hydrofluoric acid after contacting water, so harmful fluorine can be left in the water Therefore, when the hydrogen fluoride flows to the auxiliary exhaust pipe 36 through the connecting pipe 37, the water mist sprayed by the first spray member 41 and the second spray member 42 washes the hydrogen fluoride into hydrofluoric acid and flows to the liquid storage tank 2 for storage. , so that the rest of the exhaust gas discharged from the auxiliary exhaust pipe 36 becomes a relatively clean and harmless gas, and the outlet section 362 of the auxiliary exhaust pipe 36 forms a tapered shape, which can allow water vapor to condense on the pipe wall In addition, through the design of the connecting pipe 37, the gas after combustion does not need to directly enter the liquid storage tank 2, so that the liquid storage tank 2 does not need to consider After the gas generates high temperature, there are doubts about safety, and the first spray member 41 has the functions of washing the gas and cooling, if the gas reacts at high temperature with crystalline powder by-products, the first spray member 41 along the connecting pipe The spraying direction of the axial direction of 37 can also scrub the connecting pipe 37 at the same time, reducing the chance of the connecting pipe 37 being blocked by crystallization by-products, and allowing the flow of gas to be smooth.
本实施例除了有较环保、加热(燃烧)有害气体的效率高外，相较于背景技术更具安全性。In addition to being more environmentally friendly and having high efficiency in heating (burning) harmful gases, this embodiment is safer than the background technology.
众所周知，氢气属活泼的气体，若外泄则十分容易产生爆炸的意外，而由于本实施例是用氢氧气产生器5，以电解水的方式产出氢气与氧气的混合气体，因此不需有如钢瓶等用于储放氢气、氧气的设备，相对减少气体外泄的可能，且若设备停电后，就不会有电解作用持续产出氢氧气体，不会有气体蓄积的问题，所以本实施例的氢氧气体是有需要时才产制出，提升安全性。As we all know, hydrogen is an active gas, and if it leaks out, it is very easy to produce an explosion accident. Since the present embodiment uses the hydrogen and oxygen generator 5 to produce a mixed gas of hydrogen and oxygen in the form of electrolysis of water, there is no need for such a method. Steel cylinders and other equipment used to store hydrogen and oxygen can relatively reduce the possibility of gas leakage, and if the equipment is powered off, there will be no electrolysis to continuously produce hydrogen and oxygen gas, and there will be no problem of gas accumulation. Therefore, this implementation For example, hydrogen and oxygen gas are produced only when necessary, which improves safety.
综上所述，本发明燃烧式有害气体处理装置，利用氢氧气产生器5产制出的氢氧气体，以氢氧焰进行加热、燃烧有害气体，使有害气体转变成氟化氢的最终产物，再与水液结合去除氟，能够有效地去除有害元素，而不管在加热效率、安全性皆较现有技术更佳，且大幅减少二氧化碳的排放，减少温室气体而更环保。In summary, the combustion-type harmful gas treatment device of the present invention utilizes the hydrogen-oxygen gas produced by the hydrogen-oxygen generator 5 to heat and burn the harmful gas with the hydrogen-oxygen flame, so that the harmful gas is converted into the final product of hydrogen fluoride, and then Combined with water to remove fluorine, it can effectively remove harmful elements, and it is better than the existing technology in terms of heating efficiency and safety, and it can greatly reduce carbon dioxide emissions, reduce greenhouse gases and be more environmentally friendly.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310081239.1ACN104046956A (en) | 2013-03-14 | 2013-03-14 | Combustion type harmful gas treatment device |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310081239.1ACN104046956A (en) | 2013-03-14 | 2013-03-14 | Combustion type harmful gas treatment device |
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| CN104046956Atrue CN104046956A (en) | 2014-09-17 |
| Application Number | Title | Priority Date | Filing Date |
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| CN201310081239.1APendingCN104046956A (en) | 2013-03-14 | 2013-03-14 | Combustion type harmful gas treatment device |
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| CN (1) | CN104046956A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW426539B (en)* | 1999-08-14 | 2001-03-21 | Taeyang Tech Co Ltd | Composite gas processing system |
| JP2007232308A (en)* | 2006-03-02 | 2007-09-13 | Toshiba Matsushita Display Technology Co Ltd | Gas treating apparatus |
| CN101251259A (en)* | 2006-12-05 | 2008-08-27 | 株式会社荏原制作所 | Combustion-type exhaust gas treatment apparatus |
| CN101660763A (en)* | 2008-08-29 | 2010-03-03 | 友荃科技实业股份有限公司 | Hydrogen-oxygen safety combustion device |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW426539B (en)* | 1999-08-14 | 2001-03-21 | Taeyang Tech Co Ltd | Composite gas processing system |
| JP2007232308A (en)* | 2006-03-02 | 2007-09-13 | Toshiba Matsushita Display Technology Co Ltd | Gas treating apparatus |
| CN101251259A (en)* | 2006-12-05 | 2008-08-27 | 株式会社荏原制作所 | Combustion-type exhaust gas treatment apparatus |
| CN101660763A (en)* | 2008-08-29 | 2010-03-03 | 友荃科技实业股份有限公司 | Hydrogen-oxygen safety combustion device |
| Publication | Publication Date | Title |
|---|---|---|
| KR101995211B1 (en) | Exhaust gas processing device | |
| KR100766749B1 (en) | Large-capacity exhaust gas treatment method containing perfluorinated compound gas and apparatus for treating same | |
| JP5540035B2 (en) | Gas processing equipment | |
| US7394041B2 (en) | Apparatus for treating a waste gas using plasma torch | |
| KR101092866B1 (en) | High Efficiency Thermal Plasma Reactor for Highly Condensed Fluorine Gas Pyrolysis | |
| KR101226603B1 (en) | Apparatus for treating hazardous gas using counterflow of plasma and hazardous gas, method for treating hazardous gas using the same | |
| US6905663B1 (en) | Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas | |
| CN115461131B (en) | Treatment device for semiconductor manufacturing waste gas | |
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| Date | Code | Title | Description |
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| WD01 | Invention patent application deemed withdrawn after publication | Application publication date:20140917 |