CN103869413A - Optical waveguide lens and manufacturing method thereof - Google Patents

Abstract

Translated fromChinese

一种光波导透镜，其包括一个基底、一个形成于该基底上的平板光波导及一个形成于该平板光波导上的介质光栅。该平板光波导用于与一个激光光源对接以接收该激光光源发出的激光束，该介质光栅沿平行于该激光束的入射方向设置，并与该平板光波导构成一个衍射型光波导透镜以会聚该激光束。另，本发明还涉及一种光波导透镜的制造方法。该平板光波导加载该介质光栅的部分的等效折射率变大，提高了光利用率，且制程简单，制造成本低。

An optical waveguide lens includes a base, a flat optical waveguide formed on the base, and a dielectric grating formed on the flat optical waveguide. The slab optical waveguide is used for docking with a laser light source to receive the laser beam emitted by the laser light source, the dielectric grating is arranged parallel to the incident direction of the laser beam, and forms a diffractive optical waveguide lens with the slab optical waveguide to converge the laser beam. In addition, the present invention also relates to a manufacturing method of the optical waveguide lens. The equivalent refractive index of the part of the flat optical waveguide loaded with the dielectric grating becomes larger, the light utilization rate is improved, and the manufacturing process is simple and the manufacturing cost is low.

Description

Optical waveguide lens and manufacture method thereof

Technical field

The present invention relates to a kind of optical waveguide lens and manufacture method thereof.

Background technology

Preferably laser is as light source in integrated optics, generally to adopt directivity, but the light beam that laser sends still has certain angle of divergence, if directly allow light source dock with optical element, the divergent rays in light beam cannot enter optical element, and light utilization efficiency is low.In order to increase light utilization efficiency, generally can on the basis of original optical element, plate one deck high refractive index film, can be with the quite difficulty of film that original optical element matches and cost is low but select.

Summary of the invention

In view of this, be necessary to provide one to improve light utilization efficiency and processing procedure is simple, the optical waveguide lens of low cost of manufacture and manufacture method thereof.

A kind of optical waveguide lens, it comprises that a substrate, one are formed at this suprabasil planar light waveguide and a dielectric grating being formed on this planar light waveguide.This planar light waveguide is for docking to receive with a LASER Light Source laser beam that this LASER Light Source is sent, this dielectric grating edge is parallel to the incident direction setting of this laser beam, and forms a diffraction type optical waveguide lens to assemble this laser beam with this planar light waveguide.

A manufacture method of manufacturing above-mentioned optical waveguide lens, it comprises the following steps:

Substrate is provided;

In this substrate, form planar light waveguide;

On this planar light waveguide, plate a barrier bed;

The substrate that is provided with this barrier bed is immersed and in the first etching solution, carried out Wet-type etching and form dielectric grating; And

Remove this barrier bed and form optical waveguide lens.

Optical waveguide lens of the present invention and manufacture method thereof, the equivalent refractive index that this planar light waveguide loads the part of this dielectric grating becomes large, improve light utilization efficiency, and do not need to adopt again high refractive index film, avoid the problem of selecting low cost high refractive index film to mate with substrate, adopted in addition by barrier bed is set in substrate, then carry out wet etching, whole processing procedure is simple, low cost of manufacture.

Brief description of the drawings

Fig. 1 is the structural representation of optical waveguide lens provided by the invention.

Fig. 2 is the diagrammatic cross-section of the optical waveguide lens II-II along the line of Fig. 1.

Fig. 3 is the floor map of the dielectric grating in Fig. 1.

Fig. 4 is the processing procedure schematic diagram of the manufacture method of optical waveguide lens provided by the invention.

Fig. 5 is the process flow diagram of the manufacture method of optical waveguide lens provided by the invention.

Main element symbol description

Optical waveguide lens	10
		Substrate	110
End face	111
		Side	112
Planar light waveguide	120
		Dielectric grating	130
First medium portion	131
		Second medium portion	132
Barrier bed	210
		Thefirst occlusion part	211
Thesecond occlusion part	212
		LASERLight Source	20
Laser beam	21
		Optical element	30

Following embodiment further illustrates the present invention in connection with above-mentioned accompanying drawing.

Embodiment

Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail.

Refer to Fig. 1 and Fig. 2, theoptical waveguide lens 10 that embodiment of the present invention provides comprises that asubstrate 110, one are formed atplanar light waveguide 120 and thedielectric grating 130 being formed on thisplanar light waveguide 120 in this substrate 110.Thisplanar light waveguide 120 is for docking to receive the laser beam 21 that this LASERLight Source 20 is sent with a LASER Light Source 20.Thesedielectric grating 130 edges are parallel to the incident direction setting of this laser beam 21, and form a diffraction type optical waveguide lens to assemble this laser beam 21 with thisplanar light waveguide 120.

Thisdielectric grating 130 forms loaded type optical waveguide with thisplanar light waveguide 120, and the equivalent refractive index that this planar light waveguide 120 loads the part of thisdielectric grating 130 becomes large.So, by the structure of thisdielectric grating 130 is rationally set, for example, be arranged to chirp grating and just can form the diffraction type optical waveguide lens of a chirp grating type.

Thissubstrate 110 is substantially rectangular, and comprises anend face 111 and aside 112 being connected with this end face 111.Consider that lithium niobate diffuse metal titanium (simple substance) can form the loaded lightguide of gradually changed refractive index type, therefore, the material of thissubstrate 110 adopts lithium columbate crystal.

Thisplanar light waveguide 120 diffuses into thissubstrate 110 by Titanium and forms by plate after Titanium high temperature to this end face 111.So, loading after thisdielectric grating 130, the refractive index generation gradual change of thisplanar light waveguide 120, is the advantage that produces the diffraction type optical waveguide lens of chirp grating type.In the present embodiment, to shape that should substrate 110, thisplanar light waveguide 120 is rectangle, and thisend face 111 is the end face of thisplanar light waveguide 120, and thisside 112 is the side of thisplanar light waveguide 120.

Thisdielectric grating 130 forms by the end face from this planar light waveguide 120 (i.e. this end face 111) thisplanar light waveguide 120 of etching, and therefore material also has the lithium columbate crystal of Titanium for diffusion.Thisdielectric grating 130 can be a chirp grating.Concrete, thisdielectric grating 130 is chirp gratings, it comprises that one is positioned at middlefirst medium portion 131 and multiplesecond medium portion 132 that is symmetrically distributed in thesefirst medium portion 131 both sides, the quantity sum of thisfirst medium portion 131 and thissecond medium portion 132 is odd number, thisfirst medium portion 131 and multiplesecond medium portion 132 are rectangle and setting parallel to each other, the width of thisfirst medium portion 131 is greater than the width of each secondmedium portion 132, and from thisfirst medium portion 131 to the direction away from thisfirst medium portion 131, the width of the plurality ofsecond medium portion 132 is more and more less, and gap between this secondmedium portion 132 andfirst medium portion 131 and adjacent two secondmedium portions 132 also has more and more less.

Refer to Fig. 3, in present embodiment, using the line of the central point of the Width of thisfirst medium portion 131 as axis of symmetry O, the Width of thisdielectric grating 130 is

axle, this axis of symmetry O inthe joining of axle is initial point, along this axis of symmetry O to away from the direction of this axis of symmetry O being

axle forward, exists with this laser beam 21

place with the phase differential at initial point place is

axle, can obtain according to planar light waveguide wave theory:

, wherein

, of thisdielectric grating 130

individual border

meet following condition:

, wherein,

for positive integer,

,andfor constant relevant to the focal length of this diffraction type optical waveguide lens.So, can be derived from:

.And

situation, the border of thisdielectric grating 130 on this axis of symmetry O left side can obtain by symmetry.

This LASER Light Source 20 adopts distributed feedback laser (distributed feedback laser, DFB), it belongs to the semiconductor laser of side-emitted, can luminous side be welded direct on thisside 112 by chips welding (die bond) mode, so that this laser beam 21 is along this axis of symmetry O incident.Certainly, this LASER Light Source 20 also can adopt other types LASER Light Source, and arranges by other means, as long as ensure that it can be along this laser beam 21 of this axis of symmetry O outgoing.

Describedoptical waveguide lens 10 also further comprises that one is arranged at theoptical element 30 of the bright dipping side of thisdielectric grating 130, to assemble from the light of thisdielectric grating 130 outgoing.Thisoptical element 30 can be strip optical waveguide, optical fiber or optical splitter (splitter).In present embodiment, thisoptical element 30 is strip optical waveguide.

Refer to Fig. 4 and Fig. 5, the manufacture method of above-mentionedoptical waveguide lens 10, it comprises the following steps:

S10:substrate 110 is provided;

S12: formplanar light waveguide 120 on theend face 111 of thissubstrate 110;

S14: plate abarrier bed 210 on thisplanar light waveguide 120; Wherein, thisbarrier bed 210 comprises that one is positioned at middle thefirst occlusion part 211 and multiple thesecond occlusion part 212 that is symmetrically distributed in these thefirst occlusion part 211 both sides.Thisfirst occlusion part 211 is odd number with the quantity sum of thissecond occlusion part 212, and thisfirst occlusion part 211 and the setting parallel to each other of the plurality of thesecond occlusion part 212, the width of thisfirst occlusion part 211 is greater than the width of each thesecond occlusion part 212, and from thisfirst occlusion part 211 to the direction away from thisfirst occlusion part 211, the width of the plurality of thesecond occlusion part 212 is more and more less, and thissecond occlusion part 212 is also more and more less with the gap of thisfirst occlusion part 211 and adjacent two these the second occlusion parts 212.Wherein, the employing chromium metal of thisfirst occlusion part 211 and this second occlusion part 212.Particularly, be that elder generation's whole surface rotation on thisplanar light waveguide 120 plates shield portions, the mode of recycling exposure imaging leaves thisbarrier bed 210.

S16: thesubstrate 110 that is provided with thisbarrier bed 210 is immersed and carried out Wet-type etching in the first etching solution and formdielectric grating 130;

Because thissubstrate 110 is lithium columbate crystal, this first etching solution is hydrofluorite.In etching process, because a part for thissubstrate 110 is covered by thisbarrier bed 210, capped part and thisbarrier bed 210 all can be not etched.

S18: remove thisbarrier bed 210 and formoptical waveguide lens 10;

Specifically thisbarrier bed 210 is immersed in the second etching solution.In present embodiment, this second etching solution is the chromium etching solution that contains nitric acid.

Above-mentioned optical waveguide lens and manufacture method thereof, this dielectric grating and this planar light waveguide form loaded type optical waveguide (strip/grating loaded waveguide), and the equivalent refractive index that this planar light waveguide loads the part of this dielectric grating becomes large.So, by the structure of this dielectric grating is rationally set, for example be arranged to the diffraction type optical waveguide lens that chirp grating (chirped grating) just can form a chirp grating type, do not need to adopt again high refractive index film, avoided the problem of selecting low cost high refractive index film to mate with substrate, and by barrier bed is set in substrate, carry out again wet etching, whole processing procedure is simple, and low cost of manufacture is applicable to volume production.

Although the present invention discloses as above with preferred embodiments,, it is not in order to limit the present invention, and in addition, those skilled in the art can also do other variation etc. in spirit of the present invention.Certainly, the variation that these do according to spirit of the present invention, within all should being included in the present invention's scope required for protection.

Claims (10)

1. an optical waveguide lens, it comprises that a substrate, one are formed at this suprabasil planar light waveguide and a dielectric grating being formed on this planar light waveguide, this planar light waveguide is for docking to receive with a LASER Light Source laser beam that this LASER Light Source is sent, this dielectric grating edge is parallel to the incident direction setting of this laser beam, and forms a diffraction type optical waveguide lens to assemble this laser beam with this planar light waveguide.

2. optical waveguide lens as claimed in claim 1, is characterized in that, the material of this substrate adopts lithium columbate crystal.

3. optical waveguide lens as claimed in claim 1, it is characterized in that, this substrate is substantially rectangular, and comprise an end face and a side being connected with this end face, this planar light waveguide diffuses into this substrate by Titanium and forms by plate after Titanium high temperature to this end face, this planar light waveguide is rectangle, and this end face is the end face of this planar light waveguide, the side that this side is this planar light waveguide.

4. optical waveguide lens as claimed in claim 3, is characterized in that, this dielectric grating forms by this planar light waveguide of end face etching from this planar light waveguide.

5. optical waveguide lens as claimed in claim 3, it is characterized in that, this dielectric grating is a chirp grating, it comprises that one is positioned at middle first medium portion and multiple second medium portion that is symmetrically distributed in these first medium portion both sides, the quantity sum of this first medium portion and this second medium is odd number, this first medium portion and multiple second medium portion are rectangle and setting parallel to each other, the width of this first medium portion is greater than the width of each second medium portion, and from this first medium portion to the direction away from this first medium portion, the width of the plurality of second medium portion is more and more less, and gap between this second medium portion and first medium portion and adjacent two second medium portions also has more and more less.

6. optical waveguide lens as claimed in claim 5, is characterized in that, the Width of this dielectric grating is

axle, the line of the central point of the Width of this first medium portion is as axis of symmetry, this axis of symmetry with

the joining of axle is initial point, along this axis of symmetry to the direction away from this axis of symmetry isaxle forward, exists with this laser beamplace with the phase differential at initial point place is

axle, can obtain according to planar light waveguide wave theory:, wherein

, of this dielectric grating

individual border

meet following condition:

, wherein,

for positive integer,

,

and

for constant relevant to the focal length of this diffraction type optical waveguide lens.

7. a manufacture method for the optical waveguide lens of manufacture as described in claim 1 ~ 6 any one, it comprises the following steps:

Substrate is provided;

In this substrate, form planar light waveguide;

On this planar light waveguide, plate a barrier bed;

The substrate that is provided with this barrier bed is immersed and in the first etching solution, carried out Wet-type etching and form dielectric grating; And

Remove this barrier bed and form optical waveguide lens.

8. the manufacture method of optical waveguide lens as claimed in claim 7, is characterized in that, this substrate is lithium columbate crystal, and this first etching solution is hydrofluorite.

9. the manufacture method of optical waveguide lens as claimed in claim 7, it is characterized in that, this barrier bed comprises that one is positioned at middle the first occlusion part and multiple the second occlusion part that is symmetrically distributed in these the first occlusion part both sides, the quantity sum of this first occlusion part and this second occlusion part is odd number, and this first occlusion part and the setting parallel to each other of the plurality of the second occlusion part, the width of this first occlusion part is greater than the width of each the second occlusion part, and from this first occlusion part to the direction away from this first occlusion part, the width of the plurality of the second occlusion part is more and more less, and the gap of this second occlusion part and this first occlusion part and adjacent two these the second occlusion parts is also more and more less.

10. the manufacture method of optical waveguide lens as claimed in claim 7, is characterized in that, this barrier bed adopts chromium metal, and this barrier bed is all immersed in the second etching solution and removed, and this second etching solution is the chromium etching solution that contains nitric acid.

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