Summary of the invention
Technical problem of the present invention is that traditional Low emissivity energy-saving glass mainly adopts silver as functional layer, and silver has minimum radiance, but it is very easily oxidized and lost efficacy, and causes traditional Low emissivity energy-saving glass weatherability, corrosion resistance poor.And the present invention is based on above consideration, the Titanium adopting corrosion resistance outstanding is as functional layer, greatly improve the service life of energy-saving glass, and in use retention parameter is stable, but general single silver layer, titanium layer are more difficult reaches higher energy-saving effect, and merely rete thickening can be affected film visible light transmissivity and Low emissivity energy-saving glass color, therefore for improve energy-saving effect further, in the second functional layer, based on titanium, silver is auxiliary common reduction radiance.Titanium functional layer and silver-colored titanium functional layer are photoelectric properties adjustment layer simultaneously, can be used for the adjustment realizing low-E, visible ray high permeability, infrared and ultraviolet high reflectance, that is, in production process, can be according to the actual requirements, the thickness of suitable adjustment two functional layers, adjusts printing opacity, reflecting effects such as color, visible ray, uviol lamps.
Concrete technical scheme of the present invention is as follows:
A kind of Multifunctional layered Low emissivity energy-saving glass; comprise glass substrate, barrier layer, titanium functional layer, silver-colored titanium functional layer, protective layer; direction is followed successively by barrier layer, titanium functional layer, silver-colored titanium functional layer, protective layer from inside to outside on a glass substrate; barrier layer affects energy-saving effect for stoping the entered function layers such as the sodium ion in glass substrate, calcium ion; protective layer used in corrosion-resistant, the wear-resisting mechanical performance improving film, for the protection to whole film system.
Titanium functional layer refers to that the rete and other that are made up of material metal titanium are as titanium oxide, titanium nitride, titanium oxynitrides and magnesium, zinc, the oxide of the metals such as aluminium, nitride, the functional layer that the dielectric layers such as nitrogen oxide are formed jointly, wherein said titanium functional layer preferably comprises the first titanium oxide layer, first Titanium rete, second titanium oxide layer, described titanium functional layer rete order is followed successively by the first titanium oxide layer in direction from inside to outside, first Titanium rete, second titanium oxide layer, in described titanium functional layer, the thicknesses of layers of the first titanium oxide layer is 20 ~ 35nm, the thicknesses of layers of the first Titanium rete is 6 ~ 15nm, the thicknesses of layers of the second titanium oxide layer is 20 ~ 35nm.
Silver titanium functional layer refers to the rete that is made up of material metal silver and the rete that forms with material metal titanium and other are as titanium oxide, titanium nitride, titanium oxynitrides and magnesium, zinc, the oxide of the metals such as aluminium, nitride, the functional layer that the dielectric layers such as nitrogen oxide are formed jointly, wherein said silver-colored titanium functional layer preferably comprises argent rete, second Titanium rete, titanium oxide rete, zinc oxide film, described silver-colored titanium functional layer rete order is followed successively by argent rete from inside to outside, second Titanium rete, titanium oxide rete, zinc oxide film, in described silver-colored titanium functional layer, the thicknesses of layers of argent rete is 8 ~ 12nm, the thicknesses of layers of the second Titanium rete is 5 ~ 15nm, the thicknesses of layers of titanium oxide rete is 20 ~ 35nm, the thicknesses of layers of zinc oxide film is 20 ~ 40nm.
The material on described barrier layer is silica or silicon nitride, and described barrier film layer thickness is 20 ~ 35nm.
The material of described protective layer is silica or silicon nitride, and described protective layer thicknesses of layers is 25 ~ 45nm.
The preparation method of above-mentioned a kind of Multifunctional layered Low emissivity energy-saving glass, temperature 16 ~ 26 DEG C, under humidity less than 50%, sputtering pressure maintain 0.1Pa ~ 0.5Pa scope, cleanliness factor reaches the film coating environment of 100,000 magnitudes, utilize magnetron sputtering apparatus, sputtering forms barrier layer, titanium functional layer, silver-colored titanium functional layer, protective layer successively on a glass substrate, wherein barrier layer affects energy-saving effect for stoping the entered function layers such as the sodium ion in glass substrate, calcium ion, and the material on described barrier layer is silica or silicon nitride; Protective layer used in corrosion-resistant, the wear-resisting mechanical performance improving film, for the protection to whole film system, the material of described protective layer is silica or silicon nitride.
Titanium functional layer refers to that the rete and other that are made up of material metal titanium are as titanium oxide, titanium nitride, titanium oxynitrides and magnesium, zinc, the oxide of the metals such as aluminium, nitride, the functional layer that the dielectric layers such as nitrogen oxide are formed jointly, wherein said titanium functional layer preferably comprises the first titanium oxide layer, first Titanium rete, second titanium oxide layer, described titanium functional layer rete sputtering order is followed successively by the first titanium oxide layer, first Titanium rete, second titanium oxide layer, in described titanium functional layer, the thicknesses of layers of the first titanium oxide layer is 20 ~ 35nm, the thicknesses of layers of the first Titanium rete is 6 ~ 15nm, the thicknesses of layers of the second titanium oxide layer is 20 ~ 35nm.
Silver titanium functional layer refers to the rete that is made up of material metal silver and the rete that forms with material metal titanium and other are as titanium oxide, titanium nitride, titanium oxynitrides and magnesium, zinc, the oxide of the metals such as aluminium, nitride, the functional layer that the dielectric layers such as nitrogen oxide are formed jointly, wherein said silver-colored titanium functional layer preferably comprises argent rete, second Titanium rete, titanium oxide rete, zinc oxide film, described silver-colored titanium functional layer rete sputtering order is followed successively by argent rete, second Titanium rete, titanium oxide rete, zinc oxide film, in described silver-colored titanium functional layer, the thicknesses of layers of argent rete is 8 ~ 12nm, the thicknesses of layers of the second Titanium rete is 5 ~ 15nm, the thicknesses of layers of titanium oxide rete is 20 ~ 35nm, the thicknesses of layers of zinc oxide film is 20 ~ 40nm.
Described barrier film layer thickness is 20 ~ 35nm.
Described protective layer thicknesses of layers is 25 ~ 45nm.
Wherein, direction refers to away from glass substrate direction from inside to outside, and glass substrate is innermost layer; The material of titanium oxide layer is titanium oxide; The material of Titanium rete is Titanium; The material of argent rete is argent; The material of metallic zinc rete is metallic zinc.
The present invention has following technique effect:
(1) the present invention is compared with traditional Low emissivity energy-saving glass, and have better weatherability, corrosion resistance and membranous layer binding force are strong, visible light transmissivity is high, and rete color neutrality is soft, good mechanical property, rete dense uniform.
(2) because Multifunctional layered contains double layer of metal titanium film layer, improve the weatherability of film system, corrosion resistance, in conjunction with argent rete, jointly reduce heat radiation; Meanwhile, by the thickness of structure adjusting three metallic diaphragms, the adjustment of low-E, visible ray high permeability, infrared and ultraviolet high reflectance can be realized, realize the regulable control of photoelectric properties.
(3) reduce the use of argent compared with traditional Low emissivity energy-saving glass, thus reduce production cost.
Embodiment 1
With reference to described in Fig. 1, a kind of Multifunctional layered Low emissivity energy-saving glass, at the successive sedimentation barrier layer of film-coated glass substrate successively folded connection, titanium functional layer, silver-colored titanium functional layer, protective layer.Barrier layer affects energy-saving effect for stoping the entered function layers such as the sodium ion in glass substrate, calcium ion, barrier material can be silica or silicon nitride, silica or silicon nitride nontoxic pollution-free, and corrosion-resistant and wear-resisting, and this layer thickness is 20 ~ 35nm; Titanium functional layer is low-E layer, design for infrared high reverse--bias, titanium functional layer comprises the first titanium oxide layer 31, first Titanium rete 32, second titanium oxide layer 33, successive sedimentation first titanium oxide layer 31, first Titanium rete 32, second titanium oxide layer 33 of folded connection successively, wherein the first titanium oxide layer 31 thickness is 20 ~ 35nm, for the protection to Titanium rete 32 function, adjust visible light transmittance rate simultaneously; First Titanium rete 32 thickness is 6 ~ 15nm, is low-E layer, for infrared high reverse--bias; Second titanium oxide layer 33 thickness is 20 ~ 35nm, for the protection to metallic titanium membrane and subsequent metal silver function, adjusts visible light transmittance rate simultaneously; Silver titanium functional layer is for improve energy-saving effect further, based on titanium, silver is auxiliary common reduction radiance, silver titanium functional layer comprises argent rete 41, second Titanium rete 42, titanium oxide rete 43, zinc oxide film 44, successive sedimentation argent rete 41, second Titanium rete 42, titanium oxide rete 43, the zinc oxide film 44 of folded connection successively, argent rete 41 thickness is 8 ~ 12nm, is low-E rete with the second Titanium rete 42 simultaneously; Second Titanium rete 42 thickness is 5 ~ 15nm, is low-E rete, improves infrared reflectivity; Titanium oxide rete 43 thickness is 20 ~ 35nm, for the protection of low-E rete and visible light transmissivity adjustment; 3rd zinc oxide film 44 thickness is 20 ~ 40nm, for the isolation of functional layer and protective layer; Protective layer is corrosion-resistant, the wear-resisting mechanical performance improving film, and for the protection to whole film system, protective layer can be membranous layer of silicon oxide or silicon nitride film layer, and protective layer thicknesses of layers is 25 ~ 45nm.
The present invention adopts continous way automation magnetron sputtering to produce, required rete is deposited on a glass substrate successively, rete has weatherability and decay resistance is outstanding, radiance is low, sheet resistance is little, rete is fine and close, uniformity is good, adhesion is strong, wear-resisting advantage.The present invention can realize the adjustment of visible region transmitance in 55% ~ 86% scope, ultraviolet and the adjustment of infrared reflection rate in 60 ~ 81% scopes, and radiance is low, and after adopting double glazing mode, heat-insulating property is good, can comprehensively for curtain wall and sun protection glass.
Embodiment 2
A kind of Multifunctional layered Low emissivity of the present invention energy-saving glass preparation method, adopts artificial or automation plated film, glass substrate coated surface is just being loaded substrate frame to target direction and is sending into magnetron sputtering apparatus.After glass substrate feeding magnetron sputtering enters sheet room, unlatching mechanical pump vacuumizes, according to productive temp demand, when vacuum reaches about the 1Pa order of magnitude, start transmission system, open into the isolating valve between sheet room and surge chamber, substrate frame enters surge chamber, open and be evacuated to about 0.1Pa, open isolating valve, enter process cavity room, when opening vacuum pump evacuation to 1.0 ~ 4Pa, be filled with argon working gas, process gas oxygen or nitrogen are (different according to plating silica and silicon nitride, for front and back technique is convenient, related compound is as far as possible unified adopts oxide or nitride), when vacuum is in 0.1Pa ~ 0.5Pa scope, open plated film intermediate frequency power supply or dc source, adopt constant current or invariable power mode, transmission substrate frame after build-up of luminance, successively by barrier layer plated film pouch chamber sputtering silica (or silicon nitride) rete, open follow-up isolating valve, enter titanium functional layer technique plated film pouch chamber, adopt similar way to sputter titanium oxide layer, during splash-proofing sputtering metal titanium film layer, only pass into argon gas, after titanium functional layer has sputtered, open isolating valve and enter silver-colored titanium functional layer sputter procedure, pass into argon gas, oxygen or nitrogen according to corresponding oxide or nitride, only pass into argon gas to during metal sputtering, sputtering pressure still maintains 0.1Pa ~ 0.5Pa, completes the sputtering of silver-colored titanium functional layer, adopt identical way afterwards, complete the sputtering of zinc oxide film, protective layer (silica or silicon nitride film layer).In coating process, due to the difference of selective membrane system, thickness, color etc., the process gas flow passed into can change to some extent, but need ensure that sputtering pressure maintains 0.1Pa ~ 0.5Pa scope; Whole coating process adopts normal temperature coating technique, and substrate frame, without the need to special heating, improves production efficiency and membrane uniformity; Film coating environment requires to reach 100,000 magnitudes to reduce dust pollution at cleanliness factor, humidity less than 50%, and temperature, between 16 ~ 26 DEG C, improves film quality.