所属领域Field
本发明属于太赫兹真空电子器件领域，具体为一种基于阵列光栅结构的太赫兹功率源高频结构。The invention belongs to the field of terahertz vacuum electronic devices, in particular to a high-frequency structure of a terahertz power source based on an array grating structure.
背景技术Background technique
由于THz波独特的性质及在物体成像、环境监测、医疗诊断、射电天文，尤其是在卫星通讯和军用雷达、国防安检等领域具有重大的科学价值和广泛的应用前景，而受到越来越广泛的重视。然而直到目前为止，太赫兹技术的发展和应用仍很局限，其主要障碍就是其发射和接收装置至今仍然十分笨重而且昂贵。Due to the unique properties of THz waves and their great scientific value and broad application prospects in object imaging, environmental monitoring, medical diagnosis, radio astronomy, especially in satellite communications, military radar, national defense security inspection, etc. attention. However, until now, the development and application of terahertz technology is still very limited, and its main obstacle is that its transmitting and receiving devices are still very bulky and expensive.
根据THz辐射产生的机理，可以将其辐射源分为两大类：一类是利用电子学的方法，另一类是利用光学的方法。不过，其中大多数要么设备复杂、庞大、效率较低，要么难以室温下运转。如何有效的产生高功率、高能量、高效率，且能在室温下稳定运转、结构紧凑的THz辐射源，成为THz技术的研究热点。According to the mechanism of THz radiation, its radiation sources can be divided into two categories: one is the method of using electronics, and the other is the method of using optics. However, most of them are either complex, bulky, inefficient devices or difficult to operate at room temperature. How to effectively generate high-power, high-energy, high-efficiency THz radiation sources that can operate stably at room temperature and have a compact structure has become a research hotspot in THz technology.
真空电子器件在THz辐射源方面取得迅速的发展，特别是微加工技术和真空电子学结合形成的微型真空电子器件，利用微波管分布作用原理，使工作频率可以达到太赫兹领域。奥罗管是由片状电子束在开放式谐振腔内激发产生电磁场的绕辐射器件，可用作小型紧凑型太赫兹辐射源，但其效率较低，且较大的起振电流对阴极提出了很高的要求，同时由于片状电子束的电流密度较大，对聚焦磁场的要求也很高。Vacuum electronic devices have achieved rapid development in THz radiation sources, especially the micro vacuum electronic devices formed by the combination of micromachining technology and vacuum electronics. Using the principle of microwave tube distribution, the working frequency can reach the terahertz field. The Oro tube is a surrounding radiation device that is excited by a sheet-like electron beam in an open resonant cavity to generate an electromagnetic field. It can be used as a small and compact terahertz radiation source, but its efficiency is low, and the large starting current draws At the same time, due to the high current density of the sheet electron beam, the requirements for the focusing magnetic field are also very high.
发明内容Contents of the invention
本发明提供了一种基于阵列光栅结构的太赫兹功率源高频结构，利用圆柱形电子束与阵列光栅内部的高频场进行注-波能量交换，适当选取所述阵列金属光栅和准光学谐振腔所组成的结构的尺寸，即可实现系统高频信号的输出。本发明提供的高频系统具有电子效率高、输出功率大的特点，并能有效降低聚焦磁场强度以及器件的阴极发射电流密度。The present invention provides a terahertz power source high-frequency structure based on an array grating structure, which uses a cylindrical electron beam to exchange beam-wave energy with the high-frequency field inside the array grating, and properly selects the array metal grating and quasi-optical resonance The size of the structure composed of the cavity can realize the output of the high-frequency signal of the system. The high-frequency system provided by the invention has the characteristics of high electronic efficiency and large output power, and can effectively reduce the strength of the focusing magnetic field and the cathode emission current density of the device.
本发明所采用的技术方案是：The technical scheme adopted in the present invention is:
一种基于阵列光栅结构的太赫兹功率源高频结构，包括准光学谐振腔、阵列金属光栅，其特征在于：所述的准光学谐振腔的上下反射镜分别为方形球面镜和方形平凹柱面镜，在z方向上，沿着方形球面镜轴线，所述的方形球面镜上开设有圆心耦合孔，所述的方形平凹镜内部开设有一大一小上下衔接的两矩形凹槽；所述的阵列金属光栅周期嵌于较小的矩形凹槽内部，并沿x和z方向周期排列；电子枪产生的电子束沿x方向阵列金属光栅周期排列方向传输与该高频结构内的电磁场进行互作用，利用圆柱形电子束与阵列光栅内的电磁场进行注-波能量交换。A terahertz power source high-frequency structure based on an array grating structure, including a quasi-optical resonant cavity and an array metal grating, characterized in that: the upper and lower mirrors of the quasi-optical resonant cavity are square spherical mirrors and square flat-concave cylinders respectively Mirror, in the z direction, along the axis of the square spherical mirror, the square spherical mirror is provided with a center coupling hole, and the inside of the square flat concave mirror is provided with two rectangular grooves connected up and down; the array Metal gratings are periodically embedded in smaller rectangular grooves and arranged periodically along the x and z directions; the electron beams generated by the electron gun are transmitted along the direction of the periodic arrangement of metal gratings in the x direction and interact with the electromagnetic field in the high-frequency structure. The beam-wave energy exchange is performed between the cylindrical electron beam and the electromagnetic field inside the array grating.
由电子枪产生的圆柱状电子束通过所述阵列金属光栅间的缝隙时，金属光栅表面会有SP辐射产生。根据SP辐射原理，金属光栅表面激励起的THz电磁波在圆形输出耦合孔处的波长均相同。When the cylindrical electron beam generated by the electron gun passes through the gaps between the arrayed metal gratings, SP radiation will be generated on the surface of the metal gratings. According to the principle of SP radiation, the THz electromagnetic waves excited by the surface of the metal grating have the same wavelength at the circular output coupling hole.
根据电磁模式理论，谐振模式下光栅表面场周期谐波的传播常数为2πn/l，n为谐波次数，l为光栅的周期。选择适当的电子注速度，使之与光栅表面场的某次空间谐波同步。电子注在场的作用下产生群聚，并将能量交换给谐振腔内的电磁场，同时电磁场受到准光学谐振腔的谐振作用，建立起稳定的相干振荡。腔中的电磁场通过球面镜上的圆形耦合孔输出。According to the electromagnetic mode theory, the propagation constant of the periodic harmonic of the grating surface field in the resonant mode is 2πn/l, where n is the harmonic order and l is the period of the grating. Select the appropriate electron beam velocity to make it synchronized with a certain spatial harmonic of the grating surface field. Electron beams cluster together under the action of the field and exchange energy to the electromagnetic field in the resonant cavity. At the same time, the electromagnetic field is resonated by the quasi-optical resonant cavity to establish a stable coherent oscillation. The electromagnetic field in the cavity is output through the circular coupling hole on the spherical mirror.
所述阵列金属光栅沿电子束传输方向为周期排列，是为了在光栅表面得到传播常数为2πn/l的周期谐波；所述阵列金属光栅沿球面镜轴线方向为周期排列，是为了增大注-波互作用区域内电磁场的强度，同时增大电子束与光栅表面电磁波的互作用区域。采用圆柱状电子束进行电子束-波互作用，是为了增加器件的互作用效率，降低器件对阴极发射电流密度的要求，同时减小聚焦磁场。The metal grating array is arranged periodically along the electron beam transmission direction in order to obtain periodic harmonics with a propagation constant of 2πn/l on the surface of the grating; the metal grating array is arranged periodically along the axis of the spherical mirror in order to increase the The strength of the electromagnetic field in the wave interaction area increases the interaction area between the electron beam and the electromagnetic wave on the surface of the grating. The use of cylindrical electron beams for electron beam-wave interaction is to increase the interaction efficiency of the device, reduce the requirements of the device on the cathode emission current density, and reduce the focusing magnetic field at the same time.
附图说明Description of drawings
图1是本发明提供的高频系统示意图；Fig. 1 is a schematic diagram of a high-frequency system provided by the present invention;
其中：1、球面镜；2、柱面镜；3、阵列金属光栅；4、矩形匹配槽；5、矩Among them: 1. Spherical mirror; 2. Cylindrical mirror; 3. Array metal grating; 4. Rectangular matching slot; 5. Rectangular
形槽；6、圆形输出耦合孔；6. Circular output coupling hole;
图2是所述高频谐振系统在285GHz频率下的场分布图；Fig. 2 is the field distribution figure of described high-frequency resonant system under 285GHz frequency;
图3中：vp/c为腔模式一次空间谐波沿矩形金属光栅表面传播的速度与光In Fig. 3: vp /c is the speed and light of the first spatial harmonic of the cavity mode propagating along the surface of the rectangular metal grating
速之比；λ为空间谐波波长；Speed ratio; λ is the space harmonic wavelength;
图4是所述高频结构注-波互作用区域内电场强度与双光栅绕射辐射器件高频结构注-波互作用区域内电场强度的对比图；Fig. 4 is a comparison diagram of the electric field intensity in the injection-wave interaction area of the high-frequency structure and the electric field intensity in the injection-wave interaction area of the high-frequency structure of the double grating diffractive radiation device;
具体实施方式detailed description
本发明提供的一种基于阵列光栅结构的太赫兹功率源高频结构，包括准光学谐振腔、阵列金属光栅3，所述的准光学谐振腔的上下反射镜分别为方形球面镜1和方形平凹柱面镜2，在竖直方向上，沿着方形球面镜轴线，所述的方形球面镜上开设有圆心耦合孔6，所述的方形平凹镜内部开设有一大一小上下衔接的两矩形凹槽4和5；所述的阵列金属光栅周期嵌于较小的矩形凹槽5内部，并沿竖直和水平方向周期排列；电子枪产生的电子束在水平方向上沿阵列金属光栅间周期排列方向传输与该高频结构内的电磁场进行互作用，利用圆柱形电子束与阵列光栅内的电磁场进行注-波能量交换。A terahertz power source high-frequency structure based on an arrayed grating structure provided by the present invention includes a quasi-optical resonant cavity and an array metal grating 3. The upper and lower mirrors of the quasi-optical resonant cavity are a square spherical mirror 1 and a square plano-concave respectively. Cylindrical mirror 2, in the vertical direction, along the axis of the square spherical mirror, the square spherical mirror is provided with a center coupling hole 6, and the inside of the square concave mirror is provided with two rectangular grooves, one large and one small connected up and down 4 and 5; the metal grating array is periodically embedded in the smaller rectangular groove 5 and arranged periodically along the vertical and horizontal directions; the electron beam generated by the electron gun is transmitted along the direction of the periodic arrangement between the metal grating arrays in the horizontal direction Interact with the electromagnetic field in the high-frequency structure, and use the cylindrical electron beam to exchange beam-wave energy with the electromagnetic field in the array grating.
所述阵列金属光栅宽度b为600μm，x方向相邻两片阵列光栅的周期l1为130μm，相邻两片阵列光栅的间隔d为65μm，z方向相邻两片阵列光栅的周期l2为172μm，相邻两片阵列光栅的间隔m为132μm，光栅两端嵌于柱面镜内的矩形槽5中。矩形槽5的宽度与阵列金属光栅宽度b相同。The width b of the metal array grating is 600 μm, the periodl1 of two adjacent array gratings in the x direction is 130 μm, the interval d between two adjacent array gratings is 65 μm, and the period l2 oftwo adjacent array gratings in the z direction is 172 μm, the distance m between two adjacent array gratings is 132 μm, and both ends of the grating are embedded in the rectangular groove 5 in the cylindrical mirror. The width of the rectangular groove 5 is the same as the width b of the array metal grating.
矩形槽4的高度h2为800μm，宽度b2为1500μm。矩形槽4的主要作用是增强矩形槽5内部的场强，矩形槽4的高度与宽度的确定原则为该尺寸参数下矩形槽5内部的电场强度最大。The height h2 of the rectangular groove 4 is 800 μm, and the width b2 is 1500 μm. The main function of the rectangular slot 4 is to enhance the electric field intensity inside the rectangular slot 5, and the height and width of the rectangular slot 4 are determined based on the principle that the electric field intensity inside the rectangular slot 5 is the largest under this size parameter.
方形平凹柱面镜2的口径L为5265μm，曲率半径R为90000μm，其表面到口径与曲率半径均与方形柱面镜2相同的方形球面镜1之间的距离f为893μm。利用仿真软件CST搭建由上述数结参数确定的结构模型，计算所得的谐振频率为285GHz，内部场分布如图2所示。The diameter L of the square plano-concave cylindrical mirror 2 is 5265 μm, the radius of curvature R is 90000 μm, and the distance f from the surface to the square spherical mirror 1 with the same diameter and radius of curvature as the square cylindrical mirror 2 is 893 μm. Using the simulation software CST to build a structural model determined by the above numerical junction parameters, the calculated resonant frequency is 285 GHz, and the internal field distribution is shown in Figure 2.
根据切伦科夫同步条件，计算所得结构的腔模式一次空间谐波色散曲线，如图3所示。由图3可知：速度为0.129倍光速的电子束与SP辐射产生的285GHz高频信号的腔模式一次空间谐波同步，同时电磁场受到谐振频率为285GHz的准光学谐振腔的谐振作用，建立起稳定的相干振荡。According to the Cerenkov synchronization condition, the first spatial harmonic dispersion curve of the cavity mode of the obtained structure is calculated, as shown in Fig. 3 . It can be seen from Figure 3 that the electron beam with a speed of 0.129 times the speed of light is synchronized with the first spatial harmonic of the cavity mode of the 285GHz high-frequency signal generated by SP radiation, and at the same time the electromagnetic field is resonated by the quasi-optical resonant cavity with a resonant frequency of 285GHz to establish a stable coherent oscillations.
所述高频结构内部的电场强度与双光栅高频结构内部电场强度的对比如图4，所述高频结构腔内电场强度得到了明显增强。该高频结构采用圆柱状电子束进行注-波互作用，能够提高互作用效率、增大输出功率。在功率输出水平相同的情况下，该高频结构能够有效减小阴极发射电流密度，提升阴极寿命，并降低对聚焦磁场强度的要求。The comparison of the electric field intensity inside the high-frequency structure with the electric field intensity inside the double-grating high-frequency structure is shown in Fig. 4, and the electric field intensity in the cavity of the high-frequency structure has been significantly enhanced. The high-frequency structure uses cylindrical electron beams for beam-wave interaction, which can improve interaction efficiency and increase output power. In the case of the same power output level, the high-frequency structure can effectively reduce the emission current density of the cathode, improve the life of the cathode, and reduce the requirement for the strength of the focusing magnetic field.
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