CN103600312A - Method for pasting silicon polished wafer template - Google Patents

Abstract

The invention relates to a method for pasting a silicon polished wafer template. The method for pasting the silicon polished wafer template comprises firstly, uncovering part of wax paper which is arranged on the reverse side of the silicon polished wafer template and pasting a wax paper uncovered portion of the reverse side of the silicon polished wafer template on a ceramic disc; then, wrapping a cylindrical object with a sponge, forming into a pressing part and pressing the front side of the silicon polished wafer template through the pressing part; at last, pulling the wax paper which is arranged on the reverse side of the silicon polished wafer slowly with one hand, rolling the pressing piece along the pulling direction of the wax paper which is arranged on the reverse side of the silicon polished wafer with the other hand until the wax paper which is arranged on the reverse side of the silicon polished wafer is completely separated from the reverse side of the template and the template is completely pasted on the ceramic disc. According to the method for pasting the silicon polished wafer template, the sponge inside the pressing piece is uniformly pressed into a template hole of the silicon polished wafer template during rolling according to self-weight, the silicon polished wafer template is avoided from being creased to generate bubbles, and accordingly the smoothness during silicon polished wafer production is improved.

Description

A kind of method of pasting silicon polished template

Technical field

The present invention relates to a kind of method of pasting silicon polished template, particularly silicon polished template is attached to the method on ceramic disk.

Background technology

At present, while pasting silicon polished template, on one side break the mold backboard mercolized wax paper, adopt blockage plastic plate firmly to scrape template surface on one side, in this process, the area because of plastic plate is less than template on the one hand, easily makes template purse up and produces bubble; On the other hand, owing to thering is the pattern hole caving inward in template, plastic plate cannot scrape too greatly the empty edge in pattern hole, also easily cause bubble, if plastic plate is too little, whether need to repeatedly scrape, discontinuity also easily makes template purse up and produce bubble, and in pattern hole, exist bubble directly to affect the local flatness of silicon chip after polishing.

Summary of the invention

The object of this invention is to provide a kind of method of pasting silicon polished template that can avoid template to purse up and produce bubble.

The technical scheme that the present invention takes is: a kind of method of pasting silicon polished template, it is characterized in that first opening the part paraffin paper at the silicon polished template back side, and the back side of silicon polished template being opened to paraffin paper part is attached on ceramic disk; Then, by cylindric object, with making casting die after sponge wrapping, and it is positive with casting die, to push down silicon polished template; Afterwards, slowly draw on the other hand the paraffin paper at the silicon polished template back side, on the other hand along drawing the paraffin paper direction rolling casting die at the silicon polished template back side, until the paraffin paper at the template back side is thrown off from the template back side completely, template is just attached on ceramic disk completely.

Adopt the present invention, the sponge in casting die relies on deadweight, when rolling, is evenly pressed in the pattern hole of silicon polished template, avoids silicon polished template purse up and produce bubble, thereby has improved the flatness of producing when silicon polished.

the specific embodiment

Below in conjunction with specific embodiment, the invention will be further described.Specifically comprise the steps:

One, first open the part paraffin paper at the silicon polished template back side, the back side of silicon polished template being opened to paraffin paper part is attached on ceramic disk.

Two, then, by being highly more than or equal to the cylindric object of silicon polished template, with thick sponge wrapping, after skin, make casting die, and it is positive with casting die, to push down silicon polished template.

Three, afterwards, slowly draw on the other hand the paraffin paper at the silicon polished template back side, on the other hand along drawing the paraffin paper direction rolling casting die at the silicon polished template back side, until the paraffin paper at the template back side is thrown off from the template back side completely, template is just attached on ceramic disk completely.

Claims (1)

1. paste a method for silicon polished template, it is characterized in that first opening the part paraffin paper at the silicon polished template back side, the back side of silicon polished template being opened to paraffin paper part is attached on ceramic disk; Then, by cylindric object, with making casting die after sponge wrapping, and it is positive with casting die, to push down silicon polished template; Afterwards, slowly draw on the other hand the paraffin paper at the silicon polished template back side, on the other hand along drawing the paraffin paper direction rolling casting die at the silicon polished template back side, until the paraffin paper at the template back side is thrown off from the template back side completely, template is just attached on ceramic disk completely.