CN103499556A - Optical and biochemical sensor in two-way parallel-channel annulet-nested Mach Zehnder structure - Google Patents
Optical and biochemical sensor in two-way parallel-channel annulet-nested Mach Zehnder structureDownload PDFInfo
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Abstract
Description
Technical field
The invention belongs to the photoproduction field of sensing technologies, be specifically related to the design of the optics biochemical sensor of the nested mach zhender structure of the micro-ring of a kind of bilateral parallel channel.
Background technology
Along with the photonics technology reach its maturity and it in the continuous expansion of biological and chemical field application, the range of application of optics biochemical sensor has covered the numerous areas of biochemical sensor, becomes the important component part of current biochemical sensitive device.Biochemical sensor not only is widely used in traditional medical domain, but also has a wide range of applications at aspects such as environmental monitoring, crop protection, Homeland Securities.The optics biochemical sensor is a kind ofly to take certain biochemical composition as responsive primitive, take optical signalling as carrier, and the target detection thing is had to high selectivity and highly sensitive detection means.Biochemical sensor is normally detected microfluids such as gas, liquid, biomacromolecules, sample to be analyzed at least covers the upper area of whole waveguide device, the variation of concentration of specimens to be analyzed or immunoreactive generation all will change the refractive index of waveguide covering, this variation is responded to by the evanscent field component of light wave, thereby cause the change of light wave pattern effective refractive index, and make the transport property of light in ring change.Just can know the information of test substance by the variable quantity of measuring light field.
Optics biochemical sensor based on disappearance ripple sensing is widely used in the fields such as biomolecule detection, Heavy Metals in Waters constituent analysis and air pollution monitoring in recent years.The biochemical sensor of optical-waveguide-type at present more commonly used mainly contains based on surface plasma build (SPR), ring resonator type (MRR), Mach-Zehnder interferometers type (MZI) and grating type (Grating), and they exist oneself advantage and deficiency separately.Micro-ring resonant cavity is the characteristics such as size is little, integrated level is high, resonance enhancing owing to having, and are one of structures of often selecting of biology sensor.Particularly in recent years, along with the further investigation of cursor effect, the dicyclo cascade micro-ring resonant cavity based on cursor effect has been realized supersensitive optical sensing.The Mach Zehnder interferometry structure is because the large characteristics of its Free Spectral Range (FSR) equally also are widely used.Based on cursor effect, can utilize micro-ring resonant cavity and MZI advantage separately to realize the optics biochemical sensor of ultra-compact, high sensitivity, large Free Spectral Range simultaneously.But, at present common structure, channel utilization index is low, structure is compact not, and the resonance effect of micro-ring resonant cavity also is underutilized.
Summary of the invention
The objective of the invention is to provide in order to overcome the existing shortcoming that the biochemical sensor channel efficiency is low, structure is not compact the optics biochemical sensor of the nested mach zhender structure of the micro-ring of a kind of bilateral parallel channel.
The technical scheme that the present invention solves its technical matters employing is: the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel, comprise a nested mach zhender structure of the micro-ring of parallel channel and a feedback waveguide loop, the nested mach zhender structure of the micro-ring of described parallel channel comprises: an input straight wave guide, , a straight wave guide output, the nested micro-ring resonant cavity of mach zhender structure MZI, the micro-ring resonant cavity of described nested MZI comprises: the first straight wave guide, the first left semicircle feedback loop waveguide, the first right semi-circle feedback loop waveguide, the second straight wave guide, disc waveguide and the 3rd straight wave guide, described feedback waveguide loop comprises: the second left semicircle feedback loop waveguide, the 8th straight wave guide, the second right semi-circle feedback loop waveguide, described the second straight wave guide and the 3rd straight wave guide conllinear, described input straight wave guide, straight wave guide output, the first straight wave guide, the 8th straight wave guide is parallel parallel with the 3rd straight wave guide with the second straight wave guide, the input straight wave guide comprises first input end, the 4th straight wave guide, the second input end successively, straight wave guide output comprises the first output terminal, the 5th straight wave guide, the 6th straight wave guide, the 7th straight wave guide and the second output terminal successively,
The first end of the first straight wave guide and the first end of the second straight wave guide are extended respectively in the two ends of described the first left semicircle feedback loop waveguide, the second end of the first straight wave guide and the second end of the 3rd straight wave guide are extended respectively in the two ends of the first right semi-circle feedback loop waveguide, and the second end of the second straight wave guide and the first end of the 3rd straight wave guide are extended respectively in the two ends of disc waveguide; The first end of the first output terminal of the first end of the 8th straight wave guide and straight wave guide output is extended respectively at the two ends of the second left semicircle feedback loop waveguide; The two ends of the second right semi-circle feedback loop waveguide are extended respectively the second end of the 8th straight wave guide and are inputted the second end of the second input end of straight wave guide;
Described the first straight wave guide and the 4th straight wave guide form the first direction coupling mechanism, described the second straight wave guide and the 5th straight wave guide form the second direction coupling mechanism, described the 3rd straight wave guide and the 7th straight wave guide form the third direction coupling mechanism, described disc waveguide and the 6th straight wave guide form the Mach-Zehnder interferometers structure, described disc waveguide is as the bend arm of Mach-Zehnder interferometers structure, and described the 6th straight wave guide is as the straight-arm of Mach-Zehnder interferometers structure.
Further, also comprise an input grating vertical coupler and an output grating vertical coupler, the end of described input grating vertical coupler extends the first input end of input straight wave guide, and the second output terminal of straight wave guide output extends the top of output grating vertical coupler.
Further, described disc waveguide comprises first
left annulus, the second semicircular ring, firstright annulus, first
the second end of the second straight wave guide and the first end of the second semicircular ring, first are extended respectively in the two ends of left annulus
the second end of the second semicircular ring and the first end of the 3rd straight wave guide, described first are extended respectively in the two ends of right annulus
left annulus, first
the internal diameter of the internal diameter of right annulus and the second semicircular ring is tangent, and first
left annulus, the second semicircular ring, first
junction between right annulus is smooth connection.
Further, described first
left annulus and first
the internal diameter of right annulus is R2, and the internal diameter of the second semicircular ring is R3, and described R2 and R3 equate.
Further, the radius of described the first left semicircle feedback loop waveguide and the first right semi-circle feedback loop waveguide is R1, and described R1 is greater than R2, R3.
Further, the radius of described the second left semicircle feedback loop waveguide is R4, and described R4 is greater than R1.
Further, the radius of described the second right semi-circle feedback loop waveguide is R5, and described R5 is less than R4.
Further, the coupling between described input straight wave guide, straight wave guide output and described disc waveguide realizes by first direction coupling mechanism, second direction coupling mechanism and third direction coupling mechanism.
Further, described waveguide is passive ridge waveguide or slab waveguide.
Beneficial effect of the present invention: the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel of the present invention is by adopting a nested mach zhender structure of the micro-ring of parallel channel, a feedback waveguide loop, an input grating vertical coupler and an output grating vertical coupler, based on cursor effect, make the transmission spectrum of non-equilibrium mach zhender structure and bilateral parallel channel micro-ring resonant cavity superimposed, obtain and there is the more sensing characteristics spectrogram of high sensitivity, wider detectable dynamic range and larger to-noise ratio; And adopt input grating vertical coupler, output grating vertical coupler in conjunction with the feedback waveguide loop, the first output terminal of straight wave guide output is incorporated into again to the second input end of the input straight wave guide of parallel channel micro-ring resonant cavity by the feedback waveguide loop, the light secondary is injected in whole device, by the second output terminal output of straight wave guide output; Input port and output port are separated, take full advantage of four ports of parallel channel micro-ring resonant cavity, not only increased the effective length of light-matter interaction, and make the intensity noise of input port light source less on the impact of last output port, also shielded that light is defeated shakes the impact of caused F-P effect on final output light back and forth entering the straight wave guide both ends of the surface, so effectively reduce the ground unrest of whole sensor simultaneously; Simultaneously, it also moves to the best operating point of sensor is near the output power maximal value, so signal power is stronger, and corresponding signal noise ratio (SNR) is larger, more is conducive to survey.
The accompanying drawing explanation
The structural representation of the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel that Fig. 1 is the embodiment of the present invention;
Fig. 2 is the structural representation of input grating vertical coupler;
The sectional view that Fig. 3 is grating vertical coupler structure;
Wherein: the nested mach zhender structure of the micro-ring of 1-2-3-parallel channel, 1-input straight wave guide, 2-straight wave guide output, 3-the are nested micro-ring resonant cavity of MZI structure, 4-feedback waveguide loop, 30-the first left semicircle feedback loop waveguide, 31-the first straight wave guide, 32-the first right semi-circle feedback loop waveguide, 33 second straight wave guides, 34-disc waveguide, 340-first
left annulus, 341-the second semicircular ring, 342-first
right annulus, 35-the 3rd straight wave guide, the 10-first input end, 11-the 4th straight wave guide, 12-the second input end, 20-the first output terminal, 21-the 5th straight wave guide, 22-the 6th straight wave guide, 23-the 7th straight wave guide, 24-the second output terminal, 40-the second left semicircle feedback loop waveguide, 41-the 8th straight wave guide, 42-the second right semi-circle feedback loop waveguide, 5-Mach-Zehnder interferometers structure, 60-first direction coupling mechanism, 61-second direction coupling mechanism, 63-second direction coupling mechanism, 70-input grating vertical coupler, 71-output grating vertical coupler.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the invention will be further elaborated.
Be illustrated in figure 1 the structural representation of optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel of the embodiment of the present invention, comprise a nested mach zhender structure 1-2-3 of the micro-ring of parallel channel and a feedback waveguide loop 4, the nested mach zhender structure 1-2-3 of the micro-ring of described parallel channel comprises: an input straight wave guide 1, a straightwave guide output 2, a nested micro-ringresonant cavity 3 of mach zhender structure MZI structure, described micro-ring resonant cavity comprises: the first straight wave guide 31, the first left semicircle feedback loop waveguide 30, the first right semi-circlefeedback loop waveguide 32, the secondstraight wave guide 33,disc waveguide 34 and the 3rdstraight wave guide 35, described feedback waveguide loop 4 comprises: the second left semicirclefeedback loop waveguide 40, the 8thstraight wave guide 41, the second right semi-circlefeedback loop waveguide 42, described the secondstraight wave guide 33 and the 3rdstraight wave guide 35 conllinear, described input straight wave guide 1, straightwave guide output 2, the first straight wave guide 31, the 8thstraight wave guide 41 are led parallel with the secondstraight wave guide 33 with the 3rdstraight ripple 35, input straight wave guide 1 comprisesfirst input end 10, the 4th straight wave guide 11, thesecond input end 12 successively, straightwave guide output 2 comprises thefirst output terminal 20, the 5th straight wave guide 21, the 6thstraight wave guide 22, the 7thstraight wave guide 23 and thesecond output terminal 24 successively,
The first end of the first straight wave guide 31 and the first end of the secondstraight wave guide 33 are extended respectively in the two ends of described the first left semicircle feedback loop waveguide 30, the second end of the first straight wave guide 31 and the second end of the 3rdstraight wave guide 35 are extended respectively in the two ends of the first right semi-circlefeedback loop waveguide 32, and the second end of the secondstraight wave guide 33 and the first end of the 3rdstraight wave guide 35 are extended respectively in the two ends ofdisc waveguide 34; The first end of thefirst output terminal 20 of the first end of the 8thstraight wave guide 41 and straightwave guide output 2 is extended respectively at the two ends of the second left semicirclefeedback loop waveguide 40; The two ends of the second right semi-circlefeedback loop waveguide 42 are extended respectively the second end of the 8thstraight wave guide 41 and are inputted the second end of thesecond input end 12 of straight wave guide 1;
Described the first straight wave guide 31 and the 4th straight wave guide 11 form firstdirection coupling mechanism 60, described the secondstraight wave guide 33 and the 5th straight wave guide 21 form seconddirection coupling mechanism 61, described the 3rdstraight wave guide 35 and the 7thstraight wave guide 23 form thirddirection coupling mechanism 62, describeddisc waveguide 34 and the 6thstraight wave guide 22 form Mach-Zehnderinterferometers structure 5, describeddisc waveguide 34 is as the bend arm of Mach-Zehnderinterferometers structure 5, and described the 6thstraight wave guide 22 is as the straight-arm of Mach-Zehnderinterferometers structure 5.
Wherein, in the application's scheme, described input straight wave guide 1, straightwave guide output 2, feedback waveguide loop 4 are an integrated integral device, for convenience, input straight wave guide 1 here and are defined as artificiallyfirst input end 10, the 4th straight wave guide 11, thesecond input end 12; Straightwave guide output 2 is defined as thefirst output terminal 20, the 5th straight wave guide 21, the 6thstraight wave guide 22, the 7thstraight wave guide 23 and thesecond output terminal 24 artificially; Feedback waveguide loop 4 is defined as the second left semicirclefeedback loop waveguide 40, the 8thstraight wave guide 41, the 3rd right semi-circlefeedback loop waveguide 42 artificially; Same, the micro-ringresonant cavity 3 of described nested MZI structure is also as an integrated integral device.
In the present patent application scheme, also comprise an input gratingvertical coupler 70 and an output gratingvertical coupler 71, be illustrated in figure 2 the structural representation of grating vertical coupler, Figure 3 shows that the sectional view of grating vertical coupler, the end of described input gratingvertical coupler 70 extends thefirst input end 10 of input straight wave guide 1, and thesecond output terminal 24 of straightwave guide output 2 extends the top of output grating vertical coupler 71.Adopt the advantage of integrated input, output grating vertical coupler to be, compare other coupling scheme, grating coupler have coupling efficiency high, prepare packaging cost low, without the die terminals mirror polish, can realize the advantages such as signal input and output anywhere, it is the coupling process of the tool potentiality of current nano optical wave guide, and it can with sensing chip, to make monolithic integrated, compact conformation.
The parallel channelmicro-ring resonant cavity 3 of described nested MZI structure is as the main part of whole senser element, when working sensor, the variation of analyte concentration will change the refractive index of waveguide covering, thereby cause the change of light wave pattern effective refractive index, and the transport property of light in ring changed, this variation will cause the drift of total response spectrum peak.Can set up the frequency displacement response curve by the drift of monitoring peak under a certain pattern, and then obtain the relevant information of determinand.The optics biochemical sensor of the nested mach zhender structure of the micro-ring of described bilateral parallel channel has been introduced a feedback waveguide loop, the first output terminal is incorporated into again to the second input end of the input straight wave guide of parallel channel micro-ring resonant cavity by the feedback waveguide loop, the light secondary is injected in whole device, by the second output terminal output of straight wave guide output.It separates input port and output port, take full advantage of four ports of parallel channel micro-ring resonant cavity, not only increased the effective length of light-matter interaction, and make the intensity noise of input port light source less on the impact of last output port, also shielded that light is defeated shakes the impact of caused F-P effect on final output light back and forth entering the straight wave guide both ends of the surface, so effectively reduce the ground unrest of whole sensor simultaneously.Simultaneously, it also moves to the best operating point of sensor is near the output power maximal value, so signal power is stronger, and corresponding signal noise ratio (SNR) is larger, more is conducive to survey.
Wherein, described disc waveguide comprises first
left annulus 340, the secondsemicircular ring 341, first
right annulus 342, the first
the second end of the secondstraight wave guide 33 and the first end of the secondsemicircular ring 341, first are extended respectively in the two ends of left annulus 340
the second end of the secondsemicircular ring 341 and the first end of the 3rdstraight wave guide 35, described first are extended respectively in the two ends ofright annulus 342
left annulus 340, first
the external diameter of the internal diameter ofright annulus 342 and the secondsemicircular ring 341 is tangent; Described first
left annulus 340 and first
the internal diameter ofright annulus 342 is R2, and the external diameter of the secondsemicircular ring 341 is R3, and wherein said R2 and R3 equate or be approximate; The radius of described the first left semicircle feedback loop 30 and the first rightsemi-circle feedback loop 32 is R1, and described R1 is greater than R2, R3.The radius of described the second left semicircle feedback loop waveguide is R4, and described R4 is greater than R1.The radius of described the second right semi-circle feedback loop waveguide is R5, and described R5 is greater than R1.
Below, for those skilled in the art can understand and implement technical solution of the present invention, the optics biochemical sensor in connection with the concrete course of work to the nested mach zhender structure of the micro-ring of a kind of bilateral parallel channel elaborates:
At first, the light that laser instrument sends is coupled in the waveguide of sensor chip through input gratingvertical coupler 70 by single-mode fiber, enter in input straight wave guide 1, and be injected in sensing chip by thefirst input end 10 of input straight wave guide 1, and propagate to thesecond input end 12 directions, through firstdirection coupling mechanism 60, by evanescent wave, be coupled, part light is directly propagated along thesecond input end 12 directions, via feedback waveguide loop 4, to thesecond output terminal 24 directions of straightwave guide output 2, propagate, another part light is side-coupled has entered the micro-ringresonant cavity 3 of MZI structure nested, through thirddirection coupling mechanism 62, by evanescent wave, be coupled, part light is propagated forward through thebend arm 34 of Mach Zehnder interferometry part (MZI) 5, another part light is propagated forward through the straight-arm 22 of Mach Zehnder interferometry part (MZI) 5, in the MZI part, interfere for the first time, light after interfering is through seconddirection coupling mechanism 61, by evanescent wave, be coupled, again carry out power division, part light is incorporated into thesecond input end 12 of input waveguide 1 through feedback waveguide loop 4, again entered the micro-ringresonant cavity 3 of MZI structure nested, experienced equally again the interference effect of micro-ring resonant cavity and MZI part, thesecond output terminal 24 outputs by straightwave guide output 2, another part light by the micro-ringresonant cavity 3 of nested MZI structure through firstdirection coupling mechanism 60, by evanescent wave, be coupled, thesecond input end 12 by input straight wave guide 1 is propagated and is exported to thesecond output terminal 24 directions of straightwave guide output 2 through feedback waveguide loop 4.After having experienced several above processes, system reaches steady state (SS).Above two parts light is all the light beam splitting by thefirst input end 10 of input straight wave guide 1, thereby frequency is identical, just after coupling mechanism, light intensity is distributed, meet the Independence Principle of light in the communication process of light, and the screening of at least twice micro-ring resonant cavity interference effect that has experienced the MZI structure nested to spectrum, the phase place difference of their experience, thesecond output terminal 24 at straightwave guide output 2 forms interference spectum, finally at thesecond output terminal 24 of straight wave guide output, via output gratingvertical coupler 71, the light in waveguide is exported by Single-Mode Fiber Coupling.
The output spectra of Mach-Zehnder interferometers is the quadratic form of sine function, and it will form a set of interference fringe, to Mach-Zehnder interferometers, when the optical path difference of its two arm meets
wherein, the refractive index that described n is the external environment material, m is order of interference, λmZIfor lambda1-wavelength, Δ L=L1-L2=(π-2) (R2+ R3), described L1, L2be respectively Mach bend arm and the straight-arm length that increase the Dare interferometer structure, R2, R3difference firstleft annulus, firstthe radius of right annular radii and the second semicircular ring, select suitable interference arm lengths, Δ L met and have a series of like this integer order of interference m, the mutually long wavelength value λ of corresponding a series of corresponding interferencemZI.The cycle of the Sine-squared spectrum of single Mach-Zehnder interferometers output is depended on the length difference Δ L that interferes arm, can find out (R from above formula2+ R3) larger, its cycle is less, namely the FSR of single Mach-Zehnder interferometers is less, the optical path difference that can be understood as Mach-Zehnder interferometers is larger, its FSR is less, therefore under the condition of the bending loss that meets ring, should select the annulus of reduced size to increase the bend arm of Dare interferometer structure as Mach to realize large FSR.
The output spectra of parallel channel micro-ring resonant cavity is equally spaced comb spectrum, and the girth C of ring cavity meets following condition of resonance, nC=m λmRR, wherein, the refractive index that described n is the external environment material, the girth that C is ring cavity, m is order of interference, λmRRfor lambda1-wavelength; Resonance effect due to ring, only have when the light path of ring resonator equals the integral multiple of optical wavelength, and the light of some wavelength could be enhanced in ring.
Due to cursor effect, only have when the light wave of some specific wavelength meets Mach simultaneously and increases the condition of resonance of Dare interferometer structure and annular resonance cavity configuration, the harmonic peak of the two is overlapping at those wavelength places, this wavelength is strengthened, be called resonance wavelength, and other adjacent harmonic peak is not due to overlapping and remitted its fury is suppressed.Therefore, the size of parallel channel micro-ring resonant cavity 1-2-3 by reasonably selecting the MZI structure nested and the length of feedback waveguide loop 4, make it all meet interference condition, obtain transport property spectrum preferably, select to only have the characteristic peak of the situation of a harmonic peak as sensing in spectrogram in large wavelength coverage.
The concrete course of work of the optics biochemical sensor of the nested mach zhender structure of the present invention's micro-ring of a kind of bilateral parallel channel is: whole device all contacts with extraneous surrounding material to be monitored, when the external environment substance change, the waveguide top covering is experienced the changes delta n of extraneous refractive index, change the distribution of luminous energy in optical waveguide, thereby caused the changes delta N of waveguide internal schema effective refractive indexeff, finally changing the phase place of light through this optical waveguide, its phase change amount is
and phase information generally can not obtain by direct detection, need to be converted into wavelength, amplitude, polarization state and indirectly survey, here we adopt and utilize resonance to be converted into the capable detection of probing wave journey by raft down the Yangtze River shift-in.When external substance concentration changes, the variation of waveguide internal schema effective refractive index, show as the drift of whole device transmission spectrum harmonic peak, and there is following relation in the change amount Δ n of the change amount Δ λ of resonance wavelength and external substance refractive index: Δ λ/λ=Δ Neff/ Neff=Δ n/n, wherein Δ Nefffor the effective refractive index of waveguide internal schema, the refractive index that n is the external environment material, λ is lambda1-wavelength; Can measure the change amount Δ n of external substance refractive index by the change amount Δ λ that measures resonance wavelength, also just obtain the information such as the refractive index of measured matter and concentration, realize sensing detection.
In the present patent application scheme, described waveguide is all to adopt the method for microfabrication etching on the SOI wafer to obtain.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; should be understood to that protection scope of the present invention is not limited to such special statement and embodiment; within the spirit and principles in the present invention all; any modification of making, be equal to replacement, improvement etc., within protection scope of the present invention all should be included in.
Claims (9)
1. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel, it is characterized in that, comprise a nested mach zhender structure of the micro-ring of parallel channel and a feedback waveguide loop, the nested mach zhender structure of the micro-ring of described parallel channel comprises: an input straight wave guide, , a straight wave guide output, the nested micro-ring resonant cavity of mach zhender structure MZI, the micro-ring resonant cavity of described nested MZI comprises: the first straight wave guide, the first left semicircle feedback loop waveguide, the first right semi-circle feedback loop waveguide, the second straight wave guide, disc waveguide and the 3rd straight wave guide, described feedback waveguide loop comprises: the second left semicircle feedback loop waveguide, the 8th straight wave guide, the second right semi-circle feedback loop waveguide, described the second straight wave guide and the 3rd straight wave guide conllinear, described input straight wave guide, straight wave guide output, the first straight wave guide, the 8th straight wave guide is parallel parallel with the 3rd straight wave guide with the second straight wave guide, the input straight wave guide comprises first input end, the 4th straight wave guide, the second input end successively, straight wave guide output comprises the first output terminal, the 5th straight wave guide, the 6th straight wave guide, the 7th straight wave guide and the second output terminal successively,
The first end of the first straight wave guide and the first end of the second straight wave guide are extended respectively in the two ends of described the first left semicircle feedback loop waveguide, the second end of the first straight wave guide and the second end of the 3rd straight wave guide are extended respectively in the two ends of the first right semi-circle feedback loop waveguide, and the second end of the second straight wave guide and the first end of the 3rd straight wave guide are extended respectively in the two ends of disc waveguide; The first end of the first output terminal of the first end of the 8th straight wave guide and straight wave guide output is extended respectively at the two ends of the second left semicircle feedback loop waveguide; The two ends of the second right semi-circle feedback loop waveguide are extended respectively the second end of the 8th straight wave guide and are inputted the second end of the second input end of straight wave guide;
Described the first straight wave guide and the 4th straight wave guide form the first direction coupling mechanism, described the second straight wave guide and the 5th straight wave guide form the second direction coupling mechanism, described the 3rd straight wave guide and the 7th straight wave guide form the third direction coupling mechanism, described disc waveguide and the 6th straight wave guide form the Mach-Zehnder interferometers structure, described disc waveguide is as the bend arm of Mach-Zehnder interferometers structure, and described the 6th straight wave guide is as the straight-arm of Mach-Zehnder interferometers structure.
2. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as claimed in claim 1, it is characterized in that, also comprise an input grating vertical coupler and an output grating vertical coupler, the end of described input grating vertical coupler extends the first input end of input straight wave guide, and the second output terminal of straight wave guide output extends the top of output grating vertical coupler.
3. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as claimed in claim 1, is characterized in that, described disc waveguide comprises first
left annulus, the second semicircular ring, first
right annulus, firstthe second end of the second straight wave guide and the first end of the second semicircular ring, first are extended respectively in the two ends of left annulus
the second end of the second semicircular ring and the first end of the 3rd straight wave guide, described first are extended respectively in the two ends of right annulus
left annulus, firstthe internal diameter of the internal diameter of right annulus and the second semicircular ring is tangent, and first
left annulus, the second semicircular ring, first
junction between right annulus is smooth connection.
4. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as claimed in claim 3, is characterized in that described first
left annulus and first
the internal diameter of right annulus is R2, and the internal diameter of the second semicircular ring is R3, and described R2 and R3 equate.
5. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as claimed in claim 4, is characterized in that, the radius of described the first left semicircle feedback loop waveguide and the first right semi-circle feedback loop waveguide is R1, and described R1 is greater than R2, R3.
6. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as claimed in claim 5, is characterized in that, the radius of described the second left semicircle feedback loop waveguide is R4, and described R4 is greater than R1.
7. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as claimed in claim 6, is characterized in that, the radius of described the second right semi-circle feedback loop waveguide is R5, and described R5 is less than R4.
8. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as described as claim 1 to 7 any one claim, it is characterized in that, the coupling between described input straight wave guide, straight wave guide output and described disc waveguide realizes by first direction coupling mechanism, second direction coupling mechanism and third direction coupling mechanism.
9. the optics biochemical sensor of the nested mach zhender structure of the micro-ring of bilateral parallel channel as described as claim 1 to 7 any one claim, is characterized in that, described waveguide is passive ridge waveguide or slab waveguide.
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