CN103470852A - Microfluid valve gear based on electrowetting technology - Google Patents

Abstract

Translated fromChinese

本发明公开了一种基于电润湿技术的微流体阀装置。该装置包括上基板、下基板以及位于上下基板之间的微流体隔层，所述上基板（11）和下基板（12）在靠近微流体隔层（10）一侧分别设置有上导电层（13）、下导电层（14），在所述的上导电层（13）的下表面设有上疏水介质层（15），在下导电层（14）的上表面设有下疏水介质层（16）；所述微流体隔层（10）是多孔的海绵状材料；所述微流体隔层（10）的外表面以及内部结构表面均覆盖有一层中间疏水介质层（17）。通过在微流体隔层与某个基板之间施加电压，可借助电润湿特性使位于该基板和隔层中间的水性流体过滤到隔层的另一侧；与此对应的，在另一基板与隔层之间施加电压，可使水性流体过滤回初始的一侧，从而实现动态可调的流体阀功能。

The invention discloses a microfluidic valve device based on electrowetting technology. The device comprises an upper substrate, a lower substrate and a microfluid interlayer between the upper and lower substrates, and the upper substrate (11) and the lower substrate (12) are respectively provided with an upper conductive layer on the side close to the microfluid interlayer (10) (13), the lower conductive layer (14), the lower surface of the upper conductive layer (13) is provided with an upper hydrophobic medium layer (15), and the upper surface of the lower conductive layer (14) is provided with a lower hydrophobic medium layer ( 16); the microfluid interlayer (10) is a porous spongy material; the outer surface and internal structure surface of the microfluid interlayer (10) are covered with an intermediate hydrophobic medium layer (17). By applying a voltage between the microfluidic barrier and a certain substrate, the aqueous fluid located between the substrate and the barrier can be filtered to the other side of the barrier by means of electrowetting properties; correspondingly, on the other substrate Applying a voltage to the interlayer allows the water-based fluid to filter back to the original side, thereby realizing a dynamically adjustable fluid valve function.

Description

Translated fromChinese

一种基于电润湿技术的微流体阀装置A Microfluidic Valve Device Based on Electrowetting Technology

技术领域technical field

本发明涉及一种微流体阀装置，特别是一种基于超轻型石墨烯微流体阀装置。The invention relates to a microfluidic valve device, in particular to a microfluidic valve device based on ultralight graphene.

背景技术Background technique

电润湿技术是近年来得到广泛应用研究的新型微流体技术，其具有功耗低、响应速度快、器件结构简单、体积小等特点。基于电润湿技术的新型微流体阀同时还有动作可靠、响应快速和易于连续控制等优势，具备优异的应用价值。但是目前主要的电润湿微流体阀依赖微机械电子工艺，具有较为复杂精密的微观机械结构，加工工艺复杂，尤其在涉及到多相流体的操控时，对特定流体的过滤、阻隔以及可回复操作都是目前面临的主要难题。Electrowetting technology is a new type of microfluidic technology that has been widely used and researched in recent years. It has the characteristics of low power consumption, fast response speed, simple device structure, and small size. The new microfluidic valve based on electrowetting technology also has the advantages of reliable action, fast response and easy continuous control, and has excellent application value. However, the current main electrowetting microfluidic valves rely on micromechanical and electronic processes, have relatively complex and precise micromechanical structures, and complex processing techniques, especially when it comes to the manipulation of multiphase fluids, the filtration, barrier and recovery of specific fluids Operation is the main problem currently facing.

发明内容Contents of the invention

技术问题：本发明所要解决的技术问题是提供一种电润湿微流体阀装置，该装置可以精确实现多相流体的过滤，阻隔以及可回复操作，且不需要制备复杂的微机械电子部件。Technical problem: The technical problem to be solved by the present invention is to provide an electrowetting microfluidic valve device, which can accurately realize the filtration, barrier and recoverable operation of multiphase fluids, and does not require the preparation of complicated micromechanical and electronic components.

技术方案：本发明的一种基于电润湿技术的微流体阀装置包括上基板、下基板以及位于上下基板之间的微流体隔层，所述上基板和下基板在靠近微流体隔层一侧分别设置有上导电层、下导电层，在所述的上导电层的下表面设有上疏水介质层，在下导电层的上表面设有下疏水介质层；所述微流体隔层是多孔的海绵状材料；所述微流体隔层的外表面以及内部结构表面均覆盖有一层中间疏水介质层。Technical solution: A microfluidic valve device based on electrowetting technology of the present invention includes an upper substrate, a lower substrate, and a microfluidic spacer between the upper and lower substrates. The upper and lower substrates are close to the microfluidic spacer. An upper conductive layer and a lower conductive layer are respectively arranged on the side, an upper hydrophobic medium layer is arranged on the lower surface of the upper conductive layer, and a lower hydrophobic medium layer is arranged on the upper surface of the lower conductive layer; the microfluid interlayer is a porous The sponge-like material; the outer surface and inner structure surface of the microfluidic barrier are covered with a layer of intermediate hydrophobic medium layer.

所述的上疏水介质层、下疏水介质层和中间疏水介质层为与水性流体接触角大于90°的疏水介质层。The upper hydrophobic medium layer, the lower hydrophobic medium layer and the middle hydrophobic medium layer are hydrophobic medium layers with a contact angle with aqueous fluid greater than 90°.

所述微流体隔层是多孔的海绵状石墨烯。The microfluidic barrier is porous sponge-like graphene.

有益效果：与现有技术相比，本发明的电润湿微流体阀装置不依赖复杂的微机械电子部件，充分利用微流体隔层的超疏水性和较好的亲油性，即可实现油性流体的过滤，水性流体的阻隔，以及油性和水性混合流体的分离等多重功能。此外，通过在微流体隔层与某个基板之间施加电压，可借助电润湿特性使位于该基板和隔层中间的水性流体过滤到隔层的另一侧；与此对应的，在另一基板与隔层之间施加电压，可使水性流体过滤回初始的一侧，从而实现动态可调的流体阀功能。石墨烯具备优异的导电性能，可制备成微流体阀的电极材料，经过疏水介质层修饰过的海绵状石墨烯块状材料，质轻且满足电润湿工作条件，可实现对微流体的动态操控。Beneficial effects: Compared with the prior art, the electrowetting microfluidic valve device of the present invention does not rely on complex micromechanical and electronic components, and can realize oiliness by making full use of the superhydrophobicity and good lipophilicity of the microfluidic interlayer. It has multiple functions such as fluid filtration, water-based fluid barrier, and oily and water-based mixed fluid separation. In addition, by applying a voltage between the microfluidic barrier and a certain substrate, the aqueous fluid located between the substrate and the barrier can be filtered to the other side of the barrier by virtue of electrowetting properties; A voltage is applied between the base plate and the interlayer, so that the aqueous fluid can be filtered back to the original side, thereby realizing the function of a dynamically adjustable fluid valve. Graphene has excellent electrical conductivity and can be prepared as an electrode material for microfluidic valves. The spongy graphene bulk material modified with a hydrophobic medium layer is light in weight and meets the working conditions of electrowetting, which can realize the dynamics of microfluidics. manipulation.

附图说明Description of drawings

图1是本发明电润湿微流体阀装置的立体示意图；Fig. 1 is a three-dimensional schematic diagram of an electrowetting microfluidic valve device of the present invention;

图2是本发明电润湿微流体阀装置在关态时，过滤油性流体的示意图；Fig. 2 is a schematic diagram of filtering oily fluid when the electrowetting microfluidic valve device of the present invention is in the off state;

图3是本发明电润湿微流体阀装置在关态时，阻隔水性流体的示意图；Fig. 3 is a schematic diagram of blocking aqueous fluid when the electrowetting microfluidic valve device of the present invention is in the off state;

图4是本发明电润湿微流体阀装置在开态时，过滤水性流体的示意图。Fig. 4 is a schematic diagram of filtering aqueous fluid when the electrowetting microfluidic valve device of the present invention is in an open state.

以上的图中包括：微流体隔层10、上基板11、下基板12、上导电层13、下导电层14、上疏水介质层15、下疏水介质层16、中间疏水介质层17、海绵状石墨烯18、油性流体19、水性流体20。The above figure includes:microfluid interlayer 10,upper substrate 11,lower substrate 12, upperconductive layer 13, lowerconductive layer 14, upperhydrophobic medium layer 15, lowerhydrophobic medium layer 16, middlehydrophobic medium layer 17, spongy Graphene 18,oily fluid 19, aqueous fluid 20.

具体实施方式Detailed ways

下面结合附图对本发明做更进一步的解释。The present invention will be further explained below in conjunction with the accompanying drawings.

本发明的微流体阀装置，包括微流体隔层和上下两个基板；该微流体隔层是由块状多孔材料制成；该微流体隔层外表面和多孔内结构表面均覆盖有一层疏水介质层，其材质可以是含氟聚合物，如聚四氟乙烯；该微流体隔层具有亲油性和超疏水性，表现为与油性流体接触角小于90°，与水性流体接触角大于150°；该上下两个基板分别分布于微流体隔层的两侧；该上下基板在靠近隔层一侧表面各有一个导电层，导电层表面都均匀覆盖有疏水介质层。利用微流体隔层的亲油性和疏水性，可以实现油性流体的过滤，水性流体的阻隔，以及油性和水性混合流体的分离等功能。此外，通过在微流体隔层与某个基板之间施加电压，可借助电润湿特性使位于该基板和隔层中间的水性流体过滤到隔层的另一侧；与此对应的，在另一基板与隔层之间施加电压，可使水性流体过滤回初始的一侧，从而实现动态可调的流体阀功能。The microfluidic valve device of the present invention comprises a microfluidic interlayer and two upper and lower substrates; the microfluidic interlayer is made of bulk porous material; the outer surface of the microfluidic interlayer and the surface of the porous inner structure are covered with a layer of hydrophobic The medium layer can be made of fluorine-containing polymers, such as polytetrafluoroethylene; the microfluidic barrier has lipophilicity and superhydrophobicity, and the contact angle with oily fluid is less than 90°, and the contact angle with aqueous fluid is greater than 150° The upper and lower substrates are respectively distributed on both sides of the microfluidic interlayer; the upper and lower substrates have a conductive layer on the surface close to the interlayer, and the surface of the conductive layer is evenly covered with a hydrophobic medium layer. Utilizing the lipophilicity and hydrophobicity of the microfluidic barrier, the functions of filtering oily fluids, blocking watery fluids, and separating oily and watery mixed fluids can be realized. In addition, by applying a voltage between the microfluidic barrier and a certain substrate, the aqueous fluid located between the substrate and the barrier can be filtered to the other side of the barrier by virtue of electrowetting properties; A voltage is applied between the base plate and the interlayer, so that the aqueous fluid can be filtered back to the original side, thereby realizing the function of a dynamically adjustable fluid valve.

其中，微流体隔层由海绵状石墨烯材料制成。Among them, the microfluidic barrier is made of sponge-like graphene material.

根据下述实施例，可以更好的理解本发明。然而，本领域的技术人员容易理解，实施例所描述的具体的物料配比、工艺条件及其结果仅用于说明本发明，而不应当也不会限制权利要求书中所详细描述的本发明。The present invention can be better understood from the following examples. However, those skilled in the art will readily understand that the specific material ratios, process conditions and results described in the examples are only used to illustrate the present invention, and should not and will not limit the present invention described in detail in the claims .

如图1所示为电润湿微流体阀装置的立体示意图，一种电润湿微流体阀装置，包括上基板11、下基板12以及位于上下基板之间的微流体隔层10。上基板11在靠近微流体隔层10的一侧设置有上疏水介质层15。下基板12在靠近微流体隔层10的一侧设置有下疏水介质层16。在上基板11与上疏水介质层15之间设置有上导电层13。下基板12与下疏水介质层16之间设置有下导电层14。微流体隔层10的核心部件是海绵状石墨烯18，海绵状石墨烯18外表面以及内结构表面都均匀覆盖有一层中间疏水介质层17。FIG. 1 is a perspective view of an electrowetting microfluidic valve device. An electrowetting microfluidic valve device includes anupper substrate 11 , alower substrate 12 and amicrofluidic spacer 10 between the upper and lower substrates. Theupper substrate 11 is provided with an upperhydrophobic medium layer 15 on a side close to themicrofluidic spacer 10 . Thelower substrate 12 is provided with a lowerhydrophobic medium layer 16 on a side close to themicrofluidic spacer 10 . An upperconductive layer 13 is disposed between theupper substrate 11 and the upperhydrophobic medium layer 15 . A lowerconductive layer 14 is disposed between thelower substrate 12 and the lowerhydrophobic medium layer 16 . The core component of themicrofluidic barrier 10 is a sponge-like graphene 18 , and the outer surface and the inner structure surface of the sponge-like graphene 18 are evenly covered with an intermediatehydrophobic medium layer 17 .

该上基板11与下基板12采用材质的要求包括：机械强度高、耐热耐寒、耐油性、耐水性、良好的透明性。实际应用中，上基板11以及下基板12与微流体隔层10之间均各自形成一个独立的流体腔，从而使该发明提出的设计产生作用。该上电极层13和下电极层14由透明导电材质制成，如氧化铟锡。在本实施方案中上电极层13及下电极层14起到接地的作用，海绵状石墨烯18起到施加驱动信号的作用，两者也可调换使用，即对上电极层13或下电极层14施加驱动信号，对海绵状石墨烯18施加接地信号。该上疏水介质层15，下疏水介质层16及中间疏水介质层17均由透明材质制成，如单层疏水性的透明非晶态含氟聚合物，或者在透明无机或者有机介质层表面沉积此含氟聚合物，本发明中利用AF1600。The material requirements for theupper substrate 11 and thelower substrate 12 include: high mechanical strength, heat and cold resistance, oil resistance, water resistance, and good transparency. In practical application, an independent fluid chamber is formed between theupper substrate 11 and thelower substrate 12 and themicrofluidic barrier 10, so that the design proposed by the invention can work. Theupper electrode layer 13 and thelower electrode layer 14 are made of transparent conductive material, such as indium tin oxide. In this embodiment, theupper electrode layer 13 and thelower electrode layer 14 play the role of grounding, and thespongy graphene 18 plays the role of applying a driving signal, and the two can also be used interchangeably, that is, for theupper electrode layer 13 or thelower electrode layer 14 to apply a driving signal, and apply a ground signal to the sponge-like graphene 18 . The upperhydrophobic medium layer 15, the lowerhydrophobic medium layer 16 and the middlehydrophobic medium layer 17 are all made of transparent materials, such as single-layer hydrophobic transparent amorphous fluoropolymers, or deposited on the surface of transparent inorganic or organic medium layers As this fluoropolymer, AF1600 is used in the present invention.

如图2是图1所示装置在关态时，过滤油性流体的示意图。由于中间疏水介质层17与油性流体的接触角通常小于90°，结合海绵状石墨烯18的多孔状结构，产生了较好的亲油特性，可有效地起到过滤的作用，使油性流体顺利穿透微流体隔层10。Fig. 2 is a schematic diagram of filtering oily fluid when the device shown in Fig. 1 is in the off state. Because the contact angle between the middlehydrophobic medium layer 17 and the oily fluid is usually less than 90°, combined with the porous structure of thespongy graphene 18, it produces better lipophilic properties, which can effectively filter the oily fluid and make the oily fluid flow smoothly. Penetrate themicrofluidic barrier 10 .

如图3是图1所示装置在关态时，阻隔水性流体的示意图。由于中间疏水介质层17与水性流体的接触角通常大于90°，结合海绵状石墨烯18的多孔状结构，产生了理想的超疏水特性，起到阻隔水性流体的作用，利用液体表面张力产生了微阀功能。FIG. 3 is a schematic diagram of blocking aqueous fluid when the device shown in FIG. 1 is in an off state. Since the contact angle between the middlehydrophobic medium layer 17 and the aqueous fluid is usually greater than 90°, combined with the porous structure of thespongy graphene 18, an ideal superhydrophobic property is produced, which plays a role in blocking the aqueous fluid. Microvalve function.

如图4是图1所示装置在开态时，过滤水性流体的示意图。在海绵状石墨烯18与上电极层13之间施加电压，通过电润湿效应，可以克服水性流体较强的表面张力，从而使微流体阀由关闭的状态转换为开启的状态，使水性流体穿透微流体隔层10。FIG. 4 is a schematic diagram of filtering aqueous fluid when the device shown in FIG. 1 is in an open state. Applying a voltage between the sponge-like graphene 18 and theupper electrode layer 13, through the electrowetting effect, can overcome the strong surface tension of the aqueous fluid, so that the microfluidic valve is converted from a closed state to an open state, making the aqueous fluid Penetrate themicrofluidic barrier 10 .

与现有技术相比，本发明的电润湿微流体阀装置采用微流体隔层10做成微阀。该微阀不依赖复杂的微机械电子加工工艺，仅依靠多孔状材料的亲油和超疏水特性，实现油性流体的过滤，水性流体的阻隔，以及油性和水性混合流体的分离等多重功能。此外，通过在微流体隔层10与某个基板之间施加电压，可借助电润湿特性使位于该基板和隔层中间的水性流体过滤到隔层的另一侧，而在另一基板与隔层之间施加电压后，可使水性流体过滤回初始的一侧，从而实现动态可调的流体阀功能。Compared with the prior art, the electrowetting microfluidic valve device of the present invention adopts themicrofluidic interlayer 10 to make a microvalve. The microvalve does not rely on complex micromechanical and electronic processing technology, but only relies on the lipophilic and superhydrophobic properties of porous materials to achieve multiple functions such as filtering oily fluids, blocking watery fluids, and separating oily and watery mixed fluids. In addition, by applying a voltage between themicrofluidic spacer 10 and a certain substrate, the aqueous fluid located between the substrate and the spacer can be filtered to the other side of the spacer by virtue of electrowetting properties, while another substrate and the spacer can be filtered to the other side of the spacer. After a voltage is applied between the compartments, the aqueous fluid can be filtered back to the original side, thereby realizing a dynamically adjustable fluid valve function.

以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, it should be pointed out that, for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications can also be made. It should be regarded as the protection scope of the present invention.

Claims (3)

1. the microfluidic valve device based on electrowetting technology, it is characterized in that this device comprises upper substrate, infrabasal plate and the microfluid interlayer between upper and lower base plate, described upper substrate (11) and infrabasal plate (12) are being respectively arranged with upper conductive layer (13), lower conductiving layer (14) near microfluid interlayer (10) one sides, the lower surface of conductive layer (13) is provided with upper hydrophobic medium layer (15) on described, at the upper surface of lower conductiving layer (14), is provided with lower hydrophobic medium layer (16); Described microfluid interlayer (10) is the spongy material of porous; The outer surface of described microfluid interlayer (10) and internal structure surface all are coated with the middle hydrophobic medium layer (17) of one deck.

2. the microfluidic valve device based on electrowetting technology according to claim 1 is characterized in that: described upper hydrophobic medium layer (15), lower hydrophobic medium layer (16) and middle hydrophobic medium layer (17) the hydrophobic medium layer for being greater than 90 ° with the aqueous fluids wrapping angle.

3. the microfluidic valve device based on electrowetting technology according to claim 1 and 2, it is characterized in that: described microfluid interlayer (10) is the spongy Graphene (18) of porous.

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