技术领域technical field
本发明涉及一种光学传感器。The invention relates to an optical sensor.
背景技术Background technique
微小颗粒检测技术在科学研究、工业场所、大气环境监测中起到至关重要的作用。其检测技术主要有光学法、电学法、动力学法，其中光学法以测量范围广、不接触样品、快速、可自动化实时而被最广泛地应用，典型的仪器如库尔特仪、Climet和ROYCO粒子计数器、国产激光粒子计数器等。但这些仪器只能用来测量微小颗粒的大小，对形状的检测很少涉及；不仅如此，这些仪器还存在接受角范围局限、光敏区的光均匀性较差的缺陷。为此，在专利[CN201110346535.0]中，设计了一种旋转对称椭腔镜的光学传感器，用于测量微粒的大小及形状，该传感器有效地克服了接受角范围局限性问题，对光敏区的光均匀性也有了一定改善，但由于大角散射光接收器仅采用位于三角形顶点的三个光电管，信息采集量过少，影响了检测精度、特别是形状的检测精度；此外，该设计中为改善光束均匀性而采用的光路布局结构复杂，易受运输等影响。为此，本发明的目的在于提供一种结构合理，工作效果好，且造价不高的检测微小颗粒的大小及形状的光学系统。Microparticle detection technology plays a vital role in scientific research, industrial sites, and atmospheric environment monitoring. Its detection technologies mainly include optical method, electrical method, and kinetic method. Among them, optical method is the most widely used for its wide measurement range, no contact with samples, fast, automatic and real-time. Typical instruments such as Coulter, Climet and ROYCO particle counter, domestic laser particle counter, etc. However, these instruments can only be used to measure the size of tiny particles, and the detection of the shape is rarely involved; not only that, but these instruments also have the defects of limited acceptance angle range and poor light uniformity in the photosensitive area. For this reason, in the patent [CN201110346535.0], an optical sensor with a rotationally symmetrical elliptical cavity mirror is designed to measure the size and shape of particles. The uniformity of light has also been improved to some extent, but because the large-angle scattered light receiver only uses three photocells located at the vertices of the triangle, the amount of information collected is too small, which affects the detection accuracy, especially the shape detection accuracy; in addition, in this design The optical path layout adopted to improve the uniformity of the beam has a complex structure and is easily affected by transportation. Therefore, the object of the present invention is to provide an optical system for detecting the size and shape of tiny particles with reasonable structure, good working effect and low cost.
发明内容Contents of the invention
本发明的目的在于提供一种结构合理，工作性能好的检测微小颗粒大小及形状的光学系统。The object of the present invention is to provide an optical system with reasonable structure and good working performance for detecting the size and shape of tiny particles.
本发明的技术解决方案是：Technical solution of the present invention is:
一种检测微小颗粒大小及形状的光学系统，其特征是：包括球面腔镜，球腔镜由金属制成、且内表面经抛光处理并镀有反射膜，在球腔镜的外框上固装激光器，并经一定光路布局后由光纤均匀性装置形成均匀性良好的平行光束，沿球腔镜的主轴方向入射到光敏区，入射光束与样气流汇于光敏区，即球腔镜的一物点处，前向散射光透过透镜后经第一光阑后被光电倍增管接受，原方向入射光束射入光陷阱；所述光陷阱由金属制成，且内壁涂有吸光材料，并固定在球腔镜的外框体内；除前向散射光外的散射光汇聚于球腔镜上述物点的像点，然后经一透镜后被面形CCD接受，该像点处设有用以防止杂散光进入面形CCD的第二光阑，面形CCD接收的信号经输出后放大、处理。An optical system for detecting the size and shape of tiny particles is characterized in that it includes a spherical cavity mirror, the spherical cavity mirror is made of metal, and the inner surface is polished and coated with a reflective film, fixed on the outer frame of the spherical cavity mirror The laser is installed, and after a certain optical path layout, the optical fiber uniformity device forms a parallel beam with good uniformity, which enters the photosensitive area along the main axis of the spherical cavity mirror, and the incident beam and the sample gas flow converge in the photosensitive area, that is, a part of the spherical cavity mirror At the object point, the forward scattered light passes through the lens and is received by the photomultiplier tube after passing through the first aperture, and the incident light beam in the original direction enters the light trap; the light trap is made of metal, and the inner wall is coated with light-absorbing material, and It is fixed in the outer frame of the spherical cavity mirror; the scattered light except the forward scattered light converges on the image point of the above-mentioned object point of the spherical cavity mirror, and then is accepted by the surface-shaped CCD after passing through a lens. The stray light enters the second aperture of the surface CCD, and the signal received by the surface CCD is amplified and processed after being output.
样气的进、出气通道与系统的主轴垂直，在样气进气通道外套装稀释纯净气通道，且稀释纯净气通道出口比样气进气通道出口更靠近光敏区。The inlet and outlet channels of the sample gas are perpendicular to the main axis of the system, and the diluted pure gas channel is set outside the sample gas inlet channel, and the outlet of the diluted pure gas channel is closer to the photosensitive area than the outlet of the sample gas inlet channel.
前向散射光接受探测器为光电倍增管，除前向外的散射光探测器为面形CCD，且这两种探测器分居于球腔镜主轴上。The forward scattered light receiving detector is a photomultiplier tube, and the scattered light detector except the forward scattered light is a surface CCD, and these two detectors are separated on the main axis of the spherical cavity mirror.
光纤光束均匀性装置采用圆形绕行2.5周的梯度折射率分布的光能传输光纤，并呈圆形环绕在球腔镜的外框上。The optical fiber beam uniformity device adopts a light energy transmission fiber with a gradient refractive index distribution that circles around 2.5 circles, and surrounds the outer frame of the spherical cavity mirror in a circular shape.
激光器射出的光束经第一聚焦透镜后汇聚于一光纤接口，此接口为所述光纤的入射端面，激光器、第一聚焦透镜、光纤接口固定在球腔镜的外框上；光纤的输出端与另一接口相连，发出的光束经准直透镜后形成平行光束，再经第三光阑及反射镜后使光束沿与球腔镜主轴方向入射到光敏区，所述光纤的另一接口、准直透镜也固定在球腔镜的外框上；激光器功率为50~100mW的半导体激光器。The light beam emitted by the laser converges on an optical fiber interface after passing through the first focusing lens. The other interface is connected, and the emitted beam passes through the collimating lens to form a parallel beam, and then passes through the third aperture and the reflector to make the beam enter the photosensitive area along the direction of the main axis of the spherical cavity mirror. The other interface of the optical fiber, the collimator The straight lens is also fixed on the outer frame of the spherical cavity mirror; the laser power is a semiconductor laser with a power of 50~100mW.
进、出气通道的直径为2mm。The diameter of the air inlet and outlet channels is 2mm.
本发明的工作原理是：半导体激光器射出的光束经第一透镜聚焦于一梯度折射率分布的光能传输光纤的输入端面，该光纤沿圆形环绕球腔镜行2.5周，光纤直径2mm, 环绕半径0.10m，输出端光束经准直透镜后形成平行光束，且其光束的均匀性良好，均匀光斑平顶因子可达0.82，该光束入射至球腔镜的一物点处，且入射方向为该系统的主轴方向，在该物点处与经稀释的样气流相遇，即形成光敏区。由于大大提高了光敏区光束的均匀性，因而大大减小了由于微小颗粒在光敏区位置不同的影响；由于采用了纯净气稀释法，减少了微小颗粒在光敏区重叠的可能性以及在腔内的残留，提高了微粒计数的准确性；由于采用基于前向的大空间角范围接受的设计，既保证了采集微小颗粒散射光的主要信息，又大大减小了微粒形状及空间取向的影响。前向散射光被具有良好性能的光电倍增管接受，大空间角范围的其它散射光被面形CCD接受，以光电倍增管接受信号为主、CCD接受信号总值为辅的总信号大小决定了微小颗粒的大小；面形CCD的信号则用来确定微小颗粒的形状。The working principle of the present invention is: the light beam emitted by the semiconductor laser is focused by the first lens on the input end face of a light energy transmission fiber with gradient refractive index distribution. The radius of the beam is 0.10m, and the beam at the output end forms a parallel beam after passing through the collimating lens, and the uniformity of the beam is good, and the flat top factor of the uniform spot can reach 0.82. The direction of the main axis of the system, where the object point meets the diluted sample gas flow, forms a photosensitive area. Because the uniformity of the light beam in the photosensitive area is greatly improved, the influence of the different positions of the tiny particles in the photosensitive area is greatly reduced; due to the use of the pure gas dilution method, the possibility of overlapping of tiny particles in the photosensitive area and the inside of the cavity are reduced. Residues improve the accuracy of particle counting; due to the design based on the large space angle range acceptance based on the forward direction, it not only ensures the collection of the main information of the scattered light of tiny particles, but also greatly reduces the influence of particle shape and spatial orientation. The forward scattered light is accepted by the photomultiplier tube with good performance, and other scattered light in a large spatial angle range is accepted by the surface CCD. The size of the tiny particles; the signal of the surface CCD is used to determine the shape of the tiny particles.
本发明与现有技术相比，其显著优点是：1、采用面形CCD，可以大大提高对于微小颗粒形状的检测准确性。2、采用球面腔镜，加工容易，成本低廉。3、前向散射光的光电倍增管接受以及其它散射光的面形CCD接受的组合式的微粒大小检测方法，既接受了主要信息、减小了微粒形状及空间取向的影响，同时又由于CCD较过去的光电管采集了更多的散射光信息，因此在一定程度上也提高了微粒大小测量的精度。4、采用巧妙且合理的光纤均匀化光束布局，大大提高了激光束的光束均匀性，同时构成简洁、方便实用、不受运输的影响。Compared with the prior art, the present invention has the following remarkable advantages: 1. The detection accuracy for the shape of tiny particles can be greatly improved by adopting a surface CCD. 2. Spherical cavity mirror is used, which is easy to process and low in cost. 3. The combined particle size detection method of photomultiplier tube reception of forward scattered light and surface CCD reception of other scattered light not only accepts the main information, reduces the influence of particle shape and spatial orientation, but also due to the CCD Compared with the past photocells, more scattered light information is collected, so the accuracy of particle size measurement is also improved to a certain extent. 4. The ingenious and reasonable optical fiber homogenization beam layout greatly improves the beam uniformity of the laser beam. At the same time, the structure is simple, convenient and practical, and will not be affected by transportation.
附图说明Description of drawings
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.
图1是本发明一个实施例的结构示意图。Fig. 1 is a structural schematic diagram of an embodiment of the present invention.
图2是图1中光纤均匀化光束的具体布置示意图。Fig. 2 is a schematic diagram of the specific arrangement of the optical fiber homogenizing light beam in Fig. 1 .
具体实施方式Detailed ways
一种检测微小颗粒大小及形状的光学系统，包括球面腔镜20，球腔镜由金属制成、且内表面经抛光处理并镀有反射膜，在球腔镜的外框上固装激光器，并经一定光路布局后由光纤均匀性装置形成均匀性良好的平行光束，沿球腔镜的主轴方向入射到光敏区，入射光束与样气流汇于光敏区，即球腔镜的一物点处，前向散射光透过透镜12后经第一光阑10后被光电倍增管11接受，原方向入射光束经反射镜9射入光陷阱13；所述光陷阱由金属制成，且内壁涂有吸光材料，并固定在球腔镜的外框体内；除前向散射光外的散射光汇聚于球腔镜上述物点的像点，然后经一透镜18后被面形CCD接受，该像点处设有用以防止杂散光进入面形CCD19的第二光阑17，面形CCD接收的信号经输出后放大、处理。An optical system for detecting the size and shape of tiny particles, including a spherical cavity mirror 20, the spherical cavity mirror is made of metal, and the inner surface is polished and coated with a reflective film, and a laser is fixed on the outer frame of the spherical cavity mirror, And after a certain optical path layout, the optical fiber uniformity device forms a parallel beam with good uniformity, which is incident on the photosensitive area along the main axis of the spherical cavity mirror, and the incident beam and sample gas flow converge in the photosensitive area, that is, an object point of the spherical cavity mirror , the forward scattered light passes through the lens 12 and is received by the photomultiplier tube 11 after passing through the first diaphragm 10, and the incident light beam in the original direction enters the light trap 13 through the reflector 9; the light trap is made of metal, and the inner wall is coated There is a light-absorbing material, and it is fixed in the outer frame of the spherical cavity mirror; the scattered light except the forward scattered light converges on the image point of the above-mentioned object point of the spherical cavity mirror, and then is accepted by the surface-shaped CCD after passing through a lens 18, the image A second aperture 17 is provided at the point to prevent stray light from entering the surface CCD 19, and the signal received by the surface CCD is amplified and processed after being output.
样气的进、出气通道14、16与系统的主轴垂直，在样气进气通道外套装稀释纯净气通道15，且稀释纯净气通道出口比样气进气通道出口更靠近光敏区。The inlet and outlet channels 14 and 16 of the sample gas are perpendicular to the main axis of the system, and the diluted pure gas channel 15 is placed outside the sample gas inlet channel, and the outlet of the diluted pure gas channel is closer to the photosensitive area than the outlet of the sample gas inlet channel.
前向散射光接受探测器为光电倍增管，除前向外的散射光探测器为面形CCD，且这两种探测器分居于球腔镜主轴上。The forward scattered light receiving detector is a photomultiplier tube, and the scattered light detector except the forward scattered light is a surface CCD, and these two detectors are separated on the main axis of the spherical cavity mirror.
光纤光束均匀性装置采用圆形绕行2.5周的梯度折射率分布的光能传输光纤，并呈圆形环绕在球腔镜的外框上。The optical fiber beam uniformity device adopts a light energy transmission fiber with a gradient refractive index distribution that circles around 2.5 circles, and surrounds the outer frame of the spherical cavity mirror in a circular shape.
激光器1射出的光束经第一聚焦透镜2后汇聚于一光纤接口3，此接口为所述光纤的入射端面，激光器、第一聚焦透镜、光纤接口固定在球腔镜的外框上；光纤的输出端与另一接口4相连，发出的光束经准直透镜5后形成平行光束，再经第三光阑6及反射镜7、8后使光束沿与球腔镜主轴方向入射到光敏区，所述光纤的另一接口、准直透镜也固定在球腔镜的外框上；激光器功率为50~100mW的半导体激光器。The light beam emitted by the laser 1 converges on an optical fiber interface 3 after passing through the first focusing lens 2. This interface is the incident end face of the optical fiber. The laser, the first focusing lens, and the optical fiber interface are fixed on the outer frame of the spherical cavity mirror; The output end is connected with another interface 4, and the emitted light beam passes through the collimator lens 5 to form a parallel light beam, and then passes through the third diaphragm 6 and mirrors 7 and 8 to make the light beam incident on the photosensitive area along the direction of the main axis of the spherical cavity mirror, The other interface of the optical fiber and the collimating lens are also fixed on the outer frame of the spherical cavity mirror; the laser power is a semiconductor laser of 50-100mW.
进、出气通道的直径为2mm。The diameter of the air inlet and outlet channels is 2mm.
本发明的工作原理是：半导体激光器射出的光束经第一透镜聚焦于一梯度折射率分布的光能传输光纤的输入端面，该光纤沿圆形环绕球腔镜行2.5周，光纤直径2mm, 环绕半径0.10m，输出端光束经准直透镜后形成平行光束，且其光束的均匀性良好，均匀光斑平顶因子可达0.82，该光束入射至球腔镜的一物点处，且入射方向为该系统的主轴方向，在该物点处与经稀释的样气流相遇，即形成光敏区。由于大大提高了光敏区光束的均匀性，因而大大减小了由于微小颗粒在光敏区位置不同的影响；由于采用了纯净气稀释法，减少了微小颗粒在光敏区重叠的可能性以及在腔内的残留，提高了微粒计数的准确性；由于采用基于前向的大空间角范围接受的设计，既保证了采集微小颗粒散射光的主要信息，又大大减小了微粒形状及空间取向的影响。前向散射光被具有良好性能的光电倍增管接受，大空间角范围的其它散射光被面形CCD接受，以光电倍增管接受信号为主、CCD接受信号总值为辅的总信号大小决定了微小颗粒的大小；面形CCD的信号则用来确定微小颗粒的形状。The working principle of the present invention is: the light beam emitted by the semiconductor laser is focused by the first lens on the input end face of a light energy transmission fiber with gradient refractive index distribution. The radius of the beam is 0.10m, and the beam at the output end forms a parallel beam after passing through the collimating lens, and the uniformity of the beam is good, and the flat top factor of the uniform spot can reach 0.82. The direction of the main axis of the system, where the object point meets the diluted sample gas flow, forms a photosensitive area. Because the uniformity of the light beam in the photosensitive area is greatly improved, the influence of the different positions of the tiny particles in the photosensitive area is greatly reduced; due to the use of the pure gas dilution method, the possibility of overlapping of tiny particles in the photosensitive area and the inside of the cavity are reduced. Residues improve the accuracy of particle counting; due to the design based on the large space angle range acceptance based on the forward direction, it not only ensures the collection of the main information of the scattered light of tiny particles, but also greatly reduces the influence of particle shape and spatial orientation. The forward scattered light is accepted by the photomultiplier tube with good performance, and other scattered light in a large spatial angle range is accepted by the surface CCD. The size of the tiny particles; the signal of the surface CCD is used to determine the shape of the tiny particles.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410717918.8ACN104390896B (en) | 2013-07-22 | 2013-07-22 | Measurement precision improved optical system for detecting size and shape of microparticle |
| CN201410717954.4ACN104390897B (en) | 2013-07-22 | 2013-07-22 | Improve detection molecule size and the optical system of shape of beam uniformity |
| CN201310306923.5ACN103364317B (en) | 2013-07-22 | 2013-07-22 | Optical system for detecting size and shape of micro-particles |
| Application Number | Priority Date | Filing Date | Title |
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| CN201310306923.5ACN103364317B (en) | 2013-07-22 | 2013-07-22 | Optical system for detecting size and shape of micro-particles |
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| CN201410717954.4ADivisionCN104390897B (en) | 2013-07-22 | 2013-07-22 | Improve detection molecule size and the optical system of shape of beam uniformity |
| CN201410717918.8ADivisionCN104390896B (en) | 2013-07-22 | 2013-07-22 | Measurement precision improved optical system for detecting size and shape of microparticle |
| Publication Number | Publication Date |
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| CN103364317A CN103364317A (en) | 2013-10-23 |
| CN103364317Btrue CN103364317B (en) | 2015-06-10 |
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| CN201310306923.5AExpired - Fee RelatedCN103364317B (en) | 2013-07-22 | 2013-07-22 | Optical system for detecting size and shape of micro-particles |
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