技术领域technical field
本发明涉及光学领域，特别涉及一种超灵敏光谱仪以及光谱检测方法。The invention relates to the field of optics, in particular to an ultrasensitive spectrometer and a spectrum detection method.
背景技术Background technique
大量的生命科学、材料科学、化学、能源科学的研究必不可少地需要了解研究对象中所包含的成份在不同波长下的光强分布，光谱分析是获得成份分析最有效的无损分析手段之一。传统光谱仪需将一维光谱以辅助扫描的方式来实现，带来的弊端是采样时间必须给扫描留出充分的空间，不仅如此，必须采用线或面元探测器进行探测。因而存在两大棘手问题：维度问题和灵敏度问题。A large number of life sciences, material sciences, chemistry, and energy sciences are essential to understand the light intensity distribution of the components contained in the research object at different wavelengths. Spectral analysis is one of the most effective non-destructive analysis methods for component analysis. . The traditional spectrometer needs to realize the one-dimensional spectrum by means of auxiliary scanning. The disadvantage is that the sampling time must leave sufficient space for the scanning. Not only that, it must be detected by a line or surface element detector. Thus, there are two thorny problems: the dimensionality problem and the sensitivity problem.
根据光谱仪所采用的分解光谱的原理，可以将其分成两大类：经典光谱仪和新型光谱仪。经典光谱仪是建立在空间色散（分光）原理上的仪器；新型光谱仪是建立在调制原理上的仪器，故又称为调制光谱仪。经典光谱仪依据其色散原理可将仪器分为：棱镜光谱仪、衍射光栅光谱仪和干涉光谱仪。其中，传统光栅扫描光谱仪的入射光线和出射光线的方向是固定的，在光栅转动下进行分光。而干涉光谱仪的原理是：当其动镜移动时，经过干涉仪的两束相干光间的光程差就改变，探测器所测得的光强也随之变化，从而得到干涉图，经过傅里叶变换的数学运算后，就可得到入射光的光谱。经典光谱仪本质上都是通过光栅扫描或动镜移动来提高光谱仪分辨率，但提高幅度有限。According to the principle of decomposing spectra adopted by spectrometers, they can be divided into two categories: classic spectrometers and new spectrometers. The classical spectrometer is an instrument based on the principle of spatial dispersion (spectroscopy); the new spectrometer is an instrument based on the modulation principle, so it is also called a modulation spectrometer. According to its dispersion principle, classical spectrometers can be divided into: prism spectrometer, diffraction grating spectrometer and interference spectrometer. Among them, the directions of the incident light and the outgoing light of the traditional grating scanning spectrometer are fixed, and the light is split under the rotation of the grating. The principle of the interference spectrometer is: when the moving mirror moves, the optical path difference between the two beams of coherent light passing through the interferometer changes, and the light intensity measured by the detector also changes accordingly, so as to obtain the interferogram. After the mathematical operation of Liye transform, the spectrum of the incident light can be obtained. Classical spectrometers essentially increase the resolution of the spectrometer by raster scanning or moving mirror movement, but the improvement is limited.
传统光谱仪的波长相应范围也受限于灵敏度和光路，可正常工作的波段十分有限，通常光谱范围很窄，如紫外光谱仪185～400nm，可见光光谱仪380～780nm，近红外光谱仪780～2500nm等，尚无能涵盖超宽光谱的光谱仪问世。The corresponding wavelength range of traditional spectrometers is also limited by the sensitivity and optical path, and the normal working band is very limited. Usually, the spectral range is very narrow, such as 185-400nm for ultraviolet spectrometers, 380-780nm for visible light spectrometers, 780-2500nm for near-infrared spectrometers, etc. A spectrometer capable of covering an ultra-broad spectrum is introduced.
由于绝大多数光谱仪仍采用线阵或面阵探测器，如CCD、ICCD、EMCCD等，通常利用多通道的测量来使信噪比提高。而对极弱光进行探测时需要曝光一定时间，也称积分时间，平均到单位像素上的光通量很小，极难准确测量落在该像元上的光强值。而最小积分时间直接决定了该线阵或面阵探测器能测量多少强度的光信号，归结起来，是灵敏度的问题。这个指标是衡量光学系统收集光的能力的关键指标。该指标在计算上类似于亮度的指标，其实真正限制光谱仪的物理量是亮度，而不是通量。分辨率乘以灵敏度是衡量光谱仪性能指标的关键指标。分辨率也称光谱带宽，通过它能够定性、定量地分析待测物体的光谱强度信息。而灵敏度与外光路和电路部分有关：在光路上，受光学元件收集效率和杂散光的影响，可在光谱带垂直方向增加像元，提供更高的有效测量高度，进而在垂直方向上收集更多的光信号，它们累加起来可以大大提高对光信号的收集效率；而在电路方面，只能依靠探测器灵敏度的提升，目前ICCD、EMCCD都号称可以做到单光子探测，但需深度半导体制冷，成本昂贵，ICCD具有纳秒级的门宽，可实现高时间分辨，但空间分辨率有明显损失，而EMCCD空间分辨率较好，但只能实现毫秒级时间分辨，两者共同问题都是弱光下对仪器噪声的控制以及线性输出。总之，现有的光谱仪在灵敏度上存在不足，特别是对于灵敏度有特定要求的应用场合。Since most spectrometers still use linear array or area array detectors, such as CCD, ICCD, EMCCD, etc., multi-channel measurement is usually used to improve the signal-to-noise ratio. When detecting extremely weak light, a certain exposure time is required, also known as integration time. The average luminous flux on a unit pixel is very small, and it is extremely difficult to accurately measure the light intensity value falling on the pixel. The minimum integration time directly determines how much intensity of the optical signal the linear array or area array detector can measure. In conclusion, it is a matter of sensitivity. This metric is a key indicator of the ability of an optical system to collect light. This index is similar to the brightness index in calculation, but in fact, the physical quantity that really limits the spectrometer is the brightness, not the flux. Resolution times sensitivity is a key measure of spectrometer performance. Resolution is also called spectral bandwidth, through which the spectral intensity information of the object to be measured can be qualitatively and quantitatively analyzed. The sensitivity is related to the external optical path and the circuit part: on the optical path, affected by the collection efficiency of optical elements and stray light, pixels can be added in the vertical direction of the spectral band to provide a higher effective measurement height, and then collect more in the vertical direction. If there are many optical signals, their accumulation can greatly improve the collection efficiency of optical signals; and in terms of circuits, it can only rely on the improvement of detector sensitivity. At present, ICCD and EMCCD are claimed to be able to achieve single-photon detection, but deep semiconductor cooling is required. , the cost is expensive, ICCD has nanosecond-level gate width, can achieve high time resolution, but the spatial resolution has obvious loss, and EMCCD has better spatial resolution, but can only achieve millisecond-level time resolution, the common problem of both is Control of instrument noise and linear output in low light. In short, the existing spectrometers have insufficient sensitivity, especially for applications with specific requirements for sensitivity.
发明内容Contents of the invention
本发明的目的在于克服现有技术中的光谱仪在灵敏度上的不足，从而提供一种超灵敏光谱仪。The purpose of the present invention is to overcome the deficiency in the sensitivity of the spectrometer in the prior art, thereby providing an ultra-sensitive spectrometer.
为了实现上述目的，本发明提供了一种超灵敏光谱仪，包括光学单元I和电学单元II；其中，光学单元I包括入射狭缝1、光准直部件2、凹面镜3、光栅分光部件4、空间光调制器5、会聚收光部件6；所述凹面镜3包括第一凹面镜3-1，第二凹面镜3-2；电学单元II包括随机数发生器9、单光子点探测器10、计数器11、控制模块12、数据包存储器13以及压缩感知模块14；In order to achieve the above object, the present invention provides a kind of ultra-sensitive spectrometer, including optical unit I and electrical unit II; Spatial light modulator 5, converging light-receiving component 6; said concave mirror 3 includes a first concave mirror 3-1, a second concave mirror 3-2; electrical unit II includes a random number generator 9, a single photon point detector 10 , counter 11, control module 12, data packet memory 13 and compressed sensing module 14;
单光子级别的待测极弱光经由所述入射狭缝1入射，然后通过所述光准直部件2和第一凹面镜3-1对待测极弱光做扩束和准直，使所述待测极弱光成为平行光；所述平行光照射到所述光栅分光部件4生成光栅反射光场，再经过所述第二凹面镜3-2反射，进而在所述空间光调制器5上展开形成光谱带；所述空间光调制器5对所形成的光谱带进行随机调制，使得其出射光以一定的随机概率向会聚收光部件6发射；所述会聚收光部件6滤除杂散光，将过滤后的待测极弱光传输到所述电学单元II中的单光子点探测器10；The extremely weak light to be measured at the single photon level enters through the incident slit 1, and then expands and collimates the extremely weak light to be measured through the light collimating component 2 and the first concave mirror 3-1, so that the The extremely weak light to be measured becomes parallel light; the parallel light irradiates the grating light splitting component 4 to generate a grating reflection light field, which is then reflected by the second concave mirror 3-2, and then on the spatial light modulator 5 Expand to form a spectral band; the spatial light modulator 5 randomly modulates the formed spectral band, so that its outgoing light is emitted to the converging light-receiving component 6 with a certain random probability; the converging light-receiving component 6 filters out stray light , transmitting the filtered extremely weak light to be measured to the single-photon point detector 10 in the electrical unit II;
所述随机数发生器9产生随机数并提供给所述空间光调制器5，所述空间光调制器5根据该随机数实现随机调制；所述单光子点探测器10探测待测极弱光中的各个单光子点，将采集到的光信号转换成有效脉冲信号后输出；所述计数器11记录所述单光子点探测器10探测到的单光子点的数目；所述控制模块12对整个超灵敏光谱仪进行控制协调，包括对各部件的使能和触发脉冲控制，确保所述计数器11和空间光调制器5之间步调一致；所述计数器11所记录的单光子点的数目和随机数发生器9生成的随机基一起打包存入所述数据包存储器13中，所述压缩感知模块14根据所述单光子点的数目以及随机基实现光谱带信号重建，得到光谱强度曲线。The random number generator 9 generates a random number and provides it to the spatial light modulator 5, and the spatial light modulator 5 realizes random modulation according to the random number; the single photon point detector 10 detects the extremely weak light to be measured Each single-photon point in, converts the collected optical signal into an effective pulse signal and outputs it; the counter 11 records the number of single-photon points detected by the single-photon point detector 10; the control module 12 controls the entire The ultra-sensitive spectrometer performs control coordination, including enabling and triggering pulse control of each component, ensuring that the counter 11 and the spatial light modulator 5 are in step; the number and random number of single photon points recorded by the counter 11 The random basis generated by the generator 9 is packaged and stored in the data packet memory 13 together, and the compressed sensing module 14 implements spectral band signal reconstruction according to the number of single photon points and the random basis to obtain a spectral intensity curve.
上述技术方案中，所述光学单元I还包括反射镜7以及出射狭缝8；所述反射镜7位于所述第二凹面镜3-2与空间光调制器5的光路之间，用于将光谱反射至出射狭缝8，以供其它类型探测器接收或进入其它光学系统进行测量研究。In the above technical solution, the optical unit 1 further includes a reflector 7 and an exit slit 8; the reflector 7 is located between the second concave mirror 3-2 and the optical path of the spatial light modulator 5, for The spectrum is reflected to the exit slit 8 for receiving by other types of detectors or entering into other optical systems for measurement and research.
上述技术方案中，所述光栅分光部件4将不同波长的光场按波长从短到长依次投射到所述空间光调制器5的不同位置上。In the above technical solution, the grating light splitting component 4 projects light fields of different wavelengths to different positions of the spatial light modulator 5 sequentially from short to long wavelengths.
上述技术方案中，所述空间光调制器5采用数字微镜器件实现。In the above technical solution, the spatial light modulator 5 is realized by a digital micromirror device.
上述技术方案中，将所述数字微镜器件的对角线作为所述光谱带的成像位置。In the above technical solution, the diagonal line of the digital micromirror device is used as the imaging position of the spectral band.
上述技术方案中，所述会聚收光部件6包括滤光片和衰减片。In the above technical solution, the light converging component 6 includes a filter and an attenuator.
上述技术方案中，所述单光子点探测器10采用盖革模式雪崩二极管或光电倍增管实现。In the above technical solution, the single photon point detector 10 is realized by using a Geiger mode avalanche diode or a photomultiplier tube.
上述技术方案中，所述控制模块12确保所述计数器11和空间光调制器5之间步调一致包括：所述空间光调制器5中的微镜阵列每翻转一次，所述计数器11累积计数在该翻转时间间隔内检测到的所有光子，翻转完成后，计数器11清零。In the above technical solution, the control module 12 ensures that the counter 11 and the spatial light modulator 5 are in step with each other, including: every time the micromirror array in the spatial light modulator 5 flips once, the counter 11 accumulates counts at For all photons detected within the inversion time interval, after the inversion is completed, the counter 11 is cleared.
上述技术方案中，所述压缩感知模块14采用下列算法中的任意一种实现压缩感知：贪心重建算法、匹配跟踪算法MP、正交匹配跟踪算法OMP、基跟踪算法BP、LASSO、LARS、GPSR、贝叶斯估计算法、magic、IST、TV、StOMP、CoSaMP、LBI、SP、l1_ls、smp算法、SpaRSA算法、TwIST算法、l0重建算法、l1重建算法、l2重建算法。In the above technical solution, the compressed sensing module 14 adopts any one of the following algorithms to realize compressed sensing: greedy reconstruction algorithm, matching tracking algorithm MP, orthogonal matching tracking algorithm OMP, base tracking algorithm BP, LASSO, LARS, GPSR, Bayesian estimation algorithm, magic, IST, TV, StOMP, CoSaMP, LBI, SP, l1_ls, smp algorithm, SpaRSA algorithm, TwIST algorithm, l0 reconstruction algorithm, l1 reconstruction algorithm, l2 reconstruction algorithm.
本发明还提供了一种基于所述的超灵敏光谱仪所实现的光谱检测方法，包括：The present invention also provides a spectral detection method based on the ultrasensitive spectrometer, comprising:
步骤1）、单光子入射的步骤；Step 1), the step of single photon incident;
单光子级别的待测极弱光经由所述入射狭缝1入射，然后通过所述光准直部件2和第一凹面镜3-1对待测极弱光做扩束和准直，使所述待测极弱光成为平行光；所述平行光照射到所述光栅分光部件4生成光栅反射光场，再经过所述第二凹面镜3-2反射，进而在所述空间光调制器5上展开形成光谱带；所述空间光调制器5对所形成的光谱带进行随机调制，使得其出射光以一定的随机概率向会聚收光部件6发射；所述会聚收光部件6滤除杂散光，将过滤后的待测极弱光传输到所述电学单元II中的单光子点探测器10；The extremely weak light to be measured at the single photon level enters through the incident slit 1, and then expands and collimates the extremely weak light to be measured through the light collimating component 2 and the first concave mirror 3-1, so that the The extremely weak light to be measured becomes parallel light; the parallel light irradiates the grating light splitting component 4 to generate a grating reflection light field, which is then reflected by the second concave mirror 3-2, and then on the spatial light modulator 5 Expand to form a spectral band; the spatial light modulator 5 randomly modulates the formed spectral band, so that its outgoing light is emitted to the converging light-receiving component 6 with a certain random probability; the converging light-receiving component 6 filters out stray light , transmitting the filtered extremely weak light to be measured to the single-photon point detector 10 in the electrical unit II;
步骤2）、检测单光子并计数的步骤；Step 2), the step of detecting and counting single photons;
所述单光子点探测器10探测待测极弱光中的各个单光子点，将采集到的光信号转换成有效脉冲信号后输出；所述计数器11记录所述单光子点探测器10探测到的单光子点的数目；The single photon point detector 10 detects each single photon point in the extremely weak light to be measured, and converts the collected light signal into an effective pulse signal and then outputs it; the counter 11 records the The number of single-photon points of ;
步骤3）、压缩感知的步骤；Step 3), steps of compressed sensing;
所述计数器11所记录的单光子点的数目和随机数发生器9生成的随机基一起打包存入所述数据包存储器13中，所述压缩感知模块14根据所述单光子点的数目以及随机基实现光谱带信号重建，得到光谱强度曲线。The number of single-photon points recorded by the counter 11 and the random base generated by the random number generator 9 are packaged and stored in the data packet memory 13 together, and the compressed sensing module 14 is based on the number of the single-photon points and the random base. Based on the reconstruction of the spectral band signal, the spectral intensity curve is obtained.
上述技术方案中，在步骤1）之前还包括对所述空间光调制器5对角线方向上的每个像元所对应的波长进行标定的步骤，包括：In the above technical solution, the step of calibrating the wavelength corresponding to each pixel in the diagonal direction of the spatial light modulator 5 is also included before step 1), including:
选定几个特定波长的激光器，每次单色光经所述光栅分光部件4后投射到所述空间光调制器5对角线上的特定某点，标识该点对应该特定波长，反复多次得到许多测量点，相邻两个点之间的光谱分布做线性划分，从而完成对整个对角线上的每个像元所对应波长的标定。Select lasers with several specific wavelengths, each time monochromatic light is projected onto a specific point on the diagonal of the spatial light modulator 5 after passing through the grating light splitting part 4, mark the point corresponding to the specific wavelength, and repeat for many times Many measurement points are obtained at one time, and the spectral distribution between two adjacent points is linearly divided, so as to complete the calibration of the wavelength corresponding to each pixel on the entire diagonal.
上述技术方案中，在步骤1）之前还包括提高仪器信噪比的步骤。In the above technical solution, the step of improving the signal-to-noise ratio of the instrument is also included before step 1).
本发明的优点在于：The advantages of the present invention are:
本发明采用了数学研究的最新成果—压缩感知（Compressive Sensing，简称CS）理论，结合现代成熟单光子探测技术条件，无需线阵或阵列探测器，也无需扫描，仅以一个单光子点探测器实现光谱带分布的采样，并以少量测量规模重建光谱带强度信息，毫无疑问，这种方法具有超灵敏度，节约了维度，且较线阵或阵列探测器节约成本，可以有效地维度、灵敏度等问题，与传统的光谱仪存在本质上的差异。该超灵敏光谱仪优势明显，是国际上唯一能同时具备单光子探测灵敏度、超宽连续光谱、以点探测器实现光谱带重建、无需扫描、无需长时间曝光（积分时间）、高通量、高信噪比、高分辨率、高稳定性、超低测量规模等特点的最先进光谱分析仪器，是开展材料学、物理，化学、生命学等相关基础前沿领域研究必备的定量定性分析工具，可广泛应用于单分子生物物理学、材料缺陷检测、纳米材料、微电子、量子点、生命科学以及新能源光电转换材料等众多新兴高科技产业领域。The present invention adopts the latest achievement of mathematical research - Compressive Sensing (CS) theory, combined with modern mature single-photon detection technology conditions, no linear array or array detector, no scanning, only a single-photon point detector Realize the sampling of spectral band distribution, and reconstruct the spectral band intensity information with a small measurement scale. There is no doubt that this method has super sensitivity, saves dimensions, and saves cost compared with linear array or array detectors. It can effectively improve the dimensionality, sensitivity And other issues, there are essential differences with traditional spectrometers. The ultra-sensitive spectrometer has obvious advantages. It is the only one in the world that can simultaneously have single-photon detection sensitivity, ultra-wide continuous spectrum, spectral band reconstruction with point detectors, no scanning, no long exposure (integration time), high throughput, high The most advanced spectral analysis instrument featuring signal-to-noise ratio, high resolution, high stability, ultra-low measurement scale, etc., is an essential quantitative and qualitative analysis tool for research in related basic frontier fields such as materials science, physics, chemistry, and life sciences. It can be widely used in many emerging high-tech industries such as single-molecule biophysics, material defect detection, nanomaterials, microelectronics, quantum dots, life sciences, and new energy photoelectric conversion materials.
附图说明Description of drawings
图1是本发明的超灵敏度的光谱仪的结构示意图；Fig. 1 is the structural representation of the ultrasensitive spectrometer of the present invention;
图2是光谱强度曲线的示意图；Fig. 2 is the schematic diagram of spectral intensity curve;
图3是DMD中的单个微镜的反射机制的描述图。FIG. 3 is a diagram illustrating the reflection mechanism of a single micromirror in a DMD.
具体实施方式Detailed ways
现结合附图对本发明作进一步的描述。The present invention will be further described now in conjunction with accompanying drawing.
本发明的具有超灵敏度的光谱仪利用了压缩感知（Compressive Sensing，简称CS）原理，所述的压缩感知原理是由Donoho、Tao和Candès等人提出的一个全新数学理论，按照该理论能够以随机采样的方式、通过更少的数据采样数（远低于奈奎斯特/香农采样定理的极限）来完美地恢复原始信号，且具有更高的鲁棒性。压缩感知主要分为三步骤：压缩采样、稀疏变换与算法重建；其中，压缩采样，是指被测信号由高维向低维映射与采集的过程；所述的稀疏变换是选取合适的因子Ψ，使得x经Ψ变化所得值x’是稀疏的，即x在Ψ框架下可稀疏表达；所述的算法重建是在已知观测数据y、测量矩阵A和框架Ψ的条件下求解y＝AΨx'+e的过程，最后再由
参考图1，本发明的基于压缩感知原理的具有超灵敏度的光谱仪包括：光学单元I（图1中矩形虚线框内部分）和电学单元II；其中，光学单元I包括入射狭缝1、光准直部件2、凹面镜3、光栅分光部件4、空间光调制器5、会聚收光部件6、反射镜7以及出射狭缝8；所述凹面镜3有两个，分别用第一凹面镜3-1，第二凹面镜3-2表示。电学单元II包括随机数发生器9、单光子点探测器10、计数器11、控制模块12、数据包存储器13以及压缩感知模块14。With reference to Fig. 1, the spectrometer with ultra-sensitivity based on the compressed sensing principle of the present invention includes: optical unit I (the part inside the rectangular dotted line frame in Fig. 1) and electrical unit II; Straight component 2, concave mirror 3, grating light splitting component 4, spatial light modulator 5, converging and light-receiving component 6, reflector 7 and exit slit 8; there are two concave mirrors 3, respectively with the first concave mirror 3 -1, indicated by the second concave mirror 3-2. The electrical unit II includes a random number generator 9 , a single photon point detector 10 , a counter 11 , a control module 12 , a data packet memory 13 and a compressed sensing module 14 .
在光学单元I中，单光子级别的待测极弱光通过入射狭缝1进入超灵敏光谱仪，然后通过光准直部件2和第一凹面镜3-1对待测极弱光做扩束和准直，使所述待测极弱光成为平行光；所述平行光照射到光栅分光部件4，并应当尽可能覆盖整个光栅面；光栅分光部件4所生成的光栅反射光场再经过第二凹面镜3-2反射，进而在空间光调制器5上展开形成光谱带，使不同波长的光在焦平面上实现空间分离；空间光调制器5对所形成的光谱带进行随机调制，使得其出射光以一定的随机概率向会聚收光部件6发射；所述会聚收光部件6用于滤除杂散光，将过滤后的待测极弱光传输到电学单元II中的单光子点探测器10；所述反射镜7位于第二凹面镜3-2与空间光调制器5的光路之间，用于将光谱反射至出射狭缝8，以供其它类型探测器接收或进入其它光学系统进行测量研究。In the optical unit I, the extremely weak light to be measured at the single-photon level enters the ultra-sensitive spectrometer through the incident slit 1, and then expands and collimates the extremely weak light to be measured through the light collimation component 2 and the first concave mirror 3-1. Straight, so that the extremely weak light to be measured becomes parallel light; the parallel light is irradiated to the grating light splitting part 4, and should cover the entire grating surface as much as possible; the grating reflection light field generated by the grating light splitting part 4 passes through the second concave surface Reflected by the mirror 3-2, and then unfolded on the spatial light modulator 5 to form a spectral band, so that the light of different wavelengths can be spatially separated on the focal plane; the spatial light modulator 5 randomly modulates the formed spectral band, so that its output The emitted light is emitted to the converging light-receiving component 6 with a certain random probability; the converging light-receiving component 6 is used to filter out stray light, and transmit the filtered extremely weak light to be measured to the single-photon point detector 10 in the electrical unit II The reflector 7 is located between the second concave mirror 3-2 and the optical path of the spatial light modulator 5, and is used to reflect the spectrum to the exit slit 8 for receiving by other types of detectors or entering into other optical systems for measurement Research.
在电学单元II中，随机数发生器9用于生成随机数，所产生的随机数提供给空间光调制器5，所述空间光调制器5根据该随机数实现随机调制；所述的单光子点探测器10用于探测待测极弱光中的各个单光子点，将采集到的光信号转换成有效脉冲信号后输出；所述计数器11用于记录单光子点探测器10探测到的单光子点的数目；所述控制模块12用于对整个超灵敏光谱仪进行控制协调，包括对各部件的使能和触发脉冲控制，确保计数器11和空间光调制器（SLM）5之间步调一致；计数器11所记录的单光子点的数目和随机数发生器9生成的随机基一一对应，一起打包存入数据包存储器13中，最后导入压缩感知模块14中，在该模块中实现光谱带信号重建，最后输出光谱强度曲线（λ，I）。In the electrical unit II, the random number generator 9 is used to generate random numbers, and the generated random numbers are provided to the spatial light modulator 5, and the spatial light modulator 5 realizes random modulation according to the random numbers; the single photon The point detector 10 is used to detect each single photon point in the extremely weak light to be measured, and converts the collected light signal into an effective pulse signal and outputs it; the counter 11 is used to record the single photon point detected by the single photon point detector 10. The number of photon points; the control module 12 is used to control and coordinate the entire ultra-sensitive spectrometer, including enabling and triggering pulse control of each component, to ensure that the counter 11 and the spatial light modulator (SLM) 5 are in step; The number of single photon points recorded by the counter 11 corresponds to the random base generated by the random number generator 9 one by one, and is packaged together and stored in the data packet memory 13, and finally imported into the compressed sensing module 14, in which the spectral band signal is realized. Reconstruct and finally output the spectral intensity curve (λ, I).
以上是对本发明的光谱仪的总体结构的描述，下面对光谱仪中各个部件的具体实现做进一步的描述。The above is the description of the overall structure of the spectrometer of the present invention, and the specific implementation of each component in the spectrometer will be further described below.
狭缝是由一对隔板在光通路上形成的缝隙，入射狭缝1用于调节入射光的纯度和强度，形成光谱仪的物点，出射狭缝8用于出光。The slit is formed by a pair of partitions on the light path. The incident slit 1 is used to adjust the purity and intensity of the incident light to form the object point of the spectrometer, and the exit slit 8 is used to output light.
所述光栅分光部件4用于光谱分光，该部件采用色散式分光的工作方式，光栅分光部件4中的色散元件（棱镜或光栅）将不同波长的光场按波长从短到长依次投射到空间光调制器（SLM）5的不同位置上，无需进行扫描，各光谱波段同时获得。该分光方式中，光谱分辨率的高低与到达色散元件（棱镜或光栅）的入射光的准直度成正比，准直性越好光谱分辨率越高。在本实施例中，所述光栅分光部件4采用闪耀光栅实现。The grating light-splitting part 4 is used for spectral light-splitting. This part adopts the working mode of dispersion type light-splitting. The dispersion element (prism or grating) in the grating light-splitting part 4 projects the light fields of different wavelengths into the space according to the wavelength from short to long. At different positions of the light modulator (SLM) 5, there is no need to scan, and all spectral bands are obtained simultaneously. In this spectroscopic method, the spectral resolution is proportional to the collimation of the incident light reaching the dispersive element (prism or grating), and the better the collimation, the higher the spectral resolution. In this embodiment, the grating light splitting component 4 is realized by using a blazed grating.
所述空间光调制器（SLM）5能将信息加载于一维或两维的光学数据场上，是实时光学信息处理、自适应光学和光计算等现代光学领域的关键器件，这类器件可在随时间变化的电驱动信号或其他信号的控制下，改变空间上光分布的振幅或强度、相位、偏振态以及波长，或者把非相干光转化成相干光。其种类有很多种，主要有数字微镜器件（Digital Micro-mirror Device，简称DMD）、毛玻璃、液晶光阀等。在本实施例中，所述SLM为数字微镜器件，包括微镜阵列和集成电路部分。在其他实施例中，也可以是其它类型的SLM。The spatial light modulator (SLM) 5 can load information on a one-dimensional or two-dimensional optical data field, and is a key device in modern optical fields such as real-time optical information processing, adaptive optics and optical computing. Such devices can be used in Under the control of time-varying electrical drive signals or other signals, the amplitude or intensity, phase, polarization state, and wavelength of light distribution in space are changed, or incoherent light is converted into coherent light. There are many types, mainly digital micro-mirror device (Digital Micro-mirror Device, referred to as DMD), frosted glass, liquid crystal light valve and so on. In this embodiment, the SLM is a digital micromirror device, including a micromirror array and an integrated circuit. In other embodiments, other types of SLMs are possible.
本实施例中所采用的DMD是包含有成千上万个安装在铰链上的微镜的阵列（主流的DMD由1024×768的阵列构成，最大可至2048×1152），每一镜片的尺寸为14μm×14μm（或16μm×16μm）并可以通断一个像素的光，这些微镜皆悬浮着，通过对每一个镜片下的存储单元都以二进制平面信号进行电子化寻址，便可让每个镜片以静电方式向两侧倾斜10～12°左右（本实施例中取+12°和-12°），把这两种状态记为1和0，分别对应“开”和“关”，当镜片不工作时，它们处于0°的“停泊”状态。The DMD used in this embodiment is an array containing tens of thousands of micromirrors mounted on hinges (mainstream DMDs are composed of 1024×768 arrays, up to 2048×1152), and the size of each lens It is 14μm×14μm (or 16μm×16μm) and can turn on and off the light of a pixel. These micromirrors are all suspended. A lens is electrostatically tilted to both sides by about 10-12° (in this embodiment, +12° and -12° are taken), and these two states are recorded as 1 and 0, corresponding to "on" and "off", respectively. When the lenses are not operating, they are in a "parked" state of 0°.
在图3中，对DMD中的单个微镜的反射机制做了描述。图中的细实线表示单个微镜初始位置时的基线和法线，取顺时针旋转为正，逆时针为负。当入射光线与该初始法线成24°时，反射光线也与初始法线成24°，但当微镜翻转+12°时，该图例中微镜的法线随之顺时针旋转+12°，根据反射定律，反射光线则需顺时针旋转+24°，即与初始法线在同一直线上，可设置该初始法线方向为单光子点探测器10的接收方向。同理，当微镜翻转-12°时，这时的反射光线与初始法线成-48°，几乎不能被单光子点探测器10接收，可忽略不计。当然接收方向也可设置为微镜-12°翻转时的出射方向。In Fig. 3, the reflection mechanism of a single micromirror in a DMD is described. The thin solid line in the figure represents the baseline and normal of the initial position of a single micromirror, taking clockwise rotation as positive and counterclockwise as negative. When the incident ray is at 24° to this initial normal, the reflected ray is also at 24° to the initial normal, but when the micromirror is flipped +12°, the normal of the micromirror in this example rotates +12° clockwise , according to the law of reflection, the reflected light needs to be rotated clockwise by +24°, that is, it is on the same straight line as the initial normal, and the direction of the initial normal can be set as the receiving direction of the single-photon point detector 10 . Similarly, when the micromirror is flipped by -12°, the reflected light at this time is at -48° to the initial normal, which can hardly be received by the single-photon point detector 10 and can be ignored. Of course, the receiving direction can also be set as the outgoing direction when the micromirror is flipped by -12°.
需要说明的是，为使光谱带的分辨长度尽可能长，可选取DMD的对角线作为光谱带的成像位置，而DMD中每个微镜的翻转方向刚好是对角线方向，若将DMD对角线作为水平方向，光谱带成像位置也在水平方向，该法获得的像素点最多，例如2048×1152大小的DMD对角线可约达2350个像素点。It should be noted that, in order to make the resolution length of the spectral band as long as possible, the diagonal line of the DMD can be selected as the imaging position of the spectral band, and the flip direction of each micromirror in the DMD is just the direction of the diagonal line. If the DMD The diagonal line is the horizontal direction, and the imaging position of the spectral band is also in the horizontal direction. This method obtains the most pixels. For example, the diagonal line of a DMD with a size of 2048×1152 can reach about 2350 pixels.
会聚收光部件6包括滤光片和衰减片，所述滤光片用于滤除待检测光中的杂散光，当待检测光比较强时，需采用多组衰减片组合进行光衰减，以防止单光子点探测器10饱和。The converging light-receiving part 6 includes a filter and an attenuation sheet, and the filter is used to filter out stray light in the light to be detected. The single photon point detector 10 is prevented from being saturated.
本实施例中，所述单光子点探测器10采用盖革模式雪崩二极管（avalanchephotodiode，简称APD)，在其他实施例中，该点探测器也可替换成其它具有单光子探测能力的点探测器，如光电倍增管Photomultiplier tube（PMT）。In this embodiment, the single-photon point detector 10 adopts a Geiger mode avalanche diode (avalanche photodiode, referred to as APD). In other embodiments, the point detector can also be replaced by other point detectors with single-photon detection capability. , such as photomultiplier tube Photomultiplier tube (PMT).
所述控制模块12所实现的控制是指各部件的使能和触发脉冲控制，该模块所实现的协调主要实现对计数器11和SLM5之间的步调协调，SLM5中的微镜阵列每翻转一次，计数器11累积计数在该翻转时间间隔内检测到的所有光子，翻转完成后，计数器清零，所有的计数与随机数产生模块9产生的随机矩阵（随机基）打包被传至数据包存储器13中。The control realized by the control module 12 refers to the enabling and trigger pulse control of each part. The coordination realized by this module mainly realizes the step coordination between the counter 11 and the SLM5. The micromirror array in the SLM5 flips once, The counter 11 cumulatively counts all the photons detected in the flip time interval. After the flip is completed, the counter is cleared, and all the counts are packaged with the random matrix (random base) generated by the random number generation module 9 and sent to the packet memory 13. .
所述的压缩感知模块14根据计数器11得到的计数值、随机测量矩阵（由若干随机基组成，而单个随机基是由某个随机矩阵拉伸得到）进行压缩感知稀疏变换和光谱带重建，得到光谱强度曲线（λ，I）。该模块仅需可压缩光谱带的少量线性随机投影便可重建出光谱带，并利用矩阵填充理论弥补光谱带中的信号缺失，其中，所述的稀疏变换是选取合适的Ψ，使得光谱带信号x可在Ψ框架下可稀疏表达。压缩感知时所采用的算法有多种，包括贪心重建算法、匹配跟踪算法MP、正交匹配跟踪算法OMP、基跟踪算法BP、LASSO、LARS、GPSR、贝叶斯估计算法、magic、IST、TV、StOMP、CoSaMP、LBI、SP、l1_ls、smp算法、SpaRSA算法、TwIST算法、l0重建算法、l1重建算法、l2重建算法等，采用上述算法中的任意一种都可实现本发明。The compressed sensing module 14 performs compressive sensing sparse transformation and spectral band reconstruction according to the count value obtained by the counter 11 and a random measurement matrix (composed of several random bases, and a single random base is obtained by stretching a random matrix), to obtain Spectral intensity curves (λ, I). This module only needs a few linear random projections of compressible spectral bands to reconstruct the spectral bands, and uses the matrix filling theory to make up for the lack of signals in the spectral bands. The sparse transformation is to select a suitable Ψ, so that the spectral band signal x can be sparsely expressed under the Ψ framework. There are many algorithms used in compressed sensing, including greedy reconstruction algorithm, matching tracking algorithm MP, orthogonal matching tracking algorithm OMP, base tracking algorithm BP, LASSO, LARS, GPSR, Bayesian estimation algorithm, magic, IST, TV , StOMP, CoSaMP, LBI, SP, l1_ls, smp algorithm, SpaRSA algorithm, TwIST algorithm, l0 reconstruction algorithm, l1 reconstruction algorithm, l2 reconstruction algorithm, etc., any one of the above algorithms can be used to realize the present invention.
以上是对本发明的光谱仪的结构说明。下面对该光谱仪的工作过程进行描述。The above is the description of the structure of the spectrometer of the present invention. The working process of the spectrometer is described below.
本发明的光谱仪在工作时包括以下步骤：Spectrometer of the present invention comprises the following steps when working:
步骤1）、单光子入射的步骤。Step 1), the step of single photon incident.
单光子级别的待测极弱光通过入射狭缝1进入超灵敏光谱仪，然后通过光准直部件2和第一凹面镜3-1对待测极弱光做扩束和准直，使所述待测极弱光成为平行光；所述平行光照射到光栅分光部件4；光栅分光部件4所生成的光栅反射光场再经过第二凹面镜3-2发射，进而在空间光调制器5上展开形成光谱带，使不同波长的光在焦平面上实现空间分离；空间光调制器5在随机数产生器9所产生的随机数的作用下，对所形成的光谱带进行随机调制，使得光谱带以一定的随机概率向会聚收光部件6发射；所述会聚收光部件6将过滤后的待测极弱光传输到电学单元II中的单光子点探测器10。The extremely weak light to be measured at the single photon level enters the ultra-sensitive spectrometer through the incident slit 1, and then expands and collimates the extremely weak light to be measured through the light collimation component 2 and the first concave mirror 3-1, so that the extremely weak light to be measured The extremely weak light becomes parallel light; the parallel light is irradiated to the grating light-splitting part 4; the grating reflection light field generated by the grating light-splitting part 4 is emitted through the second concave mirror 3-2, and then unfolded on the spatial light modulator 5 form spectral bands, so that light of different wavelengths can be spatially separated on the focal plane; the spatial light modulator 5 randomly modulates the formed spectral bands under the action of the random number generated by the random number generator 9, so that the spectral bands Emit to the converging light-receiving component 6 with a certain random probability; the converging light-receiving component 6 transmits the filtered extremely weak light to the single-photon point detector 10 in the electrical unit II.
步骤2）、检测单光子并计数的步骤。Step 2), the step of detecting and counting single photons.
单光子点探测器10探测待测极弱光中的各个单光子点，将采集到的光信号转换成有效脉冲信号后输出；所述计数器11用于记录单光子点探测器10探测到的单光子点的数目。The single-photon point detector 10 detects each single-photon point in the extremely weak light to be measured, and converts the collected light signal into an effective pulse signal and outputs it; the counter 11 is used to record the single-photon point detected by the single-photon point detector 10. The number of photon points.
步骤3）、压缩感知的步骤。Step 3), the steps of compressed sensing.
计数器11所记录的单光子点的数目和随机数发生器9生成的随机基一一对应，一起打包存入数据包存储器13中，最后导入压缩感知模块14中，在该模块中实现光谱带信号重建，最后输出光谱强度曲线（λ，I）。The number of single photon points recorded by the counter 11 corresponds to the random base generated by the random number generator 9 one by one, and is packaged together and stored in the data packet memory 13, and finally imported into the compressed sensing module 14, in which the spectral band signal is realized. Reconstruct and finally output the spectral intensity curve (λ, I).
图2是最后所生成的光谱强度曲线的示意图，在该例子中，假设光谱带很窄，仅有单行像素宽，且该单行上每个像元上每秒仅有二十几个光子到达，则光强按功率计算在10-18W量级，数字微镜器件（DMD）的波长响应范围在350nm～2700nm，配合多个波段的特定光栅，便可实现超宽连续光谱。Fig. 2 is a schematic diagram of the finally generated spectral intensity curve, in this example, assuming that the spectral band is very narrow, only a single row of pixels is wide, and only twenty photons per second arrive at each pixel on the single row, The light intensity is on the order of 10-18 W in terms of power, and the wavelength response range of the digital micromirror device (DMD) is from 350nm to 2700nm. With specific gratings in multiple bands, an ultra-wide continuous spectrum can be realized.
作为一种优选实现方式，在另一个实施例中，在步骤1）之前包括对数字微镜器件（DMD）对角线方向上的每个像元所对应的波长进行标定的步骤。在标定时，一般选定几个特定波长的激光器，每次单色光经光栅分光部件4后投射到数字微镜器件（DMD）对角线上的特定某点，标识该点对应该特定波长，反复多次得到许多测量点，相邻两个点之间的光谱分布做线性划分，从而完成对整个对角线上的每个像元所对应波长的标定。通过该标定操作，有助于提高测量的准确度。As a preferred implementation manner, in another embodiment, before step 1), a step of calibrating the wavelength corresponding to each pixel in the diagonal direction of the digital micromirror device (DMD) is included. During calibration, lasers with several specific wavelengths are generally selected, and each time the monochromatic light passes through the grating splitter 4, it is projected onto a specific point on the diagonal of the digital micromirror device (DMD), marking the point corresponding to the specific wavelength , many measurement points are obtained repeatedly, and the spectral distribution between two adjacent points is linearly divided, so as to complete the calibration of the wavelength corresponding to each pixel on the entire diagonal. Through this calibration operation, it is helpful to improve the accuracy of measurement.
作为一种优选实现方式，在又一个实施例中，在步骤1）之前还包括有提高仪器信噪比（signal to noise ratio，简称SNR）的操作。SNR为信号与仪器噪声的方差之比，其中仪器噪声包含环境噪声、光学噪声、电学噪声（含暗计数）等，而方差可理解为信号的波动情况。若仪器噪声的波动淹没了信号的波动，则压缩感知算法失效；若仪器噪声的波动小于或远小于信号的波动，则能几乎完美重建图像。提高仪器信噪比有助于提高成像质量。提高仪器信噪比的方式有多种，如对仪器进行密闭封装，提高单光子点探测器10的相应参数和仪器稳定性。As a preferred implementation manner, in yet another embodiment, before step 1), an operation of increasing the signal-to-noise ratio (SNR for short) of the instrument is also included. SNR is the ratio of the variance of the signal to the instrument noise, where the instrument noise includes environmental noise, optical noise, electrical noise (including dark counts), etc., and the variance can be understood as the fluctuation of the signal. If the fluctuation of the instrument noise overwhelms the fluctuation of the signal, the compressive sensing algorithm will fail; if the fluctuation of the instrument noise is smaller or much smaller than the fluctuation of the signal, the image can be reconstructed almost perfectly. Improving the signal-to-noise ratio of the instrument helps to improve the imaging quality. There are many ways to improve the signal-to-noise ratio of the instrument, such as sealing the instrument, improving the corresponding parameters of the single-photon point detector 10 and the stability of the instrument.
最后所应说明的是，以上实施例仅用以说明本发明的技术方案而非限制。尽管参照实施例对本发明进行了详细说明，本领域的普通技术人员应当理解，对本发明的技术方案进行修改或者等同替换，都不脱离本发明技术方案的精神和范围，其均应涵盖在本发明的权利要求范围当中。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than limit them. Although the present invention has been described in detail with reference to the embodiments, those skilled in the art should understand that modifications or equivalent replacements to the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention, and all of them should be included in the scope of the present invention. within the scope of the claims.
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