CN103063872A - Highly-reliable fiber bragg grating acceleration sensor with function of automatical temperature supplementing - Google Patents

Abstract

Translated fromChinese

具有自温补功能的高可靠光纤光栅加速度传感器，属于光纤传感技术领域。它解决了传统光纤光栅振动传感器敏度低，可靠性差的问题。它包括菱形梁、振动梁、质量块、光纤光栅和传输光纤，所述振动梁包括振动片、曾敏凹槽、连接底板、振动臂和固定座；所述菱形梁的两个短的方形梁的末端分别固定在振动梁上，且该两个短方形梁的中心线与振动梁的中心线相互平行；菱形梁的两个长的方形梁的中心线位于振动片与固定座之间的间隙的中间；光纤光栅嵌入在菱形梁的凹槽内并延伸出菱形梁凹槽；传输光纤连接在光纤光栅延伸至菱形梁凹槽外侧的两端上；所述光纤光栅为光纤马赫-曾德尔干涉仪。本发明适用于光纤传感技术领域。

The invention relates to a highly reliable fiber grating acceleration sensor with self-warming compensation function, which belongs to the technical field of optical fiber sensing. It solves the problems of low sensitivity and poor reliability of traditional fiber grating vibration sensors. It includes a diamond beam, a vibrating beam, a quality block, an optical fiber grating, and a transmission fiber. The vibrating beam includes a vibrating plate, a Zeng Min groove, a connecting base plate, a vibrating arm, and a fixed seat; the ends of two short square beams of the rhomboid beam are They are respectively fixed on the vibrating beam, and the centerlines of the two short square beams are parallel to the centerline of the vibrating beam; the centerlines of the two long square beams of the diamond beam are located in the middle of the gap between the vibrating plate and the fixed seat The fiber grating is embedded in the groove of the diamond beam and extends out of the groove of the diamond beam; the transmission fiber is connected to the two ends of the fiber grating extending to the outside of the groove of the diamond beam; the fiber grating is a fiber Mach-Zehnder interferometer. The invention is applicable to the technical field of optical fiber sensing.

Description

Has the highly reliable optical fibre grating acceleration sensor from the temperature compensation function

Technical field

The present invention relates to a kind of optical fibre grating acceleration sensor, belong to technical field of optical fiber sensing.

Background technology

At present, Fiber Bragg Grating FBG (Fiber Bragg Grating, FBG, the abbreviation fiber grating) sensing technology at home and abroad is used widely, temperature and stress deformation monitoring such as civil engineering structures such as bridge, dam, tunnel, buildings, the Geological Hazards Monitorings such as landslide, rubble flow, the power transmission and transforming equipment temperature measurement on-lines such as switch cubicle, transformer, cable, pole line, the automatic fire alarm such as oil tank, tunnel, the special equipment structural safety monitoring such as pressure vessel, hoisting machinery and mine structural safety monitoring etc.

The basis that the research of vibration and test are development of modern industry has a wide range of applications in science and technology, national economy and national defence field.The measured vibration signal of vibration transducer can characterize by vibration acceleration or Oscillation Amplitude, therefore the detection of vibration signal has based on the vibration detection of vibration acceleration with based on the two schemes of the vibration detection of Oscillation Amplitude, and the former is main detection scheme.According to the difference of vibration signal physical detection mode, can be divided into again electro-detection formula acceleration transducer and light and detect the formula acceleration transducer.

The electro-detection acceleration transducer utilizes vibration sensing mechanism perception vibration acceleration, and vibration sensing mechanism mainly is made of sensitive-mass piece, flexible member and conversion element.That the electro-detection acceleration transducer mainly comprises is induction, three kinds of condenser type and piezoelectric types.Under the effect of vibration acceleration, sensitive-mass piece perception vibration acceleration and produce the motion or STRESS VARIATION, the STRESS VARIATION of the conversion element that drive is attached thereto such as solenoid, capacitor plate motion or generation piezoelectric chip, solenoid motion cutting magnetic line and change in location of producing induced potential, capacitor plate in the magnetic field of permanent magnet change the piezoelectric signal that the STRESS VARIATION of size, the piezoelectric chip of capacitance produces, thus the variation perception vibration signal by electric signal.The electrical output signal of the sensor of electro-detection acceleration transducer is generally very faint, need that amplifying circuit provides gain in the electrical signal detection unit, therefore electrical signal detection unit and vibration sensing device usually must be encapsulated in the same encapsulating structure and consist of acceleration transducer, that is to say that electrical signal detection unit and vibration sensing device are indissociable.The electro-detection acceleration transducer simultaneously also must self-powered or externally fed.The characteristics of electro-detection acceleration transducer be vulnerable to electromagnetic interference (EMI), signal transmission distance near, need Power supply, therefore limit the electro-detection acceleration transducer in some occasions as there being the application of electromagnetic interference (EMI), on-the-spot power supply difficulty, long-distance transmissions.

Light detects the vibration that the formula acceleration transducer utilizes the optical signal detecting object, comprises contactless and two kinds of principal modes of contact.Contactless acceleration transducer mainly is that the Oscillation Amplitude (being displacement) that utilizes surface, light signal direct-detection object a part comes the perception vibration, belong to absolute vibration and measure, the methods such as fiber optics displacement detection, laser triangulation, laser external cavity succusion are arranged.It is to utilize reflection that the vibration velocity on surface, optical signal detecting object a part causes or the Doppler shift of scattered light signal to come the perception vibration that contactless acceleration transducer also has a kind of mode.The contact acceleration transducer is fixedly connected with vibrating object, utilizes vibration sensing mechanism perceptual object vibration acceleration, and vibration sensing mechanism mainly is made of sensitive-mass piece, flexible member and conversion element.Because Fibre Optical Sensor has little, lightweight, corrosion-resistant, the anti-electromagnetic interference (EMI) of volume, is suitable for inflammable and explosive environment, usually utilizes optical fiber to realize, is called optical fiber acceleration transducer or fibre optic accelerometer.Optical fiber acceleration transducer can be divided into phase modulation-type, wavelength-modulated type and intensity modulation type according to responsive principle.The phase modulation-type optical fiber acceleration transducer mainly utilizes various ways vibration signal to be converted into the variation of light phase, then utilize fibre optic interferometer, come the variation of detected phase such as Fabry-Perot (F-P) interferometer, Michelson interferometer, Mach-Zehnder (M-Z) interferometer.This optical fiber acceleration transducer has advantages of highly sensitive, but fibre optic interferometer complex structure, existence and stability problem, practical comparatively difficulty, cost is also higher.

Wavelength-modulated type optical fiber acceleration transducer drives the FBG stress deformation mainly based on fiber grating (FBG) sensing technology by sensitive mechanism, causes the variation of FBG reflection wavelength, utilizes Wavelength demodulation to obtain acceleration signal.Optical fibre grating acceleration sensor is except possessing the intrinsic advantage of Fibre Optical Sensor, because its output characterization signal is the centre wavelength of the light signal of optical grating reflection, belong to digital quantity, so have excellent transport property (not being subjected to light source fluctuation and long Distance Transmission optical fiber to introduce the impact of decay), and can realize easily quasi-distributed measurement by different wave length is multiplexing.Can be widely used in acceleration monitoring and the measurement of the national defence sophisticated technology fields such as nuclear blast test, Aerospace Engineering and water conservancy hydro-structure, bridge and building structure, plant equipment etc.

Because fiber grating itself to temperature and strain while sensitivity, can be subject to the impact of temperature and cause measuring accuracy greatly to reduce when using fiber grating as the acceleration transducer sensitive element; In addition, although fiber grating has good axial stretch-proof fatigue capability, in case its be subjected to the force direction off-axis to, the power that very easily is sheared fractures.For these practical engineering application problems, the present invention proposes a kind ofly can eliminate the highly reliable optical fibre grating acceleration sensor from the temperature compensation function of having that temperature effect can be avoided again fiber grating fracture.

Summary of the invention

The objective of the invention is for the sensitivity of traditional fiber grating sensor lowly, the problem of poor reliability provides a kind of highly reliable optical fibre grating acceleration sensor that has from the temperature compensation function.

Have the highly reliable optical fibre grating acceleration sensor from the temperature compensation function, this sensor comprises rhombus beam, vibration fine strain of millet, mass, fiber grating and Transmission Fibers;

Described rhombus beam comprises rhombus cylinder, a main spar, No. two main spars, No. three main spars and No. four main spars;

The xsect of described rhombus cylinder is rhombus;

The lateral wall corresponding to two obtuse angles of this rhombus cylinder fixed respectively a main spar and No. two main spars, and a described main spar is identical with the structure of No. two main spars, and is mirror image along this rhombus cylinder and is symmetrical arranged; The center line of a described main spar and No. two main spars overlaps with the short diagonal of the lozenge shape cross-section of rhombus cylinder;

The lateral wall corresponding to two acute angles of this rhombus cylinder fixed respectively No. three main spars and No. four main spars, and described No. three main spars are identical with the structure of No. four main spars, and is mirror image along this rhombus cylinder and is symmetrical arranged; The center line of described No. three main spars and No. four main spars overlaps with the long-diagonal of the lozenge shape cross-section of rhombus cylinder;

The Length Ratio of described No. three main spars and a main spar is 2: 1; Position of center line at No. three main spar upper surfaces has the U-shaped groove, and this U-shaped groove runs through the main spar upper surface No. three; Fiber grating is embedded in the U-shaped groove of the U-shaped groove of No. three main spars and No. four main spars, and two ends extend to respectively outside the U-shaped groove;

Described vibration fine strain of millet is mirror image, its involving vibrations sheet, enhanced sensitivity groove, connecting bottom board, shaker arm and holder; The bottom surface of the bottom surface of described connecting bottom board, the bottom surface of shaker arm and holder is in same plane,

Holder fixes as one by connecting bottom board and shaker arm, and the vibrating reed and the connecting bottom board that are positioned at the connecting bottom board top form the enhanced sensitivity groove;

Mass is rectangular structure, and its upper surface has groove along this surperficial center line, and the end of the shaker arm of walking beam is stuck in the described groove;

A main spar of described rhombus beam and the end of No. two main spars are separately fixed on the holder and vibrating reed of walking beam, and a main spar of rhombus beam and the center line of No. two main spars and the center line of walking beam are parallel to each other; The centre in the gap of center line between vibrating reed and holder of No. three main spars and No. four main spars;

Fiber grating is embedded in the groove of rhombus beam and extends rhombus beam groove;

Transmission Fibers is connected on the two ends that fiber grating extends to the rhombus beam groove outside;

Described fiber grating is optical fiber mach-Ceng Deer interferometer.

Advantage of the present invention is: this sensor is processed with the enhanced sensitivity groove at walking beam, has improved the detection sensitivity to acceleration.

The present invention is by having increased the rhombus beam, realized the coordinate axis quadrature conversion of fiber grating stress deformation direction and walking beam stress deformation direction, completely cut off the shearing force that walking beam flexural deformation produces, guarantee that fiber grating is in the straight line extended state all the time, improved the long-term reliability of optical fibre grating acceleration sensor.

The present invention can offset the temperature drift of optical fibre grating acceleration sensor by changing the separately thermal expansivity of walking beam and rhombus beam, raising in Practical Project to the accuracy of detection of acceleration.

Description of drawings

Fig. 1 is the structural representation ofrhombus beam 1 of the present invention;

Fig. 2 is the structural representation that the present invention vibrates fine strain ofmillet 2;

Fig. 3 is structural representation of the present invention.

Embodiment

Embodiment one: below in conjunction with Fig. 1 to Fig. 3 present embodiment is described,

The described highly reliable optical fibre grating acceleration sensor that has from the temperature compensation function of present embodiment, this sensor compriserhombus beam 1, vibration fine strain ofmillet 2, mass 3, fiber grating 5 and Transmission Fibers 6;

Describedrhombus beam 1 comprises rhombus cylinder 1-1, a main spar 1-2, No. two main spar 1-3, No. three main spar 1-4 and No. four main spar 1-5;

The xsect of described rhombus cylinder 1-1 is rhombus;

Lateral wall corresponding to two obtuse angles of this rhombus cylinder 1-1 fixed respectively a main spar 1-2 and No. two main spar 1-3, and a described main spar 1-2 is identical with the structure of No. two main spar 1-3, and is mirror image along this rhombus cylinder 1-1 and is symmetrical arranged; The center line of a described main spar 1-2 and No. two main spar 1-3 overlaps with the short diagonal of the lozenge shape cross-section of rhombus cylinder 1-1;

Lateral wall corresponding to two acute angles of this rhombus cylinder 1-1 fixed respectively No. three main spar 1-4 and No. four main spar 1-5, and described No. three main spar 1-4 are identical with the structure of No. four main spar 1-5, and is mirror image along this rhombus cylinder 1-1 and is symmetrical arranged; The center line of described No. three main spar 1-4 and No. four main spar 1-5 overlaps with the long-diagonal of the lozenge shape cross-section of rhombus cylinder 1-1;

The Length Ratio of described No. three main spar 1-4 and a main spar 1-2 is 2: 1; Position of center line at No. three main spar 1-4 upper surfaces has the U-shaped groove, and this U-shaped groove runs through main spar 1-4 upper surface No. three; Fiber grating 5 is embedded in the U-shaped groove of the U-shaped groove of No. three main spar 1-4 and No. four main spar 1-5, and two ends extend to respectively outside the U-shaped groove;

Described vibration fine strain ofmillet 2 is mirror image, its involving vibrations sheet 2-1, enhanced sensitivity groove 2-3, connecting bottom board 2-4, shaker arm 2-5 and holder 2-2; The bottom surface of the bottom surface of the bottom surface of described connecting bottom board 2-4, shaker arm 2-5 and holder 2-2 is in same plane,

Holder 2-2 fixes as one by connecting bottom board 2-4 and shaker arm 2-5, and the vibrating reed 2-1 and the connecting bottom board 2-4 that are positioned at connecting bottom board 2-4 top form enhanced sensitivity groove 2-3; Mass 3 is rectangular structure, and its upper surface has groove along this surperficial center line, and the end of the shaker arm 2-5 ofwalking beam 2 is stuck in the described groove; Mass 3 is used in the situation that acceleration change produces inertial force and driveswalking beam 2 stress deformations;

A main spar 1-2 of describedrhombus beam 1 and the end of No. two main spar 1-3 are separately fixed on the holder 2-2 and vibrating reed 2-1 ofwalking beam 2, and the center line of a main spar 1-2 ofrhombus beam 1 and No. two main spar 1-3 and the center line ofwalking beam 2 are parallel to each other; The centre in the gap of the center line of No. three main spar 1-4 and No. four main spar 1-5 between vibrating reed 2-1 and holder 2-2;

Fiber grating 5 is embedded in the groove ofrhombus beam 1 and extendsrhombus beam 1 groove;

Transmission Fibers 6 is connected on the two ends that fiber grating 5 extends to therhombus beam 1 groove outside.

Embodiment two: below in conjunction with Fig. 1 to Fig. 3 present embodiment is described, present embodiment is for to the further specifying of embodiment one, and the both sides of the upper surface center line of the holder 2-2 of the described described vibrating reed 2-1 of present embodiment have two screws.

Principle of work:

Of the present inventionly a kind ofly can realize temperature self-compensation function, eliminate the temperature drift effect of optical fibre grating acceleration sensor based on the thermometal thermal expansion coefficient difference of walking beam and rhombus beam; Realized simultaneously the coordinate transform of fiber grating stress deformation direction and walking beam stress deformation direction by the rhombus beam, the fiber grating breakage problem that the shearing force that the flexural deformation of elimination walking beam produces causes.

Its light signal arrives the fiber grating that is fixed on the walking beam through Transmission Fibers, because fiber grating has wavelength selectivity, when incident wavelength satisfies Bragg's condition of reflection, will there be the light of part forward transmission to be coupled as the reverse transfer mould, and be reflected back optical fiber along original optical path.The key of present technique is that walking beam has an enhanced sensitivity groove, and fiber grating is fixed on the rhombus beam in advance, and then the rhombus beam is fixed on the both sides of walking beam enhanced sensitivity groove.When the mass of walking beam end after producing reverse inertial force under the acceleration effect, larger stress deformation can occur in the rhombus beam that is fixed on the enhanced sensitivity groove, thereby makes fiber grating fixing on the rhombus beam have the detectability sensitiveer to acceleration.In the present invention, rhombus beam and walking beam adopt two kinds of metal materials with different heat expansion coefficient, have realized thus the auto-compensation to optical fibre grating acceleration sensor temperature drift; Simultaneously, the rhombus beam be subjected to force direction and fiber grating be subjected to force direction perpendicular, make the fiber grating always work in the straight line extended state, the fiber grating breakage problem of having avoided the crooked shearing force that produces of walking beam to cause has greatly improved the reliability of optical fibre grating acceleration sensor.Therefore, the present invention has fundamentally solved temperature drift problem and the long-term reliability problems of optical fibre grating acceleration sensor, thereby has satisfied the application requirements of Practical Project.

But fiber grating sensing technology is the sensing technology of high, the practical and wavelength-division multiplex of reliability in the Fibre Optical Sensor.It is to adopt laser irradiation, be that the laser facula of 235nm～248nm is through lens and catoptron repeatedly behind the optical path adjusting by centre wavelength, form the equally distributed rectangle laser facula of light intensity, then by phase mask plate, make laser facula graphical, axially form bright dark alternate cycle diffraction fringe such as grade along quartzy single-mode fiber, finally cause being sexually revised (by a large amount of technical studies by the refractive index generating period of graphical hot spot irradiation area inner fiber, optical fiber is controlled at 8mm-15mm usually by the length of hot spot irradiation area), after irradiation is finished, the illuminated finished zone of single-mode fiber has just possessed Bragg reflection characteristic-after the specific wavelength narrow band light incident of satisfying Bragg condition, can be returned along the former road of input path after this regional reflex, the light signal of other wavelength is then by regular transmission, usually this section zone with optical fiber is called Bragg grating (Fiber BraggGrating), is called for short fiber grating (FBG).The centre wavelength of FBG narrowband reflection spectrum was determined by equivalent refractive index and the variations in refractive index cycle of grating, physical quantity such as strain, temperature can be passed through equivalent refractive index and the variations in refractive index cycle of elasto-optical effect, thermo-optic effect change grating, thereby the centre wavelength of FBG reflectance spectrum is drifted about, by detect the center wavelength variation of FBG reflectance spectrum with spectrometer or optical fiber grating wavelength demodulating equipment, can realize the demodulation to physical quantity information.This technology only has the grid region of optical fiber just to strain and responsive to temperature, other parts of optical fiber are insensitive to its physical quantity, therefore, based on FBG Wavelength-encoding characteristic, FBG and optical fiber itself are integrated, the optical attenuation that the intensity of light source and other factors cause can not affect the FBG measuring accuracy, can and connect or is connected in series simultaneously a plurality of FBG sensors with different centre wavelengths and carry out the measurement of multiple spot distributed sensing on an optical fiber.

Intensity modulation type optical fiber acceleration transducer has the advantages such as simple in structure, with low cost, can be divided into transmission-type, polarization type and reflective three kinds.Common structure launching fiber and the sensitive-mass piece of transmission-type optical fiber acceleration transducer are connected mutually, and connect reception optical fiber and the measured body Joint of detector.Under the effect of vibration acceleration, launching fiber produces relative displacement with receiving optical fiber, and the light signal strength that receives optical fiber is modulated by vibration acceleration.It receives optical fiber can be single channel, also can be two-way, adopts Receiving optical fiber can eliminate the impact of light source fluctuation.

Claims (2)

Translated fromChinese

1.具有自温补功能的高可靠光纤光栅加速度传感器，其特征在于：该传感器包括菱形梁(1)、振动粱(2)、质量块(3)、光纤光栅(5)和传输光纤(6)；1. A highly reliable fiber grating acceleration sensor with self-warming compensation function, characterized in that: the sensor includes a diamond beam (1), a vibrating beam (2), a mass (3), a fiber grating (5) and a transmission fiber (6 );所述菱形梁(1)包括菱形筒(1-1)、一号方形梁(1-2)、二号方形梁(1-3)、三号方形梁(1-4)和四号方形梁(1-5)；The rhomboid beam (1) includes a rhomboid tube (1-1), No. 1 square beam (1-2), No. 2 square beam (1-3), No. 3 square beam (1-4) and No. 4 square beam (1-5);所述菱形筒(1-1)的横截面为菱形；The cross section of the rhomboid cylinder (1-1) is rhombus;该菱形筒(1-1)的两个钝角对应的外侧壁分别固定一号方形梁(1-2)和二号方形梁(1-3)，所述一号方形梁(1-2)和二号方形梁(1-3)的结构相同，且沿该菱形筒(1-1)呈镜像对称设置；所述一号方形梁(1-2)和二号方形梁(1-3)的中心线与菱形筒(1-1)的菱形横截面的短对角线重合；The outer walls corresponding to the two obtuse angles of the rhombus (1-1) respectively fix No. 1 square beams (1-2) and No. 2 square beams (1-3), and the No. 1 square beams (1-2) and No. 2 square beams (1-3) are respectively fixed. No. two square beams (1-3) have the same structure, and are mirror-symmetrically arranged along the rhombus (1-1); The central line coincides with the short diagonal of the rhombus cross-section of the rhombus (1-1);该菱形筒(1-1)的两个锐角对应的外侧壁分别固定三号方形梁(1-4)和四号方形梁(1-5)，所述三号方形梁(1-4)和四号方形梁(1-5)的结构相同，且沿该菱形筒(1-1)呈镜像对称设置；所述三号方形梁(1-4)和四号方形梁(1-5)的中心线与菱形筒(1-1)的菱形横截面的长对角线重合；The outer walls corresponding to the two acute angles of the rhombus (1-1) respectively fix No. 3 square beams (1-4) and No. 4 square beams (1-5), and the No. 3 square beams (1-4) and No. 4 square beams (1-5) have the same structure, and are mirror-symmetrically arranged along the rhombus (1-1); described No. 3 square beams (1-4) and No. 4 square beams (1-5) The central line coincides with the long diagonal of the rhombus cross-section of the rhombus (1-1);所述三号方形梁(1-4)与一号方形梁(1-2)的长度比为2∶1；在三号方形梁(1-4)上表面的中心线位置上开有U形凹槽，且该U形凹槽贯穿三号方形梁(1-4)上表面；光纤光栅(5)嵌入在三号方形梁(1-4)的U形凹槽和四号方形梁(1-5)的U形凹槽内，且两端分别延伸至U形凹槽外；The length ratio of the No. 3 square beam (1-4) to the No. 1 square beam (1-2) is 2:1; a U-shaped groove, and the U-shaped groove runs through the upper surface of the No. 3 square beam (1-4); the fiber grating (5) is embedded in the U-shaped groove of the No. 3 square beam (1-4) and the No. 4 square beam (1 -5) in the U-shaped groove, and both ends extend to the outside of the U-shaped groove;所述振动粱(2)为镜像对称结构，它包括振动片(2-1)、增敏凹槽(2-3)、连接底板(2-4)、振动臂(2-5)和固定座(2-2)；所述连接底板(2-4)的底面、振动臂(2-5)的底面和固定座(2-2)的底面是在同一平面内，The vibrating beam (2) is a mirror symmetrical structure, which includes a vibrating plate (2-1), a sensitivity-increasing groove (2-3), a connecting base plate (2-4), a vibrating arm (2-5) and a fixing seat (2-2); the bottom surface of the connecting bottom plate (2-4), the bottom surface of the vibrating arm (2-5) and the bottom surface of the fixing seat (2-2) are in the same plane,固定座(2-2)通过连接底板(2-4)与振动臂(2-5)固接为一体，位于连接底板(2-4)上方的振动片(2-1)与连接底板(2-4)形成增敏凹槽(2-3)；The fixing seat (2-2) is fixedly connected with the vibrating arm (2-5) through the connection base plate (2-4), and the vibrating piece (2-1) above the connection base plate (2-4) is connected with the connection base plate (2-2). -4) forming a sensitization groove (2-3);质量块(3)为长方体结构，其上表面沿该表面的中心线开有凹槽，振动梁(2)的振动臂(2-5)的末端卡在所述凹槽中；The mass block (3) is a cuboid structure, and its upper surface is provided with a groove along the center line of the surface, and the end of the vibrating arm (2-5) of the vibrating beam (2) is stuck in the groove;所述菱形梁(1)的一号方形梁(1-2)和二号方形梁(1-3)的末端分别固定在振动梁(2)的固定座(2-2)和振动片(2-1)上，且菱形梁(1)的一号方形梁(1-2)和二号方形梁(1-3)的中心线与振动梁(2)的中心线相互平行；三号方形梁(1-4)和四号方形梁(1-5)的中心线位于振动片(2-1)与固定座(2-2)之间的间隙的中间；The ends of the No. 1 square beam (1-2) and the No. 2 square beam (1-3) of the rhomboid beam (1) are respectively fixed on the fixing seat (2-2) and the vibrating plate (2) of the vibrating beam (2). -1), and the centerlines of the No. 1 square beam (1-2) and No. 2 square beam (1-3) of the diamond beam (1) are parallel to the centerline of the vibrating beam (2); the No. 3 square beam (1-4) and the center line of the No. 4 square beam (1-5) are located in the middle of the gap between the vibrating plate (2-1) and the fixed seat (2-2);光纤光栅(5)嵌入在菱形梁(1)的凹槽内并延伸出菱形梁(1)凹槽；The fiber grating (5) is embedded in the groove of the diamond-shaped beam (1) and extends out of the groove of the diamond-shaped beam (1);传输光纤(6)连接在光纤光栅(5)延伸至菱形梁1凹槽外侧的两端上。The transmission optical fiber (6) is connected to the two ends of the fiber grating (5) extending to the outside of the groove of the rhombic beam 1.2.根据权利要求1所述的具有自温补功能的高可靠光纤光栅加速度传感器，其特征在于：所述振动梁(2)的固定座(2-2)的上表面中心线的两侧开有两个螺孔。2. The highly reliable fiber grating acceleration sensor with self-warming compensation function according to claim 1, characterized in that: the two sides of the upper surface center line of the fixed seat (2-2) of the vibrating beam (2) are opened There are two screw holes.

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