CN103008038A - Bipolar electrode-paper-based microfluidics type chip and preparation method thereof - Google Patents

Abstract

Translated fromChinese

本发明公开了一种双极电极-纸基微流控的芯片及其制备方法，所述芯片包括纸质基片、纸质盖片、纳米电极、双极电极；纳米电极、双极电极沉积于纸质基片表面；纳米电极作为微流通道中电渗流和双极电极电化学的驱动单元，双极电极作为在微流通道中形成使组份高倍浓集的非均匀电场，同时使被检测组份发生在双极电极两端的氧化还原反应。公开了三种不同的光刻胶与稀释剂制作上述芯片的方法。本发明纸基微流控-双极电极芯片具有重量轻、携带方便、成本低廉、可一次性使用、所需样品的体积小、分析速度快，适用于地基或空间搭载生命科学仪器的复杂样品的检测等。

The invention discloses a bipolar electrode-paper-based microfluidic chip and a preparation method thereof. The chip includes a paper substrate, a paper cover sheet, a nano electrode, a bipolar electrode; nano electrodes, bipolar electrode deposition on the surface of the paper substrate; the nanoelectrode is used as the driving unit of the electroosmotic flow in the microfluidic channel and the electrochemistry of the bipolar electrode. A redox reaction of components occurs at both ends of a bipolar electrode. Three different photoresists and diluents are disclosed for making the chip. The paper-based microfluidic-bipolar electrode chip of the present invention has the advantages of light weight, convenient portability, low cost, one-time use, small volume of required samples, and fast analysis speed, and is suitable for complex samples of life science instruments carried on foundation or space detection etc.

Description

Translated fromChinese

双极电极-纸基微流控的芯片及其制备方法Bipolar electrode-paper-based microfluidic chip and its preparation method

技术领域：Technical field:

本发明涉及一种双极电极-纸基微流控的芯片及其制备方法，属于微流控分析技术领域。The invention relates to a bipolar electrode-paper-based microfluidic chip and a preparation method thereof, belonging to the technical field of microfluidic analysis.

背景技术：Background technique:

自从20世纪九十年代提出微全分析系统的概念以来，微流控芯片作为其中的核心技术己经成为国际发展最迅速的领域之一。纸基微流控是近几年来微流控芯片研究的一个新方向。它以滤纸作为芯片材料，使用光刻技术、绘图仪技术、喷墨印刷技术、蜡印刷技术、剪纸、丝网印刷、柔版印刷、打印PDMS和等离子体氧化、激光处理、折纸术等都可以单独用来制作纸基微流控芯片，它们被己经成功的用于比色分析、电化学分析、生物样品分析等领域。由于它具有重量轻、携带方便、可一次性使用、成本低廉、所需样品的体积小、分析速度快、可以进行多种物质同时检测等优点，己经被越来越多地应用于化学、生物、医学等领域。Since the concept of micro-total analysis system was put forward in the 1990s, microfluidic chip as the core technology has become one of the fastest-growing fields in the world. Paper-based microfluidics is a new research direction of microfluidic chips in recent years. It uses filter paper as the chip material, using photolithography technology, plotter technology, inkjet printing technology, wax printing technology, paper cutting, screen printing, flexographic printing, printing PDMS and plasma oxidation, laser treatment, origami, etc. Used alone to make paper-based microfluidic chips, they have been successfully used in colorimetric analysis, electrochemical analysis, biological sample analysis and other fields. Because of its light weight, easy to carry, one-time use, low cost, small sample size, fast analysis speed, and simultaneous detection of multiple substances, it has been increasingly used in chemistry, Biology, medicine and other fields.

许多化学分析和化学反应都以纸作为载体，滤纸在点滴试验、pH试纸和纸色谱等有广泛应用。纸基微流控是由Martinez等人[Martinez et al.,Angew.Chem.Int.Ed.2007,46,1318-1320]于2007年首次提出。普通滤纸由纤维素组成，呈亲水性，其纤维层的毛细作用可使水溶液自动渗透，为用纸质微流控芯片制作和应用创造了良好条件。与硅片、玻璃、PDMS等微流控芯片基材相比，纸质微流控芯片具有成本低、制备简单、无需复杂外围设备等特点，非常适用于在资源匮乏或空间搭载等极端条件下，进一步发展一系列生化检测新方法。Many chemical analyzes and chemical reactions use paper as a carrier, and filter paper is widely used in spot test, pH test paper and paper chromatography. Paper-based microfluidics was first proposed in 2007 by Martinez et al. [Martinez et al., Angew.Chem.Int.Ed.2007,46,1318-1320]. Ordinary filter paper is composed of cellulose and is hydrophilic. The capillary action of its fiber layer can make the aqueous solution permeate automatically, which creates good conditions for the production and application of paper microfluidic chips. Compared with microfluidic chip substrates such as silicon wafers, glass, and PDMS, paper microfluidic chips have the characteristics of low cost, simple preparation, and no need for complex peripheral equipment. They are very suitable for extreme conditions such as resource scarcity or space loading. , to further develop a series of new biochemical detection methods.

用于微流控分析系统中的双极电极（Bipolar electrode,BPE），是指一个放置在微流通道中的导体，当足够高的电场施加在微流通道中的离子缓冲液时，这个导体一端发生氧化反应，一端发生还原反应，这个导体就称为BPE。国际上所报道的双极电极芯片装置主要以玻璃和PDMS为主，而本专利公布的纸基微流控-双极电极电泳分离芯片及其制备方法还没见报道。The bipolar electrode (Bipolar electrode, BPE) used in the microfluidic analysis system refers to a conductor placed in the microfluidic channel. When a sufficiently high electric field is applied to the ion buffer in the microfluidic channel, one end of the conductor occurs Oxidation reaction, reduction reaction occurs at one end, this conductor is called BPE. The bipolar electrode chip devices reported internationally are mainly glass and PDMS, but the paper-based microfluidic-bipolar electrode electrophoresis separation chip disclosed in this patent and its preparation method have not been reported yet.

发明内容：Invention content:

本发明的目的是提供一种双极电极-纸基微流控的芯片及其制备方法，双极电极-纸基微流控芯片具有重量轻、携带方便、成本低廉、可一次性使用、所需样品的体积小、分析速度快的特点，适用于地基或空间搭载生命科学仪器的复杂样品的检测等。The purpose of the present invention is to provide a bipolar electrode-paper-based microfluidic chip and its preparation method. The bipolar electrode-paper-based microfluidic chip has the advantages of light weight, easy portability, low cost, disposable use, The sample size is small and the analysis speed is fast, which is suitable for the detection of complex samples with life science instruments on the ground or in space.

为实现上述目的，本发明采用以下技术方案：To achieve the above object, the present invention adopts the following technical solutions:

双极电极-纸基微流控的芯片，包括纸质基片、纸质盖片、纳米电极、双极电极；纸质盖片通过光刻法有疏水障碍形成微流体通道，纳米电极和双极电极(7)积于纸质基片表面，介于纸质基片和纸质盖片之间；纳米电极有两个，分别位于双极电极的两侧；纸质盖片上设置有进样入口区和出口区，预分离浓缩区为微通道前半部分，微通道形成纸电泳-纸色谱，所述纳米电极作为微流通道中电渗流和双极电极电化学的驱动单元，双极电极作为微流通道的形成非均匀电场使组份高倍浓集，并使被检测组份发生在双极电极两端发生氧化还原反应，对复杂样品中低丰度物质进行聚焦浓缩和检测分析。Bipolar electrodes-paper-based microfluidic chips, including paper substrates, paper cover sheets, nano-electrodes, bipolar electrodes; paper cover sheets have hydrophobic barriers to form microfluidic channels through photolithography, nano-electrodes and bipolar electrodes Pole electrodes (7) are accumulated on the surface of the paper substrate, between the paper substrate and the paper cover; there are two nano-electrodes, located on both sides of the bipolar electrode; the paper cover is provided with a sampling The inlet area and the outlet area, the pre-separation and concentration area are the first half of the microchannel, and the microchannel forms paper electrophoresis-paper chromatography, and the nanoelectrode is used as the driving unit of electroosmotic flow and bipolar electrode electrochemistry in the microfluidic channel, and the bipolar electrode is used as The non-uniform electric field formed by the microfluidic channel makes the components highly concentrated, and the redox reaction of the detected components occurs at both ends of the bipolar electrode, and the low-abundance substances in complex samples are focused, concentrated and detected.

所述纳米电极厚度为100nm；The thickness of the nanometer electrode is 100nm;

所述双极电极厚度为100nm，与盖片的微通道垂直；The thickness of the bipolar electrode is 100nm, perpendicular to the microchannel of the cover sheet;

所述的纳米电极为半导体氧化物电极或者金属电极；The nano-electrode is a semiconductor oxide electrode or a metal electrode;

所述的双极电极材料为金或铂或者氧化锡铟；The bipolar electrode material is gold or platinum or indium tin oxide;

所述纸质基片和纸质盖片材料均为纸；Both the paper base sheet and the paper cover sheet material are paper;

所述的纳米电极和双极电极为磁控溅射形成的纳米薄膜结构；The nano-electrode and bipolar electrode are nano-film structures formed by magnetron sputtering;

一种制备双极电极-纸基微流控芯片的方法，包括如下步骤：A method for preparing a bipolar electrode-paper-based microfluidic chip, comprising the steps of:

1）纸质盖片的制作1) Preparation of paper coverslips

将光刻胶和稀释剂按照体积比1:（4～8）进行稀释，将0.5ml的稀释后的光刻胶均匀涂在直径为5cm的色谱纸上，室温干燥后，直接在光刻机上将掩膜菲林片与色谱纸对齐曝光30s，丙酮显影5min，得到具有微通道的纸质盖片；Dilute the photoresist and diluent according to the volume ratio of 1: (4~8), apply 0.5ml of the diluted photoresist evenly on the chromatographic paper with a diameter of 5cm, dry it at room temperature, and directly place it on the photolithography machine Align the mask film sheet with the chromatographic paper for 30s exposure, and develop with acetone for 5min to obtain a paper cover sheet with microchannels;

2）纸质基片的制作2) Fabrication of paper substrate

以普通A4纸裁成一定大小的纸片当掩膜，并按照色谱纸设计的电极的大小和形状把纸片电极区剪掉，把做好的纸掩膜放在色谱纸上面，采用磁控溅射氧化锡铟薄膜或者金属薄膜，获得100nm厚纳米电极和双极电极；双极电极置于两个纳米电极中间，即得纸质基片；Cut ordinary A4 paper into a certain size of paper as a mask, and cut off the electrode area of the paper according to the size and shape of the electrode designed by the chromatographic paper, put the prepared paper mask on the chromatographic paper, and use magnetron Sputter tin indium oxide film or metal film to obtain 100nm thick nano-electrode and bipolar electrode; place the bipolar electrode between the two nano-electrodes to obtain a paper substrate;

3）纸质芯片封合3) Paper chip sealing

预先在双面胶上裁剪出合适的图形，剪掉的部分与电极的形状一致，将双面胶与下层基片精确对齐黏牢，再把纸质盖片与双面胶对齐，再另外用一层透明胶带薄膜覆盖在纸质盖片的上表面，即得本发明的纸基微流控-双极电极芯片。Cut out a suitable figure on the double-sided tape in advance, and the cut part is consistent with the shape of the electrode. Accurately align the double-sided tape with the lower substrate and stick it firmly, then align the paper cover with the double-sided tape, and then use another A layer of scotch tape film is covered on the upper surface of the paper cover sheet to obtain the paper-based microfluidic-bipolar electrode chip of the present invention.

与现有技术相比，本发明纸基微流控双极电极芯片及其制备方法至少具有以下优点：简化了传统的纸基芯片光刻技术中的匀胶、前烘、后烘过程，在本发明纸基微流控-双极电极芯片中，微通道前面部分将会对复杂样品进行预分离和预浓缩，在纳米电极上加上一定电压后，微通道中的BPE两端产生驱动电势，实现微流通道双极电极高倍浓集和检测。本发明纸基微流控-双极电极芯片重量轻、携带方便、可一次性使用、成本低廉、所需样品的体积小、分析速度快，适用于地基或空间搭载生命科学仪器的复杂样品的检测等。Compared with the prior art, the paper-based microfluidic bipolar electrode chip and the preparation method thereof of the present invention have at least the following advantages: the process of gluing, pre-baking and post-baking in the traditional paper-based chip photolithography technology is simplified, and the In the paper-based microfluidic-bipolar electrode chip of the present invention, the front part of the microchannel will pre-separate and pre-concentrate complex samples. After a certain voltage is applied to the nano-electrode, the two ends of the BPE in the microchannel will generate a driving potential , to achieve high concentration and detection of bipolar electrodes in microfluidic channels. The paper-based microfluidic-bipolar electrode chip of the present invention is light in weight, easy to carry, disposable, low in cost, small in size and fast in analysis speed, and is suitable for complex samples of life science instruments carried on foundation or in space. detection etc.

附图说明：Description of drawings:

图1为本发明双极电极-纸基微流控芯片加工示意图，其中：图1（a）整个双极电极-纸基微流控芯片结构图；图1（b）微通道的加工流程图；图1（c）纳米电极和双极电极加工结构图；图1（d）纸基微通道和纸基纳米电极与双极电极组装侧视图。Figure 1 is a schematic diagram of the processing of the bipolar electrode-paper-based microfluidic chip of the present invention, wherein: Figure 1 (a) the structure diagram of the entire bipolar electrode-paper-based microfluidic chip; Figure 1 (b) the processing flow chart of the microchannel ; Fig. 1(c) Structural diagram of nanoelectrode and bipolar electrode processing; Fig. 1(d) Side view of paper-based microchannel and paper-based nanoelectrode and bipolar electrode assembly.

图2为本发明一种双极电极-纸基微流控芯片的结构图。Fig. 2 is a structural diagram of a bipolar electrode-paper-based microfluidic chip of the present invention.

图3为本发明一种双极电极-纸基微流控芯片的电场分布示意图。Fig. 3 is a schematic diagram of electric field distribution of a bipolar electrode-paper-based microfluidic chip of the present invention.

具体实施方式：Detailed ways:

下面结合附图对本发明做详细描述。The present invention will be described in detail below in conjunction with the accompanying drawings.

本发明的芯片结构为：如图1（a）所示，包括纸质基片1、纸质盖片5、第一和第二纳米电极6、8、双极电极7；纸质盖片5通过光刻法有疏水障碍2形成微流体通道3，第一、第二纳米电极6、8和双极电极7沉积于纸质基片5表面，介于纸质基片和纸质盖片之间；第一和第二纳米电极6、8分别位于双极电极7的两侧；纸质盖片上设置有进样入口区10和出口区11，预分离浓缩区4为微通道3前半部分，微通道3形成纸电泳-纸色谱，所述纳米电极6、8作为微流通道中电渗流和双极电极7电化学的驱动单元，双极电极7作为微流通道的形成非均匀电场使组份高倍浓集，使被检测组份发生在双极电极两端发生氧化还原反应，对复杂样品中低丰度物质进行聚焦浓缩和检测分析。The chip structure of the present invention is as follows: as shown in Figure 1 (a), it includes apaper substrate 1, apaper cover 5, first and second nano-electrodes 6, 8, and abipolar electrode 7; apaper cover 5Microfluidic channels 3 are formed by photolithography with hydrophobic barriers 2, and the first and second nano-electrodes 6, 8 andbipolar electrodes 7 are deposited on the surface of thepaper substrate 5, between the paper substrate and the paper cover sheet Between; the first and the second nano-electrode 6,8 are respectively positioned at the both sides of thebipolar electrode 7; The paper cover slip is provided with thesample inlet area 10 and theoutlet area 11, and the pre-separation concentration area 4 is the first half of themicrochannel 3, Themicrochannel 3 forms paper electrophoresis-paper chromatography, and the nano-electrodes 6 and 8 are used as electroosmotic flow in the microfluidic channel and the driving unit of thebipolar electrode 7 electrochemistry, and thebipolar electrode 7 forms a non-uniform electric field as the microfluidic channel to make the group The high-power concentration makes the detected components undergo oxidation-reduction reactions at both ends of the bipolar electrode, and performs focused concentration and detection analysis of low-abundance substances in complex samples.

如图1（b）和图1（c）所示，对本发明芯片的制备方法如下：As shown in Figure 1(b) and Figure 1(c), the preparation method of the chip of the present invention is as follows:

1）盖片的制作1) Preparation of coverslips

用CorelDraw或者其他绘图软件设计微通道网络，以2400dpi以上分辨率，激光照排机输出在透明胶片上用作光掩膜（一般广告公司均可提供此项服务），在暗室（或者经减暗的一般实验室）中将光掩模覆盖在滤纸上，置于光刻机上曝光30s（需根据光强进行调整）；若采用5080dpi的激光照排机输出可获得25μm的横向分辨率，若采用20000dpi的照相绘图仪输出横向分辨率为8μm，（若采用铬板掩膜，分辨率可低于8μm，但掩膜制作时间长，费用高）。因此，胶片作为在紫外曝光制作微通道线宽要求不太高的光掩模。按照图1（b），将光刻胶SU-8100和环戊酮按照体积比一定进行稀释，将0.5ml的稀释后的光刻胶均匀涂在直径为5cm的色谱纸上，2min室温干燥后，直接在光刻机(OL-2MaskAligner,AB-M,Inc)上将掩膜菲林片与色谱纸对齐曝光30s，丙酮显影5min，得到具有微通道的纸质盖片；Use CorelDraw or other drawing software to design the microchannel network. With a resolution above 2400dpi, the output of the laser imagesetter is used as a photomask on the transparent film (general advertising companies can provide this service), in the darkroom (or darkened) In the general laboratory), the photomask is covered on the filter paper, and placed on the photolithography machine for exposure for 30s (need to be adjusted according to the light intensity); if a 5080dpi laser phototypesetter is used to output a horizontal resolution of 25μm, if a 20000dpi phototypesetter is used The output lateral resolution of the photoplotter is 8μm, (if a chromium plate mask is used, the resolution can be lower than 8μm, but the mask production time is long and the cost is high). Therefore, the film is used as a photomask that does not require too high a line width of the microchannel exposed to ultraviolet light. According to Figure 1(b), dilute the photoresist SU-8100 and cyclopentanone according to a certain volume ratio, apply 0.5ml of the diluted photoresist evenly on the chromatographic paper with a diameter of 5cm, and dry it at room temperature for 2min , directly align the mask film with the chromatographic paper on the photolithography machine (OL-2MaskAligner, AB-M, Inc) for 30s, develop with acetone for 5min, and obtain a paper cover slip with microchannels;

2）纸质基片的制作2) Fabrication of paper substrate

按图1（c）所示，以普通A4纸裁成一定大小的纸片当掩膜，并按照色谱纸设计的电极的大小和形状把纸片电极区剪掉，把做好的纸掩膜放在色谱纸上面，采用磁控溅射氧化锡铟薄膜或者金属薄膜，获得100nm厚纳米电极和双极电极；双极电极置于两个纳米电极中间，即得纸质基片；As shown in Figure 1(c), cut ordinary A4 paper into a certain size of paper as a mask, and cut off the electrode area of the paper according to the size and shape of the electrode designed by the chromatographic paper, and put the prepared paper mask Put it on the chromatographic paper, and use magnetron sputtering tin indium oxide thin film or metal thin film to obtain 100nm thick nano-electrode and bipolar electrode; the bipolar electrode is placed between the two nano-electrodes to obtain a paper substrate;

3）纸质芯片封合3) Paper chip sealing

预先在双面胶上裁剪出合适的图形，剪掉的部分与电极的形状一致，将双面胶与下层基片精确对齐黏牢，再把纸质盖片与双面胶对齐，再另外用一层透明胶带薄膜覆盖在纸质盖片的上表面，即得本发明的纸基微流控-双极电极芯片。Cut out a suitable figure on the double-sided tape in advance, and the cut part is consistent with the shape of the electrode. Accurately align the double-sided tape with the lower substrate and stick it firmly, then align the paper cover with the double-sided tape, and then use another A layer of scotch tape film is covered on the upper surface of the paper cover sheet to obtain the paper-based microfluidic-bipolar electrode chip of the present invention.

下面，请继续参阅图2和图3所示，对纸基微流控-双极电极沿微通道轴向的电场空间分布示意图做详细阐述。Next, please continue to refer to FIG. 2 and FIG. 3 for a detailed description of the schematic diagram of the electric field spatial distribution of the paper-based microfluidic-bipolar electrode along the microchannel axis.

双极电极为薄片型，与上层盖片5中微通道垂直，其宽度大于整个微流体通道宽度；所述的纳米电极为半导体氧化物/金属电极；所述的纳米电极为氧化锡铟或者Pt电极或者金；所述的薄片双极电极材料为金（Au）或铂（Pt）或者氧化锡铟；所述基片1和盖片5材料均为纸；所述的纳米电极和双极电极均由磁控溅射在纸基基片1上沉积形成；所述的纳米电极和双极电极厚度均为100nm左右。The bipolar electrode is a sheet type, perpendicular to the microchannel in theupper cover sheet 5, and its width is greater than the width of the entire microfluidic channel; the nanoelectrode is a semiconductor oxide/metal electrode; the nanoelectrode is indium tin oxide or Pt electrode or gold; the material of the sheet bipolar electrode is gold (Au) or platinum (Pt) or indium tin oxide; the materials of thesubstrate 1 and thecover sheet 5 are both paper; the nanometer electrode and the bipolar electrode Both are deposited on the paper-basedsubstrate 1 by magnetron sputtering; the thickness of the nano-electrode and bipolar electrode is about 100nm.

在纳米电极6、8上施加一定的电场，BPE金膜的双极电极（7）的两端产生电势降，阳离子向阴极移动；阴离子向阳极移动，在矩形BPE金膜的准等势体的两端与沿微流通道轴向形成电势降形成BPE两端的氧化还原电势，发生氧化还原反应，同时在分离通道中的BPE金膜7周围形成非均匀电场，对分子带起高效的浓集作用，而纸质微流通道本身也有一定的预分离浓缩作用，将两者结合，将十分有利于复杂样品和低丰度物质的分析。A certain electric field is applied on the nano-electrodes 6 and 8, and the two ends of the bipolar electrode (7) of the BPE gold film generate a potential drop, and the cations move to the cathode; The two ends and the axial direction of the microfluidic channel form a potential drop to form the redox potential at both ends of the BPE, and a redox reaction occurs. At the same time, a non-uniform electric field is formed around theBPE gold film 7 in the separation channel to efficiently concentrate the molecular bands. , and the paper microfluidic channel itself also has a certain pre-separation and concentration function. Combining the two will be very beneficial to the analysis of complex samples and low-abundance substances.

实施例1：Example 1:

A．纸基盖片的制作A． Fabrication of paper-based cover slips

按照图1（b），将光刻胶SU-82025和SU-82000稀释剂按照体积比1:6进行稀释，将0.5ml的稀释后的光刻胶均匀涂在直径为5cm的色谱纸上，2min室温干燥后，直接在光刻机(OL-2Mask Aligner,AB-M,Inc)上将掩膜菲林片与色谱纸对齐曝光30s，丙酮显影5min，得到具有微通道的纸质盖片；According to Figure 1(b), dilute the photoresist SU-82025 and SU-82000 thinners at a volume ratio of 1:6, and evenly coat 0.5ml of the diluted photoresist on a chromatographic paper with a diameter of 5cm. After drying at room temperature for 2 minutes, directly align the mask film with the chromatographic paper on a photolithography machine (OL-2Mask Aligner, AB-M, Inc) for 30 seconds, develop with acetone for 5 minutes, and obtain a paper cover sheet with microchannels;

B.纸基基片的制作B. Fabrication of paper-based substrates

按图1（c）所示，以普通A4纸裁成一定大小的纸片当掩膜，并按照色谱纸设计的电极的大小和形状把纸片电极区剪掉，把做好的纸掩膜放在色谱纸上面，采用磁控溅射氧化锡铟薄膜，获得100nm厚纳米电极和双极电极；双极电极置于两个纳米电极中间，即得纸质基片；As shown in Figure 1(c), cut ordinary A4 paper into a certain size of paper as a mask, and cut off the electrode area of the paper according to the size and shape of the electrode designed by the chromatographic paper, and put the prepared paper mask Put it on the chromatographic paper, and use magnetron sputtering indium tin oxide film to obtain a 100nm thick nano-electrode and a bipolar electrode; the bipolar electrode is placed between the two nano-electrodes to obtain a paper substrate;

C.纸质芯片封合C. Paper chip sealing

预先在双面胶上裁剪出合适的图形，剪掉的部分与电极的形状一致，将双面胶与下层基片精确对齐黏牢，再把纸质盖片与双面胶对齐，再另外用一层透明胶带薄膜覆盖在纸质盖片的上表面，即得本发明的纸基微流控-双极电极芯片。Cut out a suitable figure on the double-sided tape in advance, and the cut part is consistent with the shape of the electrode. Accurately align the double-sided tape with the lower substrate and stick it firmly, then align the paper cover with the double-sided tape, and then use another A layer of scotch tape film is covered on the upper surface of the paper cover sheet to obtain the paper-based microfluidic-bipolar electrode chip of the present invention.

实施例2：Example 2:

A．纸基盖片的制作A． Fabrication of paper-based cover slips

按照图1（b），将光刻胶SU-82150和氯仿按照体积比1:4进行稀释，将0.5ml的稀释后的光刻胶均匀涂在直径为5cm的色谱纸上，2min室温干燥后，直接在光刻机(OL-2MaskAligner,AB-M,Inc)上将掩膜菲林片与色谱纸对齐曝光30s，丙酮显影5min，得到具有微通道的纸质盖片；According to Figure 1(b), the photoresist SU-82150 and chloroform were diluted according to the volume ratio of 1:4, and 0.5ml of the diluted photoresist was evenly coated on the chromatographic paper with a diameter of 5cm, and dried at room temperature for 2min , directly align the mask film with the chromatographic paper on the photolithography machine (OL-2MaskAligner, AB-M, Inc) for 30s, develop with acetone for 5min, and obtain a paper cover slip with microchannels;

B.纸基基片的制作B. Fabrication of paper-based substrates

按图1（c）所示，以普通A4纸裁成一定大小的纸片当掩膜，并按照色谱纸设计的电极的大小和形状把纸片电极区剪掉，把做好的纸掩膜放在色谱纸上面，采用磁控溅射Au薄膜，获得100nm厚纳米电极和双极电极；双极电极置于两个纳米电极中间，即得纸质基片；As shown in Figure 1(c), cut ordinary A4 paper into a certain size of paper as a mask, and cut off the electrode area of the paper according to the size and shape of the electrode designed by the chromatographic paper, and put the prepared paper mask Put it on the chromatographic paper, and use magnetron sputtering Au thin film to obtain 100nm thick nano-electrode and bipolar electrode; the bipolar electrode is placed between the two nano-electrodes to obtain a paper substrate;

C.纸质芯片封合C. Paper chip sealing

预先在双面胶上裁剪出合适的图形，剪掉的部分与电极的形状一致，将双面胶与下层纸芯片（基片）精确对齐，黏上即可，在把盖片与双面胶对其后黏上，最后将透明胶覆盖盖片的上表面，即得本发明纸基微流控-双极电极芯片。Cut out a suitable figure on the double-sided tape in advance, the cut part is consistent with the shape of the electrode, align the double-sided tape with the lower paper chip (substrate) precisely, and stick it on. Glue it on afterwards, and finally cover the upper surface of the cover with transparent glue, and obtain the paper-based microfluidic-bipolar electrode chip of the present invention.

实施例2与实施例1主要不同之处在于：不同型号的光刻胶和稀释剂以及稀释比例不同，纳米电极和双极电极材料为Au。The main difference between embodiment 2 andembodiment 1 lies in that: different types of photoresist, diluent and dilution ratio are different, and the material of nanometer electrode and bipolar electrode is Au.

实施例3：Example 3:

A．纸基盖片的制作A． Fabrication of paper-based cover slips

按照图1（b），将光刻胶SU-8100和环戊酮按照体积比1:8进行稀释，将0.5ml的稀释后的光刻胶均匀涂在直径为5cm的色谱纸上，2min室温干燥后，直接在光刻机(OL-2Mask Aligner,AB-M,Inc)上将掩膜菲林片与色谱纸对齐曝光30s，丙酮显影5min，得到具有微通道的纸质盖片；According to Figure 1(b), the photoresist SU-8100 and cyclopentanone were diluted according to the volume ratio of 1:8, and 0.5ml of the diluted photoresist was evenly coated on the chromatographic paper with a diameter of 5cm, at room temperature for 2min After drying, directly align the mask film with the chromatographic paper on the photolithography machine (OL-2Mask Aligner, AB-M, Inc) for 30s, develop with acetone for 5min, and obtain a paper cover slip with microchannels;

B.纸基基片的制作B. Fabrication of paper-based substrates

按图1（c）所示，以普通A4纸裁成一定大小的纸片当掩膜，并按照色谱纸设计的电极的大小和形状把纸片电极区剪掉，把做好的纸掩膜放在色谱纸上面，采用磁控溅射铂薄膜，获得100nm厚纳米电极和双极电极；双极电极置于两个纳米电极中间，即得纸质基片；As shown in Figure 1(c), cut ordinary A4 paper into a certain size of paper as a mask, and cut off the electrode area of the paper according to the size and shape of the electrode designed by the chromatographic paper, and put the prepared paper mask Put it on the chromatographic paper, and use magnetron sputtering platinum film to obtain a 100nm thick nano-electrode and a bipolar electrode; the bipolar electrode is placed between the two nano-electrodes to obtain a paper substrate;

C.纸质芯片封合C. Paper chip sealing

预先在双面胶上裁剪出合适的图形，剪掉的部分与电极的形状一致，将双面胶与下层基片精确对齐黏牢，再把纸质盖片与双面胶对齐，再另外用一层透明胶带薄膜覆盖在纸质盖片的上表面，即得本发明的纸基微流控-双极电极芯片。Cut out a suitable figure on the double-sided tape in advance, and the cut part is consistent with the shape of the electrode. Accurately align the double-sided tape with the lower substrate and stick it firmly, then align the paper cover with the double-sided tape, and then use another A layer of scotch tape film is covered on the upper surface of the paper cover sheet to obtain the paper-based microfluidic-bipolar electrode chip of the present invention.

实施例3与实施例1、2主要不同之处在于：不同型号的光刻胶和稀释剂以及稀释比例不同；纳米电极和双极电极均为铂。The main differences betweenembodiment 3 andembodiments 1 and 2 are: different types of photoresists, diluents and dilution ratios; both nano-electrodes and bipolar electrodes are platinum.

本发明的有益效果是：The beneficial effects of the present invention are:

1）实现了以纸基微流控-双极电极芯片；1) Realized the paper-based microfluidic-bipolar electrode chip;

2）本发明纸基微流控-双极电极芯片具有重量轻、携带方便、可一次性使用、成本低廉、所需样品的体积小、分析速度快的特点，适用于地基或空间搭载生命科学仪器的复杂样品的检测等。2) The paper-based microfluidic-bipolar electrode chip of the present invention has the characteristics of light weight, convenient portability, one-time use, low cost, small volume of required samples, and fast analysis speed, and is suitable for foundation or space-mounted life sciences The detection of complex samples of the instrument, etc.

Claims (10)

1. the micro-fluidic chip of bipolar electrode-paper substrate is characterized in that: comprise paper substrate (1), papery cover plate (5), nano-electrode (6,8), bipolar electrode (7); The papery cover plate has hydrophobic barrier (2) to form microfluidic channel (3) by photoetching process, and nano-electrode (6,8) and bipolar electrode (7) are deposited on paper substrate (1) surface, between paper substrate and papery cover plate; Nano-electrode (6,8) has two, lays respectively at the both sides of bipolar electrode (7); Be provided with sample introduction inlet region (10) and outlet area (11) on the papery cover plate, pre-separation enrichment region (4) is microchannel (3) first half, microchannel (3) forms paper electrophoresis-paper chromatography, described nano-electrode (6,8) is as EOF in the microchannel and the electrochemical driver element of bipolar electrode (7), bipolar electrode (7) concentrates the component high power as the formation inhomogeneous field of microchannel, and make detected component occur in the bipolar electrode two ends redox reaction occurs, low abundance material in the complex sample is focused on concentrated and detects and analyze.

2. the micro-fluidic chip of bipolar electrode-paper substrate as claimed in claim 1, it is characterized in that: described nano-electrode (6,8) thickness is 100nm.

3. the micro-fluidic chip of bipolar electrode-paper substrate as claimed in claim 1, it is characterized in that: described bipolar electrode (7) thickness is 100nm, and is vertical with the microchannel of cover plate.

4. the micro-fluidic chip of bipolar electrode-paper substrate as claimed in claim 1, it is characterized in that: described nano-electrode (6,8) is oxide semiconductor electrode or metal electrode.

5. the micro-fluidic chip of bipolar electrode-paper substrate as claimed in claim 1, it is characterized in that: described bipolar electrode (7) material is gold or platinum or indium tin oxide target.

6. the micro-fluidic chip of bipolar electrode-paper substrate as claimed in claim 1, it is characterized in that: described paper substrate (1) and papery cover plate (5) material are paper.

7. the micro-fluidic chip of bipolar electrode-paper substrate as claimed in claim 1 is characterized in that: the nano thin-film structure that described nano-electrode (6,8) and bipolar electrode (7) form for magnetron sputtering.

8. a method for preparing micro-fluidic chip is characterized in that, comprises the steps:

1) making of papery cover plate

With photoresist and diluent according to volume ratio 1:(4～8) dilute, photoresist after the dilution of 0.5ml is evenly coated on the chromatographic paper that diameter is 5cm, after the drying at room temperature, exposure 30s directly aligns the mask film on litho machine with chromatographic paper, acetone development 5min obtains having the papery cover plate of microchannel;

2) making of paper substrate

The scraps of paper that are cut into a certain size with common A4 paper are worked as mask, size and shape according to the electrode of chromatographic paper design is cut scraps of paper electrode district, ready-made paper mask is placed on above the chromatographic paper, adopt magnetron sputtering indium tin oxide target film or metallic film, obtain the thick nano-electrode of 100nm and bipolar electrode; Bipolar electrode places in the middle of two nano-electrodes, namely gets paper substrate;

3) papery chip involution

Cut out suitable figure at double faced adhesive tape in advance, the part of cutting is consistent with the shape of electrode, with double faced adhesive tape and the glutinous jail of lower floor's substrate Accurate align, again the papery cover plate is alignd with double faced adhesive tape, cover the upper surface of papery cover plate with layer of transparent adhesive tape film, namely get paper substrate of the present invention micro-fluidic-the bipolar electrode chip.

9. the method for a kind of micro-fluidic chip as claimed in claim 8, it is characterized in that: described photoresist is selected from photoresist SU-8100 or photoresist SU-82025 or photoresist SU-82150.

10. the method for a kind of micro-fluidic chip as claimed in claim 8 is characterized in that: described diluent selection cyclopentanone or chloroform.

Images