CN102943307A - Single crystal silicon alcohol-free wool making additive - Google Patents

Abstract

The invention discloses a single crystal silicon alcohol-free wool making additive which is composed of alkali corrosion liquid, nonionic surfactant, cation surfactant, anhydrous dextrose and organic salt. The quantity of the nonionic surfactant is 0.01-5% of that of the alkali corrosion liquid, the quantity of the cation surfactant is 0.01-0.3% of that of the alkali corrosion liquid, the quantity of the anhydrous dextrose is 0.05-5.5% of mass of the alkali corrosion liquid, and the quantity of the organic salt is 0.5-8% of mass of the alkali corrosion liquid. A product of the additive enables a single crystal silicon suede 'pyramid' to be small in size and be about 1-3 mum, improves decontamination effect, removes basket impresses and finger impresses, is capable of quickly and effectively forming the suede and is matched with the existing production devices.

Description

Silicon single crystal is without pure making herbs into wool additive

Technical field

The present invention relates to a kind of silicon single crystal making herbs into wool additive.

Background technology

In silicon single crystal alkaline corrosion making herbs into wool process, the main ingredient of basic solution commonly used is sodium hydroxide or sodium hydroxide, Virahol or ethanol, matte additive such as water glass.

The suede corrosion principle: the matte silicon face is to utilize anisotropic etch of silicon, forms small pyramidal four sides side centrum at (100) silicon chip surface.In general, interplanar covalent linkage density is higher, and then each crystal face of this family of crystal planes connects more firm, also with regard to more difficult being corroded, therefore, corrosion speed is just slower on the vertical direction of this family of crystal planes, and interplanar covalent linkage density is lower, and then this crystal face more easily is corroded.Because each atom has two dangling bonds on (100) crystal face, each atom of (111) face only has dangling bonds, so (100) face is faster than the erosion rate of (111).For silicon, if select suitable corrosive fluid and temperature, (100) face is with more than the large decades of times of (111) face erosion rate.Therefore, the anisotropic etch of (100) silicon chip finally causes producing many densely covered surfaces on the surface and puts centrum for the four sides of (111) face, forms the silicon face of matte shape.

Summary of the invention

The object of the present invention is to provide the effective silicon single crystal of a kind of making herbs into wool without pure making herbs into wool additive.

Technical solution of the present invention is:

A kind of silicon single crystal is characterized in that without pure making herbs into wool additive: be comprised of alkaline corrosion liquid, nonionogenic tenside, cats product, dextrose anhydrous and organic salt; Wherein the amount of nonionogenic tenside is equivalent to 0.01～5% of alkaline corrosion liquid quality, the amount of cats product is equivalent to 0.01～0.3% of alkaline corrosion liquid quality, the amount of dextrose anhydrous is equivalent to 0.05～5.5% of alkaline corrosion liquid quality, and the amount of organic salt is equivalent to 0.5～8% of alkaline corrosion liquid quality.

Described alkaline corrosion liquid is that mass concentration is 0.1～4% sodium hydroxide solution.

Nonionogenic tenside is to contain in alkylphenol polyoxyethylene, high-carbon fatty alcohol polyoxyethylene ether, polyoxyethylene carboxylate, polyoxyethylene amine, alkylol amide, thanomin, sucrose ester, sorbitan ester, the alkylol amide one or several.

Cats product is one or more in fatty amine salt, ethanolamine salt, polyethylene polyamines salt, quaternary, tetrahydroglyoxaline, Moroxydine class, the triazine derivative.

Organic salt is one or more in sodium-acetate, Tetrabutylammonium bromide, acetic acid pyridinium salt, sodium methyl, the sodium ethylate.

Product of the present invention makes monocrystalline silicon piece texture " pyramid " size little, and approximately 1～3 micron, and strengthen clean effect, and remove flower basket mark, remove finger-marks, can effectively form fast matte, and mate with existing equipment.The present invention makes increases " nucleation " starting point in the solution, matte " pyramid " can be grown at silicon chip surface.This is without containing a certain amount of nonionogenic tenside in the pure additive, cats product reduces the surface tension of water, effectively infiltrates silicon chip surface, make making herbs into wool after silicon chip surface clean, obtain qualified matte.

Description of drawings

The invention will be further described below in conjunction with drawings and Examples.

Fig. 1 is originally to be the monocrystalline silicon suede outward appearance photo of processing through the present invention.

Fig. 2 is the monocrystalline silicon suede SEM photo of processing through the present invention.

Embodiment

A kind of silicon single crystal is comprised of alkaline corrosion liquid, nonionogenic tenside, cats product, dextrose anhydrous and organic salt without pure making herbs into wool additive; Wherein the amount of nonionogenic tenside is equivalent to 0.01～5%(example 0.01%, 3%, 5% of alkaline corrosion liquid quality), the amount of cats product is equivalent to 0.01～0.3%(example 0.01%, 0.1%, 0.3% of alkaline corrosion liquid quality), the amount of dextrose anhydrous is equivalent to 0.05～5.5%(example 0.05%, 3%, 5.5% of alkaline corrosion liquid quality), the amount of organic salt is equivalent to 0.5～8%(example 0.5%, 3%, 8% of alkaline corrosion liquid quality).

Described alkaline corrosion liquid is that mass concentration is 0.1～4%(example 0.1%, 2%, 4%) sodium hydroxide solution.

Nonionogenic tenside is to contain alkylphenol polyoxyethylene (or in the high-carbon fatty alcohol polyoxyethylene ether, polyoxyethylene carboxylate, polyoxyethylene amine, alkylol amide, thanomin, sucrose ester, sorbitan ester, alkylol amide one or several).

Cats product is fatty amine salt (or in the ethanolamine salt, polyethylene polyamines salt, quaternary, tetrahydroglyoxaline, Moroxydine class, triazine derivative one or more).

Organic salt is sodium-acetate (or in the Tetrabutylammonium bromide, acetic acid pyridinium salt, sodium methyl, sodium ethylate one or more).

During use, the making herbs into wool temperature is 65～77 ℃, and the making herbs into wool time is 600～1100 seconds.

Claims (5)

1. a silicon single crystal is characterized in that: be comprised of alkaline corrosion liquid, nonionogenic tenside, cats product, dextrose anhydrous and organic salt without pure making herbs into wool additive; Wherein the amount of nonionogenic tenside is equivalent to 0.01～5% of alkaline corrosion liquid quality, the amount of cats product is equivalent to 0.01～0.3% of alkaline corrosion liquid quality, the amount of dextrose anhydrous is equivalent to 0.05～5.5% of alkaline corrosion liquid quality, and the amount of organic salt is equivalent to 0.5～8% of alkaline corrosion liquid quality.

2. silicon single crystal according to claim 1 is characterized in that without pure making herbs into wool additive: described alkaline corrosion liquid is that mass concentration is 0.1～4% sodium hydroxide solution.

3. silicon single crystal according to claim 1 and 2 is characterized in that without pure making herbs into wool additive: nonionogenic tenside is to contain in alkylphenol polyoxyethylene, high-carbon fatty alcohol polyoxyethylene ether, polyoxyethylene carboxylate, polyoxyethylene amine, alkylol amide, thanomin, sucrose ester, sorbitan ester, the alkylol amide one or several.

4. silicon single crystal according to claim 1 and 2 is characterized in that without pure making herbs into wool additive: cats product is one or more in fatty amine salt, ethanolamine salt, polyethylene polyamines salt, quaternary, tetrahydroglyoxaline, Moroxydine class, the triazine derivative.

5. silicon single crystal according to claim 1 and 2 is characterized in that without pure making herbs into wool additive: organic salt is one or more in sodium-acetate, Tetrabutylammonium bromide, acetic acid pyridinium salt, sodium methyl, the sodium ethylate.

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