CN102914373A - Hartmann wave-front sensor based on micro-cylindrical lens array - Google Patents
Hartmann wave-front sensor based on micro-cylindrical lens arrayDownload PDFInfo
- Publication number
- CN102914373A CN102914373ACN2012104727923ACN201210472792ACN102914373ACN 102914373 ACN102914373 ACN 102914373ACN 2012104727923 ACN2012104727923 ACN 2012104727923ACN 201210472792 ACN201210472792 ACN 201210472792ACN 102914373 ACN102914373 ACN 102914373A
- Authority
- CN
- China
- Prior art keywords
- lens arra
- microtrabeculae lens
- photodetector
- microtrabeculae
- spectroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287optical effectEffects0.000claimsabstractdescription24
- 230000011218segmentationEffects0.000claimsdescription9
- 230000005540biological transmissionEffects0.000claimsdescription3
- 239000000463materialSubstances0.000claimsdescription3
- 230000008878couplingEffects0.000claimsdescription2
- 238000010168coupling processMethods0.000claimsdescription2
- 238000005859coupling reactionMethods0.000claimsdescription2
- 238000005259measurementMethods0.000abstractdescription14
- 230000004075alterationEffects0.000abstractdescription11
- 238000001514detection methodMethods0.000abstractdescription4
- 238000003491arrayMethods0.000abstractdescription2
- 238000000034methodMethods0.000description7
- 238000010586diagramMethods0.000description5
- 238000003384imaging methodMethods0.000description4
- 230000002950deficientEffects0.000description2
- 230000004927fusionEffects0.000description2
- 238000005375photometryMethods0.000description2
- 238000005070samplingMethods0.000description2
- 230000003044adaptive effectEffects0.000description1
- 239000002131composite materialSubstances0.000description1
- 210000004087corneaAnatomy0.000description1
- 238000006073displacement reactionMethods0.000description1
- 238000005516engineering processMethods0.000description1
- 238000013213extrapolationMethods0.000description1
- 230000001788irregularEffects0.000description1
- 229920003023plasticPolymers0.000description1
- 239000004033plasticSubstances0.000description1
- 229920003229poly(methyl methacrylate)Polymers0.000description1
- 239000004926polymethyl methacrylateSubstances0.000description1
- 238000003672processing methodMethods0.000description1
- 238000009738saturatingMethods0.000description1
Images
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Translated fromChinese
Description
Technical field
The present invention relates to a kind of optical wave-front sensor, particularly a kind of Hartmann wave front sensor of the large range of dynamic measurement based on the microtrabeculae lens arra belongs to the optical detection field.
Background technology
Hartmann wave front sensor is detecting instrument before a kind of effective optics dynamic wave.Its widespread use human eyes wave-front optical aberration is surveyed, the high power wavefront aberration detects and various beam quality comprehensive detection, especially in the human eyes wave-front optical aberration field of detecting, adaptive optics ophthalmoscope, individualized contact lenses, personalized laser cornea operations all had important directive significance.Traditional Hartmann wave front sensor selects microlens array realization corrugated to cut apart usually.When incident light wave was directional light, all beamlets all focused on the corresponding lenticular optical axis; When there is wavefront distortion in incident light wave, the hot spot that they form in the focal plane just can depart from corresponding optical axis, produce certain displacement, by judging facula mass center and position relationship with reference to barycenter, after obtaining the slope information on the incident light wave wavefront orthogonal directions, restructural incident light wave wavefront to be measured distribution situation.
The range of dynamic measurement of tradition Hartmann wave front sensor is determined by clear aperature and the focal length of the sub-lens of microlens array, the sub-aperture that is microlens array is separated into corresponding subregion with the target surface of photodetector, when there is large aberration in incident light wave, some focal beam spot can exceed the scope of its corresponding subregion, and then can't carry out correct identification, accurately reconstruct wave front aberration has been caused impact.
In the optical detection of reality, Hartmann wave front sensor should guarantee under the high-precision measurement prerequisite, improve as much as possible the dynamic range of measuring.At present, document " increases the method for Shack Hartmann wave front sensor range of dynamic measurement ", the optical precision engineering, 2008,16 (7), introduced a kind of software processing method-extrapolation method that increases range of dynamic measurement, this method certain focal spot corresponding to sub-aperture given in advance, just can extrapolate with this as the starting point obtains focal spot corresponding to all sub-apertures.Document " increases the algorithm research of Shack Hartmann wave front sensor dynamic range ", Acta Optica, 2011,31 (8), proposed effectively to increase the data processing method hot spot homing of dynamic range of sensor, this method makes the hot spot of irregular arrangement get back to various original positions, is rearranged into the spot array of rule, finds wherein certain hot spot and lenticular corresponding relation again.The advantage of these methods is not change under the prerequisite of sensor hardware and has effectively improved range of dynamic measurement, but shortcoming the has been complicated algorithm affects travelling speed of sensor, the amplitude that dynamic range promotes is limited, has certain limitation.China Patent No. is the patent of ZL02123756.5, the adjustable Hartmann wave front sensor of a kind of measuring accuracy and dynamic range is disclosed, added the control element of measuring sub-aperture gating, cut apart the sampling array sampling cycle by this element control corrugated, to reach the purpose of adjusting the sensor measurement dynamic range.The shortcoming of this patent is that structure is too complicated, has reduced measuring accuracy when improving the sensor measurement dynamic range.Document is arranged again: Measurement and compensation of optical aberrations using a single spatial light modulator. (OPTICS EXPRESS.Vol.15, No.23, author: Justo Arines) propose before minute sub-aperture of wavefront, to add a LCD space light modulator to realize removable mask function, thereby improve the dynamic range of Hartmann sensor, but the defective that still exists measuring accuracy to descend.
Summary of the invention
The present invention seeks to overcome the shortcoming of above-mentioned prior art, propose a kind of simple in structurely, strong adaptability is taken into account the Hartmann wave front sensor based on the microtrabeculae lens arra of high precision and large range of dynamic measurement.
The Hartmann wave front sensor of the large range of dynamic measurement based on the microtrabeculae lens arra provided by the invention comprises optical match system (1), the first microtrabeculae lens arra (3) and the second microtrabeculae lens arra (5), spectroscope (2), the first photodetector (4) and the second photodetector (6); Optical match system (1) adds a spectroscope (2) afterwards, place the first microtrabeculae lens arra (3) and the first photodetector (4) at the transmission end of spectroscope (2), place the second microtrabeculae lens arra (5) and the second photodetector (6) at the reflection end of spectroscope (2); Described optical match system (1) expands incident light wave, makes the clear aperature of the size coupling microtrabeculae lens arra of incident light wave; Described microtrabeculae lens arra is realized the wavefront aperture segmentation; Described spectroscope (2) is divided into two bundles with incident light wave, a branch of through forming focal line spot array behind the first microtrabeculae lens arra (3), the first photodetector (4) that focal line spot array is positioned at place, the first microtrabeculae lens (3) focal plane gathers; Another bundle is through forming focal line spot array behind the second microtrabeculae lens arra (5), the second photodetector (6) that focal line spot array is positioned at place, the second microtrabeculae lens (5) focal plane gathers.The image of the first photodetector (4) collection and the image of the second photodetector (6) collection are carried out quadrature fusion stack, form continuous latticed focal line spot.By the continuous line spot of trace accurately judge facula mass center with reference to the position relationship of barycenter, obtain the slope information on the incident light wave wavefront orthogonal directions after, restructural incident light wave wavefront to be measured distribution situation.
In the technique scheme, described optical match system is positioned over spectroscopical front end, and the incident light wave after spectroscope will expand is divided into two bundles, wherein the equivalent optical path of transmitted light to the light path of the first microtrabeculae lens arra and reflected light to the second microtrabeculae lens arra.
Described the first microtrabeculae lens arra and the second microtrabeculae lens arra are realized the wavefront aperture segmentation to transmitted light beam and folded light beam respectively.
The clear aperture of described the second microtrabeculae lens arra and the first microtrabeculae lens arra, size, radius-of-curvature, thickness, material and the quantity of sub-lens are identical, but mutually vertical with the first microtrabeculae lens arra placement location.
Sub-lens quantity in described the second microtrabeculae lens arra and the first microtrabeculae lens arra clear aperature determines the precision of the special Wavefront sensor of Hamann.
Sub-lens quantity ranks number average in the described microtrabeculae lens arra clear aperature is greater than 10.
Described the first photodetector and the second photodetector adopt ccd detector, cmos detector, or the quadrant sensors array.
In the technique scheme, described spectroscope adopts plane beam splitter, or Amici prism.
Advantage of the present invention
Hartmann wave front sensor based on the microtrabeculae lens arra disclosed in this invention has adopted the microtrabeculae lens arra to realize the wavefront aperture segmentation, to obtain continuous latticed focal line spot.When measuring large aberration, even the facula mass center skew is larger, the scope that has exceeded its corresponding subregion, can by the continuous line spot of trace accurately judge facula mass center with reference to the position relationship of barycenter, therefore it is little to have overcome the special Wavefront sensor dynamic range of traditional Hamann, can't accurately measure the defective of large aberration light wave, guarantee to have significantly improved the dynamic range of measuring under the high-precision prerequisite.
Description of drawings:
Fig. 1 is the structural representation that the present invention is based on the special Wavefront sensor embodiment of Hamann of microlens array.
Fig. 2 is the structural representation of thesub-lens array 4 * 1 of microtrabeculae lens arra of the present invention.
Fig. 3 is that microtrabeculae lens arra of the present invention is treated photometry ripple realization wavefront aperture segmentation, and obtains the work synoptic diagram of sequential focusing line spot array at photodetector.
Fig. 4 is the synoptic diagram of the sequential focusing line spot array that receives of electric explorer of the present invention, and wherein (a) is the line spot array synoptic diagram that the first photodetector receives, and (b) is the line spot array synoptic diagram that the second photodetector receives.
Fig. 5 is that the image of the present invention's the first photodetector collection and the image of the second photodetector collection carry out quadrature fusion stack, forms continuous latticed focal line spot synoptic diagram.
Among the figure, 1-optical match system, 2-spectroscope, the 3-the first microtrabeculae lens arra, the 4-the first photodetector, the 5-the second microtrabeculae lens arra, the 6-the second photodetector.
Embodiment:
The present invention is described further below in conjunction with embodiment and accompanying drawing, but should not be construed as protection domain of the present invention of task limits.
As shown in Figure 1, the present invention is based on the Hartmann wave front sensor of microtrabeculae lens arra, thespectroscope 2 that comprisesoptical match system 1 and back thereof, the transmission end ofspectroscope 2 are being placed the firstmicrotrabeculae lens arra 3, thefirst photodetectors 4 and are being placed on the focal plane of the firstmicrotrabeculae lens arra 3; The reflection end ofspectroscope 2 is being placed the secondmicrotrabeculae lens arra 5, the second photodetectors 6 and is being placed on the focal plane of the second microtrabeculae lens arra 5.In this example,optical match system 1 employing enlargement factor is 3 telescopic system, and it is the plane beam splitter of 5:5 thatspectroscope 2 adopts saturating inverse ratio; The extraneous aberration of introducing in order to reduce the microtrabeculae lens arra causes the impact of extra wavefront distortion to incident light wave, and it is the anaberration lens of 10mm that the sub-lens of the firstmicrotrabeculae lens arra 3 and the secondmicrotrabeculae lens arra 5 all adopts focal length.
Described the firstmicrotrabeculae lens arra 3 and the secondmicrotrabeculae lens arra 5 are realized the wavefront aperture segmentation; When the wave front aberration of incident light wave is carried out composite measurement, light wave to be measured is realized expanding throughoptical match system 2, then be divided into two bundles by spectroscope, a branch of incide on the firstmicrotrabeculae lens arra 3 and by its imaging wherein, whole light beam forms continuous focal line spot array by aperture segmentation and at the target surface offirst photodetector 4 at place, the firstmicrotrabeculae lens arra 3 focal planes; In addition light beam then incides on the secondmicrotrabeculae lens arra 5 and by its imaging, and whole light beam forms continuous focal line spot array by aperture segmentation and at the target surface of second photodetector 6 at place, the secondmicrotrabeculae lens arra 5 focal planes.
As shown in Figure 2, the structural representation ofsub-lens 4 * 1 arrays of microtrabeculae lens arra, wherein the sub-lens structural parameters are as shown in Table 1.
Table one, the sub-lens structural parameters of microtrabeculae lens arra (unit: millimeter mm)
| Focal length | 10 |
| Thickness | 2.5 |
| Material | Plastics PMMA |
As shown in Figure 3, the microtrabeculae lens arra is treated the photometry ripple and is realized the wavefront aperture segmentation, forms continuous focal line spot array.The microtrabeculae lens arra carries out wavefront division with light wave to be measured, by each sub-lens the light wave after cutting apart is carried out imaging again, by the characteristic of post lens wire imaging as can be known, acquisition be the wire focal spot.
As shown in Figure 4, the line spot array that obtains of photodetector compares as can be known with (a) of Fig. 4 and (b), and the structural parameters of the first microtrabeculae lens arra and the second microtrabeculae lens arra are in full accord, but placement location is mutually vertical.
As shown in Figure 5, at first with reference to the structural parameters of microtrabeculae lens arra the pixel of photodetector is divided, to determine with reference to center-of-mass coordinate (X0, Y0).The image that the image that the first photodetector is obtained and the second photodetector obtain carries out quadrature and merges stack, calculates the center-of-mass coordinate (X of hot spot intersection pointi, Yi) and with reference to center-of-mass coordinate (X0, Y0) side-play amount (Δ X on X and Y-directioni, Δ Yi), calculate light wave wavefront slope information, just restructural light wave wavefront to be measured distribution situation by following formula again:
Wherein f is the focal length of the first and second microtrabeculae lens.Sub-lens quantity in the microtrabeculae lens arra clear aperature is more, and the light wave wavefront to be measured of reconstruct distributes more accurate, should guarantee that usually sub-lens quantity ranks number average is greater than 10.
Claims (7)
1. the Hartmann wave front sensor based on the microtrabeculae lens arra comprises optical match system (1), the first microtrabeculae lens arra (3) and the second microtrabeculae lens arra (5), spectroscope (2), the first photodetector (4) and the second photodetector (6); It is characterized in that optical match system (1) adds a spectroscope (2) afterwards, place the first microtrabeculae lens arra (3) and the first photodetector (4) at the transmission end of spectroscope (2), place the second microtrabeculae lens arra (5) and the second photodetector (6) at the reflection end of spectroscope (2); Described optical match system (1) expands incident light wave, makes the clear aperature of the size coupling microtrabeculae lens arra of incident light wave; Described microtrabeculae lens arra is realized the wavefront aperture segmentation; Described spectroscope (2) is divided into two bundles with incident light wave, a branch of through forming focal line spot array behind the first microtrabeculae lens arra (3), the first photodetector (4) that focal line spot array is positioned at place, the first microtrabeculae lens (3) focal plane gathers; Another bundle is through forming focal line spot array behind the second microtrabeculae lens arra (5), the second photodetector (6) that focal line spot array is positioned at place, the second microtrabeculae lens (5) focal plane gathers.
2. the Hartmann wave front sensor based on the microtrabeculae lens arra according to claim 1, it is characterized in that described optical match system (1) is positioned over the front end of spectroscope (2), incident light wave after spectroscope (2) will expand is divided into two bundles, wherein the equivalent optical path of transmitted light to the light path of the first microtrabeculae lens arra and reflected light to the second microtrabeculae lens arra.
3. the Hartmann wave front sensor based on the microtrabeculae lens arra according to claim 1, size, radius-of-curvature, thickness, material and the quantity of clear aperture, sub-lens that it is characterized in that described the second microtrabeculae lens arra (5) and the first microtrabeculae lens arra (3) is identical, but mutually vertical with the first microtrabeculae lens arra (3) placement location.
4. the Hartmann wave front sensor based on the microtrabeculae lens arra according to claim 3 is characterized in that the interior sub-lens quantity of described the second microtrabeculae lens arra (5) and the first microtrabeculae lens arra (3) clear aperature determines the precision of Hartmann wave front sensor.
5. each described Hartmann wave front sensor based on the microtrabeculae lens arra in 4 according to claim 1 is characterized in that sub-lens quantity ranks number average in the microtrabeculae lens arra clear aperature is greater than 10.
6. each described Hartmann wave front sensor based on the microtrabeculae lens arra in 4 according to claim 1, it is characterized in that described the first photodetector (4) and the second photodetector (6) adopt ccd detector, cmos detector, or the quadrant sensors array.
7. each described Hartmann wave front sensor based on the microtrabeculae lens arra in 4 according to claim 1 is characterized in that described spectroscope (2) adopts plane beam splitter, or Amici prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104727923ACN102914373A (en) | 2012-11-20 | 2012-11-20 | Hartmann wave-front sensor based on micro-cylindrical lens array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104727923ACN102914373A (en) | 2012-11-20 | 2012-11-20 | Hartmann wave-front sensor based on micro-cylindrical lens array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102914373Atrue CN102914373A (en) | 2013-02-06 |
Family
ID=47612844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012104727923APendingCN102914373A (en) | 2012-11-20 | 2012-11-20 | Hartmann wave-front sensor based on micro-cylindrical lens array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102914373A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557947A (en)* | 2013-10-30 | 2014-02-05 | 东南大学 | Double-mode wave-front sensor capable of conducting automatic alignment and measuring method thereof |
| CN106767391A (en)* | 2016-12-23 | 2017-05-31 | 浙江大学 | The sensitivity intensifier and method of four wavefront lateral shearing interference Wavefront sensors |
| CN110703394A (en)* | 2018-07-09 | 2020-01-17 | 余姚舜宇智能光学技术有限公司 | Large-area signal light energy acquisition system and method |
| CN111829671A (en)* | 2020-09-08 | 2020-10-27 | 中国工程物理研究院应用电子学研究所 | High-resolution wavefront detection device and wavefront restoration method |
| CN112097923A (en)* | 2020-07-30 | 2020-12-18 | 福建华科光电有限公司 | Simple wavefront measurement method for optical element |
| CN112229528A (en)* | 2020-09-28 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Hartmann wavefront sensor based on Fermat spiral self-interference multifocal lens array |
| CN114777933A (en)* | 2022-06-20 | 2022-07-22 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
| CN115183886A (en)* | 2022-07-11 | 2022-10-14 | 中国科学院光电技术研究所 | Wavefront sensor based on defocused grating array |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518854A (en)* | 1982-06-17 | 1985-05-21 | Itek Corporation | Combined shearing interferometer and Hartmann wavefront sensor |
| CN1673707A (en)* | 2005-04-20 | 2005-09-28 | 中国人民解放军国防科学技术大学 | Large aperture linear array Hartmann wavefront sensor |
| CN1731085A (en)* | 2005-08-12 | 2006-02-08 | 中国科学院上海光学精密机械研究所 | device for measuring laser beam parallelism |
| CN102419213A (en)* | 2011-12-20 | 2012-04-18 | 四川大学 | Hartmann wavefront sensor based on diffraction grating arrays |
- 2012
- 2012-11-20CNCN2012104727923Apatent/CN102914373A/enactivePending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518854A (en)* | 1982-06-17 | 1985-05-21 | Itek Corporation | Combined shearing interferometer and Hartmann wavefront sensor |
| CN1673707A (en)* | 2005-04-20 | 2005-09-28 | 中国人民解放军国防科学技术大学 | Large aperture linear array Hartmann wavefront sensor |
| CN1731085A (en)* | 2005-08-12 | 2006-02-08 | 中国科学院上海光学精密机械研究所 | device for measuring laser beam parallelism |
| CN102419213A (en)* | 2011-12-20 | 2012-04-18 | 四川大学 | Hartmann wavefront sensor based on diffraction grating arrays |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557947A (en)* | 2013-10-30 | 2014-02-05 | 东南大学 | Double-mode wave-front sensor capable of conducting automatic alignment and measuring method thereof |
| CN103557947B (en)* | 2013-10-30 | 2015-10-14 | 东南大学 | A kind of self-aligning double mode Wavefront sensor and measuring method |
| CN106767391A (en)* | 2016-12-23 | 2017-05-31 | 浙江大学 | The sensitivity intensifier and method of four wavefront lateral shearing interference Wavefront sensors |
| CN110703394A (en)* | 2018-07-09 | 2020-01-17 | 余姚舜宇智能光学技术有限公司 | Large-area signal light energy acquisition system and method |
| CN112097923A (en)* | 2020-07-30 | 2020-12-18 | 福建华科光电有限公司 | Simple wavefront measurement method for optical element |
| CN111829671A (en)* | 2020-09-08 | 2020-10-27 | 中国工程物理研究院应用电子学研究所 | High-resolution wavefront detection device and wavefront restoration method |
| CN112229528A (en)* | 2020-09-28 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Hartmann wavefront sensor based on Fermat spiral self-interference multifocal lens array |
| CN114777933A (en)* | 2022-06-20 | 2022-07-22 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
| CN114777933B (en)* | 2022-06-20 | 2022-09-20 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
| CN115183886A (en)* | 2022-07-11 | 2022-10-14 | 中国科学院光电技术研究所 | Wavefront sensor based on defocused grating array |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102914373A (en) | Hartmann wave-front sensor based on micro-cylindrical lens array | |
| CN102735348B (en) | Wavefront measurement method based on Hartmann wavefront sensor | |
| CN102331303B (en) | Phase difference wavefront sensor based on grating | |
| CN104236856B (en) | Wave aberration detection device of objective lens imaging system and system error correction method of wave aberration detection device | |
| CN101493375B (en) | Splicing detection device based on small-caliber circular Hartmann-shack wavefront sensor | |
| CN102252832B (en) | Large aperture collimation system wavefront quality detection device and method | |
| CN101403650B (en) | Differential confocal combination ultra-long focal length measuring method and apparatus | |
| CN102175143B (en) | Line scanning differential confocal measuring device based on light path of pillar lens | |
| CN204165736U (en) | A kind of wave aberration high precision measuring device for object lens imaging system | |
| CN103712573B (en) | The spatial match bearing calibration of array image sensor in binary channels interferometry | |
| CN102419213A (en) | Hartmann wavefront sensor based on diffraction grating arrays | |
| CN111220361B (en) | Method for measuring focal length of micro-lens array | |
| CN102967380B (en) | Hartmann wavefront sensor based on unit photosensitive detector array | |
| CN101408478B (en) | Method and apparatus for measuring cofocal combined ultra-long focal distance | |
| CN202420688U (en) | Hartmann wavefront sensor based on diffraction grating arrays | |
| CN103557947B (en) | A kind of self-aligning double mode Wavefront sensor and measuring method | |
| CN102589428B (en) | Method and device for tracking and correcting sample axial position based on asymmetric incidence | |
| CN105466576B (en) | Device and method for synchronously measuring height and angle non-isohalo wavefront errors of atmospheric turbulence | |
| CN103033260B (en) | Wave surface separation and defocusing based phase retrieval wavefront analyzer and analytical method thereof | |
| CN101614530B (en) | A novel method and device for real-time detection of beam flat drift and angular drift | |
| CN102840964A (en) | Large-caliber long-focus collimator focal point real-time monitoring system | |
| CN103528539A (en) | Nonzero-digit interference system based on point source array | |
| CN108955904B (en) | Multifunctional wavefront detection device considering point-surface target | |
| CN106338823A (en) | Phase inversion method based on mixed focal length Fresnel zone plate | |
| CN101285735B (en) | A Hartmann sensor that expands the dynamic range by separating the overall tilt of the wavefront |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication | Application publication date:20130206 |