CN102849462A - Device used for conveying substrate - Google Patents

Abstract

Translated fromChinese

本发明公开一种用于传送基板的装置。所述装置包括：真空室；托盘，用于在所述真空室中传送所述基板；上部传送单元，用于向所述托盘的上部传递驱动力而不接触所述托盘的上端部；相对运动容许单元，耦合至所述托盘的下端部并可相对于所述托盘运动；以及多个引导单元，用于接触所述相对运动容许单元并引导所述托盘的运动。

The invention discloses a device for transferring substrates. The apparatus includes: a vacuum chamber; a tray for transferring the substrate in the vacuum chamber; an upper transfer unit for transferring a driving force to an upper portion of the tray without contacting an upper end portion of the tray; relative movement a allowing unit coupled to a lower end portion of the tray and movable relative to the tray; and a plurality of guide units contacting the relative movement allowing unit and guiding the movement of the tray.

Description

Be used for transmitting the device of substrate

The cross reference of related application

The right that the korean patent application case of filing an application to Korea S Department of Intellectual Property korean patent application case on July 13rd, 10-2011-0065153 number 1 that the application's case is advocated to file an application to Korea S Department of Intellectual Property based on June 30th, 2011 is 10-2011-0069438 number, the content of described korean patent application case is incorporated herein in full with way of reference.

Technical field

The present invention relates to a kind of device for transmitting substrate, more specifically, relate to and a kind ofly can be placed with the pallet of substrate and transmit the device of substrate in vacuum chamber by top, described device comprises the acceleration/deceleration unit for control substrate transfer rate.

Background technology

Generally speaking, for the manufacture of Liquid Crystal Display (liquid crystal display; LCD) device, plasma display (plasma display panel; PDP) device, field-emitter display (field emission display; FED) device, electroluminescent display (electro luminescence display; ELD) device or similarly flat-panel monitor (flat panel display; FPD) most of techniques of device all are that substrate is carried out.

In this kind technique for the manufacture of the flat-panel monitor device, repeatedly repeat depositing operation, photoetching process and etch process, and relate to many other techniques, such as cleaning, bonding, cutting etc.

Therefore, when carrying out every kind of technique, must the loading or unloading substrate.For loading and unloading carried base board, considered to use coaxial type method (in-line type method), in the coaxial type method, pass the pallet that chamber is placed with substrate above vertically transmitting.

Fig. 1 is the cutaway view for the prior device that transmits substrate, and Fig. 2 is the front elevation of Fig. 1.As shown in Figures 1 and 2, the prior device that be used for to transmit substrate comprise chamber 1, above be placed with thepallet 2 of substrate S and contact with the bottom ofpallet 2 and to the driving rolls 3 ofpallet 2 transmission of drive force.Driving rolls 3 is by electrical motor 4 driven rotary and therefore to pallet 2 transmission of drive force.

Simultaneously, provide theguidance unit 1a and the 2a that guidepallet 2 with magnetic force, fall in order to can prevent thepallet 2 of perpendicular movement.Particularly, palletpermanent magnet 2a is arranged on the upper end ofpallet 2, and chamberpermanent magnet 1a arranges at chamber 1 interior contiguous pallet permanent magnet 2a.Therefore at this moment, palletpermanent magnet 2a is different from the polarity of chamberpermanent magnet 1a, and attracts each other and do not contact, thereby can prevent thatpallet 2 from falling when being transmitted.In other words, the prior device that be used for to transmit substrate adopts following method: the bottom of driving rolls 3 andpallet 2 that wherein is arranged in the downside of chamber 1 is in contact with one another, and comesmobile pallet 2 by the rotational force of driving rolls 3.

Yet, be used for to transmit the prior device of substrate, utilize to contact transmission of drive force between the bottom of driving rolls 3 andpallet 2, therefore, the slip betweenpallet 2 and the driving rolls 3 can cause mismatch.In other words, when transmitting substrate S,pallet 2 may not be in contact with one another in the normal position with driving rolls 3, thereby can increase defective and reduce productive force.

Equally, be used for to transmit the prior device of substrate,pallet 2 is to be transmitted simultaneously with the driving rolls 3 that is used for transmission of drive force is contacted, thereby particle can have harmful effect.

In addition, in the prior device that is used for transmitting substrate, if the acceleration/deceleration speed ofpallet 2 raises to reduce production time per piece (tact time) by delivery tray 2 rapidly, the problem cause because sliding between the bottom of driving rolls 3 andpallet 2 then can appear when makingpallet 2 acceleration or deceleration, thereby make the time ofpallet 2 acceleration/deceleration elongated, this is because the position deviation thatpallet 2 is expected certainly, and along with the friction between the bottom of driving rolls 3 andpallet 2 increases and generation foreign matter (that is, particle).

Summary of the invention

One aspect of the present invention provides a kind of device for transmitting substrate, in this device, can not come in contact to the pallet transmission of drive force, even pallet departs from correct position, pallet also can be back to its initial position rapidly, and can prevent from producing when delivery tray particle.

Another aspect of the present invention provides a kind of device for transmitting substrate, in this device, be used for increasing/reducing by electromagnetic force the contiguous described pallet of acceleration/deceleration unit of pallet transfer rate, thereby can increase the transfer rate of pallet and can prevent that foreign matter from producing.

According to an aspect of the present invention, provide a kind of device for transmitting substrate, described device comprises: vacuum chamber; Pallet is used for transmitting described substrate at described vacuum chamber; The top delivery unit is used for not contacting to the top transmission of drive force of described pallet the upper end of described pallet; The unit is allowed in relative motion, and the bottom that is coupled to described pallet also can be with respect to described tray motion; And a plurality of guidance units, be used for contacting the motion that described relative motion is allowed the unit and guided described pallet.

Described relative motion allows that the unit can comprise rotating body, and described rotating body is to be coupled to the relative rotation described pallet.

Described rotating body can comprise: the tray support axle is coupled to the described bottom of described pallet; Swivelling pipe is used for therein accommodating described tray support axle, and has and the contacted outside face of described guidance unit; And bearing, have the inner periphery that is coupled to described tray support axle and the excircle that is coupled to described swivelling pipe.

Described guidance unit can comprise guide roller, described guide roller has guiding surface, described guiding surface has curvature, the diameter of described curvature is along with near the center of described guiding surface and reduce, and the curvature of described swivelling pipe is less than the described curvature of the described guiding surface of described guide roller.

Described guidance unit can comprise guide roller, and described guide roller has guiding surface, and described guiding surface has curvature, and the diameter of described curvature is along with near the center of described guiding surface and reduce.

Described top delivery unit can comprise: the top permanent magnet is arranged on the described upper end of described pallet; And the top electromagnet, contiguous described top permanent magnet and being arranged in the described vacuum chamber.

Described top delivery unit can comprise: the top permanent magnet is arranged on the described upper end of described pallet; And the top electromagnet, contiguous described top permanent magnet and being arranged at outside the described vacuum chamber.

Described device also can comprise mounting groove, the described upper end of the contiguous described pallet of described mounting groove and outside face depression on the outer wall of described vacuum chamber, and described top electromagnet is embedded in and is installed in the described mounting groove.

Described top electromagnet can be removably installed in the described mounting groove.

Described device also can comprise the bottom delivery unit, is used for not contacting described relative motion to the bottom transmission of drive force of described pallet and allows the unit.

Described bottom delivery unit can comprise: the bottom permanent magnet is arranged at described relative motion and allows in the unit; And the bottom electromagnet, contiguous described bottom permanent magnet and being arranged in the described vacuum chamber.

Described bottom delivery unit can comprise: the bottom permanent magnet is arranged at described relative motion and allows in the unit; And the bottom electromagnet, contiguous described bottom permanent magnet and being arranged at outside the described vacuum chamber.

The outer wall of described vacuum chamber can be formed with the protrusion that raises up between each described guidance unit, the described protrusion of described vacuum chamber is provided with the mounting groove from the outside face depression of described protrusion, and described bottom electromagnet can be embedded in and be installed in the described mounting groove.

Described bottom electromagnet can be removably installed in the described mounting groove.

According to an aspect of the present invention, provide a kind of device for transmitting substrate, described device comprises: pallet, be equipped with described substrate and be used for transmitting described substrate; Delivery unit is arranged in the bottom of described pallet and is used for transmitting described pallet; And acceleration/deceleration unit, be close to upper end or the bottom of described pallet, and increase or reduce the transfer rate of described pallet by electromagnetic force.

Described device also can comprise guidance unit, is arranged in the top of described pallet and is used for guiding described pallet.

Described acceleration/deceleration unit can comprise: at least one rotary magnet, and described upper end or the described bottom of contiguous described pallet, and rotatably be arranged on the direction of transfer of described pallet; Turning motor is used for rotating described rotary magnet; And Rotation Controllers, for hand of rotation and the speed of controlling described turning motor.

Described rotary magnet can be in the described bottom of described pallet the contiguous described pallet in cross side place and rotate in the direction that transmits described pallet.

Described rotary magnet can have round-shaped, and wherein the N utmost point and the S utmost point are crisscross arranged along the described circumference of described rotary magnet.

Described acceleration/deceleration unit can comprise: at least one motion magnet, described upper end or the described bottom of contiguous described pallet and be arranged near or away from described pallet; Actuator, be used for driving described motion magnet near or away from described pallet; And driving governor, be used for controlling the operation of described actuator.

Described motion magnet can be in the described bottom of described pallet the contiguous described pallet in cross side place and be arranged near or away from described pallet.

Described acceleration/deceleration unit can comprise: a plurality of static magnet are arranged at specific interval in the described bottom of described pallet; Electromagnet module, contiguous described static magnet and with arranged at certain intervals, and produce magnetic force to increase/to reduce the transfer rate of described pallet by the interaction with described static magnet; And module controller, be used for the supply that control is applied to the electric current of described electromagnetic module, optionally to change the N/S polarity of described electromagnetic module.

Described electromagnet module can comprise: a plurality of iron cores, contiguous described static magnet and and described static magnet between leave predetermined space, and be wound with coil at described iron core; And connecting panel, be used for described a plurality of iron cores are linked into an integrated entity.

Described a plurality of iron core can be arranged by specific interval, and described interval is different from the arrangement pitch of described static magnet.

Described delivery unit can comprise: the pallet lower tracks is coupled to the described bottom of described pallet; And a plurality of driving rollss, in the bottom of described pallet lower tracks, be arranged in contact and be rotated in the described pallet lower tracks.

The described bottom of described pallet lower tracks or described pallet can comprise the high-conductivity metal that is embedded in wherein.

Described guidance unit can comprise: the pallet upper track is configured to ferromagnet and is coupled to the described upper end of described pallet; And the magnetic guiding unit, described pallet upper track is embedded in wherein and has polarity, to produce the magnetic force that is used for promoting in the relative both sides of described pallet upper track described pallet upper track.

As mentioned above, the top delivery unit does not contact the upper end of described pallet to the pallet transmission of drive force, and allow that with the relative motion of the bottom that is coupled to described pallet the guidance unit of unit contacts, and relative motion allows that the unit is coupled to pallet with can be movable relatively, even thereby pallet shakes during transmitting, described pallet also can be back to its initial position rapidly, and can prevent during transmitting that particle from producing.

Equally, be used for increasing/reducing by electromagnetic force the contiguous described pallet of acceleration/deceleration unit of the transfer rate of pallet, thereby can increase the transfer rate of described pallet and can prevent that foreign matter (that is, particle) from producing.

Description of drawings

Read by reference to the accompanying drawings following detailed description the in detail, can more clearly understand exemplary embodiment of the present invention, in the accompanying drawings:

Fig. 1 is the cutaway view for the prior device that transmits substrate;

Fig. 2 is the front elevation of Fig. 1;

Fig. 3 is the cutaway view of the device that is used for the transmission substrate of the first exemplary embodiment according to the present invention;

Fig. 4 is the transparent view that being used among Fig. 3 transmits the device of substrate;

Fig. 5 allows the transparent view of unit for the relative motion that shows Fig. 4;

Fig. 6 be Fig. 3's ' A ' zone enlarged view;

Fig. 7 is installed on the outer transparent view of vacuum chamber for the top electromagnet that shows the device that is used for the transmission substrate of the second exemplary embodiment according to the present invention;

Fig. 8 is installed on the outer view of vacuum chamber for the top electromagnet that is used for key drawing 7;

Fig. 9 is for showing the transparent view of the bottom electromagnet of the device that is used for the transmission substrate of the 3rd exemplary embodiment according to the present invention;

Figure 10 is installed on the outer transparent view of vacuum chamber for the bottom electromagnet that shows the device that is used for the transmission substrate of the 4th exemplary embodiment according to the present invention;

Figure 11 is the schematic elevational view of the device that is used for the transmission substrate of the 5th exemplary embodiment according to the present invention;

Figure 12 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 11;

Figure 13 is the pallet lower tracks of the device that is used for the transmission substrate among Figure 11 and the side-looking enlarged drawing of the contact part between the driving rolls;

Figure 14 is the schematic diagram for the operation of the rotary magnet of explaining Figure 11;

Figure 15 is the view for the alternate exemplary embodiment of the rotary magnet of explaining Figure 14;

Figure 16 is the schematic elevational view of the device that is used for the transmission substrate of the 6th exemplary embodiment according to the present invention;

Figure 17 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 16;

Figure 18 is the lateral plan of Figure 17;

Figure 19 is the schematic elevational view of the device that is used for the transmission substrate of the 7th exemplary embodiment according to the present invention;

Figure 20 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 19;

Figure 21 is the schematic side elevation of the device that is used for the transmission substrate of the 8th exemplary embodiment according to the present invention;

Figure 22 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 21;

Figure 23 is the schematic elevational view of the device that is used for the transmission substrate of the 9th exemplary embodiment according to the present invention; And

Figure 24 is the view for the operation of the acceleration/deceleration unit of the device that is used for the transmission substrate of explaining Figure 23.

The main element description of symbols

1: chamber

1a: chamber permanent magnet

2: pallet

2a: pallet permanent magnet

3: driving rolls

4: electrical motor

S: substrate

T1: the device that is used for transmitting substrate

T2: the device that is used for transmitting substrate

T3: the device that is used for transmitting substrate

T4: the device that is used for transmitting substrate

T5: the device that is used for transmitting substrate

T6: the device that is used for transmitting substrate

T7: the device that is used for transmitting substrate

T8: the device that is used for transmitting substrate

T9: the device that is used for transmitting substrate

10: vacuum chamber

11: protrusion

20: pallet

30: the top delivery unit

30a: top delivery unit

31: the top permanent magnet

33: the top electromagnet

33a: top electromagnet

40: the unit is allowed in relative motion

41: the tray support axle

43: swivelling pipe

45: bearing

51: guide roller

53: guiding surface

60b: bottom delivery unit

63b: bottom electromagnet

63c: bottom electromagnet

H: mounting groove

100: pallet

200: delivery unit

210: the pallet lower tracks

220: driving rolls

230: the roller driving motor

300: acceleration/deceleration unit

310: rotary magnet

320: turning motor

400: guidance unit

410: the pallet upper track

420: the magnetic guiding unit

C: high-conductivity metal

500: acceleration/deceleration unit

510: motion magnet

520: actuator

600: acceleration/deceleration unit

610: static magnet

620: electromagnet module

621: iron core

622: connecting panel

The specific embodiment

Hereinafter with reference to the accompanying drawing that is used for the illustration various embodiments of the present invention, to obtain fully understanding concept of the present invention and advantage thereof.

Hereinafter, will elaborate concept of the present invention by being explained with reference to the drawings various embodiments of the present invention.Ref. No. identical among the figure is indicated identical element.

Fig. 3 is the cutaway view of the device that is used for the transmission substrate of the first exemplary embodiment according to the present invention, Fig. 4 is the transparent view that being used among Fig. 3 transmits the device of substrate, Fig. 5 allows the transparent view of unit for the relative motion that shows Fig. 4, and Fig. 6 is the enlarged view in ' A ' zone of Fig. 3.

Such as Fig. 3 to shown in Figure 6, according to the present invention the device T1 that is used for transmitting substrate of the first exemplary embodiment comprisevacuum chamber 10, be used forvacuum chamber 10 transmitsubstrate S pallet 20, be used for not contacting to the top transmission of drive force ofpallet 20 upper end ofpallet 20top delivery unit 30, be coupled to the bottom ofpallet 20 and can allowunit 40 and be used for a plurality ofguidance units 50 that the contact relative motion is allowedunit 40 and guided the motion ofpallet 20 with respect to the relative motion ofpallet 20 motions.

Vacuum chamber 10 separates outside atmosphere zone and inner vacuum zone, and allows the substrate S on thedelivery tray 20 therein.

The shape ofpallet 20 looks like to have the flat board of narrow width, and is provided with for the section of the laying (not shown) of placing substrate S in the above at a side place.In other words, substrate S vertically is stacked in laying in the section of pallet 20.In this exemplary embodiment, with standing upright state delivery tray 20.Herein, the direction of transfer ofpallet 20 refers to the vertical ofpallet 20.

Substrate S can comprise the various substrate S for the manufacture of the similar devices such as flat-panel monitor device and liquid crystal display device.Substrate S can comprise semi-conductive wafer.

Simultaneously, relative motion allows thatunit 40 is coupled to the bottom of pallet 20.Particularly, relative motion allows thatunit 40 is for being coupled to the relative rotation the rotating body of pallet 20.Relative motion allows thatunit 40 rotatably is coupled to the bottom of pallet 20.In other words, relative motion allows thatunit 40 is with respect to the rotation that vertically (is equivalent to hereinafter the direction of thetray support axle 41 of will set forth) of pallet 20.Relative motion allows thatunit 40 is used for preventing thatpallet 20 is transmitted, and hereinafter will elaborate it when Width departs from its tram.

Such as Fig. 3 to shown in Figure 6, relative motion allowunit 40 comprise the bottom that is coupled topallet 20tray support axle 41, be used for accommodatingtray support axle 41 therein and have with the swivellingpipe 43 ofguidance unit 50 contacted outside faces and have the inner periphery that is coupled totray support axle 41 and be coupled to the bearing 45 of the excircle of swivellingpipe 43.

In other words, be coupled to the inner periphery of bearing 45 at thetray support axle 41 that vertically is coupled to the bottom ofpallet 20 of pallet 20.At this moment, swivellingpipe 43 is coupled to the excircle of bearing 45, so that swivellingpipe 43 can relatively rotate with respect totray support axle 41.

The shape of swivellingpipe 43 has andguidance unit 50 contacted excircles as hollow cylinder, and can be coupled to the relative rotationtray support axle 41 by bearing 45.

Swivelling pipe 43 can be with respect to 41 rotations of tray support axle; even thereby during thedelivery tray 20 because the particulate on the guiding surface ofguidance unit 50 or owing to acceleration/deceleration etc. makespallet 20 depart from the tram at the Width ofpallet 20,pallet 20 also can be got back to its tram by the rotation of swivellingpipe 43.

Bearing 45 in this exemplary embodiment is radial ball bearing, and wherein ball is embedded between its inner periphery and the excircle.The inner periphery of bearing 45 is coupled totray support axle 41, and excircle is coupled to swivellingpipe 43, so that swivellingpipe 43 can relatively rotate with respect totray support axle 41.

Simultaneously, to shown in Figure 6,guidance unit 50 can be guideroller 51 such as Fig. 3, and guideroller 51 has guidingsurface 53, and guidingsurface 53 has curvature, and the diameter of described curvature is along with reducing near the center.A plurality ofguide rollers 51 separate with predetermined interval, and are rotatably mounted in the downside place of vacuum chamber 10.The guidingsurface 53 ofguide roller 51 has predetermined curvature, with the excircle corresponding to swivelling pipe 43.At this moment, the curvature of swivellingpipe 43 can less than the curvature of the guidingsurface 53 ofguide roller 51, allow that to preventrelative motion unit 40bootstrap rollers 51 depart from.

Top delivery unit 30 comprises toppermanent magnet 31 on the upper end that is arranged atpallet 20 and adjacent upper portionspermanent magnet 31 and is arranged attop electromagnet 33 in thevacuum chamber 10.

Top electromagnet 33 is coupled to the inside face of the outer wall of vacuum chamber 10.In other words, as the toppermanent magnet 31 ofpallet 20,top electromagnet 33 is arranged in the vacuum chamber 10.Herein,top electromagnet 33 is regarded as stator (stator), and toppermanent magnet 31 is regarded as mover (mover).In other words, if electric current (that is, in stator) intop electromagnet 33 flows, then (that is, in mover) can produce Lorentz force (Lorenz force) in top permanent magnet 31.At this moment, toppermanent magnet 31 is coupled to the upper end ofpallet 20, so that can be based on the Lorentz force that produces in toppermanent magnet 31 anddelivery tray 20.

Below, will set forth the operation of the device T1 that is used for the transmission substrate in this exemplary embodiment.

When being placed with thepallet 20 of substrate S above transmitting,top delivery unit 30 is to the top transmission of drive force of pallet 20.In other words, if electric current (that is, in stator) intop electromagnet 33 flows, then (that is, in mover) can produce Lorentz force in toppermanent magnet 31, and therefore transmits thepallet 20 that is coupled to toppermanent magnet 31.

Simultaneously, the relative motion that is coupled to the bottom ofpallet 20 allows thatunit 40 guides the transmission to pallet 20 in contact guidance roller 51.At this moment, the acceleration/deceleration of the particle on the guidingsurface 53 ofguide roller 51 orpallet 20 can makepallet 20 in heeling condition but not keep vertically being transmitted.When pallet 20 tilted, relative motion allowed thatunit 40 is not positioned at the center of the guidingsurface 53 ofguide roller 51, and is positioned at the edge of guiding surface 53.In this exemplary embodiment; relative motion allows thatunit 40 can be with respect to 41 rotations of tray support axle; therefore; even above-mentioned particle or vibrations make relative motion allow thatunit 40 is positioned at the edge of the guidingsurface 53 ofguide roller 51, relative motion allows thatunit 40 also can move to the center by rotation.Therefore, the device T1 that be used for to transmit substrate in this exemplary embodiment,pallet 20 can keep during transmitting in its tram and be transmitted.In other words, even pallet 20 shakes during transmitting,pallet 20 also can be back to its initial position rapidly.Equally, even pallet 20 shakes, can prevent that also particle from producing during transmitting.

In addition,top delivery unit 30 is arranged on the upper end ofpallet 20, and is arranged at the bottom ofpallet 20 for theguidance unit 50 of guidingpallet 20 motions.Therefore, even pallet 20 is accelerated during transmitting/slows down, the vibration ofpallet 20 or shake also and can advantageously alleviate.

Fig. 7 is installed on the outer transparent view of vacuum chamber for the top electromagnet that shows the device that is used for the transmission substrate of the second exemplary embodiment according to the present invention, and Fig. 8 is installed on the outer view of vacuum chamber for the top electromagnet that is used for key drawing 7.

This exemplary embodiment shows except the structure oftop delivery unit 30a the equal identical structure of structure of the first exemplary embodiment shown in Figure 6 extremely with Fig. 3, therefore, below will only set forth the structure according to thetop delivery unit 30a of this exemplary embodiment.

As shown in Figures 7 and 8,delivery unit 30a in top comprises toppermanent magnet 31 on the upper end that is arranged atpallet 20 and adjacent upper portionspermanent magnet 31 and is arranged at the outertop electromagnet 33a ofvacuum chamber 10.

In other words, the device T2 that is used for transmitting substrate in this exemplary embodiment,top electromagnet 33a are arranged invacuum chamber 10 atmosphere outward, and this arrangement position with the first exemplary embodiment is opposite.

Particularly, such as Fig. 7 or shown in Figure 8, from the upper end of thecontiguous pallet 20 of the mounting groove H of outside face depression and be arranged on the outer wall ofvacuum chamber 10, and thereforetop electromagnet 33a is embedded in and is installed among the mounting groove H.

Therefore, iftop electromagnet 33a is installed onvacuum chamber 10 outer (that is, in the atmosphere), then can prevent fromvacuum chamber 10, arc phenomenon occuring.This kind arc phenomenon is the form of vacuum discharge.Vacuum discharge is the electric discharge phenomena that produced under high vacuum state by high potential.Therefore, iftop electromagnet 33a places the atmosphere outside thevacuum chamber 10 as this exemplary embodiment, can prevent advantageously that then topelectromagnet 33a is exposed to vacuum state, and prevent that therefore electric arc from producing.

Equally, in this exemplary embodiment,top electromagnet 33a is set removably.In other words,electromagnet 33a in top can be attached to the mounting groove H ofvacuum chamber 10 and can dismantle from the mounting groove H of vacuum chamber 10.By this kind structure, whentop electromagnet 33a et out of order or performance degradation, can advantageously replace easily thetop electromagnet 33a outside thevacuum chamber 10.

Fig. 9 is for showing the transparent view of the bottom electromagnet of the device that is used for the transmission substrate of the 3rd exemplary embodiment according to the present invention.

This exemplary embodiment shows except the structure of bottom delivery unit 30b the equal identical structure of structure of the first exemplary embodiment shown in Figure 6 extremely with Fig. 3, therefore, below will only set forth the structure according to the bottom delivery unit 30b of this exemplary embodiment.

As shown in Figure 9,bottom delivery unit 60b does not allowunit 40 to the bottom transmission of drive force ofpallet 20 and do not contact relative motion.Specifically,delivery unit 60b in bottom comprises that being arranged at relative motion allows bottom permanent magnet (not shown) in theunit 40 and contiguous described bottom permanent magnet and be arranged atbottom electromagnet 63b in the vacuum chamber 10.Can increase bottom permanent magnet conduct and allow the individual component thatunit 40 separates with relative motion, andtray support axle 41 can be formed magnet.In other words,tray support axle 41 is to be made by magnetic material, and as the bottom permanent magnet.Select as another, the bottom permanent magnet can be coupled at the installation direction oftray support axle 41tray support axle 41.

In this exemplary embodiment,bottom electromagnet 63b is coupled to the inside face of the outer wall of vacuum chamber10.Bottom electromagnet 63b is arranged between theguide roller 51separately.Bottom electromagnet 63b is equivalent to stator, and is arranged at relative motion and allows that the bottom permanent magnet in theunit 40 is equivalent to mover.In other words,delivery unit 60b in bottom provides propulsive effort based on Lorentz force and forpallet 20 as above-mentionedtop delivery unit 30.

The operation for the device T3 that transmits substrate according to this exemplary embodiment is as follows.Bottom delivery unit 60b is to the bottom transmission of drive force of pallet 20.In other words,top delivery unit 30 is to the top transmission of drive force ofpallet 20 and simultaneously to the bottom transmission of drive force ofpallet 20, so thatpallet 20 can be transmitted more reposefully.Therefore, propulsive effort is to transmit in top and the bottom ofpallet 20 simultaneously, sopallet 20 can more easily keep balance based on equilibrium of forces.

Figure 10 is installed on the outer transparent view of vacuum chamber for the bottom electromagnet that shows the device that is used for the transmission substrate of the 4th exemplary embodiment according to the present invention.

This exemplary embodiment shows except the structure ofbottom electromagnet 63c and the equal identical structure of the structure of the structure of Fig. 7 and the second exemplary embodiment shown in Figure 8 and the 3rd exemplary embodiment shown in Figure 9, therefore, below will only set forth structure according to thebottom electromagnet 63c of this exemplary embodiment.

In this exemplary embodiment,top delivery unit 30a has the structure identical with the structure of the second exemplary embodiment, andbottom electromagnet 63c is arranged at outside thevacuum chamber 10, and this setting position with the 3rd exemplary embodiment is opposite.

In other words, as shown in figure 10, the outer wall ofvacuum chamber 10 is formed with the protrusion that raises up between eachguidance unit 50, and the protrusion ofvacuum chamber 10 is provided with the mounting groove H from its outside facedepression.Bottom electromagnet 63c is embedded in and is installed among the mounting groove H.

In other words,vacuum chamber 10 is formed with and wants to be close to theprotrusion 11 thatunit 40 is allowed in relative motion between each guide roller 51.The outside face ofprotrusion 11 is provided with mounting groove H, embeds in mounting groove H andbottom electromagnet 63c is installed, so thatbottom electromagnet 63c is arranged at (that is,vacuum chamber 10 is outer) in the atmosphere.Be arranged at the outerbottom electromagnet 63c ofvacuum chamber 10 have with above-mentioned the second exemplary embodiment in be arranged at the identical effect of the outertop electromagnet 33a ofvacuum chamber 10.

Simultaneously,bottom electromagnet 63c according to this exemplary embodiment removably is set.In other words,bottom electromagnet 63c can be with respect to the mounting groove H dismounting of vacuum chamber 10.By this kind structure, ifbottom electromagnet 63c et out of order or performance reduce, then can be easily outer with its replacement atvacuum chamber 10.

Figure 11 is the schematic elevational view of the device that is used for the transmission substrate of the 5th exemplary embodiment according to the present invention, Figure 12 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 11, Figure 13 is the pallet lower tracks of the device that is used for the transmission substrate among Figure 11 and the side-looking enlarged drawing of the contact part between the driving rolls, Figure 14 is the schematic diagram of the operation of rotary magnet that be used for to explain Figure 11, and Figure 15 is the view of the alternate exemplary embodiment of the rotary magnet that is used for explaining Figure 14.

Such as Figure 11 to shown in Figure 15, above the device T5 that is used for transmitting substrate of the 5th exemplary embodiment comprises according to the present invention substrate S is housed and be used for transmitting substrate Spallet 100, be arranged atpallet 100 belows and be used for upper end or the bottom of thedelivery unit 200 ofdelivery tray 100,contiguous pallet 100 and increase/reduce byelectromagnetic force pallet 100 transfer rate acceleration/deceleration unit 300 and be arranged at the top ofpallet 100 and be used for theguidance unit 400 of guidingpallet 100.

The shape ofpallet 100 is as rectangular frame, therefore arranges the fixture unit (not shown) that is used for clamping substrate S along the edge of this rectangular frame so that substrate S can be attached topallet 100 central part and can be from the central part dismounting of pallet 100.Thepallet 100 that substrate S is housed is to transmit with the standing upright state.

In this exemplary embodiment, substrate S can comprise the various substrate S for the manufacture of flat-panel monitor device or similar device and liquid crystal display device.Substrate S can comprise semi-conductive wafer.

With reference to Figure 11 and Figure 12,delivery unit 200 comprises palletlower tracks 210 and a plurality of drivingrolls 220 of the bottom that is coupled topallet 100, and described a plurality of drivingrollss 220 are rotated when being arranged in contact palletlower tracks 210 below pallet lower tracks 210.

The shape of palletlower tracks 210 is as cylindrical bar, and it is coupled to bottom and thesupport tray 100 ofpallet 100, so thatpallet 100 can contact driving rolls 220 and be transmitted at driving rolls 220.

Simultaneously, as shown in figure 13, high-conductivity metal C is embedded in the palletlower tracks 210 or in the bottom ofpallet 100, thereby increases the intensity of the eddy current that therotary magnet 310 of the acceleration/deceleration unit 300 of elaboration is induced in palletlower tracks 210 by institute hereinafter.In this exemplary embodiment, palletlower tracks 210 comprises corrosion-resistant steel, and high-conductivity metal C comprises copper or aluminium.

Driving rolls 220 is configured to have S. A. and rotates in the direction that transmits substrate, and comprises the groove with certain curvature at its circumferential surface, with the bottom of contact pallet lower tracks 210.Driving rolls 220 with plural form with arranged at certain intervals on the direction of transfer ofpallet 100, so thatdelivery tray 100 stably.Equally, the S. A. of drivingrolls 220 can be provided with theroller driving motor 230 forrotary actuation roller 220, and therefore,roller driving motor 230 can produce for the propulsive effort that transmits substrate S.

Next, acceleration/deceleration unit 300 comprises: at least onerotary magnet 310, and the bottom of itscontiguous pallet 100 also rotatably is arranged on the direction of transfer ofpallet 100; Turning motor 320 is used forrotation rotary magnet 310; And Rotation Controllers 330, for hand of rotation and the speed of control turning motor 320.

The bottom of thecontiguous pallets 100 ofrotary magnet 310 also rotates up the sender of pallet 100.Ifrotary magnet 310 rotations then can induce eddy current among the high conductor C in the bottom that is embedded in palletlower tracks 210 orpallet 100, and therefore generation power are come delivery tray 100.Figure 12 shows thatpallet 100 is transmitted by resulting from the eddy current in the palletlower tracks 210 whenrotary magnet 310 rotates therein in a clockwise direction to the right.

On the other hand, whenexpectation pallet 100 slows down, makerotary magnet 310 with opposite direction rotation, so thatpallet 100 can be slowed down by the eddy current of responding in pallet lower tracks 210.

In this exemplary embodiment, the bottom of thecontiguous pallets 100 of acceleration/deceleration unit 300 but is not limited in this so thatpallet 100 accelerates and slows down.Select as another, the upper end that acceleration/deceleration unit 300 can be close topallet 100 is accelerated anddeceleration pallet 100.

Simultaneously, according to the general permanent magnet ofrotary magnet 310 employings of this exemplary embodiment, and has in the heart therein S. A..Therefore, whenrotary magnet 310 rotation, can produce eddy current in the lower tracks of pallet 100.Yet the permanent magnet that this kind is general is increasing/is reducing and has large deviation aspect the eddy current that its when rotation responding to, therebypallet 100 may shake.

With reference to Figure 14, when being positioned at (b) in rotation time,rotary magnet 310 locates and (d) when locating, the eddy current of induction can promptly reduce in palletlower tracks 210, and locates and (c) when locating, described eddy current can promptly increase whenrotary magnet 310 is positioned at (a).Therefore, when makingpallet 100 acceleration/deceleration by therotary magnet 310 with general magnet,pallet 100 may shake.

Therefore, as shown in figure 15, if use and have the round-shaped rotary magnet 310 ' through improvement, and be crisscross arranged along the circumference ofrotary magnet 310 at the described N utmost point and the S utmost point of making in round-shaped, then can reduce to result from the deviation of the eddy current in the palletlower tracks 210, thus shaking of reducing inpallet 100 to produce.

Turning motor 320 is connected to the S. A. ofrotary magnet 310, and is provided for rotating the propulsive effort ofrotary magnet 310.

Hand of rotation and the speed of Rotation Controllers 330 control turning motors 320, thereby intensity and the direction of the eddy current that capable of regulating induces in palletlower tracks 210 byrotary magnet 310, and then control is used for making the power ofpallet 100 acceleration or decelerations.

Simultaneously, with reference to Figure 11 to Figure 15,guidance unit 400 comprises: palletupper track 410, and it is configured to ferromagnet and is coupled to the upper end ofpallet 100; Andmagnetic guiding unit 420, it is embedded in palletupper track 410 wherein and has polarity to produce the magnetic force that is used for promoting in the relative both sides of palletupper track 410 palletupper track 410.

Palletupper track 410 for shape as the ferromagnet of cylindrical bar and be coupled to the upper end ofpallet 100.

Magnetic guiding unit 420 has the cross-sectional plane that bends to picture ' U ' shape, with in relative both sides guiding palletupper track 410, and the end of the contiguous palletupper track 410 ofmagnetic guiding unit 420 is provided with the polarity ferromagnet identical with the polarity of pallet upper track 410.Therefore, produce to be used for promoting in the relative both sides of palletupper track 410 power of palletupper track 410, this power puts on the upper end ofpallet 100, thereby guidingpallet 100 falls being transmitted Shi Buhui.

For this kind structure, as follows for the operation of the device T5 that transmits substrate.

When thepallet 100 of substrate S is equipped with in transmission in process chamber, with standing uprightstate delivery tray 100, sagging with the central part that prevents substrate S.

Be used for the device T5 ofdelivery tray 100,guidance unit 400 is arranged on thepallet 100, and guidingpallet 100 falls being transmitted Shi Buhui, and delivery unit 300 is arranged atpallet 100 belows, and insupport tray 100delivery tray 100.

When pallet 100 when quiescence begins or stop when being transmitted, the speed ofpallet 100 can promptly increase or reduce, therefore,pallet 100 may can produce particle in the friction that driving rolls 220 slides and produce this moment.

Acceleration/deceleration unit 300 is rotatedrotary magnet 310 in the bottom ofpallet 100, and therefore produces eddy current in palletlower tracks 210, so that the eddy current that pallet 100 can pass through to produce is accelerated or slows down.In other words, control intensity and the direction that results from the eddy current in the palletlower tracks 210 by hand of rotation and the speed of controllingrotary magnets 310 by Rotation Controllers 330, thereby control is used for making the power ofpallet 100 acceleration or decelerations.

Therefore, at the device T5 that is used for transmitting substrate according to this exemplary embodiment, be used for increasing and reducing by electromagnetic force the acceleration/deceleration unit 300contiguous pallets 100 of the transfer rate ofpallet 100, thereby can more accurately control the transfer rate of pallet 100.Therefore, can carry out rapidly transmission and arrangement to pallet 100.In addition, increase or reduce the transfer rate ofpallet 100 with electromagnetic force, thereby have the foreign matter of preventing produce an effect.

Below, the device T6 that is used for transmitting substrate that sets forth with reference to the accompanying drawings the 6th exemplary embodiment according to the present invention will be with will no longer being given unnecessary details for the identical structure of person described in the device T5 that transmits substrate of the 5th exemplary embodiment according to the present invention.

Figure 16 is the schematic elevational view of the device that is used for the transmission substrate of the 6th exemplary embodiment according to the present invention, and Figure 17 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 16, and Figure 18 is the lateral plan of Figure 17.Herein, in institute's drawings attached of Figure 11 to Figure 18, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.

As shown in the figure, the device T6 that is used for the transmission substrate of the 6th exemplary embodiment comprises acceleration/deceleration unit 300 according to the present invention, and acceleration/deceleration unit 300 comprises: at least onerotary magnet 310, and the bottom of itscontiguous pallet 100 also rotatably is arranged on the direction of transfer ofpallet 100; Turning motor 320 is used forrotation rotary magnet 310; And Rotation Controllers 330, for hand of rotation and the speed of control turning motor 320.Particularly,contiguous pallet 100 also can rotate up the sender ofpallet 100rotary magnet 310 at the cross side place of the bottom ofpallet 100.

In other words, if be difficult to as the 5th exemplary embodiment, will speed up/deceleration unit places the bottom ofpallet 100, the cross side ofcontiguous pallet 100 and place acceleration/deceleration unit androtary magnet 310 is rotated at cross side as this embodiment then, thus the acceleration/deceleration effect identical with the acceleration/deceleration effect of the 5th exemplary embodiment had.Therefore, can effectively utilize the space and be convenient to designs.

Below, set forth with reference to the accompanying drawings the device T7 that is used for transmitting substrate of the 7th exemplary embodiment according to the present invention, with will no longer being given unnecessary details for the identical structure of person described in the device T5 that transmits substrate and the T6 of the 5th and the 6th exemplary embodiment according to the present invention.

Figure 19 is the schematic elevational view of the device that is used for the transmission substrate of the 7th exemplary embodiment according to the present invention, and Figure 20 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 19.Herein, in institute's drawings attached of Figure 11 to Figure 20, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.

The device T7 that is used for the transmission substrate of the 7th exemplary embodiment comprises according to the present invention:pallet 100, and the above is equipped with substrate S and is used for transmitting substrate S;Delivery unit 200 is arranged atpallet 100 belows and is used fordelivery tray 100; Acceleration/deceleration unit 500, upper end or the bottom ofcontiguous pallet 100 also increases/reduces the transfer rate ofpallet 100 by electromagnetic force; Andguidance unit 400, be arranged in the top ofpallet 100 and be used for guidingpallet 100.

According to the 7th exemplary embodiment of the present invention, acceleration/deceleration unit 500 comprises: at least onemotion magnet 510, the bottom of itscontiguous pallet 100 and be arranged near or away frompallet 100;Actuator 520, be used foractuation movement magnet 510 near or away frompallet 100; And driving governor, be used for driving the operation ofactuator 520.

The bottom of thecontiguous pallets 100 ofmotion magnet 510 is also driven byactuator 520, with near or move away from the direction of pallet lower tracks 210.

Whenmotion magnet 510 moves towards palletlower tracks 210, can produce eddy current in the palletlower tracks 210, and therefore produce braking force.On the contrary, whenmotion magnet 510 when moving away from the direction of palletlower tracks 210, can be not restricted power limitground delivery tray 100.

When replacing friction that pallet 100 is stopped with eddy current, have and prevent from whenpallet 100 stops, sliding and the effect of generation foreign matter.

As the 5th exemplary embodiment, high-conductivity metal C is embedded in the palletlower tracks 210 and can increases the intensity of the eddy current of responding in the pallet lower tracks 210.

Actuator 520 provides propulsive effort so thatmotion magnet 510 near or away from palletlower tracks 210, and drivinggovernor control actuator 520 comeactuation movement magnet 510 near or away from pallet 100.Actuator 520 can be by realizations such as hydraulic actuating cylinder, linear motors.

In this exemplary embodiment, the bottom ofmotion magnet 510 contiguous pallets 100.Yet,motion magnet 510 can optionally be close topallet 100 the upper end and near or away frompallet 100, thereby have effect same as described above.

Below, set forth with reference to the accompanying drawings the device T8 that is used for transmitting substrate of the 8th exemplary embodiment according to the present invention, with will no longer being given unnecessary details for the identical structure of person described in the device T5, the T6 that transmit substrate and the T7 of the 5th to the 7th exemplary embodiment according to the present invention.

Figure 21 is the schematic side elevation of the device that is used for the transmission substrate of the 8th exemplary embodiment according to the present invention, and Figure 22 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 21.Herein, in institute's drawings attached of Figure 11 to Figure 21, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.

With reference to Figure 21 and Figure 22, at the device T8 that be used for to transmit substrate according to the 8th exemplary embodiment, acceleration/deceleration unit 500 comprises: at least onemotion magnet 510, the bottom of itscontiguous pallet 100 and be arranged near or away frompallet 100;Actuator 520, be used foractuation movement magnet 510 near or away frompallet 100; And driving governor, be used for driving the operation of actuator 520.Particularly, thecontiguous pallet 100 in the cross side place ofmotion magnet 510 in the bottom ofpallet 100 and be arranged near or away frompallet 100.

In other words, if be difficult to as the 7th exemplary embodiment, will speed up/deceleration unit places the bottom ofpallet 100, then as this exemplary embodiment, will speed up/cross side of thecontiguous pallet 100 of deceleration unit places, and makemotion magnet 510 motion with at the cross side place near or away from pallet, thereby have the acceleration/deceleration effect identical with the acceleration/deceleration effect of the 7th exemplary embodiment.Therefore, can effectively utilize the space and be convenient to designs.

Below, set forth with reference to the accompanying drawings the device T9 that is used for transmitting substrate of according to the present invention the 9th exemplary embodiment, with the 5th to the 8th exemplary embodiment of the concept according to the present invention be used for transmit the structure that the person is identical described in device T5, T6, T7 and the T8 of substrate and will no longer be given unnecessary details.

Figure 23 is the schematic elevational view of the device that be used for to transmit substrate of the 9th exemplary embodiment according to the present invention, and Figure 24 is for being used for explaining the view of operation of acceleration/deceleration unit of device that is used for transmitting substrate of Figure 23.Herein, in institute's drawings attached of Figure 11 to Figure 21, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.

With reference to Figure 23 and Figure 24, comprise according to the device T9 that be used for to transmit substrate of the 9th exemplary embodiment:pallet 100, the above is equipped with substrate S and is used for transmitting substrate S;Delivery unit 200 is arranged atpallet 100 belows and is used fordelivery tray 100; Acceleration/deceleration unit 600, the transfer rate that it is close to upper end or the bottom ofpallet 100 and increases/reduce pallet 100 by electromagnetic force; Andguidance unit 400, be arranged in the top ofpallet 100 and be used for guidingpallet 100.

Acceleration/deceleration unit 600 according to the 9th exemplary embodiment comprises: a plurality of static magnet 610, and it is arranged in the bottom ofpallet 100 with specific interval; Electromagnet module 620, it is close to static magnet 610 and produces magnetic force to increase/to reduce the transfer rate ofpallet 100 with arranged at certain intervals and by the interaction with static magnet 610; And module controller, be used for controlling the supply of the electric current that is applied to electromagnetic module 620 optionally to change the N/S polarity of electromagnetic module 620.

Static magnet 610 with arranged at certain intervals in palletlower tracks 210 and make the N utmost point and S extremely interlaced.Static magnet 610 is not attaching dividually, but is set to one with the bottom of palletlower tracks 210 orpallet 100.

Electromagnet module 620 is with arranged at certain intervals and contiguous static magnet 610, and and static magnet 610 between leave predetermined space.The connecting panel 622 that is wound with a plurality of iron cores 621 of coil above electromagnet module 620 comprises and is used for described a plurality of iron cores 621 are linked into an integrated entity.

When electric current flowed in coil, iron core 621 was magnetized and has magnetic pole, and connecting panel 622 links into an integrated entity described a plurality of iron cores 621 and it is supported still.

If the electric current that flows in coil changes direction, then the polarity of iron core 621 also can change.Size and the direction of the electric current that herein, flows in coil are controlled by module controller.In other words, module controller is controlled at size and the direction of the moving electric current of coil midstream, thereby optionally changes polarity and the magnetic force of iron core 621.

With reference to Figure 24, in the bottom ofpallet 100 and make the N utmost point and S extremely interlaced, and electromagnet module 620 is arranged in static magnet 610 belows to static magnet 610 with arranged at certain intervals, and and static magnet 610 between leave predetermined space.The iron core 621 of electromagnet module 620 is arranged with specific interval, and described interval is different from the arrangement pitch of static magnet 610.For example, three iron cores 621 are arranged with the interval that wherein is arranged with four static magnet 610.Select as another, even number iron core 621 is arranged with the interval that wherein is arranged with the static magnet 610 of odd number.

The iron core of electromagnet module 620 is sequentially magnetized, so thatpallet 100 accelerates and slows down, elaborates it hereinafter with reference to Figure 24.

As among Figure 24 1. shown in, (a) be magnetized to N polarity and (c) be magnetized to S polarity, produce thus the power that attracts static magnet 610, thereby pallet 100 stopped.Next, shown in 2., (b) be magnetized to N polarity and (d) be magnetized to S polarity, in the polarity identical with the polarity of static magnet 610, produce repulsive force thus, and in the polarity different from the polarity of static magnet 610, produce attractive force, therebypallet 100 is moved right, shown in 3..

Subsequently, as Figure 24 4. shown in, (a) be magnetized to S polarity and (c) be magnetized to N polarity, identical polarity is repelled mutually and different polarity attracts each other, thereby is continued to makepallet 100 motions, shown in 5..

As mentioned above, if the polarity of the iron core 621 of electromagnet module 620 every predetermined time section change continuously, then pallet 100 travels forward.On the contrary, the polarity of iron core 621 is magnetized on the contrary, andpallet 100 moves backward.In other words, forproal pallet 100,pallet 100 is slowed down.

Therefore, the device that is used for transmitting substrate in the exemplary embodiment according to the present invention, can pallet 100 be accelerated and deceleration by non-contact method, thereby can prevent that foreign matter from producing, and can prevent slip between driving rolls 220 and the palletlower tracks 210, and then carry out quickly acceleration/deceleration and be beneficial to transmission and arrangement topallet 100.

Although show particularly and set forth concept of the present invention with reference to each exemplary embodiment of the present invention, However, it should be understood that and under the condition of the spirit that does not break away from the claims of enclosing and scope, to make various changes to it in form and details.

Claims (27)

Translated fromChinese

1.一种用于传送基板的装置，所述装置包括：1. A device for transferring a substrate, the device comprising:真空室；vacuum chamber;托盘，用于在所述真空室中传送所述基板；a tray for transferring the substrate in the vacuum chamber;上部传送单元，用于向所述托盘的上部传递驱动力而不接触所述托盘的上端部；an upper conveying unit configured to transmit a driving force to an upper portion of the tray without contacting an upper end portion of the tray;相对运动容许单元，耦合至所述托盘的下端部并可相对于所述托盘运动；以及a relative movement allowing unit coupled to the lower end of the tray and movable relative to the tray; and多个引导单元，用于接触所述相对运动容许单元并引导所述托盘的运动。A plurality of guide units contact the relative movement allowing unit and guide the movement of the tray.2.如权利要求1所述的装置，其特征在于，所述相对运动容许单元包括旋转本体，所述旋转本体相对旋转地耦合至所述托盘。2. The apparatus of claim 1, wherein the relative motion allowing unit comprises a rotating body relatively rotatably coupled to the tray.3.如权利要求2所述的装置，其特征在于，所述旋转本体包括：3. The apparatus of claim 2, wherein the rotating body comprises:托盘支撑轴，耦合至所述托盘的所述下端部；a tray support shaft coupled to the lower end of the tray;旋转管，用于在其中容置所述托盘支撑轴，并具有与所述引导单元相接触的外表面；以及a rotating tube for accommodating the tray support shaft therein and having an outer surface in contact with the guide unit; and轴承，具有耦合至所述托盘支撑轴的内圆周及耦合至所述旋转管的外圆周。A bearing having an inner circumference coupled to the tray support shaft and an outer circumference coupled to the rotating tube.4.如权利要求3所述的装置，其特征在于，所述引导单元包括引导滚轮，所述引导滚轮具有引导表面，所述引导表面具有曲率，所述曲率的直径随着接近所述引导表面的中心而减小，以及4. The device according to claim 3, wherein the guide unit comprises a guide roller having a guide surface having a curvature whose diameter increases as the guide surface approaches decreases in the center of , and所述旋转管的曲率小于所述引导滚轮的所述引导表面的所述曲率。The curvature of the rotating tube is smaller than the curvature of the guide surface of the guide roller.5.如权利要求1所述的装置，其特征在于，所述引导单元包括引导滚轮，所述引导滚轮具有引导表面，所述引导表面具有曲率，所述曲率的直径随着接近所述引导表面的中心而减小。5. The device according to claim 1, wherein the guide unit comprises a guide roller having a guide surface having a curvature whose diameter increases as the guide surface approaches center decreases.6.如权利要求1所述的装置，其特征在于，所述上部传送单元包括：6. The apparatus of claim 1, wherein the upper delivery unit comprises:上部永久磁铁，设置于所述托盘的所述上端部上；以及an upper permanent magnet disposed on the upper end of the tray; and上部电磁铁，邻近所述上部永久磁铁而设置于所述真空室内。The upper electromagnet is disposed in the vacuum chamber adjacent to the upper permanent magnet.7.如权利要求1所述的装置，其特征在于，所述上部传送单元包括：7. The apparatus of claim 1, wherein the upper delivery unit comprises:上部永久磁铁，设置于所述托盘的所述上端部上；以及an upper permanent magnet disposed on the upper end of the tray; and上部电磁铁，邻近所述上部永久磁铁而设置于所述真空室外。The upper electromagnet is arranged outside the vacuum chamber adjacent to the upper permanent magnet.8.如权利要求7所述的装置，其特征在于，还包括安装槽，所述安装槽自所述真空室的外壁上的外表面凹陷，且所述真空室邻近所述托盘的所述上端部，8. The apparatus of claim 7, further comprising a mounting slot recessed from an outer surface on an outer wall of the vacuum chamber adjacent to the upper end of the tray department,所述上部电磁铁被嵌入并安装于所述安装槽中。The upper electromagnet is embedded and installed in the installation groove.9.如权利要求8所述的装置，其特征在于，所述上部电磁铁可拆卸地安装于所述安装槽中。9. The device according to claim 8, wherein the upper electromagnet is detachably installed in the installation groove.10.如权利要求1所述的装置，其特征在于，还包括下部传送单元，用于向所述托盘的下部传递驱动力而不接触所述相对运动容许单元。10. The apparatus of claim 1, further comprising a lower transfer unit for transferring a driving force to a lower portion of the tray without contacting the relative motion allowing unit.11.如权利要求10所述的装置，其特征在于，所述下部传送单元包括：11. The apparatus of claim 10, wherein the lower delivery unit comprises:下部永久磁铁，设置于所述相对运动容许单元中；以及a lower permanent magnet disposed in the relative movement allowing unit; and下部电磁铁，邻近所述下部永久磁铁而设置于所述真空室内。The lower electromagnet is disposed in the vacuum chamber adjacent to the lower permanent magnet.12.如权利要求10所述的装置，其特征在于，所述下部传送单元包括：12. The apparatus of claim 10, wherein the lower delivery unit comprises:下部永久磁铁，设置于所述相对运动容许单元中；以及a lower permanent magnet disposed in the relative movement allowing unit; and下部电磁铁，邻近所述下部永久磁铁而设置于所述真空室外。The lower electromagnet is arranged outside the vacuum chamber adjacent to the lower permanent magnet.13.如权利要求12所述的装置，其特征在于，所述真空室的外壁形成有在各所述引导单元之间向上凸起的突出部，所述真空室的所述突出部设置有自所述突出部的外表面凹陷的安装槽，以及13. The device according to claim 12, wherein the outer wall of the vacuum chamber is formed with a protruding portion protruding upward between each of the guide units, and the protruding portion of the vacuum chamber is provided with a self- a mounting groove recessed in the outer surface of the protrusion, and所述下部电磁铁被嵌入并安装于所述安装槽中。The lower electromagnet is embedded and installed in the installation groove.14.如权利要求13所述的装置，其特征在于，所述下部电磁铁可拆卸地安装于所述安装槽中。14. The device according to claim 13, wherein the lower electromagnet is detachably installed in the installation groove.15.一种用于传送基板的装置，所述装置包括：15. An apparatus for transferring a substrate, the apparatus comprising:托盘，装有所述基板并用于传送所述基板；a tray containing the substrate and transporting the substrate;传送单元，设置于所述托盘的下部中并用于传送所述托盘；以及a transfer unit provided in a lower portion of the tray and configured to transfer the tray; and加速/减速单元，邻近所述托盘的上端部或下端部，并通过电磁力来增大或减小所述托盘的传送速度。The acceleration/deceleration unit is adjacent to the upper end or the lower end of the tray, and increases or decreases the transfer speed of the tray by electromagnetic force.16.如权利要求15所述的装置，其特征在于，还包括引导单元，设置于所述托盘的上部中并用于引导所述托盘。16. The apparatus of claim 15, further comprising a guide unit provided in an upper portion of the tray and used to guide the tray.17.如权利要求15所述的装置，其特征在于，所述加速/减速单元包括：17. The apparatus of claim 15, wherein the acceleration/deceleration unit comprises:至少一个旋转磁铁，邻近所述托盘的所述上端部或所述下端部，并可旋转地设置于所述托盘的传送方向上；at least one rotating magnet, adjacent to the upper end or the lower end of the tray, and rotatably disposed in the conveying direction of the tray;旋转电动机，用于旋转所述旋转磁铁；以及a rotary motor for rotating the rotary magnet; and旋转控制器，用于控制所述旋转电动机的旋转方向及速度。The rotation controller is used to control the rotation direction and speed of the rotation motor.18.如权利要求17所述的装置，其特征在于，所述旋转磁铁在所述托盘的所述下端部中的横向侧处邻近所述托盘并在传送所述托盘的方向上旋转。18. The apparatus of claim 17, wherein the rotating magnet is adjacent to the tray at a lateral side in the lower end of the tray and rotates in a direction in which the tray is conveyed.19.如权利要求17所述的装置，其特征在于，所述旋转磁铁具有圆形形状，其中N极与S极沿所述旋转磁铁的所述圆周交错设置。19. The device of claim 17, wherein the rotating magnet has a circular shape, wherein N poles and S poles are alternately arranged along the circumference of the rotating magnet.20.如权利要求15所述的装置，其特征在于，所述加速/减速单元包括：20. The apparatus of claim 15, wherein the acceleration/deceleration unit comprises:至少一个运动磁铁，邻近所述托盘的所述上端部或所述下端部并设置成靠近或远离所述托盘；at least one moving magnet adjacent to said upper end or said lower end of said tray and positioned closer to or away from said tray;驱动器，用于驱动所述运动磁铁靠近或远离所述托盘；以及a driver for driving the moving magnet closer to or away from the tray; and驱动控制器，用于控制所述驱动器的操作。A drive controller for controlling the operation of the drive.21.如权利要求20所述的装置，其特征在于，所述运动磁铁在所述托盘的所述下端部中的横向侧处邻近所述托盘并设置成靠近或远离所述托盘。21. The apparatus of claim 20, wherein the moving magnet is adjacent to the tray at a lateral side in the lower end of the tray and is positioned closer to or away from the tray.22.如权利要求15所述的装置，其特征在于，所述加速/减速单元包括：22. The apparatus of claim 15, wherein the acceleration/deceleration unit comprises:多个静止磁铁，以特定间隔设置于所述托盘的所述下端部中；a plurality of stationary magnets disposed in the lower end of the tray at specific intervals;电磁铁模块，邻近所述静止磁铁并以特定间隔排列，且通过与所述静止磁铁的相互作用来产生磁力以增大/减小所述托盘的传送速度；以及an electromagnet module arranged adjacent to the stationary magnet at a certain interval, and generates a magnetic force by interacting with the stationary magnet to increase/decrease the transport speed of the tray; and模块控制器，控制施加至所述电磁模块的电流的供应，并选择性地改变所述电磁模块的N/S极性。A module controller controls supply of current applied to the electromagnetic module and selectively changes N/S polarity of the electromagnetic module.23.如权利要求22所述的装置，其特征在于，所述电磁铁模块包括：23. The apparatus of claim 22, wherein the electromagnet module comprises:多个铁芯，邻近所述静止磁铁并与所述静止磁铁之间留有预定空间，且在所述铁芯上绕有线圈；以及a plurality of iron cores adjacent to and leaving a predetermined space between the stationary magnets, and coils are wound on the iron cores; and连接板，用于将所述多个铁芯连接成一体。The connecting plate is used for connecting the plurality of iron cores into one body.24.如权利要求23所述的装置，其特征在于，所述多个铁芯以特定间隔进行排列，所述间隔不同于所述静止磁铁的排列间隔。24. The apparatus of claim 23, wherein the plurality of iron cores are arranged at a certain interval different from the arrangement interval of the stationary magnets.25.如权利要求15所述的装置，其特征在于，所述传送单元包括：25. The apparatus of claim 15, wherein the transmitting unit comprises:托盘下部轨道，耦合至所述托盘的所述下端部；以及a tray lower rail coupled to the lower end of the tray; and多个驱动滚轮，在所述托盘下部轨道的下部中设置成在接触所述托盘下部轨道的同时进行旋转。A plurality of drive rollers are provided in a lower portion of the tray lower rail so as to rotate while contacting the tray lower rail.26.如权利要求25所述的装置，其特征在于，所述托盘下部轨道或所述托盘的所述下部包括被嵌入于其中的高导电性金属。26. The apparatus of claim 25, wherein the tray lower rail or the lower portion of the tray comprises highly conductive metal embedded therein.27.如权利要求16所述的装置，其特征在于，所述引导单元包括：27. The device of claim 16, wherein the guiding unit comprises:托盘上部轨道，被设置成铁磁体并耦合至所述托盘的所述上端部；以及a tray upper rail configured as a ferromagnetic body and coupled to said upper end of said tray; and磁性引导单元，将所述托盘上部轨道嵌入于其中并具有极性，以产生用于在所述托盘上部轨道的相对两侧推动所述托盘上部轨道的磁力。The magnetic guide unit has the upper tray rail embedded therein and has a polarity to generate a magnetic force for pushing the upper tray rail on opposite sides of the upper tray rail.

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