CN102749092A - Flexible compound type array sensor used for artificial sensitive skin of intelligent robot - Google Patents
Flexible compound type array sensor used for artificial sensitive skin of intelligent robotDownload PDFInfo
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Abstract
Translated fromChinese
Description
Translated fromChinese技术领域technical field
本发明属于传感技术领域，更具体地说是一种应用于智能机器人的敏感皮肤柔性复合式阵列传感器。The invention belongs to the field of sensor technology, and more specifically relates to a sensitive skin flexible composite array sensor applied to intelligent robots.
背景技术Background technique
国际机器人界都在加大科研的研究力度，对于智能机器人来说既要求传感器能够精确地感知环境，又要求足够的柔软，使机器人有人一样的感知能力和灵活程度。智能机器人的人工敏感皮肤是模块化、带有数据解析能力的阵列传感器，覆盖在智能机器人表面，依赖于人工智能皮肤上的复合式阵列传感器来感知外部环境信息。随着智能机器人工作复杂性的增加，单一的触觉传感器已经不能完全的满足实际工作的需求，现在具有同时检测多重信息的柔性复合式传感器已经成为国际研究智能机器人皮肤等领域的热点问题，现阶段实现的途径大部分是依赖柔性组织结构或者是柔性的高分子材料作为传递信息的媒介利用各种敏感材料制备而成的。2005年日本的东京大学Someya等人研制出具备压力和温度检测功能的晶体管阵列式电子皮肤。美国伊利诺斯州大学Engel等人利用MEMS制作工艺，将识别材质、温度、压力和硬度等材料特性的独立传感器件分布在聚合物内部，制备出可识别物体性能的柔性多功能触觉敏感系统。台湾大学Yang等人利用MEMS工艺，在柔性衬底聚酰亚胺-铜薄膜上设计并制作了8×8阵列结构的集成式触觉敏感阵列，应用于智能机器人的敏感皮肤。日本丰桥技术科学大学Takao等人利用硅IC的柔性变形技术设计了一种具有检测接触力、硬度、温度分布的集成式多功能触觉传感器阵列图像系统。美国的北卡罗来纳州立大学Daniel等人在柔性聚酰亚胺薄层上制作了金属薄膜式温度和应变传感器阵列。2010年Yoon等人将热电堆嵌入高聚物薄膜中制成柔性热电触觉传感器，实现了接触压力和温度的同时检测。分析国内外研究状况可知，目前智能机器人人工敏感皮肤的研究只局限于或压力或温度或压力温度复合式，并且压力温度复合式的温度传感单元是非柔性的传感器。没有同时检测压力、温度和湿度三种信号的柔性传感器阵列的相关报导。The international robotics community is increasing research efforts in scientific research. For intelligent robots, sensors are required to accurately perceive the environment and be soft enough to make robots have the same perception and flexibility as humans. The artificial sensitive skin of the intelligent robot is a modular array sensor with data analysis capability, which covers the surface of the intelligent robot and relies on the composite array sensor on the artificial intelligence skin to perceive the external environment information. With the increasing complexity of the work of intelligent robots, a single tactile sensor can no longer fully meet the needs of actual work. Now the flexible composite sensor with simultaneous detection of multiple information has become a hot issue in the field of international research on the skin of intelligent robots. At this stage Most of the ways to achieve it rely on flexible tissue structures or flexible polymer materials as the medium for transmitting information and are made of various sensitive materials. In 2005, Someya and others at the University of Tokyo in Japan developed a transistor array electronic skin with pressure and temperature detection functions. Engel and others at the University of Illinois in the United States used the MEMS manufacturing process to distribute independent sensor devices that identify material properties such as material, temperature, pressure, and hardness inside the polymer, and prepared a flexible multifunctional tactile sensitive system that can identify object properties. Yang et al. from National Taiwan University used MEMS technology to design and fabricate an integrated tactile sensitive array with an 8×8 array structure on a flexible substrate polyimide-copper film, which is applied to the sensitive skin of intelligent robots. Takao et al. of Toyohashi University of Technology in Japan designed an integrated multifunctional tactile sensor array image system with the detection of contact force, hardness and temperature distribution by using the flexible deformation technology of silicon IC. Daniel et al. of North Carolina State University in the United States fabricated a metal thin film temperature and strain sensor array on a thin layer of flexible polyimide. In 2010, Yoon et al. embedded a thermopile in a polymer film to make a flexible thermoelectric tactile sensor, which realized simultaneous detection of contact pressure and temperature. Analysis of the domestic and foreign research status shows that the current research on artificial sensitive skin of intelligent robots is limited to either pressure or temperature or pressure-temperature composite type, and the temperature sensing unit of the pressure-temperature composite type is a non-flexible sensor. There is no relevant report on flexible sensor arrays that simultaneously detect three signals of pressure, temperature and humidity.
发明内容Contents of the invention
本发明是为了实现智能机器人人工敏感皮肤能够感知外界环境信息，提供一种柔性好、精度高、性能稳定的用于智能机器人人工敏感皮肤的柔性复合式阵列传感器，以期同时测量压力、温度和湿度。The present invention aims to realize that the artificial sensitive skin of intelligent robots can perceive external environmental information, and provides a flexible composite array sensor for artificial sensitive skin of intelligent robots with good flexibility, high precision and stable performance, in order to measure pressure, temperature and humidity at the same time .
本发明为解决技术问题采用如下技术方案：The present invention adopts following technical scheme for solving technical problems:
本发明用于智能机器人人工敏感皮肤柔性复合式阵列传感器的结构特点是构成阵列的传感单元是以柔性聚酰亚胺电路板为基底，在所述基底的同一面上分别设置压力传感器、温度传感器和湿度传感器；所述压力传感器的表面高度高于温度传感器和湿度传感器，形成整体呈凹凸面的分布形式。The structural feature of the present invention for the artificial sensitive skin flexible composite array sensor of an intelligent robot is that the sensing unit constituting the array is based on a flexible polyimide circuit board, and a pressure sensor, a temperature sensor, and a temperature sensor are respectively arranged on the same surface of the base. Sensors and humidity sensors; the surface height of the pressure sensor is higher than that of the temperature sensor and the humidity sensor, forming an overall concave-convex distribution form.
本发明用于智能机器人人工敏感皮肤柔性复合式阵列传感器的特点也在于：所述压力传感器是以炭黑填充硅橡胶作为压力敏感材料；所述温度传感器是以碳纤维填充硅橡胶作为温度敏感材料；所述湿度传感是以碳纳米管填充硅橡胶作为湿度敏感材料。The present invention is also characterized in that the flexible composite array sensor for artificial sensitive skin of an intelligent robot is: the pressure sensor uses silicon rubber filled with carbon black as the pressure-sensitive material; the temperature sensor uses silicon rubber filled with carbon fiber as the temperature-sensitive material; The humidity sensor uses silicon rubber filled with carbon nanotubes as the humidity sensitive material.
与已有技术相比，本发明有益效果体现在：Compared with the prior art, the beneficial effects of the present invention are reflected in:
1、本发明利用三种传感器组成一个复合式传感器单元，在基底上共同设置复合式传感器阵列，使得传感器能同时检测压力、温度和湿度信息；1. The present invention uses three kinds of sensors to form a composite sensor unit, and a composite sensor array is jointly arranged on the substrate, so that the sensor can detect pressure, temperature and humidity information at the same time;
2、本发明中传感器阵列中不同功能单元的高度不同，整体呈凹凸面的分布形式，消除被压力对温度和湿度传感器的干扰；温度传感器与压力传感器在同一个单元，可利用同一单元的温度传感器补偿压力传感器，消除温度对压力传感器的干扰，可以大幅度减小压力和温度之间的交叉干扰，提高传感器测量的准确性；2. The heights of different functional units in the sensor array of the present invention are different, and the whole is in the form of a concave-convex distribution, which eliminates the interference of the pressure on the temperature and humidity sensors; the temperature sensor and the pressure sensor are in the same unit, and the temperature of the same unit can be used. The sensor compensates the pressure sensor to eliminate the interference of temperature on the pressure sensor, which can greatly reduce the cross-interference between pressure and temperature, and improve the accuracy of sensor measurement;
3、本发明中的基底、压力敏感材料、温度敏感材料和湿度敏感材料均为弹性材料，允许传感器阵列实现弯曲变形，可以布在任意机器人的表面；3. The substrate, pressure-sensitive material, temperature-sensitive material and humidity-sensitive material in the present invention are all elastic materials, which allow the sensor array to achieve bending deformation and can be placed on the surface of any robot;
4、本发明中由于叉指电极结构稳定，三种传感器电极都采用叉指电极结构，组成如图1所示的复合式传感器单元，实现压力、温度和湿度的同时检测。4. In the present invention, due to the stable structure of the interdigitated electrodes, all three kinds of sensor electrodes adopt the interdigitated electrode structure to form a composite sensor unit as shown in FIG. 1 to realize simultaneous detection of pressure, temperature and humidity.
附图说明Description of drawings
图1为本发明柔性复合式传感器单元电极示意图；Fig. 1 is the schematic diagram of flexible composite sensor unit electrode of the present invention;
图2为本发明复合式传感器侧面结构示意图；Fig. 2 is the schematic diagram of the side structure of the composite sensor of the present invention;
图3为本发明柔性复合式阵列传感器。Fig. 3 is a flexible composite array sensor of the present invention.
具体实施方式Detailed ways
参见图1、图2，本实施例中用于智能机器人人工敏感皮肤柔性复合式阵列传感器的结构形式是：构成阵列的传感单元是以柔性聚酰亚胺电路板为基底，在基底的同一面上分别设置压力传感器1、温度传感器2和湿度传感器3；压力传感器的表面高度高于温度传感器和湿度传感器，形成整体呈凹凸面的分布形式(如图2所示)。Referring to Fig. 1 and Fig. 2, the structural form of the flexible composite array sensor used in the artificial sensitive skin of the intelligent robot in this embodiment is: the sensing unit constituting the array is based on a flexible polyimide circuit board, and on the same substrate, A
具体实施是，在常温常压下，将压力敏感材料制备成厚度约为2mm的小块，温度敏感材料与湿度敏感材料利用旋涂法制备成薄膜。通过控制台式匀胶机的转速以及旋涂时间来控制温度敏感材料与湿度敏感材料薄膜的厚度，使温度和湿度传感器敏感材料的薄膜低于压力传感器敏感材料的厚度。The specific implementation is that under normal temperature and pressure, the pressure-sensitive material is prepared into a small piece with a thickness of about 2mm, and the temperature-sensitive material and the humidity-sensitive material are prepared into thin films by spin coating. The thickness of the film of the temperature sensitive material and the humidity sensitive material is controlled by controlling the rotational speed of the type glue coater and the spin coating time, so that the film of the temperature and humidity sensor sensitive material is lower than the thickness of the pressure sensor sensitive material.
压力传感器用炭黑填充硅橡胶作为压力敏感材料；温度传感器用碳纤维填充硅橡胶作为温度敏感材料；其中的压力敏感材料和温度敏感材料在《功能材料》2010年第二期，赵兴、黄英等人所发表的“用于复合式柔性触觉传感器的导电复合材料研究”中已有公开报导；湿度传感用碳纳米管填充硅橡胶作为湿度敏感材料，这一材料在《功能材料》2012年第06期中廉超、黄英等人发表的“多壁碳纳米管/硅橡胶复合材料的湿度敏感特性”中已有公开报道）The pressure sensor uses carbon black filled silicone rubber as the pressure sensitive material; the temperature sensor uses carbon fiber filled silicone rubber as the temperature sensitive material; the pressure sensitive material and temperature sensitive material are in the second issue of "Functional Materials" in 2010, Zhao Xing, Huang Ying "Research on Conductive Composite Materials for Composite Flexible Tactile Sensors" published by et al. has been publicly reported; humidity sensing uses carbon nanotubes to fill silicone rubber as a humidity sensitive material. This material was published in "Functional Materials" in 2012 "Humidity Sensitive Properties of Multi-walled Carbon Nanotubes/Silicone Rubber Composite Materials" published by Zhong Lianchao, Huang Ying and others in the 06th issue has been publicly reported)
图2所示，在基底4表面，复合式传感器单元的压力敏感材料，温度敏感材料，湿度敏感材料以及位于基底和压力敏感材料，温度敏感材料，湿度敏感材料之间的电极组成结构紧密的整体，其中压力传感器1的表面高度为2mm,温度传感器2和湿度传感器3的表面高度为0.5mm。As shown in Figure 2, on the surface of the
图1所示为复合式传感器单元的电极结构。其中复合式传感器单元中的压力传感器，温度传感器，湿度传感器的电极均采用叉指电极结构。复合式传感器单元内消除压力，温度，湿度相互干扰的方法如下：Figure 1 shows the electrode structure of the composite sensor unit. The electrodes of the pressure sensor, temperature sensor and humidity sensor in the composite sensor unit all adopt interdigital electrode structure. The method of eliminating mutual interference of pressure, temperature and humidity in the composite sensor unit is as follows:
由于湿度对压力和温度敏感材料的影响不大，即湿度变化对压力和温度传感器的影响可以忽略。所以只考虑温度与压力传感器间的干扰，当压力温度变化时，压力传感器的输出电阻RF=R0(1+k1F+a1△T)，式中：RF为压力传感器受到压力F（0<F≤FN）时压力传感器的阻值；R0为压力传感器不受力时的阻值；FN为压力传感器可测的最大压力，由实验测得；k1为压力传感器的压力-电阻系数，通过实验标定测得；a1为压力传感器的温度-电阻系数，由实验标定测得。Since humidity has little effect on pressure and temperature sensitive materials, that is, the effect of humidity changes on pressure and temperature sensors can be ignored. Therefore, only the interference between the temperature and the pressure sensor is considered. When the pressure and temperature change, the output resistance of the pressure sensor RF =R0 (1+k1 F+a1 △T), where: RF is the pressure of the pressure sensor The resistance value of the pressure sensor when F (0<F≤FN ); R0 is the resistance value of the pressure sensor without force; FN is the maximum pressure that the pressure sensor can measure, which is measured by experiment; k1 is the pressure sensor The pressure-resistivity coefficient of is measured by the experimental calibration; a1 is the temperature-resistivity coefficient of the pressure sensor, which is measured by the experimental calibration.
由于传感器设计成凹凸状，压力传感器高于温度传感器和湿度传感器，复合式传感器单元所受的压力对单元内温度传感器和湿度传感器的影响可忽略。所以温度变化时，温度传感器输出电阻为RT=R0(1+a2△T)，其中，RT为温度传感器在温度T(T0<T≤Tc）下的阻值；T0为温度传感器所能测得最低温度可由实验测得；Tc为温度传感器可测的最高温度可由实验测得；R0为温度传感器在T0温度下的阻值可由实验测得；α2为温度传感器电阻温度系数可由实验标定测得；△T＝T-T0。则由方程RT=R0(1+a2△T)可测复合式传感器单元上的准确温度T以及△T。再以求得的△T带入RF=R0(1+k1F+a1△T)中即可得到复合式传感器单元上的所受的压力F。通过此计算方法可以求得每个复合式传感器单元内的温度与压力即可排除压力传感器的温度干扰。Since the sensor is designed in a concave-convex shape, and the pressure sensor is higher than the temperature sensor and the humidity sensor, the impact of the pressure on the composite sensor unit on the temperature sensor and humidity sensor in the unit is negligible. Therefore, when the temperature changes, the output resistance of the temperature sensor is RT =R0 (1+a2 △T), where RT is the resistance value of the temperature sensor at the temperature T (T0 <T≤Tc ); T0 The lowest temperature that can be measured by the temperature sensor can be measured by experiment;Tc is the highest temperature that can be measured by the temperature sensor can be measured by experiment;R0 is the resistance value of the temperature sensor atT0 temperature can be measured by experiment;α2 is The temperature coefficient of resistance of the temperature sensor can be measured by experimental calibration; △T=TT0 . Then the exact temperature T and ΔT on the composite sensor unit can be measured by the equation RT =R0 (1+a2 ΔT). Then bring the obtained ΔT into RF =R0 (1+k1 F+a1 ΔT) to obtain the pressure F on the composite sensor unit. Through this calculation method, the temperature and pressure in each composite sensor unit can be obtained to eliminate the temperature interference of the pressure sensor.
图3所示为由复合式传感器单元组合而成的复合式传感器阵列。各复合式传感器单元间距为3mm。阵列的大小和形状可根据需要调整。复合式传感器阵列由于是多个复合式传感器组合而成所以可同时采集压力场，温度场以及湿度场信息。Figure 3 shows a composite sensor array composed of composite sensor units. The distance between each composite sensor unit is 3mm. The size and shape of the array can be adjusted as needed. The composite sensor array can collect pressure field, temperature field and humidity field information at the same time because it is composed of multiple composite sensors.
制作工艺：Craftsmanship:
1、采用标准柔性电路板制作技术制作柔性聚酰亚胺电路板；1. Using standard flexible circuit board manufacturing technology to make flexible polyimide circuit boards;
2、采用丝网印刷技术在柔性聚酰亚胺电路板上制作压力敏感单元电极，温度敏感单元电极，湿度敏感单元电极；2. Use screen printing technology to make pressure-sensitive unit electrodes, temperature-sensitive unit electrodes, and humidity-sensitive unit electrodes on flexible polyimide circuit boards;
3、在室温下采用溶液共混工艺分别制作柔性压敏导电橡胶的混合溶液、温度敏感导电橡胶的混合溶液和湿度敏感导电橡胶混合溶液；3. Using a solution blending process at room temperature to prepare a mixed solution of flexible pressure-sensitive conductive rubber, a mixed solution of temperature-sensitive conductive rubber, and a mixed solution of humidity-sensitive conductive rubber;
4、制作柔性压敏导电橡胶的混合溶液在室温常压下固化成尺寸为5mm×5mm×2mm小块状材料4. The mixed solution for making flexible pressure-sensitive conductive rubber is cured at room temperature and normal pressure to form a small block material with a size of 5mm×5mm×2mm
5、温度敏感材料的混合溶液和湿度敏感材料混合溶液利用旋涂制成0.5mm厚的膜，室温常压下固化成型。以便与温度传感器形成有一定高度差的凹凸结构。5. The mixed solution of the temperature-sensitive material and the mixed solution of the humidity-sensitive material are formed into a film with a thickness of 0.5 mm by spin coating, and cured at room temperature and normal pressure. In order to form a concave-convex structure with a certain height difference with the temperature sensor.
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| WO2014117724A1 (en)* | 2013-01-29 | 2014-08-07 | 中国科学院苏州纳米技术与纳米仿生研究所 | Electronic skin, preparation method and use thereof |
| CN105784788A (en)* | 2016-05-09 | 2016-07-20 | 吉林大学 | Paper-based flexible humidity sensitive element and preparation method thereof |
| CN106057534A (en)* | 2016-08-03 | 2016-10-26 | 中国科学院深圳先进技术研究院 | Pressure sensitive electric switch based on printing technology and manufacturing method thereof |
| CN106352927A (en)* | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| CN106568539A (en)* | 2016-10-20 | 2017-04-19 | 上海交通大学 | Polymer substrate-based monolithic integrated temperature and humidity flexible sensor and preparation method |
| CN107345825A (en)* | 2017-09-06 | 2017-11-14 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensible equipment |
| CN107374780A (en)* | 2017-08-29 | 2017-11-24 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detection humiture and pressure |
| CN107449467A (en)* | 2017-08-29 | 2017-12-08 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN107551323A (en)* | 2017-08-29 | 2018-01-09 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on piezoelectric and thermistor material |
| CN107582215A (en)* | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | Artificial intelligence skin and its detection method with humiture and pressure detecting function |
| CN107582216A (en)* | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detecting pressure and temperature |
| CN107748184A (en)* | 2017-08-31 | 2018-03-02 | 南方科技大学 | Humidity sensor and preparation method thereof |
| CN107764331A (en)* | 2017-10-21 | 2018-03-06 | 长沙展朔轩兴信息科技有限公司 | Flexible compound type sensor array for the artificial sensitive skin of intelligent robot |
| CN108332794A (en)* | 2018-02-09 | 2018-07-27 | 中国科学院电子学研究所 | Biomimetic tactile system and multi-function robot |
| CN108519173A (en)* | 2018-03-07 | 2018-09-11 | 南京纳铠生物医药科技有限公司 | A kind of flexibility stress and humidity sensor, preparation method and application |
| CN109253757A (en)* | 2018-09-26 | 2019-01-22 | 东南大学 | A kind of flexible passive is wireless humidity, pressure integrated sensor |
| CN109249422A (en)* | 2017-07-14 | 2019-01-22 | 江苏申源新材料有限公司 | A kind of flexible high-strength robot skin preparation method |
| WO2019047063A1 (en)* | 2017-09-06 | 2019-03-14 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensing device |
| CN110455871A (en)* | 2019-07-25 | 2019-11-15 | 湘潭大学 | A kind of dual-mode humidity sensor based on nickel iodide and preparation method thereof |
| CN110584833A (en)* | 2019-10-17 | 2019-12-20 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin with touch sense and temperature sense |
| CN110712224A (en)* | 2019-10-17 | 2020-01-21 | 中国科学院长春光学精密机械与物理研究所 | A smart skin with a sense of temperature |
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| CN113175948A (en)* | 2021-03-31 | 2021-07-27 | 西安交通大学 | Flexible integrated sensor and method for simultaneously measuring temperature, pressure and medium |
| CN113340356A (en)* | 2021-06-29 | 2021-09-03 | 北京科技大学 | Array type temperature and pressure cooperative sensor and application method |
| CN113386158A (en)* | 2021-05-17 | 2021-09-14 | 浙江大学 | Full-printing bionic super-sensing flexible robot skin |
| CN114536355A (en)* | 2022-01-26 | 2022-05-27 | 浙江大学 | Expandable and reconfigurable multi-stage perception flexible robot skin |
| CN116222812A (en)* | 2022-11-21 | 2023-06-06 | 上海交通大学 | Flexible temperature sensor based on composite film substrate and preparation method thereof |
| CN118081840A (en)* | 2024-01-10 | 2024-05-28 | 清华大学深圳国际研究生院 | Haptic sensation method, haptic sensation device, electronic apparatus, and storage medium |
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| WO2014117724A1 (en)* | 2013-01-29 | 2014-08-07 | 中国科学院苏州纳米技术与纳米仿生研究所 | Electronic skin, preparation method and use thereof |
| CN105784788A (en)* | 2016-05-09 | 2016-07-20 | 吉林大学 | Paper-based flexible humidity sensitive element and preparation method thereof |
| CN105784788B (en)* | 2016-05-09 | 2019-01-11 | 吉林大学 | A kind of paper base flexibility dew cell and preparation method thereof |
| CN106057534A (en)* | 2016-08-03 | 2016-10-26 | 中国科学院深圳先进技术研究院 | Pressure sensitive electric switch based on printing technology and manufacturing method thereof |
| CN106352927A (en)* | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| CN106568539A (en)* | 2016-10-20 | 2017-04-19 | 上海交通大学 | Polymer substrate-based monolithic integrated temperature and humidity flexible sensor and preparation method |
| CN109249422B (en)* | 2017-07-14 | 2022-03-15 | 江苏申源新材料有限公司 | Preparation method of flexible high-strength robot skin |
| CN109249422A (en)* | 2017-07-14 | 2019-01-22 | 江苏申源新材料有限公司 | A kind of flexible high-strength robot skin preparation method |
| CN107582215A (en)* | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | Artificial intelligence skin and its detection method with humiture and pressure detecting function |
| CN107449467A (en)* | 2017-08-29 | 2017-12-08 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN107582216A (en)* | 2017-08-29 | 2018-01-16 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detecting pressure and temperature |
| CN107551323A (en)* | 2017-08-29 | 2018-01-09 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on piezoelectric and thermistor material |
| CN107374780B (en)* | 2017-08-29 | 2018-05-04 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detection humiture and pressure |
| CN107449467B (en)* | 2017-08-29 | 2018-05-15 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN107551323B (en)* | 2017-08-29 | 2018-05-25 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on piezoelectric material and thermistor material |
| CN107374780A (en)* | 2017-08-29 | 2017-11-24 | 北京中硕众联智能电子科技有限公司 | A kind of artificial intelligence skin and its method for detection humiture and pressure |
| CN107748184A (en)* | 2017-08-31 | 2018-03-02 | 南方科技大学 | Humidity sensor and preparation method thereof |
| CN107748184B (en)* | 2017-08-31 | 2020-11-24 | 南方科技大学 | Humidity sensor and preparation method thereof |
| WO2019047063A1 (en)* | 2017-09-06 | 2019-03-14 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensing device |
| CN107345825A (en)* | 2017-09-06 | 2017-11-14 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensible equipment |
| CN107764331A (en)* | 2017-10-21 | 2018-03-06 | 长沙展朔轩兴信息科技有限公司 | Flexible compound type sensor array for the artificial sensitive skin of intelligent robot |
| CN108332794A (en)* | 2018-02-09 | 2018-07-27 | 中国科学院电子学研究所 | Biomimetic tactile system and multi-function robot |
| CN108519173A (en)* | 2018-03-07 | 2018-09-11 | 南京纳铠生物医药科技有限公司 | A kind of flexibility stress and humidity sensor, preparation method and application |
| CN109253757A (en)* | 2018-09-26 | 2019-01-22 | 东南大学 | A kind of flexible passive is wireless humidity, pressure integrated sensor |
| WO2020062529A1 (en)* | 2018-09-26 | 2020-04-02 | 东南大学 | Flexible passive wireless integrated humidity and pressure sensor |
| CN109253757B (en)* | 2018-09-26 | 2020-05-19 | 东南大学 | Flexible passive wireless humidity and pressure integrated sensor |
| CN110455871A (en)* | 2019-07-25 | 2019-11-15 | 湘潭大学 | A kind of dual-mode humidity sensor based on nickel iodide and preparation method thereof |
| CN110584833A (en)* | 2019-10-17 | 2019-12-20 | 中国科学院长春光学精密机械与物理研究所 | Intelligent skin with touch sense and temperature sense |
| CN110712224A (en)* | 2019-10-17 | 2020-01-21 | 中国科学院长春光学精密机械与物理研究所 | A smart skin with a sense of temperature |
| CN111307204A (en)* | 2019-11-28 | 2020-06-19 | 杭州电子科技大学 | A flexible multifunctional sensor |
| CN113175948A (en)* | 2021-03-31 | 2021-07-27 | 西安交通大学 | Flexible integrated sensor and method for simultaneously measuring temperature, pressure and medium |
| CN113386158A (en)* | 2021-05-17 | 2021-09-14 | 浙江大学 | Full-printing bionic super-sensing flexible robot skin |
| CN113386158B (en)* | 2021-05-17 | 2022-05-27 | 浙江大学 | A fully printed biomimetic super-sensing flexible robotic skin |
| CN113340356A (en)* | 2021-06-29 | 2021-09-03 | 北京科技大学 | Array type temperature and pressure cooperative sensor and application method |
| CN114536355A (en)* | 2022-01-26 | 2022-05-27 | 浙江大学 | Expandable and reconfigurable multi-stage perception flexible robot skin |
| CN116222812A (en)* | 2022-11-21 | 2023-06-06 | 上海交通大学 | Flexible temperature sensor based on composite film substrate and preparation method thereof |
| CN118081840A (en)* | 2024-01-10 | 2024-05-28 | 清华大学深圳国际研究生院 | Haptic sensation method, haptic sensation device, electronic apparatus, and storage medium |
| CN118081840B (en)* | 2024-01-10 | 2025-09-30 | 清华大学深圳国际研究生院 | Tactile perception method, tactile perception device, electronic device and storage medium |
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