Portable three-dimensional light acoustic excitation sources based on three scanning galvanometersTechnical field
The present invention relates to a kind of photo-acoustic excitation technology, particularly relate to a kind of portable three-dimensional light acoustic excitation sources based on three scanning galvanometers.
Background technology
The two-dimensional laser galvanometer has advantages such as volume is little, response speed is fast, sweep velocity is high, sweep limit is big, is widely used in fields such as laser index carving, cut, laser boring at present.But in bigger scanning field of view; When light beam during to boundary scan, variation has taken place in the light path of laser, so analyzing spot no longer is the original focal position of light beam; Need to increase a dynamic focusing system this moment and realize focusing on the whole plane of scanning motion, this i.e. three scanning galvanometers.
Photoacoustic technique usually adopts the solid state laser with little burnt level energy and nanosecond pulsewidth as excitaton source, but its volume is big, price is high, safeguard that numerous shortcomings such as difficulty hamper the marketization popularization of optoacoustic system always.In recent years, has the semiconductor laser that volume is little, in light weight, the life-span is long, conversion efficiency is high and cover advantages such as wavelength band is wide, just as directly using light source or pump light source progressively are applied to the optoacoustic field.For example; Allen in 2006 etc. have reported and have adopted the array of four pulsed laser diodes compositions to realize large-area two-dimentional photoacoustic imaging (T. J. Allen as the optoacoustic driving source; And P. C. Beard, " Pulsed near-infrared laser diode excitation system for biomedical photoacoustic imaging, " Opt. Lett. 31 (23); 3462-3464,2006); Maslov in 2008 etc. have reported that the continuous laser diode that adopts single amplitude modulation equally also realized large-area optical acoustic scanning imaging (K. Maslov and L. V. Wang as the optoacoustic driving source; " Photoacoustic imaging of biological tissue with intensity-modulated continuous-wave laser; " J. Biomed. Opt. 13 (2); 024006,2008); Because the peak power of semiconductor laser is lower; Be no more than 200W generally speaking; So above method needs sensor to be done the photoacoustic signal of circumference or linear mechanical scanning reception different directions by step motor drive; Have numerous shortcomings such as length consuming time, complicated operation, mechanical vibration are big, in practical application, obviously have sizable limitation, can't satisfy actual high precision, high stability and fast imaging demand.
Summary of the invention
To the problems referred to above; The technical matters that the present invention will solve provides a kind of portable three-dimensional light acoustic excitation sources based on three scanning galvanometers; It will be fast and efficiently three scanning galvanometer technical application to the photo-acoustic excitation field; And realize integrated design can realizing small-sized three-dimensional light acoustic excitation sources with laser diode.
For realizing the foregoing invention purpose, the present invention adopts following technical scheme:
A kind of portable three-dimensional light acoustic excitation sources based on three scanning galvanometers is characterized in that: it comprises laser diode, collimation lens set, expanded beam lens group, focus lens group, X axle reflection galvanometer, Y axle reflection galvanometer, field lens, linear electric motors, X spindle motor, y-axis motor, shell; Expanded beam lens group and linear electric motors mechanical connection; X axle reflection galvanometer and X spindle motor mechanical connection; Y axle reflection galvanometer and y-axis motor mechanical connection; Laser diode, collimation lens set, expanded beam lens group, focus lens group, X axle reflection galvanometer, Y axle reflection galvanometer, field lens, linear electric motors, X spindle motor, y-axis motor are placed in the shell; Laser diode is launched pulsed or the continous way laser after modulation; Behind the collimation lens set collimation; Expand bundle by expanded beam lens group; Focus on by focus lens group again, inspire photoacoustic signal on the sample through focusing on to be radiated at behind X axle reflection galvanometer, Y axle reflection galvanometer and the protective glass successively then; X spindle motor and y-axis motor can be driven and drive respectively X axle reflection galvanometer and the deflection of Y axle reflection galvanometer makes light beam do laser scanning at X-Y plane; The expanded beam lens group that can drive linear electric motors and drive moves and makes light beam do laser scanning in Z-direction, has promptly obtained the three-dimensional light sound field.
The radiation wavelength of said laser diode is one or more wavelength in ultraviolet to the infra-red range.
Said collimation lens set, expanded beam lens group, condenser lens and field lens group can be formed by one or more combination of lenses respectively.
The invention has the beneficial effects as follows:
(1) the present invention adopts three scanning galvanometers at a high speed; Usually sweep velocity is not less than 3KHz (promptly 300 * 300 analyzing spots only need 30 seconds); Sweep velocity is done circumference and linear mechanical scanning far above traditional sensor by step motor control, effectively raises the detection time of system.
(2) because three scanning galvanometers normally adopt moving of elaborate servo Electric Machine Control catoptron and expanded beam lens group to realize the 3-D scanning of light beam; Solved the shortcoming of two-dimensional laser galvanometer focus out of focus in large-area scanning; Have advantages such as focusing range is big, scanning accuracy is high, scanning inertia is low, focal adjustments is prone to, mechanical vibration are little, drift value is low, effectively improved scanning accuracy, stability and the practicality of system.
(3),, realized the miniaturization excitation of three-dimensional photoacoustic imaging with the laser diode integrated design of small size because three scanning galvanometer systems have the little and compact conformation of volume.
Description of drawings
Fig. 1 is the structural representation of embodiment 1.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are specified:
The structure of embodiment 1 present embodiment is as shown in Figure 1, and the name of each element is called: 1. laser diode, 2. collimation lens set, 3. expanded beam lens group, 4. focus lens group, 5. X axle reflection galvanometer, 6. Y axle reflection galvanometer, 7. field lens, 8. linear electric motors, 9. X spindle motor, 10. y-axis motor, 11. shells.
Wherein light source 1 select for use pulse semiconductor laser diode (PGAS1S24, Hoffo), operation wavelength is 905nm, peak power is 49W, pulsewidth is 150ns, single pulse energy is about 7.3uJ; X axle and y-axis motor adopt the elaborate servo motor, and repeatable accuracy can reach 8 μ rad, and the linear electric motors precision can reach 0.32 micron.
This instance comprises laser diode, collimation lens set, expanded beam lens group, focus lens group, X axle reflection galvanometer, Y axle reflection galvanometer, field lens, linear electric motors, X spindle motor, y-axis motor, shell; Expanded beam lens group and linear electric motors mechanical connection; X axle reflection galvanometer and X spindle motor mechanical connection; Y axle reflection galvanometer and y-axis motor mechanical connection; Laser diode, collimation lens set, expanded beam lens group, focus lens group, X axle reflection galvanometer, Y axle reflection galvanometer, field lens, linear electric motors, X spindle motor, y-axis motor are placed in the shell; Laser diode is launched pulsed or the continous way laser after modulation; Behind the collimation lens set collimation; Expand bundle by expanded beam lens group; Focus on by focus lens group again, inspire photoacoustic signal on the sample through focusing on to be radiated at behind X axle reflection galvanometer, Y axle reflection galvanometer and the protective glass successively then; X spindle motor and y-axis motor can be driven and drive X axle reflection galvanometer and the deflection of Y axle reflection galvanometer makes light beam do laser scanning at X-Y plane; The expanded beam lens group that can drive linear electric motors and drive moves and makes light beam do laser scanning in Z-direction, has promptly obtained the three-dimensional light sound field.
The radiation wavelength of said laser diode is one or more wavelength in ultraviolet to the infra-red range.
Said collimation lens set, expanded beam lens group, condenser lens and field lens group can be formed by one or more combination of lenses respectively.