CN102501224A - Planar maglev linear-motion platform - Google Patents

Abstract

Translated fromChinese

本发明公开了一种具有两维较大行程的平面型磁浮直线运动平台装置。该装置的每个电磁轴承由两个差动式驱动电磁铁组成，控制线圈中电流可使磁悬浮工作平台在电磁力作用下稳定悬浮，与支承座及直线驱动系统间无机械接触；平台与直线电机驱动单元相互独立，两个水平面上相互垂直的直线电机依靠侧向导向悬浮电磁铁的非接触电磁力作用推动磁浮平台作平面型两维直线运动。其中磁浮平台的两个侧向直线导向及驱动机构结构完全相同，每个导向机构均由两个电磁轴承和机械滚动轴承组成。两导向无耦合关系，当平台高加速度运动时，刚性滚动轴承辅助导向及驱动磁悬浮工作平台，而在稳定状态及需要比较小的驱动力时，柔性电磁轴承可以直接驱动磁悬浮工作平台。The invention discloses a planar magnetic levitation linear motion platform device with a two-dimensional large stroke. Each electromagnetic bearing of the device is composed of two differential drive electromagnets. Controlling the current in the coil can make the magnetic levitation work platform float stably under the action of electromagnetic force, without mechanical contact with the support seat and the linear drive system; The motor drive units are independent of each other, and the two linear motors perpendicular to each other on the horizontal plane rely on the non-contact electromagnetic force of the side-guided levitation electromagnet to push the maglev platform to make a planar two-dimensional linear motion. Among them, the two lateral linear guides and drive mechanisms of the maglev platform are completely identical in structure, and each guide mechanism is composed of two electromagnetic bearings and mechanical rolling bearings. There is no coupling relationship between the two guides. When the platform moves at high acceleration, the rigid rolling bearing assists in guiding and drives the magnetic levitation work platform, while in a stable state and requires a relatively small driving force, the flexible electromagnetic bearing can directly drive the magnetic levitation work platform.

Description

A kind of plane magnetic suspension linear motion platform

Technical field

The present invention relates to the accurate magnetic suspension linear kinetic control system in the microelectronics manufacturing equipment, particularly relate to a kind of big stroke two-dimensional plane sports type magnetic suspension linear motion platform.

Technical background

Make and biological manufacturing field at some microelectronic chips, like the high speed wire bonder etc., make that Equipment Requirement has at a high speed, high accuracy, high-cleanness, high kinematic system.But the kinematic system of present chip manufacturing equipment all adopts line slideway or air-bearing supporting, receives the influence of mechanical friction or air-flow, and positioning accuracy and dynamic property are limited, is difficult to adapt to the close and environment friendly requirement of high speed and super precision.Adopting the magnetic suspension bearing linear motion system that does not have the machinery contact is a kind of new selection.In the design of traditional multidimensional magnetic transportation by driving moving platform, linear electric motors and magnetic bearing integrate, and the kinematic system on each free degree direction coupling each other is strong, and the plane motion stroke is limited.The magnetic suspension platform that the present invention will have operating load keeps balance through the electromagnetic force and the load of the generation of control suspension magnet on vertical gravity direction, keep the floating workbench stable suspersion of magnetic; Two the side direction straight-line guidances and the driving mechanism structure of the floating platform of magnetic are identical, and each guiding mechanism is formed by two electromagnetic bearings and two mechanical rolling bearings.The driving force that provides through linear electric motors; Rigidity rolling bearing driver part or flexible electrical magnetic bearing driver part driven magnetic suspension workbench by driver element; Make the magnetic suspension workbench in horizontal plane rapid movement and planar have bigger travel range, realize magnetic suspension guide to and drive between integrated.Stroke on each direction only depends on the linear electric motors stroke, can infinitely increase in theory.

Summary of the invention

Technical problem to be solved by this invention provides a kind of large-range plane type magnetic suspension linear motion platform of realizing not having the machinery contact; Effectively improve working space, kinematic accuracy and the dynamic response performance of kinematic system, the bidimensional magnetic suspension linear motion platform of a kind of cleaning, high speed and super precision is provided for microelectronic chip manufacturing equipment

In order to solve the problems of the technologies described above; Plane magnetic suspension linear motion platform provided by the invention; Mainly comprise: base, electromagnet bearing, magnetic suspension workbench, the vertical current vortex sensor of quadruplet, operating load, the four pairs of differential DMs, be used to detect two cover linear grating chis, the location-plate of displacement motor, driving arm, vertically place two linear electric motors that move along the XY direction respectively, two pairs of closed slides consistent, spacing detection optoelectronic switch, limited block with the motor movement direction, each ties up respectively to have on direction of motion that two pairs of horizontally-guided electromagnet are respectively arranged on two rolling bearings, each guide direction.

The technical characterictic that plane magnetic suspension linear motion platform of the present invention solves big route problem comprises: 1, the electromagnet of four pairs of vertical winding arounds is formed four differential type ACTIVE CONTROL electromagnetic bearings; Positional information through detecting near the current vortex sensor of installing every pair of electromagnet is as feedback control signal; The electromagnetic force that electric current in the control coil produces with the control magnetic bearing; Can make magnetic float workbench and stably be suspended in above the electromagnet bearing, not have mechanical the contact when the floating platform of assurance magnetic is worked with between vertical bracing frame.2, support is a non-magnet material, and the floating workbench of electromagnet and magnetic is a high-permeability material, and the floating workbench of magnetic is the square groove shape structure of hollow, and adjacent both sides are vertical each other, wherein have two adjacent vertical edges to play guide rail effect; Two rectilinear motion motors are fixed on above the base; The connection driving arm of each motor is equipped with two guiding and drives with rolling bearing and two electromagnetic bearings, and the guide rail limit of the floating platform of magnetic places between the right space of magnet, under two electric mover driving action; The floating platform of magnetic can move along orthogonal two-dimensional plane direction; Receive the guide effect of two pairs of horizontal direction electromagnet, two-dimensional motion does not have mechanism's coupling, thereby can make the magnetic suspension workbench realize large-scale plane motion.3, each driving arm that links to each other with electric mover is a non-magnet material, comprises two rigidity driver parts (rolling bearing) and two pairs of soft drive parts (differential type electromagnetic bearing) on the support respectively.The flexible electrical magnetic bearing carries out position servo feedback through eddy current displacement sensor, and controlled making is used in electromagnetic force and the air gap position of the relative magnet of guide rail on the floating platform guide edge of magnetic.The rolling bearing external diameter is littler from its distance than electromagnet outer surface from the minimum distance on the floating platform rail of magnetic surface; Can protect electromagnetic bearing; Under height acceleration, high thrust driving action; When the electromagnetic push deficiency of electromagnetic bearing and size of gaps are difficult to keep constant, can directly promote the floating platform motion of magnetic by rolling bearing.Two rolling bearings and two horizontal electromagnetic bearings are accomplished the guiding on each dimension direction jointly and are driven function.4, the integrated mode of operation of rigidity rolling bearing and flexible magnetism bearing is: when the magnetic suspension workbench needs bigger acceleration; The direct driven magnetic suspension of rigidity driver part workbench, wherein the soft drive parts play the effect that cushions and avoid rigid collision; When the magnetic suspension workbench needed smaller driving force, the soft drive parts are driven magnetic suspension workbench directly, realize magnetic suspension guide to and driving between integrated; 5, linear electric motors are servomotor, and high accuracy feedback element linear grating chi is housed respectively, can realize its precise motion control.Optoelectronic switch and limited block are carried out automatically controlled to its extreme position and the two position-limiting actions of mechanical system.

Compare with background technology, the invention has the beneficial effects as follows:

1, the magnetic suspension platform that has operating load makes the floating workbench in the vertical direction stable suspersion of magnetic in the operating position through electromagnetic force and load maintenance balance that four pairs of differential type DMs of control produce; The driving force that provides through linear electric motors; Rigidity driver part or soft drive parts driven magnetic suspension workbench by driver element; Make the magnetic suspension workbench in horizontal plane, produce rapid movement and have bigger plane travel range, realize magnetic suspension guide to and drive between integrated;

2, when the magnetic suspension workbench needs stable suspersion, four pairs of electromagnet of suspension magnet unit and soft drive parts make it be suspended in settling position through the position feedback of current vortex sensor, realize magnetic suspension guide to drive between separate.When being steady operation, do not have mechanical the contact between the floating platform of magnetic and pedestal and linear drive system, avoided bringing because of mechanical friction creep, problems such as lubricant pollution, wearing and tearing, have higher dynamic response performance and kinematic accuracy.

Description of drawings

Fig. 1 is a structural representation of the present invention, and Fig. 1 (a) is a front view, and 1 (b) is vertical view.Among Fig. 1: base (1); Electromagnet bearing (2); Magnetic suspension workbench (3); The vertical current vortex sensor of quadruplet (4); Operating load (5); Four to the differential DM of " U " shape (6); Be used to detect two cover linear grating chis (7) of displacement motor; Location-plate (8); Driving arm (9); Vertical two linear electric motors (10) that move along the XY direction respectively of placing; The two pair closed slides (11) consistent with the motor movement direction; Optoelectronic switch (12); Limited block (13); Two rolling bearings (14) on each dimension direction of motion; Two pairs of horizontally-guided electromagnet (15) are respectively arranged on each guide direction.

The specific embodiment

Below in conjunction with the accompanying drawing and the specific embodiment the present invention is described further.

Referring to Fig. 1; Plane magnetic suspension linear motion platform according to the invention; Critical piece comprises: a base (1), an electromagnet stent (2) (supporting four pairs of vertical electromagnet), magnetic suspension workbench (3), the vertical current vortex sensor of quadruplet (4), operating load (5), four pairs of differential DMs (6), be used to detect two cover linear grating chis (7), the location-plate (8) of displacement motor, driving arm (9), vertically place two linear electric motors (10) of moving along the XY direction respectively, two pairs of closed slides (11) consistent, optoelectronic switch (12), limited block (13) with the motor movement direction, each is tieed up on two rolling bearings (14) on direction of motion, each guide direction that two pairs of horizontally-guided electromagnet (15) are respectively arranged.Two linear electric motors can be identical, also can be different, require to decide according to concrete stroke.Two linear electric motors actings in conjunction are on the floating platform of magnetic; The floating platform of magnetic is under floating guiding of the magnetic of driving arm and push-and-pull action, and with respect to self guide groove moving linearly, the two-dimensional direction motion is separate; No machinery and electrical couplings make platform can produce plane motion on a large scale.

The present invention has four to " U "type electromagnet 6 on the floating gravity direction of platform perpendicular to ground of magnetic, be wrapped with the water conservancy diversion coil around electromagnet " U " shape iron core, the every pair of electromagnet opening surface over against, middlely be the floating platform plate face of magnetic, and keep definite gap.When in coil, switching on, relative power-on and power-off magnet produces electromagnetic attraction, utilizes the position feedback information of current vortex sensing to carry out position servo control, can make the floating platform of magnetic keep stable suspersion and does not contact with iron core.Verticalbelt coil electromagnet 6 is formed four ACTIVE CONTROL electromagnetic bearings; Electric current in the coil makes each magnetic bearing produce definite electromagnetic force with balancing gravity and external disturbance power with plug-type Differential Control mode; Can make magnetic float workbench and stably be suspended in above the electromagnet bearing, not have mechanical the contact when the floating platform of assurance magnetic is worked with between vertical bracing frame.

For improving magnetic bearing magnetic conduction efficient, reduce magnetic interference and leak and grow, avoid magnet short-cut path, support adopts non-magnet material, and the floating workbench of electromagnet and magnetic is a high-permeability material.The floating workbench of magnetic is the square groove shape structure of hollow, and adjacent both sides are vertical each other, wherein has two adjacent vertical edges to play guide rail and bears the effect of linear motor driving power; Two rectilinear motion motors are fixed on above the base; The connection driving arm of each motor is equipped with two guiding and drives with rolling bearing and two electromagnetic bearings, and the guide rail limit of the floating platform of magnetic places between the right space of magnet, under two electric mover driving action; The floating platform of magnetic can move along orthogonal two-dimensional plane direction; Receive the guide effect of two pairs of horizontal direction electromagnet, two-dimensional motion does not have mechanism's coupling, thereby can make the magnetic suspension workbench realize large-scale plane motion.

Each driving arm that links to each other with electric mover also adopts non-magnet material, comprises two rigidity driver parts (rolling bearing) and two pairs of soft drive parts (differential type electromagnetic bearing) on the support respectively.Place the guide edge of the floating platform of magnetic between the relative air gap of flexible electrical magnetic bearing, carry out the position servo feedback through eddy current displacement sensor, controlled making is used in electromagnetic force and the size of gaps of the relative magnet of guide rail on the floating platform guide edge of magnetic.The rolling bearing external diameter is littler from its distance than electromagnet outer surface from the minimum distance on the floating platform rail of magnetic surface; Can protect electromagnetic bearing; Under height acceleration, high thrust driving action; When the electromagnetic push deficiency of electromagnetic bearing and size of gaps are difficult to keep constant, can directly promote the floating platform motion of magnetic by rolling bearing.And when the floating platform stable of magnetic is worked, under the effect of electromagnetic force, also keeping contactless suspended state between platform vertical direction two guide edges and driving arm, this moment, rolling bearing was inoperative.Two rolling bearings and two horizontal electromagnetic bearings are accomplished the guiding on each dimension direction jointly and are driven function.

The cooperative work mode of rigidity rolling bearing and flexible magnetism suspension bearing is: before the rectilinear motion, at first keep the floating platform of magnetic to be in the stable suspersion state.In the linear drives process; When the magnetic suspension workbench needs bigger acceleration; The temporary transient unstability because electromagnetic force is limited, the rigidity driver part direct driven magnetic suspension of contact guide rail earlier workbench, wherein the soft drive parts play the effect that cushions and avoid rigid collision; When the magnetic suspension workbench needs smaller driving force; The soft drive parts are driven magnetic suspension workbench directly; The floating platform of magnetic this moment is in contactless suspension duty with linear drive system, realized magnetic suspension guide to and driving between integrated.Wherein rolling bearing plays the process auxiliary drive effect.

The linear electric motors that linear drives adopts are servomotor, and high accuracy feedback element (linear grating chi) is housed respectively, can realize its precise motion control.Each is tieed up and all is provided with optoelectronic switch and limited block on the forward and reverse direction of motion, carries out automatically controlled and the two position-limiting actions of mechanical system to its extreme position.Optoelectronic switch detects extreme position earlier and sends to the bit switch signal, and the control system takes spacing action according to detected information.

Operating load on the magnetic suspension platform is the target job system, and a typical application instance shown in the figure is to place a cover lead bonding joint, and driven magnetic is floating can carry out the high speed bonding that goes between to chip.

During the platform operate as normal; The magnetic suspension platform that has operating load at first keeps balance through electromagnetic force and the load gravity that the control system produces the floating electromagnet of vertical direction magnetic, the balance operating position that the floating workbench in the vertical direction stable suspersion of magnetic is being confirmed; The also first steady operation of the guiding electromagnetic bearing of horizontal direction makes the platform guide edge be in the air gap centre position, thereby makes the suspension duty fully that whole workbench is in does not have the machinery contact.

When carrying out the operation of acceleration, deceleration rectilinear motion; The driving force that provides through linear electric motors; Rigidity driver part or soft drive parts driven magnetic suspension workbench by driver element; Make the magnetic suspension workbench in horizontal plane, produce rapid movement and have bigger plane travel range, realize magnetic suspension guide to and drive between integrated;

When the floating platform stable of magnetic is worked; Separate between the floating operating system of magnetic and the linear drive system; There is not mechanical the contact between the floating platform of magnetic and pedestal and linear drive system; Avoided in the rectilinear motion process creeping because of mechanical friction brings, problem such as lubricant pollution, wearing and tearing, have higher dynamic response performance and kinematic accuracy, have better cleaning ambient.

Claims (7)

Translated fromChinese

1.一种平面型磁浮直线运动平台，主要部件包括：底座(1)、电磁铁支座(2)、磁悬浮工作平台(3)、四套垂向电涡流传感器(4)、工作负载(5)、四对差动驱动电磁铁(6)、用于检测电机位移的两套直线光栅尺(7)、定位板(8)，驱动支架(9)、垂直放置分别沿XY方向运动的两台直线电机(10)、与电机运动方向一致的两对平行导轨(11)、光电开关(12)、限位块(13)、每一维运动方向上的两个滚动轴承(14)、每一导向方向上各有两对水平导向电磁铁(15)。1. A planar maglev linear motion platform, the main components include: a base (1), an electromagnet support (2), a maglev working platform (3), four sets of vertical eddy current sensors (4), and a working load (5 ), four pairs of differential drive electromagnets (6), two sets of linear grating scales (7) for detecting motor displacement, positioning plate (8), drive bracket (9), and two vertically placed moving along the XY direction Linear motor (10), two pairs of parallel guide rails (11) consistent with the direction of motion of the motor, photoelectric switch (12), limit block (13), two rolling bearings (14) in each dimension of motion direction, each guiding Two pairs of horizontal guide electromagnets (15) are respectively arranged on the direction.2.根据权利要求1所述的一种平面型磁浮直线运动平台的特征在于：四对垂向带线圈电磁铁6组成四个主动控制电磁轴承，通过检测每对电磁铁附近安装的电涡流传感器的位置信息作为反馈控制信号，控制线圈中的电流以控制磁轴承产生的电磁力，可使磁浮工作平台稳定地悬在电磁铁支座上面且使磁浮工作台在竖直方向上稳定悬浮在确定的平衡工作位置，保证磁浮平台工作时与垂向支撑架间无机械接触。2. A kind of planar maglev linear motion platform according to claim 1 is characterized in that: four pairs of vertically coiled electromagnets 6 form four active control electromagnetic bearings, by detecting the eddy current sensors installed near each pair of electromagnets The position information is used as a feedback control signal, and the current in the coil is controlled to control the electromagnetic force generated by the magnetic bearing, so that the magnetic levitation work platform can be stably suspended on the electromagnet support and the magnetic levitation work platform can be stably suspended in the vertical direction at a certain position. The balanced working position ensures that there is no mechanical contact between the maglev platform and the vertical support frame when it is working.3.根据权利要求1所述的一种平面型磁浮直线运动平台特征在于：支架为非导磁材料，电磁铁和磁浮工作台为高磁导率材料，磁浮工作台为中空的方槽形结构，相邻两边相互垂直，其中有两个相邻垂直边起导轨作用；两个直线运动电机固定在底座上面，每个电机的联接驱动支架安装有两个导向和驱动用滚动轴承和两个电磁轴承，磁浮平台的导轨边置于磁铁对的空隙间，在两个电机动子驱动作用下，磁浮平台可沿相互垂直的两维平面方向运动，受两对水平方向电磁铁的导向作用，两维运动无机构耦合，从而可使磁悬浮工作平台实现大范围的平面运动，实现磁悬浮导向与驱动之间的集成。3. A planar maglev linear motion platform according to claim 1 is characterized in that: the bracket is made of non-magnetic material, the electromagnet and the maglev workbench are made of high permeability materials, and the maglev workbench is a hollow square groove structure , the two adjacent sides are perpendicular to each other, and two adjacent vertical sides act as guide rails; two linear motion motors are fixed on the base, and the connecting drive bracket of each motor is equipped with two guiding and driving rolling bearings and two electromagnetic bearings , the guide rail edge of the maglev platform is placed between the gaps between the magnet pairs. Driven by the two motor movers, the maglev platform can move along the two-dimensional plane directions perpendicular to each other, and is guided by two pairs of horizontal electromagnets. The movement has no mechanism coupling, so that the magnetic levitation work platform can realize a large range of plane motion, and realize the integration between the magnetic levitation guidance and the drive.4.根据权利要求1所述的一种平面型磁浮直线运动平台特征在于：与电机动子相连的每一驱动支架为非导磁材料，支架上分别包括两个刚性驱动部件(滚动轴承)和两对柔性驱动部件(差动式电磁轴承)。柔性电磁轴承通过电涡流位移传感器进行位置伺服反馈，可控制作用在磁浮平台导向边上的电磁力和导轨相对磁铁的气隙位置。滚动轴承外径离磁浮平台导轨表面的最近距离比电磁铁外表面离其距离要小，可保护电磁轴承，在高加速、大推力驱动作用下，电磁轴承的电磁推力不足而气隙大小难以保持恒定时，可借助滚动轴承直接推动磁浮平台运动。两个滚动轴承和两个水平电磁轴承共同完成每一维方向上的导向和驱动功能。4. A kind of planar maglev linear motion platform according to claim 1 is characterized in that: each drive bracket connected with the motor mover is a non-magnetic material, and the bracket includes two rigid drive components (rolling bearings) and two For flexible drive components (differential electromagnetic bearings). The flexible electromagnetic bearing performs position servo feedback through the eddy current displacement sensor, which can control the electromagnetic force acting on the guide edge of the maglev platform and the air gap position of the guide rail relative to the magnet. The closest distance between the outer diameter of the rolling bearing and the surface of the guide rail of the magnetic levitation platform is smaller than that of the outer surface of the electromagnet, which can protect the electromagnetic bearing. Under high acceleration and high thrust driving, the electromagnetic thrust of the electromagnetic bearing is insufficient and the size of the air gap is difficult to maintain constant , the maglev platform can be directly driven to move by means of rolling bearings. Two rolling bearings and two horizontal electromagnetic bearings jointly complete the guiding and driving functions in each dimension.5.根据权利要求1所述的一种平面型磁浮直线运动平台特征在于：刚性滚动轴承与柔性磁轴承的集成工作模式为：当磁悬浮工作平台需要比较大的加速度时，刚性驱动部件直接驱动磁悬浮工作平台，其中柔性驱动部件起到缓冲并避免刚性碰撞的作用；当磁悬浮工作平台需要比较小的驱动力时，柔性驱动部件可以直接驱动磁悬浮工作平台，实现磁悬浮导向与驱动之间的集成；5. The planar maglev linear motion platform according to claim 1 is characterized in that: the integrated working mode of the rigid rolling bearing and the flexible magnetic bearing is: when the maglev working platform requires relatively large acceleration, the rigid drive part directly drives the maglev to work The platform, in which the flexible driving part plays the role of buffering and avoiding rigid collision; when the magnetic levitation working platform needs a relatively small driving force, the flexible driving part can directly drive the magnetic levitating working platform, realizing the integration between the magnetic levitation guidance and the drive;6.根据权利要求1所述的一种平面型磁浮直线运动平台特征在于：直线电机为伺服电机，分别装有高精度反馈元件直线光栅尺，可实现其精密运动控制。光电开关及限位块对其极限位置实行电控和机械系统双限位作用。6. A planar maglev linear motion platform according to claim 1, characterized in that the linear motors are servo motors, each equipped with a high-precision feedback element linear grating scale, which can realize its precise motion control. The photoelectric switch and the limit block implement double limit functions of electric control and mechanical system for its limit position.7.根据权利要求1所述的一种平面型磁浮直线运动平台特征在于：当磁悬浮工作平台需要稳定悬浮时，悬浮磁铁单元和柔性驱动部件的四对电磁铁通过涡流传感器的位置反馈使其悬浮在稳定位置，实现磁悬浮导向与驱动之间的分离。7. A planar maglev linear motion platform according to claim 1 is characterized in that: when the maglev working platform needs to be suspended stably, the four pairs of electromagnets of the levitation magnet unit and the flexible driving part can be suspended through the position feedback of the eddy current sensor In the stable position, the separation between the magnetic levitation guidance and the drive is realized.

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