CN102466975A - Connecting rod-driven workpiece table system - Google Patents
Connecting rod-driven workpiece table systemDownload PDFInfo
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- CN102466975A CN102466975ACN2010105352668ACN201010535266ACN102466975ACN 102466975 ACN102466975 ACN 102466975ACN 2010105352668 ACN2010105352668 ACN 2010105352668ACN 201010535266 ACN201010535266 ACN 201010535266ACN 102466975 ACN102466975 ACN 102466975A
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- 230000007246mechanismEffects0.000claimsabstractdescription76
- 230000033001locomotionEffects0.000claimsdescription31
- 238000004519manufacturing processMethods0.000abstractdescription8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-NSiliconChemical compound[Si]XUIMIQQOPSSXEZ-UHFFFAOYSA-N0.000description11
- 229910052710siliconInorganic materials0.000description11
- 239000010703siliconSubstances0.000description11
- 238000000034methodMethods0.000description7
- 239000004065semiconductorSubstances0.000description7
- 238000001259photo etchingMethods0.000description5
- 230000000694effectsEffects0.000description3
- 238000010586diagramMethods0.000description2
- 238000006073displacement reactionMethods0.000description2
- 238000005516engineering processMethods0.000description2
- 230000036316preloadEffects0.000description2
- 230000005540biological transmissionEffects0.000description1
- 230000007812deficiencyEffects0.000description1
- 239000003292glueSubstances0.000description1
- 230000005389magnetismEffects0.000description1
- 230000001360synchronised effectEffects0.000description1
- 238000010023transfer printingMethods0.000description1
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Abstract
Description
Technical field
The present invention relates to the semiconductor manufacturing facility technical field, relate to a kind of connecting rod concretely and drive the work stage system.
Background technology
In the manufacture process of semiconductor devices; The exposure transfer printing (be photoetching) of the IC layout design of chip on semi-conductor silicon chip photomask surface glue is one of most important operation wherein, when making semi-conductor chip, earlier after the semi-conductor silicon chip contraposition; Make public again; Prior art generally adopts the work stage system to place semi-conductor silicon chip, and it comprises base station, is positioned at the work stage and the work stage that is positioned at exposure region of base station alignment area.Its process is following: will be after the work stage of carrying silicon chip of alignment area is carried out accurate contraposition; The work stage that itself and exposure region are carrying silicon chip is exchanged; After exposure is accomplished; Two work stage with exposure region and alignment area exchange again, take out the good semi-conductor chip of exposure that is positioned at alignment area.Alignment area is the zone of the work stage of carrying silicon chip being carried out accurate contraposition; Exposure region is that the silicon chip on the work stage is carried out exposed areas.
For example: Chinese patent publication number CN101101454A; Open day on January 9th, 2008; Invention and created name is the invention of a kind of photo-etching machine silicon chip platform (being work stage) double-platform switching system, and this photo-etching machine silicon slice bench double-bench switching system contains work stage that runs on the exposure station and the work stage that runs on the pre-service station; Described two work stage are arranged on the base station; Be provided with at describedbase station edge 4 along X to Y to the double freedom driver element that moves, two work stage are positioned at the space that 4 double freedom driver elements surround, and are suspended in the base station upper surface through air-bearing; Described each double freedom driver element comprises line slideway, following line slideway and guide pin bushing, and last line slideway is cross with following line slideway and is installed in the guide pin bushing; Between described double freedom driver element and the work stage through the permanent magnetism preload or/and the air-bearing of vacuum preload be connected; Work stage realize X to or Y to motion be that last line slideway through a double freedom driver element pushes or pulls to work stage, the following line slideway of another adjacent driven unit is followed work stage and is done the constant speed realization that is synchronized with the movement.
The double-workpiece-table exchange system of the litho machine of above structure, two work stage are to carry out place-exchange through the slip of guide rail at alignment area and exposure region.Double-workpiece-table is free body on base station, is not connected with any parts, when two boards are carried out place-exchange, particularly when two work stage straight line transmission, is easy to bump.Because than higher, and adopt the quantity of guide rail many to the accuracy requirement of guide rail, therefore, the manufacturing cost of the litho machine double-workpiece-table exchange system of guide rail type of drive is higher.In addition, each double freedom guide rail also will be provided with a guide pin bushing, structure more complicated.
For another example: Chinese patent publication number CN101551598A; Open day on October 7th, 2009; Invention and created name is the invention of a kind of photo-etching machine silicon chip platform (being work stage) double-platform switching system; This photo-etching machine silicon slice bench double-bench switching system contains work stage that runs on the exposure station and the work stage that runs on the pre-service station; Each is carried each work stage by a 6-freedom micro-motion platform, and work stage and 6-freedom micro-motion platform constitute a work stage group, and two work stage groups are arranged on the same rectangular base station.Be respectively equipped with one group of double freedom driver element on the every limit of base station, two work stage groups are suspended in the base station upper surface through air-bearing; The 6-freedom micro-motion platform structure of work stage group is divided two-layer up and down; Can realize 6DOF control; The double freedom driver element on the long limit of base station is connected with the 6-freedom micro-motion platform shell; Drive whole work-piece platform group and on surface level, move, the double freedom driver element of base station minor face is connected with 6-freedom micro-motion platform upper strata stator coil skeleton, drives 6-freedom micro-motion platform upper strata stator coil and on surface level, moves.
The double-workpiece-table exchange system of the litho machine of above structure is though solved the anticollision problem of two work stage; But on the basis of degree of freedom driver element, increased 6-freedom micro-motion platform again, the structure more complicated; The double-workpiece-table exchange system of the litho machine of said structure; All be to adopt the guide rail type of drive that two work stage are carried out place-exchange at alignment area and exposure region; This kind type of drive to the accuracy requirement of guide rail than higher; And the not minimizing of the quantity of guide rail, therefore, the manufacturing cost of the litho machine double-workpiece-table exchange system of guide rail type of drive is higher.
Summary of the invention
The technical matters that the present invention will solve is, overcomes above deficiency, provides a kind of connecting rod simple in structure, low cost of manufacture to drive the work stage system.
For solving the problems of the technologies described above, the present invention provides a kind of connecting rod to drive the work stage system, comprises work stage, and said work stage is arranged on the base station through air-bearing; It also comprises linkage assembly, and an end of said linkage assembly and described work stage flexibly connect, the other end with flexibly connect with reference to body; At least one end of said linkage assembly also is provided with drive motor, and said drive motor drives the work stage motion through linkage assembly.
Further, described linkage assembly comprises the connecting rod of two flexible connections at least.
Further, described linkage assembly comprises first connecting rod and second connecting rod, and the active connection place of described first connecting rod and second connecting rod is provided with drive motor, and said drive motor drives first connecting rod and second connecting rod motion.
Further, it also comprises auxiliary connecting rod mechanism, and an end of said auxiliary connecting rod mechanism is connected with described work stage through clamp, the other end and with reference to the body flexible connection, described clamp can clamp or unclamp auxiliary connecting rod mechanism.
Further, said auxiliary connecting rod mechanism comprises the connecting rod of two flexible connections at least.
After adopting technique scheme; Connecting rod of the present invention drives the work stage system and compared with prior art has the following advantages: prior art is the guide rail type of drive; Generally all to adopt the double freedom structure, complex structure not only, but also to adopt many high-precision guide rails; Guide rail quantity is more, and manufacturing cost is higher; The present invention adopts the linkage assembly type of drive; During use, linkage assembly one end is movably connected in reference on the body, and the other end and work stage flexibly connect; Through the drive motor drivening rod mechanism kinematic of at least one end setting of linkage assembly, thereby change the position of work stage on base station.When work stage moved on base station, because work stage is connected with linkage assembly, problem therefore can not bump because of inertia effect between a plurality of work stage.In addition, the present invention also is provided with auxiliary connecting rod mechanism and clamp, makes work stage when mobile, and is more stable.Therefore, structure of the present invention is simple more, manufacturing cost is lower.
Description of drawings
Fig. 1 is the structural representation that connecting rod of the present invention drives work stage system embodiment 1 original state;
Fig. 2 is the structural representation that connecting rod of the present invention drives work stage system embodiment 1 exchange process;
Fig. 3 is the structural representation after connecting rod of the present invention drives 1 exchange of work stage system embodiment;
Fig. 4 is the structural representation that connecting rod of the present invention drives work stage system embodiment 2.
Shown in the figure: 1, first work stage, 2, second work stage, 3, base station, 31, alignment area, 32, exposure region; 4, first connecting rod mechanism, 41, first connecting rod, 42, second connecting rod, 5, second connecting rod mechanism, 51, third connecting rod; 52, the 4th connecting rod, 61, the first auxiliary connecting rod mechanism, 62, the second auxiliary connecting rod mechanism, 71, first clamp, 72, second clamp; 81, first with reference to body, and 82, second with reference to body, and the 83, the 3rd with reference to body, and the 84, the 4th with reference to body, 91, first motor; 93, the 3rd motor, the 95, the 5th motor, 92, second motor, the 94, the 4th motor, the 96, the 6th motor.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail:
Connecting rod of the present invention drives the work stage system, comprises work stage, and said work stage is arranged on thebase station 3 through air-bearing; It also comprises linkage assembly, and an end of said linkage assembly and described work stage flexibly connect, the other end with flexibly connect with reference to body; At least one end of said linkage assembly also is provided with drive motor, and said drive motor drives the work stage motion through linkage assembly.
Above-mentioned connecting rod drives the work stage system, and it also comprises auxiliary connecting rod mechanism, and an end of said auxiliary connecting rod mechanism is connected with described work stage through clamp, the other end and with reference to the body flexible connection, described clamp can clamp or unclamp auxiliary connecting rod mechanism.
Above-mentioned connecting rod drives the work stage system, and described linkage assembly and auxiliary connecting rod mechanism comprise the connecting rod of two flexible connections at least.
Above-mentioned connecting rod drives the work stage system; Described linkage assembly comprises first connectingrod 41 and second connectingrod 42; The active connection place of described first connectingrod 41 and second connectingrod 42 is provided with drive motor, and said drive motor drives first connectingrod 41 and second connectingrod motion 42.
Connecting rod of the present invention drives the work stage system, can use separately, also can a plurality of connecting rods be driven the work stage combination and use.
Embodiment 1:
Shown in Fig. 1-3; Connecting rod of the present invention drives the work stage system and comprisesbase station 3; Be positioned at first work stage 1 of thealignment area 31 ofbase station 3; And second work stage 2 that is positioned at theexposure region 32 ofbase station 3, described first work stage 1 and second work stage 2 all are arranged on thebase station 3 through air-bearing, and it also comprises the firstconnecting rod mechanism 4 and secondconnecting rod mechanism 5 that drives first work stage 1 and second work stage 2 respectively; One end of described firstconnecting rod mechanism 4 and first work stage 1 flexibly connect the other end with first with reference tobody 81 flexible connections, described firstconnecting rod mechanism 4 at least one ends are provided withfirst motor 91; One end of described secondconnecting rod mechanism 5 and second work stage 2 flexibly connect, the other end with second with reference tobody 82 flexible connections, at least one end of said secondconnecting rod mechanism 5 is provided with second motor 92.Above-mentionedalignment area 31 is meant the zone that is positioned atbase station 3 left sides, andexposure region 32 is meant the zone that is positioned atbase station 3 right sides.
Described firstconnecting rod mechanism 4 comprises first connectingrod 41 and second connectingrod 42, and described first connectingrod 41 flexibly connects with second connecting rod 42.This kind design, not only simple in structure, and also firstconnecting rod mechanism 4 adopts two connecting rods; Be first connectingrod 41 and second connectingrod 42, described first connectingrod 41 flexibly connects with second connectingrod 42, here mode; Make first work stage 1 of firstconnecting rod mechanism 4 move more flexible, convenient.
The active connection place of described first connectingrod 41 and second connectingrod 42 is provided with the 3rd motor 93.The effect of the3rd motor 93 is: auxiliaryfirst motor 91 is controlled the direction of motion of firstconnecting rod mechanism 4, thereby moves the position of first work stage 1.When the first connectingrod 41 of first motor, 91 drive first connectingrod mechanisms 4 moved with second connectingrod 42,first motor 91 will be controlled moving of first connecting rod mechanism four direction, and displacement is longer, and speed is slower; After adopting the3rd motor 93, can set the linear movement direction offirst motor 91 and the3rd motor 93 respectively, control first connectingrod 41 and second connectingrod 42 respectively, make first work stage 1 can fast moving.When the active connection place of first connectingrod 41 and second connectingrod 42 dead angle occurs or blocks, can change the direction of motion of first connectingrod 41 or second connectingrod 42 through the3rd motor 93.
The described firstconnecting rod mechanism 4 and first active connection place with reference tobody 81 are provided with the 5th motor 95.The5th motor 95 can be assisted the direction of motion offirst motor 91 or the3rd motor 93 control first connectingrod mechanisms 4, thus the position of moving first work stage 1.
Described secondconnecting rod mechanism 5 comprises third connectingrod 51 and the 4th connectingrod 52, and described third connectingrod 51 and the 4th connectingrod 52 flexibly connect.This kind design, not only simple in structure, and secondconnecting rod mechanism 5 adopts two connecting rods, i.e. third connectingrod 51 and the 4th connectingrod 52, described third connectingrod
The active connection place of described third connectingrod 51 and the 4th connectingrod 52 is provided with the 4th motor 94.The effect of the4th motor 94 is: auxiliarysecond motor 92 is controlled the direction of motion of secondconnecting rod mechanism 5, thereby moves the position of second work stage 2.The third connectingrod 51 that drives second connectingrod mechanisms 5 whensecond motor 92 is during with 52 motions of the 4th connecting rod, andsecond motor 92 will be controlled the mobile of secondconnecting rod mechanism 5 four directions, and displacement is longer, and speed is slower; After adopting the4th motor 94, can set the linear movement direction ofsecond motor 92 and the4th motor 94 respectively, control third connectingrod 51 and the 4th connectingrod 52 respectively, make second work stage 2 can fast moving.When the active connection place of third connectingrod 51 and the 4th connectingrod 51 dead angle occurs or blocks, can change the direction of motion of third connectingrod 51 or the 4th connectingrod 52 through the4th motor 94.
The described secondconnecting rod mechanism 5 and second active connection place with reference tobody 82 are provided with the 6th motor 96.The6th motor 96 can be assisted the direction of motion ofsecond motor 92 or the4th motor 94 control secondconnecting rod mechanisms 5, thus the position of moving second work stage 2.
It is following that first work stage 1 and second work stage 2 are carried out exchange process:
Fig. 1 is the structural representation that connecting rod of the present invention drives work stage system embodiment 1 original state; Through the position of mobile first work stage 1 and second work stage 2, thereby first work stage 1 that will be positioned at thealignment area 31 ofbase station 3 exchanges with second work stage 2 that is positioned at theexposure region 32 of base station 3.Fig. 2 is the status architecture synoptic diagram that connecting rod of the present invention drives work stage system embodiment 1 exchange process, and Fig. 3 is the status architecture synoptic diagram after connecting rod of the present invention drives 1 exchange of work stage system embodiment.
During the exchange of first work stage 1 and second work stage 2, the control mode of motor has following several kinds:
1) changes the direction of motion of firstconnecting rod mechanism 4 throughfirst motor 91, thereby move first position of work stage 1 onbase station 3; Through the fortune direction of motion of second motor, 92 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
2) change the direction of motion of firstconnecting rod mechanism 4 through the3rd motor 93, thereby move first position of work stage 1 onbase station 3; Through the fortune direction of motion of the4th motor 94 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
3) change the direction of motion of firstconnecting rod mechanism 4 through the5th motor 95, thereby move first position of work stage 1 onbase station 3; Through the fortune direction of motion of the6th motor 96 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
4) control the direction of motion of firstconnecting rod mechanisms 4 throughfirst motor 91 and the3rd motor 93, thereby move first position of work stage 1 onbase station 3; Through the direction of motion ofsecond motor 92 and the4th motor 94 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
5) control the direction of motion of firstconnecting rod mechanisms 4 throughfirst motor 91 and the5th motor 95, thereby move first position of work stage 1 onbase station 3; Through the direction of motion ofsecond motor 92 and the6th motor 96 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
6) control the direction of motion of firstconnecting rod mechanisms 4 through the5th motor 95 and the3rd motor 93, thereby move first position of work stage 1 onbase station 3; Through the direction of motion of the6th motor 96 and the4th motor 94 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
7) direction of motion throughfirst motor 91, the3rd motor 93 and the5th motor 95 control first connectingrod mechanisms 4, thus first position of work stage 1 onbase station 3 moved; Through the direction of motion ofsecond motor 92, the4th motor 94 and the5th motor 96 control secondconnecting rod mechanisms 5, thereby move second position of work stage 2 onbase station 3.
Embodiment 2:
As shown in Figure 4; Connecting rod of the present invention drives the work stage system on the basis of embodiment 1; Be connected with the first auxiliaryconnecting rod mechanism 61 and the second auxiliaryconnecting rod mechanism 62 respectively in a side of described first work stage 1 and a side of second work stage 2; The other end of the said first auxiliaryconnecting rod mechanism 61 and the 3rd flexibly connects with reference tobody 83, and the other end of the described second auxiliaryconnecting rod mechanism 62 and the 4th flexibly connects with reference to body 84.When first work stage 1 moves, more steady when moving first work stage 1 by firstconnecting rod mechanism 4 and the first auxiliaryconnecting rod mechanism 61 simultaneously or the timesharing traction than independent use firstconnecting rod mechanism 4, promptly increase first work stage 1 traveling comfort on base station 3.In like manner; When second work stage 2 moves; Drawn simultaneously by the secondconnecting rod mechanism 5 and the second auxiliaryconnecting rod mechanism 62, balance more when using separately separately second connectingrod mechanism 5 to move second work stage 2 promptly increases second work stage 2 traveling comfort onbase station 3.
Described first work stage 1 is connected throughfirst clamp 71 with the first auxiliaryconnecting rod mechanism 61; Described second work stage 2 is connected throughsecond clamp 72 with the second auxiliary connecting rod mechanism 62.When first work stage 1 and second work stage 2 exchange, can break off being connected offirst clamp 71 and the first auxiliaryconnecting rod mechanism 61, make the one-movement-freedom-degree of first work stage 1 onbase station 3 bigger.In like manner, when first work stage and 2 second work stage 2 exchange, can break off being connected ofsecond clamp 72 and the second auxiliaryconnecting rod mechanism 62, make the one-movement-freedom-degree of second work stage 2 onbase station 3 bigger.
In the foregoing description 2, when first work stage 1 and second work stage 2 exchanged, exchange process was identical with the exchanged form ultimate principle of embodiment 1.
Difference is: when embodiment 2 modes, first work stage and second work stage exchange; Can the first auxiliaryconnecting rod mechanism 61 be connected with first work stage 1 throughfirst clamp 71, perhaps break offfirst clamp 71 that the first auxiliaryconnecting rod mechanism 61 is connected with first work stage 1.In like manner, can make being connected of the second auxiliaryconnecting rod mechanism 62 and second work stage 24, perhaps break offsecond clamp 72 that the second auxiliaryconnecting rod mechanism 62 is connected with second work stage 2 throughsecond clamp 72.
Among above-mentioned two kinds of embodiment, first to fourth all is actionless with reference to body.
Claims (5)
1. a connecting rod drives the work stage system, comprises work stage, and said work stage is arranged on the base station through air-bearing; It is characterized in that: it also comprises linkage assembly, and an end of said linkage assembly and described work stage flexibly connect, the other end with flexibly connect with reference to body; At least one end of said linkage assembly also is provided with drive motor, and said drive motor drives the work stage motion through linkage assembly.
2. connecting rod according to claim 1 drives the work stage system, and it is characterized in that: described linkage assembly comprises the connecting rod of two flexible connections at least.
3. connecting rod according to claim 2 drives the work stage system; It is characterized in that: described linkage assembly comprises first connecting rod and second connecting rod; The active connection place of described first connecting rod and second connecting rod is provided with drive motor, and said drive motor drives first connecting rod and second connecting rod motion.
4. connecting rod according to claim 1 drives the work stage system; It is characterized in that: it also comprises auxiliary connecting rod mechanism; One end of said auxiliary connecting rod mechanism is connected with described work stage through clamp; The other end with flexibly connect with reference to body, described clamp can clamp or unclamp auxiliary connecting rod mechanism.
5. connecting rod according to claim 3 drives the work stage system, it is characterized in that: said auxiliary connecting rod mechanism comprises the connecting rod of two flexible connections at least.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105352668ACN102466975A (en) | 2010-11-08 | 2010-11-08 | Connecting rod-driven workpiece table system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105352668ACN102466975A (en) | 2010-11-08 | 2010-11-08 | Connecting rod-driven workpiece table system |
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| CN102466975Atrue CN102466975A (en) | 2012-05-23 |
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| CN2010105352668APendingCN102466975A (en) | 2010-11-08 | 2010-11-08 | Connecting rod-driven workpiece table system |
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| CN111482958A (en)* | 2019-12-13 | 2020-08-04 | 上海智殷自动化科技有限公司 | Multi-transmission manipulator photoetching machine based on neural network and cooperative control system thereof |
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