CN101907631B - Double-liquid capillary micro-flow control valve in micro-flow control chip, and manufacturing method thereof - Google Patents

Abstract

The invention relates to a double-liquid capillary micro-flow control valve in a micro-flow control chip, and a manufacturing method thereof, in particular to a capillary micro-flow control mechanism which is used for the micro-flow control chip and can realize sample injection of two liquids at the same time, aiming at solving the technical problem that the sample injection of the two trace liquids with different medium affinity properties can be difficultly realized in the existing micro-flow control technology. The double-liquid capillary micro-flow control valve is provided with a first branch flow groove, a second branch flow groove and an output groove which have equal cross section width; the cross section width of an air duct groove is less than that of the first branch flow groove, the second branch flow groove and the output groove; the depth of the second branch flow groove is equal to that of the output groove, and the depth of the first branch flow groove is less than that of the second branch flow groove; the depths of the second branch flow groove and the output groove are less than that of the air duct groove; the ends of the first branch flow groove and the second branch flow groove are communicated with an input end of the output groove; and the end of the air duct groove is communicated in front of the end of the second branch flow groove. The invention is applicable to the structure of a device which can lead the sample injection of high-affinity liquid to be carried out at the same time.

Description

Trickle flow control valve of double-liquid capillary in the micro-fluidic chip and preparation method thereof

Technical field

The present invention relates to be used for realize on the micro-fluidic chip two kinds of liquid capillary microfluidic control valve of sample introduction simultaneously, particularly a kind of being applicable to realized two kinds of control gears with micro liquid synchro-feed of different close dielectric properties in the biological detection.

Background technology

Micro-fluidic chip is the hot fields of current micro-total analysis system (Miniaturized Total Analysis Systems) development.Micro-fluidic chip will be used to accomplish sample preparation, transport, quantitatively, the microstructure of processes such as mixing and detection is integrated on the chip, constitutes the main platform that microflow control technique is realized.On chip, the married operation of liquid needs two kinds of liquid to get into micro-mixer simultaneously, and this function is accomplished by Y type sample introduction microchannel.Usually in the Y type sample introduction microchannel two kinds of liquid intersection's capillary flow of two sample introduction branches by realizing that by little valve of hydrophobic region or expansive valve the mode through the liquid triggering realizes the unlatching of the little valve of intersection then, thereby sample introduction when realizing two kinds of liquid.Local deposits C in the microchannel₄F₈, or making OTS hydrophobic region can form drain valve; The capillary expansive valve mainly is the function of ending that realizes capillary flow through the sudden change of the degree of depth in the microchannel or Width size.The making of drain valve need be carried out topical surface treatment, can increase process complexity and difficulty of processing, and processing compatibility is poor; Expansive valve mainly is to rely on ending that the expansion of size realizes flowing, and high lyophile is prone to lose efficacy.Therefore, common Y type sample introduction microchannel exists processing technology complicated, and processing compatibility is poor, is difficult to realize high lyophile sample introduction and the shortcoming that has liquid residue simultaneously.

Summary of the invention

The objective of the invention is to realize two kinds of micro liquids with different close dielectric properties technical barriers of sample introduction simultaneously, propose trickle flow control valve of double-liquid capillary in a kind of micro-fluidic chip and preparation method thereof for solving being difficult to of existing in the present microflow control technique.

The trickle flow control valve of double-liquid capillary in the micro-fluidic chip of the present invention; Be that dimethyl silicone polymer (PDMS) substrate that the surface is provided with groove posts the Y type capillary channel that on glass sheet surface, constitutes, the groove on the said PDMS substrate surface comprises the first tributary groove, the second tributary groove, output groove and air flue groove; The cross-sectional width of the said first tributary groove, the second tributary groove and output groove equates; The cross-sectional width of said air flue groove is less than the cross-sectional width of the first tributary groove, the second tributary groove and output groove; The deep equality of said second tributary groove and output groove, the degree of depth of the first tributary groove is less than the degree of depth of the second tributary groove; The degree of depth of the second tributary groove and output groove is less than the degree of depth of air flue groove; The end of the said first tributary groove and the second tributary groove converges in the input end of output groove; Before the end of air flue groove converges in the end of the second tributary groove; The entrance point of said air flue groove apart from the length of output groove input end greater than the first tributary groove entrance point and the second tributary groove entrance point apart from the length of exporting the groove input end; Described capillary microfluidic control valve provides the rotation center of centrifugal force to be positioned at entrance point one side of two the tributary fluid passages and the gas passage of the trickle flow control valve of double-liquid capillary; Rotation center provides centrifugal force to make to be plugged in the first tributary fluid passage and the terminal gas of the second tributary fluid passage to discharge to the motion of rotation center direction and by the import of gas passage; Liquid in the second tributary fluid passage and the liquid in the first tributary fluid passage converge at the expansive valve place; And then two flow of liquid are flowed out simultaneously along the output liquid passage; Capillary microfluidic control valve has the rotation center that centrifugal force is provided; Rotation center is positioned at entrance point one side of the first tributary fluid passage that the first tributary groove of the trickle flow control valve of double-liquid capillary constitutes, the second tributary fluid passage that the second tributary groove constitutes and the second tributary fluid passage and the gas passage of air flue groove formation; The import discharge of the gas passage that the terminal gas of the second tributary fluid passage that rotation center provides centrifugal force to make to be plugged in the first tributary fluid passage that the first tributary groove constitutes and the second tributary groove to constitute constitutes to the motion of rotation center direction and by the second tributary fluid passage and air flue groove; Liquid in the first tributary fluid passage that the liquid in the second tributary fluid passage that the second tributary groove constitutes and the first tributary groove constitute converges at the expansive valve place, and then two flow of liquid are flowed out along the output liquid passage simultaneously.

The method for making of the trickle flow control valve of double-liquid capillary in the micro-fluidic chip, the concrete steps of this method are:

Step 1, on the surface of the silicon single crystal flake after the oxidation spin coating photoresist; Make the photoresist figure of the said first tributary groove, the second tributary groove, output groove and air flue groove by lithography; With wet etching silicon dioxide behind the said photoresist figure post bake; Then the photoresist of the first tributary groove, the second tributary groove, output groove and air flue groove remainder is removed, obtained the silicon dioxide mask figure of the first tributary groove, the second tributary groove, output groove and air flue recess channels;

Step 2, on the silicon dioxide mask figure thatstep 1 obtains the thick aluminium film ofvapor deposition 1 μ m; Spin coating photoresist on said aluminium film then; Make the photoresist figure of the described second tributary groove, output groove and air flue groove by lithography, wet etching aluminium behind the post bake obtains the aluminium mask graph; Then the photoresist of the remainder of the said second tributary groove, output groove and air flue groove is removed, obtained the aluminium mask graph of the second tributary groove, output groove and air flue groove;

Step 3, on the silicon wafer of the aluminium mask graph thatstep 2 obtains the spin coating photoresist, make the photoresist figure of air flue groove by lithography, remove photoresist behind the post bake, obtain the glue mask graph;

The silicon wafer of the glue mask graph that step 4, the aluminium mask graph thatstep 2 is obtained and step 3 obtain carries out the inductively coupled plasma dry etching, obtains silica-based former mould; The process of said inductively coupled plasma dry etching is:

Steps A, etching 10 μ m at first remove the mask that removes photoresist then, obtain to contain the silicon wafer of aluminium and silicon dioxide mask figure;

Step B, on the basis of steps A, continue etching 170 μ m, remove the aluminium mask then, continue etching 30 μ m, obtain silica-based former mould;

Step 5, adopt little die casting process, liquid dimethyl silicone polymer is cast on the silica-based former mould, carry out the demoulding after vacuum outgas, heating, the cooling then; Obtain the dimethyl silicone polymer male mold;

Step 6, on the described dimethyl silicone polymer male mold of step 5 the pouring liquid dimethyl silicone polymer, carry out the demoulding after vacuum outgas, heating, the cooling then; Obtain the dimethyl silicone polymer substrate;

Punching respectively in the end of step 7, the on-chip first tributary groove of dimethyl silicone polymer, the second tributary groove and air flue groove that step 6 is obtained, is respectively the entrance point in first tributary, the entrance point of the second tributary groove and the entrance point of air flue groove;

Dimethyl silicone polymer substrate after step 8, the punching that step 7 is obtained is fitted with glass sheet, obtains the interior trickle flow control valve of double-liquid capillary of micro-fluidic chip.

The principle of work of the trickle flow control valve of double-liquid capillary of the present invention is:

The second tributary fluid passage that first tributary fluid passage that the first less tributary groove of the degree of depth is constituted and the second bigger tributary groove of the degree of depth are constituted forms two expansive valves respectively with the intersection of the output output liquid passage that groove constituted, and the intersection of the gas passage that the second tributary fluid passage and air flue groove are constituted also has expansive valve to form.After a kind of liquid was added by the import of the first tributary fluid passage, when liquid arrived the expansive valve place with output liquid passage intersection under capillary action, capillary flow was ended.Inflow point by the second tributary fluid passage adds another kind of liquid then; This liquid also flows to its this channel end under capillary action; Owing to be compressed at the first tributary fluid passage and the terminal gas of the second tributary fluid passage by shutoff; Make air pressure and capillary equilibrium, and make the liquid of the second tributary fluid passage end in the intersection of gas passage and this second tributary fluid passage.Centrifugal force is provided then; Rotation center is positioned at above-mentioned two the tributary fluid passages of the trickle flow control valve of this double-liquid capillary and entrance point one side of gas passage; Under centrifugal action; Be plugged in the terminal gas of the first tributary fluid passage and the second tributary fluid passage because of discharging by the import of gas passage to the motion of rotation center direction; Liquid in the second tributary fluid passage arrives the intersection of two tributary fluid passages, converges at the expansive valve place with liquid in the first tributary fluid passage, and then two flow of liquid are flowed out along the output liquid passage simultaneously.The trickle flow control valve of this double-liquid capillary is simple in structure; Can realize of the blocking-up of the capillary flow of two kinds of liquid (wherein a kind of can be high lyophile) simultaneously in intersection; And then sample introduction when realizing under centrifugal force two kinds of liquid, and Y type microchannel intersection no liquid is remaining; In addition, select cheap materials such as polymkeric substance for use, manufacture craft is greatly simplified, cost reduces.

Beneficial effect of the present invention: the trickle flow control valve of double-liquid capillary in the micro-fluidic chip of the present invention, can realize of the blocking-up of high lyophile in Y type microchannel intersection; Gas is prone to discharge smoothly in centrifugal force field, has improved the reliability that high lyophile capillary flow is ended in intersection, thereby has effectively guaranteed the simultaneity of two kinds of liquid sample introductions; And the remnants of liquid have been avoided in Y type microchannel intersection; Its structured material is cheap, and technology is simple, can effectively shorten the fabrication cycle and reduction cost of manufacture of device.

Description of drawings

Fig. 1 is the schematic perspective view of the trickle flow control valve of double-liquid capillary in the micro-fluidic chip of the present invention;

Fig. 2 is the schematic perspective view of the substrate of PDMS shown in Fig. 1;

Fig. 3 is the A-A diagrammatic cross-section of the substrate of PDMS shown in Fig. 2.

Among the figure: 1, PDMS substrate, 1-1, the first tributary groove, 1-1-1, the first tributary groove entrance point; 1-2, the second tributary groove, 1-2-1, the second tributary groove entrance point, 1-3, output groove; 1-4, air flue groove, 1-4-1, air flue groove entrance point, 2, glass sheet.

Embodiment

Embodiment one, combination Fig. 1 to Fig. 3 explain this embodiment; The trickle flow control valve of double-liquid capillary in the micro-fluidic chip; Be that thePDMS substrate 1 that the surface is provided with groove posts the Y type capillary channel that onglass sheet 2 surfaces, constitutes, saidPDMS substrate 1 lip-deep groove comprises the first tributary groove 1-1, the second tributary groove 1-2, output groove 1-3 and air flue groove 1-4; The cross-sectional width of the said first tributary groove 1-1, the second tributary groove 1-2 and output groove 1-3 equates; The cross-sectional width of said air flue groove 1-4 is less than the cross-sectional width of the first tributary groove 1-1, the second tributary groove 1-2 and output groove 1-3; The deep equality of said second tributary groove 1-2 and output groove 1-3, the degree of depth of the first tributary groove 1-1 is less than the degree of depth of the second tributary groove 1-2; The degree of depth of the second tributary groove 1-2 and output groove 1-3 is less than the degree of depth of air flue groove 1-4; The end of the said first tributary groove 1-1 and the second tributary groove 1-2 converges in the input end of output groove 1-3; Before the end of air flue groove 1-4 converges in the end of the second tributary groove 1-2, the entrance point 1-4-1 of said air flue groove 1-4 apart from the length of output groove 1-3 input end greater than the first tributary groove 1-1 entrance point 1-1-1 and the second tributary groove 1-2 entrance point 1-2-1 apart from the length of exporting groove 1-3 input end.

Before the end of the said air flue groove of this embodiment 1-4 converges in the end of the second tributary groove 1-2, be meant before the described end: the end of the first tributary groove 1-1 and the second tributary groove 1-2 converges in the input end position arbitrarily before of output groove 1-3.

The degree of depth of the described first tributary groove 1-1 of this embodiment, output groove 1-3 and the second tributary groove 1-2 is respectively 30 μ m, 200 μ m and 200 μ m, and its width is 600 μ m; The degree of depth of said air flue groove 1-4 is that 240 μ m, width are 100 μ m.

Embodiment two, this embodiment are the method for making of the trickle flow control valve of double-liquid capillary in the embodiment one described micro-fluidic chip, and the concrete steps of this method are:

Step 1, on the surface of the Si single-chip after the oxidation spin coating photoresist; Make the photoresist figure of the said first tributary groove 1-1, the second tributary groove 1-2, output groove 1-3 and air flue groove 1-4 by lithography, then with wet etching SiO behind the said photoresist figure post bake₂, then the photoresist of the first tributary groove 1-1, the second tributary groove 1-2, output groove 1-3 and air flue groove 1-4 remainder is removed, obtain the SiO of the first tributary groove 1-1, the second tributary groove 1-2, output groove 1-3 and air flue groove 1-4 passage₂Mask graph;

Step 2, the SiO that obtains instep 1₂The thick aluminium film ofvapor deposition 1 μ m on the mask graph; Spin coating photoresist on said aluminium film then; Make the photoresist figure of the described second tributary groove 1-2, output groove 1-3 and air flue groove 1-4 by lithography, wet etching aluminium behind the post bake obtains the aluminium mask graph; Then the photoresist of the remainder of the said second tributary groove 1-2, output groove 1-3 and air flue groove 1-4 is removed, obtained the aluminium mask graph of the second tributary groove 1-2, output groove 1-3 and air flue groove 1-4;

Step 3, on the Si wafer of the aluminium mask graph thatstep 2 obtains the spin coating photoresist, make the photoresist figure of air flue groove 1-4 by lithography, remove photoresist behind the post bake, obtain the glue mask graph;

The Si wafer of the glue mask graph that step 4, the aluminium mask graph thatstep 2 is obtained and step 3 obtain carries out the ICP dry etching, obtains Si base former mould; The process of said ICP dry etching is:

Steps A, etching 10 μ m at first remove the mask that removes photoresist then, obtain to contain the Si wafer of aluminium mask graph;

Step B, on the basis of steps A, continue etching 170 μ m, remove the aluminium mask then, continue etching 30 μ m, obtain Si base former mould;

Step 5, adopt little die casting method, liquid PDMS is cast on the Si base former mould, carry out the demoulding after vacuum outgas, heating, the cooling then; Obtain the PDMS male mold;

Step 6, on the described PDMS male mold of step 5 pouring liquid PDMS, carry out the demoulding after vacuum outgas, heating, the cooling then; ObtainPDMS substrate 1;

Punching respectively in the end of the first tributary groove 1-1, the second tributary groove 1-2 and air flue groove 1-4 on step 7, thePDMS substrate 1 that step 6 is obtained, is respectively the entrance point 1-1-1 of the first tributary 1-1, the entrance point 1-2-1 of the second tributary groove 1-2 and the entrance point 1-4-1 of air flue groove 1-4;

PDMS substrate 1 after step 8, the punching that step 7 is obtained is fitted withglass sheet 2, obtains the trickle flow control valve of double-liquid capillary in the micro-fluidic chip.

The thickness of the described Si single-chip ofstep 1 can be 380 μ m, 600 μ m or 800 μ m in this embodiment.

Step 5 and step 6 are described in this embodiment carries out vacuum outgas, heating, cooling and the demoulding; Obtain the PDMS male mold; Described heating-up temperature is 120 ℃, and the time of being heating and curing is 15 minutes.

The complementary structure of the Si base former mould that the structure of the PDMS male mold that step 5 obtains in this embodiment and step 4 obtain; Described liquid PDMS and hardening agent form by 10: 1 mixed.

The structure of thePDMS substrate 1 that step 6 obtains in this embodiment is identical with the structure of the Si base former mould that step 4 obtains.

The material of the described glass sheet of this embodiment (2) is the Pyrex sheet, the size of said Pyrex sheet and SiO₂Single-chip measure-alike; Thickness is 1mm.

Claims (8)

Translated fromChinese

1.微流控芯片内的双液体毛细微流控制阀，是表面上设有凹槽的聚二甲基硅氧烷基片(1)贴置在玻璃片(2)上构成的Y型毛细通道，其特征是：所述聚二甲基硅氧烷基片(1)表面上的凹槽包括第一支流凹槽(1-1)、第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)；所述第一支流凹槽(1-1)、第二支流凹槽(1-2)和输出凹槽(1-3)的横截面宽度相等；所述气道凹槽(1-4)的横截面宽度小于第一支流凹槽(1-1)、第二支流凹槽(1-2)和输出凹槽(1-3)的横截面宽度；所述第二支流凹槽(1-2)和输出凹槽(1-3)的深度相等，第一支流凹槽(1-1)的深度小于第二支流凹槽(1-2)的深度；第二支流凹槽(1-2)和输出凹槽(1-3)的深度小于气道凹槽(1-4)的深度；所述第一支流凹槽(1-1)和第二支流凹槽(1-2)的末端汇通于输出凹槽(1-3)的输入端，气道凹槽(1-4)的末端汇通于第二支流凹槽(1-2)的末端前，所述气道凹槽(1-4)的进口端(1-4-1)距输出凹槽(1-3)输入端的长度大于第一支流凹槽(1-1)进口端(1-1-1)与第二支流凹槽(1-2)进口端(1-2-1)距输出凹槽(1-3)输入端的长度，毛细微流控制阀具有提供离心力的旋转中心，旋转中心位于双液体毛细微流控制阀的第一支流凹槽(1-1)构成的第一支流液体通道、第二支流凹槽(1-2)构成的第二支流液体通道和第二支流液体通道与气道凹槽(1-4)构成的气体通道的进口端一侧，旋转中心提供离心力使封堵于第一支流凹槽(1-1)构成的第一支流液体通道与第二支流凹槽(1-2)构成的第二支流液体通道末端的气体向旋转中心方向运动而由第二支流液体通道与气道凹槽(1-4)构成的气体通道的进口排出，第二支流凹槽(1-2)构成的第二支流液体通道内的液体与第一支流凹槽(1-1)构成的第一支流液体通道内的液体在扩张阀处汇合，进而使两支液体流沿输出液体通道同时流出。1. The dual-liquid capillary micro-flow control valve in the microfluidic chip is a Y-shaped capillary valve composed of a polydimethylsiloxane sheet (1) with grooves on the surface and placed on a glass sheet (2). The channel is characterized in that: the grooves on the surface of the polydimethylsiloxane-based sheet (1) include a first tributary groove (1-1), a second tributary groove (1-2), an output groove Groove (1-3) and air passage groove (1-4); The transverse direction of described first tributary groove (1-1), second tributary groove (1-2) and output groove (1-3) The cross-sectional width is equal; the cross-sectional width of the airway groove (1-4) is smaller than the first tributary groove (1-1), the second tributary groove (1-2) and the output groove (1-3) The cross-sectional width; the depth of the second tributary groove (1-2) and output groove (1-3) is equal, the depth of the first tributary groove (1-1) is less than the second tributary groove (1 -2) depth; the depth of the second tributary groove (1-2) and the output groove (1-3) is less than the depth of the airway groove (1-4); the first tributary groove (1- 1) and the end of the second tributary groove (1-2) are connected to the input end of the output groove (1-3), and the end of the airway groove (1-4) is connected to the second tributary groove (1- 2) before the end of the airway groove (1-4), the length of the inlet end (1-4-1) of the airway groove (1-4) from the input end of the output groove (1-3) is greater than that of the first tributary groove (1-1) The length between the inlet end (1-1-1) and the inlet end (1-2-1) of the second tributary groove (1-2) and the input end of the output groove (1-3), the capillary micro-flow control valve has the ability to provide centrifugal force The center of rotation is located at the first branch liquid channel formed by the first branch groove (1-1) and the second branch liquid channel formed by the second branch groove (1-2) of the dual-liquid capillary micro-flow control valve On the inlet side of the gas channel formed by the second branch liquid channel and the airway groove (1-4), the center of rotation provides centrifugal force to block the first branch liquid formed by the first branch groove (1-1). The gas at the end of the second branch liquid channel formed by the channel and the second branch groove (1-2) moves to the direction of the center of rotation, while the gas channel formed by the second branch liquid channel and the airway groove (1-4) enters the inlet discharge, the liquid in the second branch liquid channel formed by the second branch groove (1-2) and the liquid in the first branch liquid channel formed by the first branch groove (1-1) merge at the expansion valve, and then The two liquid streams flow out simultaneously along the output liquid channel.2.基于权利要求1所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征是，该方法的具体步骤为：2. based on the manufacture method of the dual-liquid capillary micro-flow control valve in the microfluidic chip according to claim 1, it is characterized in that, the specific steps of the method are:步骤一、在氧化后的硅单晶片的表面上旋涂光刻胶，光刻出所述第一支流凹槽(1-1)、第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)的光刻胶图形，将所述光刻胶图形坚膜后湿法腐蚀二氧化硅，然后将第一支流凹槽(1-1)、第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)其余部分的光刻胶去除，获得第一支流凹槽(1-1)、第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)通道的二氧化硅掩模图形；Step 1, spin-coating photoresist on the surface of the oxidized silicon single wafer, and photoetching out the first tributary groove (1-1), the second tributary groove (1-2), the output groove ( 1-3) and the photoresist pattern of the airway groove (1-4), after the photoresist pattern is hardened, the silicon dioxide is wet-etched, and then the first tributary groove (1-1), the second The photoresist removal of the remaining parts of the second tributary groove (1-2), the output groove (1-3) and the airway groove (1-4) obtains the first tributary groove (1-1), the second tributary groove SiO2 mask pattern of groove (1-2), output groove (1-3) and airway groove (1-4) channel;步骤二、在步骤一获得的二氧化硅掩模图形上蒸镀1μm厚的铝膜，然后在所述铝膜上旋涂光刻胶，光刻出所述的第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)的光刻胶图形，坚膜后湿法腐蚀铝，获得铝掩模图形，然后将所述第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)的其余部分的光刻胶去除，获得第二支流凹槽(1-2)、输出凹槽(1-3)和气道凹槽(1-4)的铝掩模图形；Step 2. Evaporate a 1 μm thick aluminum film on the silicon dioxide mask pattern obtained in step 1, then spin-coat photoresist on the aluminum film, and photoetch the second branch groove (1- 2), output the photoresist pattern of the groove (1-3) and the airway groove (1-4), wet-etch the aluminum after hardening the film, obtain the aluminum mask pattern, and then the second tributary groove ( 1-2), the photoresist removal of the remaining part of the output groove (1-3) and the airway groove (1-4), obtain the second tributary groove (1-2), the output groove (1-3 ) and the aluminum mask patterns of the airway grooves (1-4);步骤三、在步骤二获得的铝掩模图形的硅晶片上旋涂光刻胶，光刻出气道凹槽(1-4)的光刻胶图形，坚膜后去胶，获得胶掩模图形；Step 3, spin-coat photoresist on the silicon wafer of the aluminum mask pattern obtained in step 2, photoresist the photoresist pattern of the airway groove (1-4), remove the glue after hardening the film, and obtain the glue mask pattern ;步骤四、将步骤二获得的铝掩模图形和步骤三获得的胶掩模图形的硅晶片进行感应耦合等离子体干法刻蚀，获得硅基阴模模具；所述感应耦合等离子体干法刻蚀的过程为：Step 4, performing inductively coupled plasma dry etching on the aluminum mask pattern obtained in step two and the silicon wafer of the glue mask pattern obtained in step three to obtain a silicon-based negative mold; the inductively coupled plasma dry etching The erosion process is:步骤A、首先刻蚀10μm，然后除去胶掩模，获得含有铝和二氧化硅掩模图形的硅晶片；Step A, first etching 10 μm, and then removing the glue mask to obtain a silicon wafer containing aluminum and silicon dioxide mask patterns;步骤B、在步骤A的基础上继续刻蚀170μm，然后除去铝掩模，继续刻蚀30μm，获得硅基阴模模具；Step B, continue to etch 170 μm on the basis of step A, then remove the aluminum mask, and continue to etch 30 μm to obtain a silicon-based negative mold;步骤五、采用微模铸工艺，将液态聚二甲基硅氧烷浇注于硅基阴模模具上，然后进行真空脱气、加热、冷却后脱模；获得聚二甲基硅氧烷阳模模具；Step 5. Using the micro-casting process, pour the liquid polydimethylsiloxane on the silicon-based female mold, and then perform vacuum degassing, heating, cooling and then demoulding; obtain the male polydimethylsiloxane mold mold;步骤六、在步骤五所述的聚二甲基硅氧烷阳模模具上浇注液态聚二甲基硅氧烷，然后进行真空脱气、加热、冷却后脱模；获得聚二甲基硅氧烷基片(1)；Step 6, pouring liquid polydimethylsiloxane on the polydimethylsiloxane male mold described in step 5, then vacuum degassing, heating, cooling and demoulding; obtain polydimethylsiloxane Alkyl sheet (1);步骤七、对步骤六获得的聚二甲基硅氧烷基片(1)上的第一支流凹槽(1-1)、第二支流凹槽(1-2)和气道凹槽(1-4)的末端处分别打孔，分别为第一支流(1-1)的进口端(1-1-1)、第二支流凹槽(1-2)的进口端(1-2-1)和气道凹槽(1-4)的进口端(1-4-1)；Step seven, the first tributary groove (1-1), the second tributary groove (1-2) and the airway groove (1-1) on the polydimethylsiloxane-based sheet (1) obtained in step six 4) Holes are punched at the ends respectively, which are respectively the inlet end (1-1-1) of the first tributary (1-1) and the inlet end (1-2-1) of the second tributary groove (1-2) and the inlet end (1-4-1) of the airway groove (1-4);步骤八、将步骤七获得的打孔后的聚二甲基硅氧烷基片(1)与玻璃片(2)贴合，获得微流控芯片内双液体毛细微流控制阀。Step 8: Bond the perforated polydimethylsiloxane-based sheet (1) obtained in step 7 with the glass sheet (2) to obtain a dual-liquid capillary microfluidic control valve in the microfluidic chip.3.根据权利要求2所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征在于，所述硅单晶片的厚度为380μm、600μm或者800μm。3 . The method for manufacturing the dual-liquid capillary microfluidic control valve in the microfluidic chip according to claim 2 , wherein the silicon single wafer has a thickness of 380 μm, 600 μm or 800 μm. 4 .4.根据权利要求2所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征在于，步骤五和步骤六所述的进行真空脱气、加热、冷却和脱模；获得聚二甲基硅氧烷阳模模具；所述的加热温度为120℃，加热固化时间为15分钟。4. The manufacturing method of the dual-liquid capillary micro-flow control valve in the microfluidic chip according to claim 2, characterized in that, vacuum degassing, heating, cooling and demoulding are carried out in steps 5 and 6; A positive polydimethylsiloxane mold is obtained; the heating temperature is 120° C., and the heating and curing time is 15 minutes.5.根据权利要求2所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征在于，步骤五获得的聚二甲基硅氧烷阳模模具的结构与步骤四获得的硅基阴模模具的结构互补。5. the manufacture method of the dual-liquid capillary micro-flow control valve in the microfluidic chip according to claim 2, is characterized in that, the structure of the polydimethylsiloxane male mold mold that step 5 obtains is obtained with step 4 The structure of the silicon-based female mold is complementary.6.根据权利要求2所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征在于，步骤五所述的液态聚二甲基硅氧烷与固化剂按10∶1的比例混合而成。6. The manufacturing method of the dual-liquid capillary micro-flow control valve in the microfluidic chip according to claim 2, characterized in that the liquid polydimethylsiloxane and curing agent described in step 5 are in a ratio of 10:1 The ratio is mixed.7.根据权利要求2所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征在于，步骤六获得的聚二甲基硅氧烷基片(1)的结构与步骤四获得的硅基阴模模具的结构相同。7. The manufacturing method of the dual-liquid capillary micro-flow control valve in the microfluidic chip according to claim 2, characterized in that, the structure and steps of the polydimethylsiloxane-based sheet (1) obtained in step 6 The four obtained silicon-based negative molds have the same structure.8.根据权利要求2所述的微流控芯片内的双液体毛细微流控制阀的制作方法，其特征在于，所述玻璃片(2)的材质为硼硅玻璃片，所述硼硅玻璃片的尺寸与硅单晶片的尺寸相同。8. the manufacture method of the dual-liquid capillary micro-flow control valve in the microfluidic chip according to claim 2, is characterized in that, the material of described glass sheet (2) is borosilicate glass sheet, and described borosilicate glass The size of the sheet is the same as that of a silicon single wafer.

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