CN101207344B - Creeping motion type piezoelectricity straight line driver - Google Patents

Abstract

Translated fromChinese

本发明公开一种具有纳米级精度的大行程蠕动式压电直线驱动器，主要包括底座，导向机构，可调箝位机构，可调中间驱动机构，带法兰盘输出轴，箝位用固定支撑架。底座用于固定箝位用固定支撑架，箝位用固定支撑架用于固定双平行直线导杆，形成导向平面；所述的可调中间驱动机构与带法兰盘输出轴固定一体并可在导向机构上自由移动，输出轴与箝位用固定支撑架小间隙配合；所述的可调箝位机构通过底座下的调节螺栓调节箝位机构与输出轴之间的间隙并达到零间隙。本发明独特的双平行直线导杆导向的结构不仅可以保证高的直线度，而且可以避免该驱动器长时间运行后性能下降的问题，该驱动器简单紧凑、易装可调、控制方便，适用于精密加工及精密运动平台的应用。

The invention discloses a large-stroke peristaltic piezoelectric linear actuator with nanometer-level precision, which mainly includes a base, a guiding mechanism, an adjustable clamping mechanism, an adjustable intermediate driving mechanism, an output shaft with a flange, and a fixed support for clamping shelf. The base is used to fix the fixed support frame for the clamp, and the fixed support frame for the clamp is used to fix the double parallel linear guide rods to form a guide plane; The guide mechanism moves freely, and the output shaft cooperates with the fixed support frame for clamping with a small gap; the adjustable clamping mechanism adjusts the gap between the clamping mechanism and the output shaft through the adjusting bolt under the base to achieve zero gap. The unique dual-parallel linear guide rod-guided structure of the present invention can not only ensure high straightness, but also avoid the problem of performance degradation of the driver after long-term operation. Processing and precision motion platform applications.

Description

Translated fromChinese

蠕动式压电直线驱动器Peristaltic Piezo Linear Actuators

技术领域technical field

本发明涉及一种具有纳米级精度的大行程蠕动式压电直线驱动器。属于精密仪器设备技术领域。The invention relates to a large stroke peristaltic piezoelectric linear driver with nanometer precision. It belongs to the technical field of precision instruments and equipment.

背景技术Background technique

具有纳米精度的直线驱动器是纳米技术的动力部分，被人们称为纳米科技的心脏。国内外许多著名的研究机构都把这种微驱动系统作为主要的研究方向。传统电磁旋转电机必须经特定机构才能转换成直线运动，使其很难实现纳米精度的直线运动。因此，当运动分辨率达到亚微米级或纳米级时，固体致动器特别是压电致动器在微驱动定位技术中体现出优势。压电陶瓷驱动器与电磁直线电机相比，具有惯性小、响应快、控制特性好、不受磁场影响、其本身亦不产生磁场、运动准确等特点。但是直接利用压电变形的驱动定位系统有其明显的缺点，即位移行程小，最多数十微米。The linear actuator with nanometer precision is the power part of nanotechnology, and is called the heart of nanotechnology. Many famous research institutions at home and abroad regard this micro-drive system as the main research direction. The traditional electromagnetic rotary motor must be converted into linear motion through a specific mechanism, making it difficult to achieve nanometer-precision linear motion. Therefore, solid-state actuators, especially piezoelectric actuators, show advantages in micro-actuated positioning technology when the motion resolution reaches sub-micron or nano-level. Compared with the electromagnetic linear motor, the piezoelectric ceramic driver has the characteristics of small inertia, fast response, good control characteristics, no influence of magnetic field, no magnetic field itself, and accurate movement. However, the drive positioning system that directly uses piezoelectric deformation has its obvious disadvantages, that is, the displacement stroke is small, at most tens of microns.

蠕动式压电直线驱动器模仿自然界中蠕虫的爬行方式，通过对压电陶瓷微小变形的累加，能够实现大行程、高精度、高速度的双向运动，适用于精密光学工程、半导体制造、超精密微细加工与测量技术、微型机电系统、航空航天技术、现代医学及生物遗传工程等诸多尖端科技领域的应用。The peristaltic piezoelectric linear actuator imitates the crawling mode of worms in nature. By accumulating the tiny deformation of piezoelectric ceramics, it can realize bidirectional motion with large stroke, high precision and high speed. It is suitable for precision optical engineering, semiconductor manufacturing, ultra-precision micro Processing and measurement technology, micro-electromechanical systems, aerospace technology, modern medicine and bio-genetic engineering and many other cutting-edge technology applications.

迄今为止，所实现的蠕动式压电直线驱动器都是由导向机构，如平行导轨或导杆，与箝位机构的直接接触来提供驱动所需要的摩擦力，步进运动和输出负载都是依赖箝位机构和导向机构夹持箝位的摩擦力实现，箝位机构的箝位夹持力决定了系统的输出负载。由于磨损的存在，运行一段时间之后，由于间隙变大普遍出现输出负载下降，直线度不稳定的现象，并最终影响使用寿命。So far, the peristaltic piezoelectric linear actuators have been realized by the direct contact of the guide mechanism, such as parallel guide rails or guide rods, with the clamp mechanism to provide the friction force required for the drive, and the step motion and output load are dependent on The clamping mechanism and the guiding mechanism clamp the friction force to realize the clamping clamp, and the clamping force of the clamping mechanism determines the output load of the system. Due to the existence of wear, after running for a period of time, the output load will generally decrease due to the increase of the gap, and the straightness will be unstable, which will eventually affect the service life.

发明内容Contents of the invention

本发明所要解决的技术问题是设计一款新颖结构的蠕动式压电直线驱动器，该驱动器能够在长时间运行之后避免由于摩擦磨损所带来的性能下降问题，且系统成本低廉，易装可调具有较高输出力和速度。The technical problem to be solved by the present invention is to design a peristaltic piezoelectric linear actuator with a novel structure, which can avoid performance degradation caused by friction and wear after long-term operation, and the system cost is low, easy to install and adjustable With high output force and speed.

本发明设计的一种蠕动式压电直线驱动器，包括底座，导向机构，可调箝位机构，可调中间驱动机构，带法兰盘输出轴，箝位用固定支撑架；底座用于固定箝位用固定支撑架，而箝位用固定支撑架用于固定导向机构；导向机构为双平行直线导杆；所述的可调中间驱动机构与带法兰盘输出轴固定一体并可在导向机构上自由移动，输出轴与箝位用固定支撑架小间隙配合；所述的可调箝位机构通过底座下的调节螺栓调节箝位机构与输出轴之间的间隙并达到零间隙。A peristaltic piezoelectric linear driver designed by the present invention includes a base, a guide mechanism, an adjustable clamping mechanism, an adjustable intermediate drive mechanism, an output shaft with a flange, and a fixed support frame for clamping; the base is used for fixing the clamp The fixed support frame is used for the position, and the fixed support frame for the clamp is used to fix the guide mechanism; the guide mechanism is a double parallel linear guide rod; The upper part moves freely, and the output shaft cooperates with the fixed support frame for clamping with a small gap; the adjustable clamping mechanism adjusts the gap between the clamping mechanism and the output shaft through the adjusting bolt under the base to achieve zero gap.

与现有的相同原理驱动器相比，本发明具有以下技术效果：（一）由于采用双平行直线导杆作为导向机构，可以得到较高的直线度，并且不受摩擦磨损的影响。（二）压电陶瓷的预紧和摩擦面间隙都采用可调机构，保证了本发明设计的高可靠性，大大降低了加工成本。（三）本发明设计结构紧凑，适用于精密加工与装配，增加导杆的刚度后，亦可以用于大承载能力的精密运动平台。Compared with the existing driver with the same principle, the present invention has the following technical effects: (1) Due to the use of double parallel linear guide rods as the guiding mechanism, higher straightness can be obtained and it is not affected by friction and wear. (2) Both the preload and the gap between the friction surfaces of piezoelectric ceramics adopt adjustable mechanisms, which ensures the high reliability of the design of the present invention and greatly reduces the processing cost. (3) The present invention has a compact design and is suitable for precision machining and assembly. After increasing the stiffness of the guide rod, it can also be used for a precision motion platform with a large load-carrying capacity.

附图说明Description of drawings

图1是本发明的装配示意图。Figure 1 is a schematic diagram of the assembly of the present invention.

图2是本发明的运动原理图。Fig. 2 is a motion principle diagram of the present invention.

图3是本发明的平行导杆滑动部分的装配示意图。Fig. 3 is an assembly diagram of the sliding part of the parallel guide rod of the present invention.

图4是本发明的中间驱动机构的装配示意图。Fig. 4 is an assembly schematic diagram of the intermediate drive mechanism of the present invention.

图5是本发明的中间驱动柔顺机构的预紧示意图。Fig. 5 is a preload schematic diagram of the intermediate drive compliance mechanism of the present invention.

图6是本发明的箝位机构的装配示意图。Fig. 6 is an assembly schematic diagram of the clamping mechanism of the present invention.

图7是图6的侧视图。FIG. 7 is a side view of FIG. 6 .

图8是中间驱动柔顺机构示意图。Fig. 8 is a schematic diagram of an intermediate drive compliance mechanism.

图9是箝位柔顺机构示意图。Fig. 9 is a schematic diagram of the clamp compliance mechanism.

图中：1．底座，2．可调箝位支撑板，3．箝位柔顺机构，4．箝位用压电叠堆，5．箝位用固定支撑架，6．带法兰盘输出轴，7．直线导杆，8．直线衬套，9．滑动块，10．中间驱动柔顺机构，11．弹簧钢丝，12．驱动用压电叠堆，13．驱动用压电叠堆的预紧螺钉，14．驱动用压电叠堆的垫块，15．箝位机构调节螺栓，16．箝位用压电叠堆的预紧螺栓，17．箝位用压电叠堆的垫块，18．柔性铰链。In the picture: 1. Base, 2. Adjustable clamp support plate, 3. Clamp compliance mechanism, 4. Piezoelectric stack for clamping, 5. Clamp with a fixed support frame, 6. Output shaft with flange, 7. Linear guide rod, 8. Linear bushing, 9. slider, 10. Intermediate drive compliance mechanism, 11. Spring steel wire, 12. Piezoelectric stack for driving, 13. 14. Preloading screws for driving piezoelectric stacks. 15. A spacer for driving a piezoelectric stack. Clamp mechanism adjustment bolt, 16. Pre-tightening bolts for piezoelectric stacks for clamping, 17. Piezoelectric stack spacers for clamping, 18. Flexible hinge.

具体实施方式Detailed ways

下面结合附图，详细介绍本发明的内容。Below in conjunction with accompanying drawing, introduce the content of the present invention in detail.

本发明所采用的技术方案是：本发明设计主要包括底座1，导向机构7、8，可调箝位机构2、3、4、15、16、17，可调中间驱动机构9、10、11、12、13、14，带法兰盘输出轴6，箝位用固定支撑架5。两个箝位用固定支撑架5固定在底座1上，用于固定两个平行的直线导杆7提供导向平面，并且与左右两个带法兰盘输出轴6小间隙配合提供箝位接触面。带法兰盘输出轴6与滑动块9固定联接，滑动块9与中间驱动柔顺机构10通过铆钉和螺栓固定，两个滑动块9通过四个直线衬套8可以在直线导杆7上自由移动。箝位柔顺机构3放在可调箝位支撑板2上通过下面的两个可调螺栓15，保证箝位柔顺机构3上面的圆弧面与输出轴6的无间隙配合。箝位机构与中间驱动机构都是由压电叠堆、柔顺机构、垫块和可调螺栓组成，中间驱动机构还配有四个回复弹簧钢丝11。The technical solution adopted in the present invention is: the design of the present invention mainly includesbase 1, guidingmechanism 7, 8,adjustable clamping mechanism 2, 3, 4, 15, 16, 17, adjustableintermediate driving mechanism 9, 10, 11 , 12, 13, 14,output shaft 6 with flange,fixed support frame 5 for clamping. The two clamps are fixed on thebase 1 with afixed support frame 5, which is used to fix two parallellinear guide rods 7 to provide a guide plane, and cooperate with the left and right twoflanged output shafts 6 with a small gap to provide a clamp contact surface . Theoutput shaft 6 with flange is fixedly connected with thesliding block 9, and thesliding block 9 and the intermediatedrive compliance mechanism 10 are fixed by rivets and bolts, and the twosliding blocks 9 can move freely on thelinear guide rod 7 through fourlinear bushings 8 . Theclamp compliance mechanism 3 is placed on the adjustableclamp support plate 2 through the two adjustable bolts 15 below to ensure that the circular arc surface on theclamp compliance mechanism 3 and theoutput shaft 6 fit seamlessly. Both the clamping mechanism and the intermediate driving mechanism are composed of a piezoelectric stack, a compliance mechanism, a spacer and an adjustable bolt, and the intermediate driving mechanism is also equipped with four returnspring steel wires 11 .

如图2所示，本发明设计的蠕动式压电直线驱动器模仿蠕虫的运动方式，通过对两个箝位用压电叠堆4和驱动用压电叠堆12顺序加电压实现如图所示的单步位移，如此循环可以实现大的位移行程，改变加电的逻辑顺序可以实现双向的运动。通过调整电压的幅值和输入波形的频率可以改变驱动器的速度。如运动原理图所示的结构，箝位机构固定，中间驱动机构运动的构型属于步进－推动型的蠕动式压电直线驱动器，该构型运动部分质量最小有利于系统的快速响应。As shown in Figure 2, the peristaltic piezoelectric linear actuator designed by the present invention imitates the movement mode of worms, and realizes the realization by sequentially applying voltage to the twopiezoelectric stacks 4 for clamping andpiezoelectric stack 12 for driving, as shown in the figure. Single-step displacement, such a cycle can achieve a large displacement stroke, and changing the logic sequence of power-on can achieve two-way movement. The speed of the drive can be varied by adjusting the magnitude of the voltage and the frequency of the input waveform. As shown in the motion schematic diagram, the clamping mechanism is fixed, and the intermediate driving mechanism moves. It belongs to the step-push type peristaltic piezoelectric linear actuator. The minimum mass of the moving part in this configuration is conducive to the rapid response of the system.

本发明直接采用高精度的直线导杆7作为导向，为了保证两个直线导杆7在一个水平面内，左右箝位用固定支撑架5和两个滑动块9都采用一体化加工，然后从中间切开。如图3所示，可调中间驱动机构9、10、11、12、13、14通过嵌在滑动块9中的直线衬套8可以在导杆7上自由移动。该结构避免了由导向机构直接提供驱动所需的摩擦力，容易实现驱动用摩擦表面间隙可调，降低配合精度，利于提高系统的使用寿命，同时也避免了使用大行程用导向机构所必须的高的直线度和平面度的加工要求。The present invention directly adopts the high-precisionlinear guide rod 7 as a guide. In order to ensure that the twolinear guide rods 7 are in a horizontal plane, the fixedsupport frame 5 for the left and right clamps and the two slidingblocks 9 are all processed in one piece, and then from the middle cut open. As shown in FIG. 3 , the adjustableintermediate drive mechanisms 9 , 10 , 11 , 12 , 13 , 14 can move freely on theguide rod 7 through thelinear bush 8 embedded in the slidingblock 9 . This structure avoids the friction required for the drive directly provided by the guide mechanism, and it is easy to realize the adjustable clearance of the friction surface for the drive, which reduces the matching accuracy and helps to improve the service life of the system. High straightness and flatness processing requirements.

本发明采用压电叠堆直接驱动箝位的方式以及增大接触面积的圆弧面配合来保证尽量大的输出力。尽管柔性放大机构能够放大压电叠堆的变形，减小加工公差的要求，但是输出刚度太小，并不能真正有效地提高输出刚度和输出力，并且柔性放大机构必然降低系统的响应速度。通过仔细研磨输出轴6与箝位用固定支撑架5的接触圆弧面，来保证上端的摩擦箝位面的小间隙配合。如图6、7所示，箝位柔顺机构3放在箝位支撑板2上，通过下面的两个调节螺栓15来保证下端的摩擦箝位面，即柔顺机构3与输出轴6之间的零间隙，间隙越小损失的箝位力就越少，克服了直接驱动对加工精度依赖的技术问题，简单有效地提高了系统的可靠性。The present invention adopts the method of directly driving the clamp by the piezoelectric stack and the cooperation of the circular arc surface which increases the contact area to ensure the largest possible output force. Although the flexible amplification mechanism can amplify the deformation of the piezoelectric stack and reduce the processing tolerance requirements, the output stiffness is too small to really effectively improve the output stiffness and output force, and the flexible amplification mechanism will inevitably reduce the response speed of the system. By carefully grinding the contact arc surface of theoutput shaft 6 and the fixedsupport frame 5 for clamping, the small clearance fit of the friction clamping surface at the upper end is ensured. As shown in Figures 6 and 7, theclamp compliance mechanism 3 is placed on theclamp support plate 2, and the friction clamping surface at the lower end is ensured by the two adjustment bolts 15 below, that is, the distance between thecompliance mechanism 3 and theoutput shaft 6 Zero gap, the smaller the gap is, the less the clamping force will be lost, which overcomes the technical problem that direct drive depends on machining accuracy, and improves the reliability of the system simply and effectively.

压电叠堆在预紧情况下可以更有效运动，而且为了保护压电叠堆4、12，避免承受剪切破坏，柔顺机构3、10与预紧螺栓16和预紧螺钉13配合垫块17、14对压电叠堆进行预紧，相对于直接使用柔顺机构的过盈配合来施加预紧，可以降低加工的精度要求。如图8和9，分别是驱动用压电叠堆12和箝位用压电叠堆4的柔顺机构10和3，两者都是基于柔性铰链18的柔性八杆机构，通过优化设计，两者在满足刚度和应力的前提下，具有尽可能高的固有频率，使系统具有良好的静态和动态性能。为了进一步增加系统的动态性能，如图4所示，增加4根弹簧钢丝11，相当于质量不变并联了4个小刚度弹簧，可以显著提高系统的固有频率，适用于大承载能力的精密运动平台的预紧。The piezoelectric stack can move more effectively under pre-tightening conditions, and in order to protect thepiezoelectric stacks 4, 12 from shear damage, thecompliant mechanisms 3, 10 cooperate with the pre-tightening bolts 16 and thepre-tightening screws 13 withpads 17 , 14 Preload the piezoelectric stack, compared with directly using the interference fit of the compliant mechanism to apply the preload, it can reduce the processing accuracy requirements. As shown in Figures 8 and 9, they are respectively thecompliant mechanisms 10 and 3 of thepiezoelectric stack 12 for driving and thepiezoelectric stack 4 for clamping, both of which are flexible eight-bar mechanisms based on flexible hinges 18. Through optimal design, the two Under the premise of satisfying the stiffness and stress, the latter has the highest natural frequency as possible, so that the system has good static and dynamic performance. In order to further increase the dynamic performance of the system, as shown in Figure 4, adding 4spring steel wires 11 is equivalent to connecting 4 small stiffness springs in parallel with the same mass, which can significantly increase the natural frequency of the system and is suitable for precision motion with large load capacity platform preload.

本发明在保证具有较高输出力和速度的前提下，结构简单紧凑、成本低廉且易装可调便于市场推广，适用于精密加工进给装置的应用，特别是适用于大承载的精密运动平台的应用。On the premise of ensuring high output force and speed, the present invention has simple and compact structure, low cost, easy installation and adjustment, and is convenient for market promotion. It is suitable for the application of precision machining feed devices, especially for precision motion platforms with large loads Applications.

Claims (2)

1. a creeping motion type piezoelectricity straight line driver comprises base, guiding mechanism, adjustable clamping institution, adjustable middle driving mechanism, flanged dish output shaft, clamp fixing support rack; It is characterized in that base is used for fixedly clamp fixing support rack, and clamp is used for fixed guide mechanism with fixing support rack; Described adjustable in the middle of driving mechanism and flanged dish output shaft be fixed as one and also can move freely at guiding mechanism, output shaft and clamp are with the little matched in clearance of fixing support rack; Described adjustable clamping institution is regulated the gap between described clamping institution and the described output shaft and is reached the zero clearance by the adjusting bolt under the base.

2. a kind of creeping motion type piezoelectricity straight line driver according to claim 1 is characterized in that, described guiding mechanism is two parallel lines guide rods.

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