CN101109764A

Movatterモバイル変換

Info

Publication number: CN101109764A
Application number: CN 200710042302
Authority: CN
Inventors: 张卫平; 张忠榕; 陈文元; 刘武
Original assignee: Shanghai Jiao Tong University
Current assignee: Shanghai Jiao Tong University
Priority date: 2007-06-21
Filing date: 2007-06-21
Publication date: 2008-01-23
Anticipated expiration: 2027-06-21
Also published as: CN100489538C

Abstract

一种微机电系统领域的双模式反磁敏感质量微加速度计，由上定子、转子和下定子构成，所述下定子中，下定子侧向静电电极分布在下定子基体的顶面的最外围，且沿圆周分布，下定子十字分隔结构沿下定子基体表面几何结构的中线位置分布，将下定子基体的底面空间分隔成四个区域，在这四个区域上粘附着下定子永磁块；所述上定于中，上定子十字分隔结构沿上定子基体表面几何结构的中线位置分布，将上定子基体的底面空间分隔成四个区域，在这四个区域上粘附着上定子永磁块。本发明降低了转子的起支过程和起支控制难度，可同时检测包括沿X、Y、Z轴的线加速度以及绕X、Y轴角加速度等多个自由度的加速度。

A dual-mode inverse magnetic-sensitive mass micro-accelerometer in the field of micro-electromechanical systems, consisting of an upper stator, a rotor, and a lower stator, in which the lateral electrostatic electrodes of the lower stator are distributed on the outermost periphery of the top surface of the lower stator base , and distributed along the circumference, the lower stator cross separation structure is distributed along the center line of the surface geometric structure of the lower stator base, and divides the space of the bottom surface of the lower stator base into four areas, on which the permanent magnet blocks of the lower stator are adhered ; The upper part is fixed in the middle, the upper stator cross partition structure is distributed along the centerline position of the upper stator base body surface geometric structure, and the bottom surface space of the upper stator base body is divided into four areas, and the upper stator is permanently attached to these four areas. magnetic block. The invention reduces the difficulty of the starting process and the starting control of the rotor, and can simultaneously detect accelerations including linear accelerations along X, Y and Z axes and angular accelerations around X and Y axes.

Description

Dual-mode inverse magnetic sensitive mass micro-accelerometer

Technical field

What the present invention relates to is a kind of micro-acceleration gauge of field of micro electromechanical technology, specifically is a kind of dual-mode inverse magnetic sensitive mass micro-accelerometer.

Background technology

As everyone knows, the micro-mechanical inertia instrument comprises micro-inertia sensor (micro-acceleration gauge and gyroscope) and Micro Inertial Measurement Unit (MIMU is made of micro-inertia sensor, micro-control circuit etc.), is the important MEMS (micro electro mechanical system) of a class.At present, mems accelerometer is that development and application is the most successful in all MEMS sensors, in the micro-mechanical accelerometer existing procucts of low precision come out, apply, and to more high precision development.Floated micro-acceleration gauge is compared non-Floating micro-acceleration gauge owing to eliminated because the thermonoise that manufacturing process and mechanical connection support are brought for the influence of support stiffness, can obtain high resolution in theory.E-consumer series products such as standby as inertial navigation, GPS aspect dual-use, virtual reality, inertia mouse, biologic medical, automotive safety are with a wide range of applications, and have therefore obtained the generally attention of countries in the world.

Find through literature search prior art, people such as Liu Yunfeng, Ding Henggao, Dong Jingxin are in " Tsing-Hua University's journal (natural science edition) " (2007 the 47th the 2nd phases of volume, the 181-185 page or leaf) delivers " design of electrostatic suspension micro-mechanical accelerometer " on, propose a kind of disk type rotor electrostatic suspension micro-acceleration gauge in this article.Its weak point is: need provide suspension electrode and radially control electrode mass (rotor) is carried out the 5DOF position control, realize electrostatic suspension.

Summary of the invention

The objective of the invention is provides a kind of dual-mode anti-magnetic rotor inductive rotating microgyroscope at above-mentioned deficiency of the prior art, makes it have the double mode suspension mode of operation that selectable inverse magnetic suspension mode of operation and anti-magnetic add electrostatic suspension.Rely on upper and lower stator to provide suspending power and lateral stability power just can realize suspending from steady to antimagnetic rotor, can utilize simultaneously electrostatic suspension principle and following stator side to improve axial rigidity, lateral rigidity and the impact resistance of little gyro to electrostatic attraction electrode again, strengthen stable suspersion, make and add under the electrostatic suspension mode of operation at anti-magnetic, before applying electrostatic potential, rotor has been suspended in the equilibrium position because of diamagnetic effect, so compare general electrostatic suspension micro-acceleration gauge, reduced playing a process and playing a control difficulty of rotor.And the present invention can detect simultaneously and comprise along three axis accelerometers of X, Y, Z axle and around X, Y-axis two shaft angle acceleration.

The present invention is achieved through the following technical solutions, and the present invention is by last stator, and rotor and following stator three parts constitute, last stator tips upside down on down on the stator, makes two end faces of stator and following stator relative, finishes assembling, thereby formation cavity, rotor then are suspended in this cavity.When assembling, the face over against rotor in the last stator structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor in the following stator structure also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.

Described stator down comprises that stator side is to electrostatic attraction electrode, following stator matrix, following stator cross separation structure, following stator permanent magnet piece down; Following stator side is distributed in down the outermost of the end face of stator matrix to electrostatic attraction electrode, and circumferentially; In the following bottom surface of stator matrix, following stator cross separation structure distributes along the midline position of stator matrix surface geometry down, and the floor space of stator matrix down is separated into four zones, is adhering to the stator permanent magnet piece on these four zones;

The described stator primary structure of going up comprises the stator matrix, goes up stator cross separation structure, goes up the stator permanent magnet piece; In the bottom surface of last stator matrix, last stator cross separation structure distributes along the midline position of last stator matrix surface geometry, and the floor space of last stator matrix is separated into four zones, is adhering to the stator permanent magnet piece on these four zones.

Described rotor is a disc-shaped structure, comprises rotor upper surface Ti layer, the middle anti-magnetic structure layer of rotor, rotor lower surface Ti layer, and the upper and lower surface of anti-magnetic structure layer is covered with rotor upper surface Ti layer and rotor lower surface Ti layer respectively in the middle of rotor.

Described stator down also comprises: following stator public capacitance pole plate and following stator detect and FEEDBACK CONTROL capacitor plate group; On the end face of following stator matrix, distributing stator public capacitance pole plate, following stator detection and FEEDBACK CONTROL capacitor plate group, following stator side to electrostatic attraction electrode from inside to outside successively.

The described stator of going up also comprises: go up stator public capacitance pole plate and last stator and detect and FEEDBACK CONTROL capacitor plate group; Stator public capacitance pole plate and last stator detect and FEEDBACK CONTROL capacitor plate group on distributing successively from inside to outside on the end face of last stator matrix.

The present invention has two kinds of mode of operations, can be chosen under one of them pattern and work: under the inverse magnetic suspension mode of operation, the bottom surface of last stator matrix comprises by the different last stator permanent magnet piece that constitutes of the electromagnetism polarity of four permanent magnetism sheets and the same end face of adjacent permanent magnet piece, the bottom surface of following stator matrix comprises by the different following stator permanent magnet piece that constitutes of the electromagnetism polarity of four permanent magnetism sheets and the same end face of adjacent permanent magnet piece, when last stator tips upside down on down on the stator, need to make the opposite face of going up stator and following stator to form the N-S opposite relation of pole polarity one to one at vertical direction; Anti-magnetic adds under the electrostatic suspension mode of operation, the end face of last stator matrix is distributed with stator and detects and FEEDBACK CONTROL capacitor plate group, the end face of following stator matrix is distributed with down stator and detects and FEEDBACK CONTROL capacitor plate group, and stator side is right to electrostatic attraction electrode under being distributed with on the end face outmost turns circumference of following stator matrix.

The invention solves the deficiencies in the prior art, adopt selectable double mode work, in the dependence, following stator provides suspending power and lateral stability power to antimagnetic rotor, also can utilize simultaneously electrostatic suspension principle and following stator side to electrostatic attraction electrode to improving little gyro axial rigidity, lateral rigidity, and then improved impact resistance, realize stable suspersion, technology is simple relatively, add under the electrostatic suspension mode of operation at anti-magnetic simultaneously, because before applying electrostatic potential, rotor is because diamagnetic effect has been suspended in the equilibrium position, compare general electrostatic suspension micro-acceleration gauge, reduced playing a process and playing a control difficulty of rotor, can detect simultaneously and comprise along X, Y, the linear acceleration of Z axle and around X, the acceleration of a plurality of degree of freedom such as Y-axis angular acceleration.

Description of drawings

Fig. 1 is a general structure synoptic diagram of the present invention

Fig. 2 is stator structure end face synoptic diagram under the present invention

Fig. 3 is stator structure schematic bottom view under the present invention

Fig. 4 is stator structure end face synoptic diagram in the present invention

Fig. 5 is stator structure schematic bottom view in the present invention

Fig. 6 is a rotor structure synoptic diagram of the present invention

Embodiment

Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.

As shown in Figure 1, what present embodiment adopted is three-decker, is made oflast stator 1,rotor 3 and following stator 2.Last stator 1 tips upside down on down on thestator 2, makes 2 two end faces ofstator 1 and following stator relative, finishes assembling, thereby forms cavity, and 3 of rotors are suspended in this cavity.When assembling, the face over againstrotor 3 inlast stator 1 structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over againstrotor 3 in followingstator 2 structures also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.

Shown in Fig. 2,3, stator public capacitance pole plate 4, following stator detection and FEEDBACK CONTROLcapacitor plate group 5, following stator side were toelectrostatic attraction electrode 6, followingstator matrix 7, following stator cross separation structure 8, following statorpermanent magnet piece 9 under followingstator 2 comprised.At the end face of followingstator matrix 7, distributing stator public capacitance pole plate 4, following stator detection and FEEDBACK CONTROLcapacitor plate group 5, following stator side from inside to outside successively toelectrostatic attraction electrode 6; In the following bottom surface ofstator matrix 7, following stator cross separation structure 8 distributes along the midline position ofstator matrix 7 surface geometries down, and the floor space ofstator matrix 7 down is separated into four zones, is adhering to statorpermanent magnet piece 9 on these four zones.

Shown in Fig. 4,5,last stator 1 comprises stator publiccapacitance pole plate 10, goes up stator detection and FEEDBACK CONTROL capacitor plate group 11, goes upstator matrix 12, goes up statorcross separation structure 13, goes up stator permanent magnet piece 14.At the end face oflast stator matrix 12, distributing successively from inside to outside and going up stator publiccapacitance pole plate 10, last stator detection and FEEDBACK CONTROL capacitor plate group 11; In the bottom surface oflast stator matrix 12, last statorcross separation structure 13 distributes along the midline position oflast stator matrix 12 surface geometries, and the floor space oflast stator matrix 12 is separated into four zones, is adhering to statorpermanent magnet piece 14 on these four zones.

As shown in Figure 6,rotor 3 is disc-shaped structures, comprises rotor uppersurface Ti layer 15, the middleanti-magnetic structure layer 16 of rotor, rotor lower surface Ti layer 17.The upper and lower surface ofanti-magnetic structure layer 16 is covered with rotor uppersurface Ti layer 15 and rotor lowersurface Ti layer 17 respectively in the middle of rotor.The circumferential edges ofrotor 3 detects with following stator and the external arc edge in the vertical direction of FEEDBACK CONTROLcapacitor plate group 5 and detection of last stator and FEEDBACK CONTROL capacitor plate group 11 aligns.Rotor 3 external diameters are with following stator detection and FEEDBACK CONTROLcapacitor plate group 5 and last stator detects and the external diameter of FEEDBACK CONTROL capacitor plate group 11 equates.

As Fig. 3,5, in the bottom surface of followingstator matrix 7, following stator cross separation structure 8 is separated into the following statorpermanent magnet piece 9 that is adhering on four zones and is made of four permanent magnetism sheets, and the electromagnetism polarity of the same end face of adjacent permanent magnet piece is different; Equally, in the bottom surface oflast stator matrix 12, last statorcross separation structure 13 is separated into the last statorpermanent magnet piece 14 that is adhering on four zones and also is made of four permanent magnetism sheets, and the electromagnetism polarity of the same end face of adjacent permanent magnet piece is different; When last stator tips upside down on down on the stator, need to make the opposite face of going upstator 1 and followingstator 2 to form the N-S opposite relation of pole polarity one to one at vertical direction, then the attractive force between them makes that the joint of going upstator 1 and followingstator 2 is tightr.

As Fig. 2,3,4,5,6, during present embodiment work, comprise following three aspects:

(1) when being used to detect the acceleration signal of vertical direction z axle input, apply same frequency for last stator detection and FEEDBACK CONTROL capacitor plate group 11 and the detection of following stator and FEEDBACK CONTROLcapacitor plate group 5, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator publiccapacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detect for last stator and FEEDBACK CONTROL capacitor plate group 11 and play stator detects and FEEDBACK CONTROLcapacitor plate group 5 to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position torotor 3;

(2) when being used for the acceleration signal of detection level direction x axle input, detect for last stator and FEEDBACK CONTROL capacitor plate group 11 upper left two capacitor plates and the detection of following stator and two capacitor plates in FEEDBACK CONTROLcapacitor plate group 5 lower-lefts, and last stator detects and two capacitor plates in FEEDBACK CONTROL capacitor plate group 11 bottom rights detect with following stator and FEEDBACK CONTROLcapacitor plate group 5 upper right two capacitor plates apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator publiccapacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the x axle acceleration of input through the circuit aftertreatment, simultaneously by detecting for last stator and FEEDBACK CONTROL capacitor plate group 11 upper left two capacitor plates and play stator detect and two capacitor plates in FEEDBACK CONTROLcapacitor plate group 5 lower-lefts, and go up that stator detects and two capacitor plates in FEEDBACK CONTROL capacitor plate group 11 bottom rights and the detection of play stator and FEEDBACK CONTROLcapacitor plate group 5 upper right two capacitor plates to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position torotor 3;

(3) when being used to detect the acceleration signal of vertical direction y axle input, detect for last stator and two capacitor plates in FEEDBACK CONTROL capacitor plate group 11 lower-lefts and the detection of following stator and FEEDBACK CONTROLcapacitor plate group 5 upper left two capacitor plates, and last stator detects and FEEDBACK CONTROL capacitor plate group 11 upper right two capacitor plates detect with following stator and two capacitor plates in FEEDBACK CONTROLcapacitor plate group 5 bottom rights apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator publiccapacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detecting for last stator and two capacitor plates in FEEDBACK CONTROL capacitor plate group 11 lower-lefts and play stator detect and FEEDBACK CONTROLcapacitor plate group 5 upper left two capacitor plates, and go up that stator detects and FEEDBACK CONTROL capacitor plate group 11 upper right two capacitor plates and the detection of play stator and two capacitor plates in FEEDBACK CONTROLcapacitor plate group 5 bottom rights to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position torotor 3.

The present invention has two kinds of mode of operations, can be chosen under one of them pattern and work:

First inverse magnetic suspension mode of operation, because the bottom surface oflast stator 1 and followingstator 2 all is stained with the permanent magnetism sheet, androtor 3 itself is a diamagnetic body, will form interaction force betweenrotor 3 andlast stator 1 and the followingstator 2 is that coercive force provides Z to (axially) suspending power for the suspension antimagnetic rotor, simultaneously also forrotor 3 provides lateral stability power along X, Y direction, and thenrotor 3 has been realized the self-stabilization suspension 2 oflast stator 1 and following stators.It two is that anti-magnetic adds the electrostatic suspension mode of operation, by applying voltage for stator detection down and FEEDBACK CONTROLcapacitor plate group 5 and the detection of last stator and FEEDBACK CONTROL capacitor plate group 11, the electrostatic force that produces between followingstator 2 androtor 3,last stator 1 and therotor 3, strengthened the axial rigidity ofrotor 3, by onelectrostatic attraction electrode 6, applying FEEDBACK CONTROL voltage in the peripheral following stator side that distributes of stator, following stator side produces electrostatic force toelectrostatic attraction electrode 6 androtor 3, has strengthened the lateral rigidity of rotor 3.Detect and FEEDBACK CONTROL capacitor plate group 11, stator detects and FEEDBACK CONTROLcapacitor plate group 5, stator side applies carrier wave on 6 pairs of electrostatic attraction electrodes down down at last stator, when having axial and lateral deviation, by the signal that generates on last stator publiccapacitance pole plate 10 and the following stator public capacitance pole plate 4 is picked up, processing such as amplification, modulation, and judge, increase voltage on corresponding capacitance pole plate group or side direction electrostatic attraction electrode, the electrostatic force of generation is withdrawn into the equilibrium position with little rotor.Can improve like this be in inverse magnetic suspension state lower rotor part axially and lateral rigidity, improve the impact resistance of little gyro, ensure thatrotor 3 is at 2 oflast stator 1 and following stators stable suspersion more.Simultaneously, add under the electrostatic suspension mode of operation,, reduced playing a process and playing a control difficulty ofrotor 3 because before applying electrostatic potential,rotor 3 is compared general electrostatic suspension micro-acceleration gauge because diamagnetic effect has been suspended in the equilibrium position at anti-magnetic.The operate as normal that these two kinds of patterns all are micro-acceleration gauge provides safeguard.

Process using Micrometer-Nanometer Processing Technology of the present invention (MEMS technology) combines with Precision Machining, specifically: go up last stator publiccapacitance pole plate 10 on thestator 1, go up that stator detects and FEEDBACK CONTROL capacitor plate group 11, go up statorcross separation structure 13, and down the following stator public capacitance pole plate 4 on thestator 2, stator detects and FEEDBACK CONTROLcapacitor plate group 5, stator side is toelectrostatic attraction electrode 6, stator cross separation structure 8 adopts the Micrometer-Nanometer Processing Technologies realizations down down down; Capacitor plate and side direction electrostatic attraction electrode material generally adopt electric conductivity to be preferably copper, the Micrometer-Nanometer Processing Technology that technology generally adopts photoetching to electroplate; The negative glue of material that insulation that last statorcross separation structure 13 and following stator cross separation structure 8 can adopt and magnetic conduction are indifferent such as SU8 is by getting rid of the Micrometer-Nanometer Processing Technology of thick glue and photoetching; Following statorpermanent magnet piece 9 and last statorpermanent magnet piece 14 adopts permanent magnetic materials, as cobalt nickel manganese phosphorus (CoNiMnP), neodymium iron boron (NdFeB) Precision Machining and magnetize and obtain; 3 of rotors are to be earlier two surface sputtering Ti of the middle anti-magnetic structure layer of rotor at substrate, obtain through fine electric spark processing then, and what substrate adopted is diamagnetic material, as pyrolytic graphite.

Claims

Translated fromChinese

1.一种双模式反磁敏感质量微加速度计，由上定子(1)、转子(3)和下定子(2)构成，上定子(1)倒扣在下定子(2)上，上定子(1)和下定子(2)两个顶面相对，从而形成空腔，转子(3)则悬浮在此空腔内，其特征在于：1. A dual-mode inverse magnetic sensitive mass microaccelerometer is composed of an upper stator (1), a rotor (3) and a lower stator (2), the upper stator (1) is buckled upside down on the lower stator (2), and the upper stator (1) and the two top surfaces of the lower stator (2) are opposed to form a cavity, and the rotor (3) is suspended in this cavity, which is characterized in that:

所述下定子(2)包括下定子侧向静电电极(6)、下定子基体(7)、下定子十字分隔结构(8)、下定子永磁块(9)，下定子侧向静电电极(6)分布在下定子(2)顶面的最外围，且沿圆周分布；在下定子基体(7)的底面，下定子十字分隔结构(8)沿下定子基体(7)表面几何结构的中线位置分布，将下定子基体(7)的底面空间分隔成四个区域，在这四个区域上粘附着下定子永磁块(9)；The lower stator (2) includes a lower stator lateral electrostatic electrode (6), a lower stator base (7), a lower stator cross separation structure (8), a lower stator permanent magnet block (9), and a lower stator lateral electrostatic electrode ( 6) Distributed on the outermost periphery of the top surface of the lower stator (2), and distributed along the circumference; on the bottom surface of the lower stator base (7), the lower stator cross partition structure (8) is along the centerline of the surface geometry of the lower stator base (7) Position distribution, the bottom surface space of the lower stator base (7) is divided into four regions, and the lower stator permanent magnet block (9) is adhered to these four regions;

所述上定子(1)包括上定子基体(12)、上定子十字分隔结构(13)、上定子永磁块(14)，在上定子结基体(12)的底面，上定子十字分隔结构(13)沿上定子基体(12)表面几何结构的中线位置分布，将上定子基体(12)的底面空间分隔成四个区域，在这四个区域上粘附着上定子永磁块(14)。The upper stator (1) includes an upper stator base body (12), an upper stator cross separation structure (13), an upper stator permanent magnet block (14), and on the bottom surface of the upper stator junction base body (12), an upper stator cross separation structure ( 13) Distributed along the centerline position of the geometric structure of the upper stator base (12), divide the space of the bottom surface of the upper stator base (12) into four areas, and adhere the upper stator permanent magnet block (14) on these four areas .

2.根据权利要求1所述的双模式反磁敏感质量微加速度计，其特征是，所述下定子还设有下定子公共电容极板(4)、下定子检测及反馈控制电容极板组(5)，下定子公共电容极板(4)、下定子检测及反馈控制电容极板组(5)和下定子侧向静电电极(6)由内而外依次分布在下定子基体(7)顶面。2. dual-mode diamagnetic sensitive mass micro accelerometer according to claim 1, is characterized in that, described lower stator is also provided with lower stator public capacitance pole plate (4), lower stator detection and feedback control capacitance pole plate group (5), the lower stator common capacitor plate (4), the lower stator detection and feedback control capacitor plate group (5) and the lower stator side electrostatic electrodes (6) are sequentially distributed on the lower stator base (7) from inside to outside top surface.

3.根据权利要求2所述的双模式反磁敏感质量微加速度计，其特征是，所述下定子永磁块(9)，由四块永磁片且相邻永磁片同一端面的电磁极性相异构成。3. dual-mode inverse magnetism sensitive mass micro-accelerometer according to claim 2, is characterized in that, described lower stator permanent magnet block (9), is made of four permanent magnet sheets and the electromagnetic of the same end face of adjacent permanent magnet sheet polar opposite composition.

4.根据权利要求2所述的双模式反磁敏感质量微加速度计，其特征是，所述上定子永磁块(14)，由四块永磁片且相邻永磁片同一端面的电磁极性相异构成。4. dual-mode inverse magnetism sensitive mass micro-accelerometer according to claim 2, is characterized in that, described upper stator permanent magnet block (14), is made of four permanent magnet sheets and the electromagnetic of the same end face of adjacent permanent magnet sheet. polar opposite composition.

5.根据权利要求1所述的双模式反磁敏感质量微加速度计，其特征是，所述上定子(1)和下定子(2)的相对面在竖直方向形成N-S一一对应的磁极极性相反的关系。5. dual-mode diamagnetic sensitive mass microaccelerometer according to claim 1, is characterized in that, the opposite face of described upper stator (1) and lower stator (2) forms the magnetic pole of N-S one-to-one correspondence in vertical direction polar opposite relationship.

6.根据权利要求1所述的双模式反磁敏感质量微加速度计，其特征是，所述上定子(1)还设有上定子公共电容极板(10)和上定子检测及反馈控制电容极板组(11)，上定子公共电容极板(10)和上定子检测及反馈控制电容极板组(11)由内而外依次分布在上定子基体(12)顶面。6. The dual-mode diamagnetic sensitive mass micro-accelerometer according to claim 1 is characterized in that, the upper stator (1) is also provided with an upper stator public capacitance pole plate (10) and an upper stator detection and feedback control capacitance The plate group (11), the upper stator common capacitor plate (10) and the upper stator detection and feedback control capacitor plate group (11) are sequentially distributed on the top surface of the upper stator base (12) from inside to outside.

7.根据权利要求1所述的双模式反磁敏感质量微加速度计，其特征是，所述转子是一个圆盘形结构。7. The dual-mode diamagnetic sensitive mass micro-accelerometer according to claim 1, wherein the rotor is a disc-shaped structure.

8.根据权利要求1或7所述的双模式反磁敏感质量微加速度计，其特征是，所述转子包括转子上表面Ti层(15)、转子中间反磁结构层(16)、转子下表面Ti层(17)，在转子中间反磁结构层(16)的上、下表面分别覆盖着转子上表面Ti层(15)和转子下表面Ti层(17)。8. according to claim 1 or 7 described dual-mode diamagnetic sensitive mass micro-accelerometers, it is characterized in that, described rotor comprises rotor upper surface Ti layer (15), rotor middle diamagnetic structure layer (16), rotor lower The surface Ti layer (17) covers the rotor upper surface Ti layer (15) and the rotor lower surface Ti layer (17) respectively on the upper and lower surfaces of the diamagnetic structure layer (16) in the middle of the rotor.

9.根据权利要求1或7所述的双模式反磁敏感质量微加速度计，其特征是，所述转子(3)的圆周边缘与下定子检测及反馈控制电容极板组(5)和上定子检测及反馈控制电容极板组(11)的外圆弧边缘在竖直方向上对齐。9. according to claim 1 or 7 described dual-mode diamagnetic sensitive mass micro-accelerometers, it is characterized in that, the circumferential edge of the rotor (3) is connected with the lower stator detection and feedback control capacitance pole plate group (5) and the upper The outer circular arc edges of the stator detection and feedback control capacitor plate group (11) are aligned in the vertical direction.

10.根据权利要求1或7所述的双模式反磁敏感质量微加速度计，其特征是，所述转子(3)，其外径与下定子检测及反馈控制电容极板组(5)以及上定子检测及反馈控制电容极板组(11)的外径相等。10. according to claim 1 or 7 described dual-mode diamagnetic sensitive mass micro-accelerometers, it is characterized in that, described rotor (3), its outer diameter and lower stator detection and feedback control capacitance pole plate group (5) and The outer diameters of the upper stator detection and feedback control capacitor plate group (11) are equal.