CN101023322A - Coordinate measuring apparatus and method for measuring an object - Google Patents

Abstract

The invention relates to a coordinate measuring apparatus (110) used for measuring an object (3), which is provided with an X-ray sensing device as a first sensing device and a second sensing device provided with touch and/or optical sensing devices (8, 11; 9). The first sensing device comprises an X-ray source (10) and at least an X-ray sensor (7) used for sensing X-ray. The second sensing device can be positioned relative to the object in the direction of X, Y or Z of the coordinate measuring apparatus. In order to measure an object extending in a large scope, it is recommended that the X-ray sensor (7, 10) should be positioned according to the second sensor (8, 11; 9) in the coordinate measuring apparatus (10).

Description

The coordinate measuring apparatus and the method that are used for measuring object

The present invention relates to a kind of coordinate measuring apparatus that is used for measuring object, it has as the X ray sensing device of first sensing device and second sensing device as sense of touch and/or optical sensing devices, wherein said first sensing device comprises x-ray source, at least one detects the X ray sensor of X ray and at the shielding of X-radiation, and described second sensing device can position with respect to object on x, the y of coordinate measuring apparatus and/or z direction.The invention still further relates to a kind of method that is used for measuring object in addition, comprise coordinate measuring apparatus, and relate to a kind of method that is used to calibrate the X ray sensing device with at least one X ray sensing device.

For known the coordinate measuring apparatus of the geometric configuration of measuring workpieces with different sensors.As this sensor described optics and touch sensor (DE.Z.: technology book, Bd.248).Same known computerised tomograph (Tomograph) is used for determining workpiece geometries, particularly fault location.Therefore the combination of two kinds of equipment has been described in DE-A-103 31 419.Here computerised tomograph is fixed on the basic structure of coordinate measuring apparatus with fixed form.Determine the position of measuring object at this by means of traditional measurement of coordinates technology sensing device, and navigate to afterwards in the measurement range of computerised tomograph.

In described prior art, do not pay attention to different mission requirementses.For example never solve following problem, promptly measuring object may have the extension greater than the measurement range of computerised tomograph.Because this computerised tomograph is fixed on the basic structure of coordinate measuring apparatus with immobilizing, so the assembling of a plurality of computerised tomograph photography is impossible.

Computerised tomograph has usually in 10 μ m or the uncertainty of measurement bigger order of magnitude, more rough in addition.Therefore, as described in, utilize computerised tomograph that unique measurement of measuring object is not enough to solve fully the dimensional measurement task that common drawing part (Zeichnungsteil) is located at DE-A-103 31 419.Another problem is, carries out the geometric calibration of computerised tomograph.Because the characteristic that Laminographic is measured significantly depends on the characteristic of measuring object itself, so this just is difficult to realize according to measurement standard on the whole.

The known a kind of method that is used for determining thickness of workpiece from DE-A-100 44 169.Hit detecting device at this X ray that sees through the parts that to measure.Can and reduce this parts by means of executor rotation and rising.After complete transmitting member, the gray-scale value sectional view that the computing machine of computerised tomograph provides a spelling to close is so that obtain three-dimensional voxel (Voxel) data recording.From this data recording, calculate the wall thickness of these parts then.

Known a kind of coordinate measuring apparatus from DE-C-38 06 686 with multi-sensor detection system, it comprises with the sensor of tactile manner work, laser sensor and video sensor, wherein uses a sensor in these sensors according to measuring task.EP-A-1 389263 regulations replace one of these sensors with computerised tomograph.

Under the situation of applying X-ray sensing device, need to be used to shield the large-scale safeguard measure of X ray, so that satisfy the radiation proof regulation.Must guarantee to be no more than the ultimate value of regulation at this at the ray load of measurement mechanism outside.In order to satisfy these requirements, known around measurement mechanism, just be independent of this measurement mechanism and arrange radiation protective casing, wherein for example constitute this radiation protective casing by compound substance with lead or lead layer.Unique task at this radiation protective casing is to be absorbed in the X ray radiation that produces in the computerised tomograph.Because this additional housing makes the entire measuring device volume become big.Other consequence is undesirable weight increase and expensive.

The shortcoming of known in addition computerised tomograph is that measuring speed lags behind the measuring speed that can reach in utilizing the measurement of coordinates technology of optical sensor.Computerised tomograph is fixed on fixed form on the basic structure of coordinate measuring apparatus, makes to have limited to measure to use possibility, and this also is disadvantageous.

The known a kind of checking system that is used for airframe from US-A-2003/0043964, its be included in x-ray source that fuselage interior is starting point with the jacking equipment and fuselage outside same be the sensor of starting point with the jacking equipment.In order to determine the position of sensor, use triangulation method.

Measuring instrument according to DE-A-100 01 239 also is provided with non-optical measuring system except position detector, such as AFM (atomic force microscope), they interconnect through support component with immobilizing.

Multisensor measuring head according to DE-A-44 45 331 comprises Z-axis, on this Z-axis a plurality of sensors can be installed.

In according to the coordinate measuring apparatus of EP-A-0 504 609, except measuring head, also use the chain link milling head.

According to US-A-5,038,378 X ray checking device is stipulated following possibility, promptly independently of one another along three axial adjustment X-ray detectors.

The present invention based on task be, so improve be used to utilize as at least one X ray sensing device of first sensing device and for example second sensing device of sense of touch and/or optical sensing devices form come the method and the coordinate measuring apparatus of measuring object, make can the bigger extension of no problem ground measurement measuring object.Compared with prior art should reach higher measurement degree of certainty in addition.In addition should be with simple mode calibration X ray sensing device (computerised tomograph) on how much.This equipment is answered compact conformation, wherein should guarantee the abundant shielding to X-radiation simultaneously.Should realize high density measurement and high measuring speed by simple measure.Should improve resolution and reduction in addition and believe/make an uproar ratio.Should implement only produce the measurement of the object of small contrast with regard to X-radiation by enough accuracy.

In order to solve one aspect of the present invention, advise a kind of coordinate measuring apparatus that is used for measuring object, it has as the X ray sensing device of first sensing device and as second sensing device of sense of touch and/or optical sensor and so on, described first sensing device comprises x-ray source and at least one detects the X ray sensor of X ray, described second sensing device can be positioned with respect to object on x, the y of coordinate measuring apparatus and/or z direction, this measuring instrument is characterised in that, can locate the X ray sensing device according to second sensing device in coordinate measuring apparatus.In other words, the X ray sensing device and second sensing device are arranged in the coordinate measuring apparatus of equal valuely, wherein identical in principle assembly or hardware and software can be used to locate the X ray sensing device and analyze its measurement data, and these assemblies or hardware and software also are used for other sensing device in principle.Second sensing device itself can also comprise more than a sensor.

Therefore, stipulate in addition that X ray sensing device (computerised tomograph) is not to be installed on the coordinate measuring apparatus regularly, but is integrated in the coordinate measuring apparatus fully as sensing device according to the present invention.The transmitter and receiver of computerised tomograph so is disposed in the coordinate measuring apparatus for this reason, is realized under the situation of transillumination and Flame Image Process sensor usually as this.X ray receiver and Flame Image Process sensor or mechanical detector can be movably disposed within on the public mechanical axis.Also can use independent axle for each sensor equally.Relatively arrange the corresponding radiation source that is used for light and X-radiation with corresponding sensor.

Can detect a plurality of fragments of described measuring object continuously by known tomography (part is rotated and takes a plurality of fluoroscopy images) by structure according to the present invention.Next can realize 3D for the fluoroscopy images of all combinations makes up.Therefore can measure the bigger measuring object that limits than by the visual field of tomograph.

According to the present invention, under the situation of the coordinate system that comprises coordinate measuring apparatus or measuring instrument, arrange a plurality of x-ray tomography images mutually.

Can utilize the sensor (for example with sense of touch-optical sensor) of multisensor coordinate measuring apparatus to measure the measurement features of wanting of described measuring object more accurately in addition in a conventional manner.X ray sensor is measured in public coordinate system as common in the multisensor coordinate measuring apparatus with touch sensor with the Flame Image Process sensor, makes measurement result can directly set up contact mutually.

In the structure that provides, can directly on measuring object itself, calibrate now and utilize of the measurement of X ray sensing device according to the Laminographic principle.The gauge point of measuring described measuring object with known degree of accuracy with the sense of touch or the optical sensor of coordinate measuring apparatus thus.When the calculating of the 3D of anacom tomograph reconstruct, consider described point, so that this restructuring procedure of geometric calibration.

In order to guarantee the abundant shielding to X-radiation in compact structure, the present invention stipulates in addition, and shielding maybe at least one zone of this shielding is constructed to the functional part of the desired measuring technique structure of coordinate measuring apparatus.Here for example can relate to the container (Aufnahme) of mechanical axis or this axle itself, base plate, support etc., and not limit the present invention thus.In other words, the required shielding of pre-radiation proof is completely or partially born by the functional part of the measuring technique structure of coordinate measuring apparatus.

Have this possibility especially, promptly the base plate of the shell of coordinate measuring apparatus and at least the size of rear wall so be determined or by a kind of made, make to reach desired shielding simultaneously.Also can correspondingly construct base plate or sidewall.Special provision for this reason is made of admant (as grouan) for the shielding important components.Also can use other material, particularly artificial stone, described other material can mix the material of corresponding absorbed radiation in case of necessity.

Stipulate that in ben improvement of the present invention the parts (as wall) of the shielding of coordinate measuring apparatus or formation shielding are the installation sites of the function element of coordinate measuring apparatus.Therefore the shield member function element that also can be used to install coordinate measuring apparatus (particularly employed computerised tomograph) simultaneously, wherein function element can be mechanical axis or shifting axle (Verfahrachsen) and/or sensor and/or radiation source or light source.

In order to ensure abundant shielding, needed than seeing from measuring technique or static angular, can be identified for the size of the parts that shield biglyyer.

According to a creative especially suggestion regulation, distribute a plurality of sensors to x-ray source, its angle of radiation of passing object differs from one another, wherein particularly distribute n sensor applying X ray simultaneously in order to measure described object to x-ray source, this x-ray radiation source can be adjusted basic angle [alpha] and sensor in succession respectively to arrange with the mode of adjacent sensors anglec of rotation α/n with respect to object between measurement in succession.

Device according to the present invention comprises n detecting device that is used for X-radiation, so arrange these detecting devices, make and utilize each detecting device or sensor to take fluoroscopy images with different angle of transmission respectively, need thus to reduce in order to produce the required angle position of tomogram.

According to the present invention, with the differential seat angle X ray sensor of harmonizing each other, following this differential seat angle that draws.Use basic angle, its as radiation source and on the one hand the integral multiple of the applied angular interval between sensor and the object that will measure on the other hand draw, wherein particularly described object is on the universal stage, and this universal stage can rotate with respect to the X ray sensing device.The angle of second sensor is enhanced avalue 1/ (number of sensor), and the angle of the 3rd sensor is enhanced avalue 2/ (number of sensor).Therefore n sensor is enhanced one (n-1)/(number of sensor).Therefore draw this possibility, promptly analyze u multiple purpose angle position under the situation of once rotation, wherein u=is by the product of n (number of=sensor) with m (=object is with respect to the location number of X ray sensing device).

According to the present invention,, wherein can shorten the transmission time in corresponding position, angle each other with the integral multiple adjustment X ray sensor of the angular interval of universal stage.Even now receives many times X ray by many times sensors, reduces signal to noise ratio (S/N ratio) thus.

In a creative especially improvement, stipulate, a plurality of pixel cells of sensor are merged into a pixel and the interpolation method by computing machine respectively and reach or surpass initial resolution in volumetric image (Volumenbild) when transmission of image taking or image or graphical analysis, wherein calculate this volumetric image from the image of number of pixels with corresponding reduction.

So can be after taking the 2D image for example current 2D image be converted into and has than hanging down image Pixel Information, that resolution is lower by averaging of neighbor by means of tomography.From the lower image of this resolution, carry out 3D reconstruct then, so that from different 2D fluoroscopy images, calculate the three-dimensional voxel image.After determining this voxel image, this voxel image is calculated to be conversely the image of initial resolution by interpolation between a plurality of voxels.This in addition can be by in addition should be in a like fashion using the high-resolution of calculating additional voxel under the situation of determining algorithm and therefore reaching the voxel image.

Below design also is creative especially, i.e. continuous target rotation during measuring, wherein by means of for example machinery or the shutter of electronics or the measure (as high frequency modulated) of same purpose only repeatedly open x-ray source momently so that avoid mobile fuzzy.Even now realizes still that by this mode Measuring Time shortens.

In improvement, also stipulate, under the situation of the different spectral scope of utilizing X-radiation, can produce a plurality of tomograms from object.Therefore, determine the spectral range of X-radiation by the cathode voltage of X-radiation device.Typically (but be exemplary purely) can be for example carries out Laminographic with the cathode voltage of 50kV and 90kV and 130kV to measuring object, so as from the difference of measurement result under the situation of different cathode voltages, the light color that is to say X ray or X-radiation frequency, to infer then system measured deviation (such as artefact) size and then it is revised.

A plurality of tomograms that also can reference object, wherein can by means of the mechanical rotation revolving shaft or by using a plurality of detecting devices to change angle between the turning axle of the universal stage that holds object and x-ray source and the sensor that distributed with different angles, wherein said sensor particularly extends along the straight line of the axle that is parallel to universal stage.

Can take a plurality of photos for the resolution that improves tomogram, between these photos, make sensor or object move a interval less than the edge length of sensor sensor.

The present invention stipulates that the X ray that extends parallel to each other penetrates described object in addition.Make X-radiation parallel by means of suitable equipment for this reason.

In addition or can instead have this possibility, promptly take scope greater than sensor surface by means of the translation relative motion between the object that will measure and x-ray source/sensor.

To taking at the workpiece that only shows small contrast aspect the X-radiation, the present invention's regulation centers on described object by following material for also, and this material itself has higher absorption than described object.Therefore under the situation of the measuring object that for example lower material (for example lithium) forms by atomic mass number, improve contrast in the following manner, promptly with heavier material cast measuring object with the determined 2D fluoroscopy images of tomography.Therefore obtain the image of enough contrasts from the egative film form (Negativform) of measuring object, described image can be represented measuring object again.

To optimize in order realizing measuring, can to measure with different sensors.Stipulate for this reason, except x-ray source with distribute to the sensor of described x-ray source and in this device, be provided with the other sensor that is used for measuring technique mode detected object, such as mechanical detector, laser detector, Flame Image Process sensor, these sensors are arranged in independently on the shifting axle in case of necessity.

On shifting axle, also can arrange to be used to take tomogram turning axle required, that be used to rotate described object, on the direction of turning axle, expand measurement range thus.In other words, can on the direction of turning axle, adjust described object.

The X ray sensing device, a creative especially suggestion regulation that is used for calibrating coordinate measuring apparatus, measure the gauge point of wanting measuring object and therefrom determine geometric properties (as diameter or interval) with sense of touch and/or optical sensing devices, wherein said geometric properties is utilizing the X ray sensing device to be considered for calibrating the X ray sensing device after having determined identical geometric properties.

Therefore measurement result (as the fringe region of measurement volumes) determined by sense of touch and/or optical sensing devices, gauge point can be considered for proofreading and correct the measurement cloud point (Punktwolke) that the passing threshold method is produced from the 3D voxel data.

Obtain the 3D cloud point according to the employed threshold operation of tomography, described 3D cloud point can be represented with ASCI form or STL form.Between with sense of touch or the determined measurement point of optical mode, so revise cloud point, make that the deviation between sense of touch and/or optical measurement and Laminographic measurement becomes minimum value.In this case, between sense of touch and/or optical measurement point, carry out interpolation and be used for determining deviation.

By means of 3D reconstruction calculations voxel the time, with sense of touch or optics is counter measures the position that (Gegenmessung) determined corrected value changes voxel, described position is in by the material boundary of the object of Laminographic (edge of measurement volumes).Next revise the voxel location that between the strong point, exists by the interpolation between the correction position of having measured.Produce irregular voxel grid thus in three dimensions, wherein voxel location and initial body sketch map look like to compare better the object geometry corresponding to reality.Then advantageously with the grid of rule to this voxel image resampling.This realizes in the following manner, promptly pre-determines the specified grid of voxel image and calculates new voxel amplitude according to the voxel amplitude around being positioned at by interpolation method for each point of specified grid.

In order to reach high measurement reliability and can be with simple mode geometric calibration X ray sensing device (computerised tomograph), the present invention's suggestion, after once measuring at the enlargement factor of determining and measurement range, the position of x-ray source and X-ray detector is stored with affiliated calibration data and can be extracted arbitrarily under the situation of not carrying out other recalibration by the software control mode then and be used for ensuing measurement.

In other words, the regulation according to the present invention detects and stores for necessary all setup parameters of tomography (the out-of-alignment position of Laminographic or coordinate measuring apparatus belongs to this) with definite enlargement factor or definite measurement range in the measuring technique mode in the once mensuration process of coordinate measuring apparatus and distributes to the times magnification numerical value of described position and calibration data (comprising that position measurements that the displacement measurement system that is used for being distributed with respect to passing through provides comes the corrected value of locating shaft) in addition.Normal in service at coordinate measuring apparatus then by operator's pressing button or by extracting the value that these have been stored from the CNC routine call, the calibration data of machine under corresponding position is moved and used in measuring process subsequently.

Special provision, the process of measurement by coordinate measuring apparatus are automatically called enlargement factor and the measured zone measured in advance and are set, and the corresponding nextport hardware component NextPort of this equipment is positioned.

There is this possibility in addition, i.e. synchronously mobile x-ray source and X-ray detector, so that only change enlargement factor and/or measurement range, perhaps mobile x-ray source and X-ray detector independently of one another are so that change enlargement factor and/or measurement range.

Also have this possibility, promptly measuring and store all in advance no longer needs the mensuration process for the necessary setting of X-ray measurement (tomography) and in corresponding X-ray measurement process (as in the Laminographic process).

By mensuration process and/or the skew of corresponding correction rotation center, can realize the rotation center adjustment with software.

A kind of improvement regulation is determined the enlargement factor of tomography and/or about the rotation center position of x-ray source and X-ray detector, this master body comprises at least two spheroids by means of master body.Stipulate that especially this master body comprises four spheroids.

Especially, be used for determining that at coordinate measuring apparatus the method for rotation center position is characterised in that following method step:

-comprise four spheroid master bodies of four spheroids of on the angle of rectangle (such as square), being arranged in location on the turning axle, the wherein known or each interval of calibrated sphere,

-so rotate four ball master bodies, make the plane parallel that is strutted in detecting device,

-measurement four ball positions in the measured zone of detecting device,

Calculate average enlargement factor M1 the specified pixel size of-spheroids distance of having measured from four, specified spheroid distance and detecting device,

-make turning axle Rotate 180 °,

Four the spheroid positions of-measurement in image,

Calculate average enlargement factor M2 the specified pixel size of-spheroids distance of having measured from four, specified spheroid distance and detecting device.

The Y position of calculating the rotation mid point according to following formula according to four spheroid positions before rotation and afterwards: Pdyn=(Pkyn1*M2+Pkyn2*M1)/(M1+M2), Pdyn wherein: the Y position of turning axle on detecting device for spheroid n, Pky1: in the anglec of rotation is the Y position of 0 ° situation lower sphere n, Pkyn2: in the anglec of rotation is the Y position of 180 ° situation lower sphere n, M1: in the anglec of rotation average enlargement factor under 0 ° the situation, M2: be average enlargement factor under 180 ° the situation in the anglec of rotation.

Also there is this possibility, promptly measure described object with coordinate measuring apparatus, this coordinate measuring apparatus also has other sensor except X ray sensing device (computerised tomograph), make and to implement to measure by means of sense of touch and/or optical sensing devices, wherein should mention sense of touch-optical measurement especially.Therefore there is this possibility, promptly by proofread and correct with sense of touch or measurement point that optical mode is obtained described measuring object with the measured measurement cloud point of X ray sensing device or tomography or proofread and correct the surface elemant of the triangulation of therefrom being calculated, wherein between the check point measured, can carry out interpolation with sense of touch and/or optical mode.

Also can consider between with sense of touch and/or check point that optical sensing devices obtained to carry out interpolation and/or carry out interpolation under the situation of function curve of the cloud point that obtained by X-ray measurement (as tomography) by consideration nominal cad model.

Another advises regulation, at first by means of X ray (Laminographic) with the standard of sense of touch and/or optical mode sampled measurements object type part (Musterteil), from the difference of two kinds of measurements, calculate the corrective network that is used to proofread and correct by the measured value of Laminographic, and when measuring series part (Serienteil), utilize once determined corrected value to revise the chromatography X-ray photogrammetry.

Associated mode should so be understood, promptly in first measuring process by means of X ray with tomography with measure a plurality of measurement points of the typical case representative of described measuring object with sense of touch or optical mode.In this case, in sense of touch and/or optical measurement, also use very many measurement point work, so that reach enough close corrective network.Therefrom determine corresponding correction value then, wherein from the comparison of sense of touch and/or optical measurement value and Laminographic measured value, draw this corrected value for each surface location of the object of wanting Laminographic.After a while to the Laminographic of other part the time, directly utilize described corrected value.Do not need sense of touch once more or optics is counter measures.

Therefore stipulate, the calibrated section of measuring object is carried out Laminographic and calculate the corrective network that is used to proofread and correct the measured value that chromatographical X-ray takes the photograph from the measured deviation when measuring, and the measurement that when measuring serial part, utilizes the corrected value harmonized in advance to harmonize Laminographic.

When series is partly measured, additionally can consider with optics and/or each measured check point of tactile manner.

In order to proofread and correct, can to determine sense of touch and/or optical measurement point by the determined cloud point of tomography place by operator's figure ground, and measure automatically by coordinate measuring apparatus then.

A kind of improvement regulation in order to proofread and correct, to be determined sense of touch and/or optical measurement point by operator's figure ground, and is measured automatically by coordinate measuring apparatus then on based on the cad model of wanting measure portion.At this, can almost evenly or evenly distributedly automatically measure sense of touch on based on the surface of the cad model of wanting measure portion and/or the optical measurement point is used for proofreading and correct by automatic algorithm by coordinate measuring apparatus.Also can determine that on cad model sense of touch and/or optical measurement point are used for proofreading and correct, and after loading cad model, measure automatically by coordinate measuring apparatus by operator's figure ground.

The present invention indicates in addition, in the Laminographic process, also calibration body, particularly ball device are carried out Laminographic together in principle, and determine that therefrom rotating shaft is with respect to coordinate measuring apparatus and/or with respect to x-ray source and/or with respect to the relative position of X ray sensor and next carry out the mathematics calibration.Can determine position and the consideration position that be used to proofread and correct turning axle of calibration body on turning axle with optics and/or touch sensor at this.

But, special provision, calibration body (as at least two calibrated sphere) is hidden support, be that is to say that in the universal stage of wanting measuring object of following material, this material has the absorption lower to X ray.Therefore can the measuring object on the universal stage be positioned by detecting calibration body, because can determine point of rotation position, the turning axle of universal stage just by means of calibration body.

According to the present invention, can determine the locus of rotation axis in the measuring technique mode with the X ray sensing device and/or with touch sensing device and/or with optical sensing devices, and to the Laminographic of measuring object the time, on mathematics, revise this position deviation with respect to x-ray source and X-ray detector.

Particularly the turning axle position with the nominal position phase deviation is proofreaied and correct in rotation by the 2D single image and/or translation and/or distortion.

Can consider turning axle position in this external restructing algorithm with the nominal position phase deviation.

Another suggestion regulation of the present invention, by use sense of touch and/or optical sensor and/or tomography determine on the universal stage of measuring instrument and the therefore position of the measuring object in lathe coordinate system, and next utilize image processing method to measure described measuring object in the position of being measured of X ray sensor by measurer with the 2D transmission mode.

By this measure explanation another use principle, in this coordinate measuring apparatus, be integrated with the X ray sensing device according to coordinate measuring apparatus of the present invention.So produced this possibility, promptly in the 2D fluoroscopy images, measured.Usually this is impossible, because be unknown in the current enlargement factor of measuring object; Because do not know the position of measuring object in the X ray light path, yet obviously determine enlargement factor according to this position of ray theorem.If determine the position of measuring object in coordinate measuring apparatus exactly with optics and/or touch sensing device now, then known current from this position by the enlargement factor of the measuring object of transmission, and can use X ray sensor to be used to utilize image processing method to carry out two-dimensional measurement.

Can control X-ray detector automatically by device software, make in the radiation cone that during real Laminographic process, detecting device is navigated to x-ray source and outside during this period of time, make detecting device be in the stop place in the radiation cone outside.

Make the irradiation load minimum of X ray sensor and therefore prolong its life-span by this measure.

Stipulate that especially creatively the Flame Image Process sensing device of multisensor coordinate measuring apparatus is equipped with identical Flame Image Process hardware and identical image processing software or wherein a part of with the X ray sensing device.At this, image processing method known from the Flame Image Process sensing device can be applied to the X ray sensing device equally.

The present invention's regulation was out of shape correction and/or bright signal correction and/or dark signal correction and/or mathematics translation and/or mathematics rotation and/or resampling method and/or linear feature curvature correction and/or image processing filter to the 2D-X ray image before reconstruct in addition.

Not only from independent claims but also from dependent claims, learn advantageous embodiment of the present invention.

The feature that obtains by claim, from this claim (itself and/or with array mode) but also not only by drawing other details of the present invention, advantage and feature in the preferred embodiment of from following description of drawings, learning.

Fig. 1 illustrates the principle schematic of multisensor coordinate measuring apparatus,

Fig. 2 illustrates the principle of work and power of 3D computerised tomograph,

Fig. 3 illustrates another principle schematic of coordinate measuring apparatus,

Fig. 4 illustrates first principle schematic of arranging of x-ray source and the sensor that is distributed,

Fig. 5 illustrates second principle schematic of arranging of x-ray source and the sensor that is distributed,

Fig. 6 illustrates the principle schematic of graphical analysis,

Fig. 7 illustrates the principle schematic of the method for setting forth the resolution be used to improve tomogram,

Fig. 8 illustrates the principle schematic of calibration body,

Fig. 9 illustrates the principle schematic of the universal stage with calibration body,

Figure 10 illustrates block scheme, and

Figure 11 illustrates the principle schematic that is used to set forth bearing calibration.

In Fig. 1, on principle, show the coordinate measuring apparatus that is used in combination X ray sensing device and optics and touch sensing device, the present invention simultaneously is taught in the essential characteristic aspect and also is applicable to such coordinate measuring apparatus, and described coordinate measuring apparatus does not comprise additional sensing device except computerised tomograph.

On theaxle 18 of the X-axis that is parallel to coordinate measuring apparatus, be furnished with universal stage 2.Measuringobject 3 is positioned on this universal stage and therefore can is rotated and is moved (double-head arrow) byaxle 18 on directions X around turning axle 18.On theslide block 4 that is parallel to Y-axis, arrange twoaxles 5,6 that are parallel to the Z axle.Thesensor 7 and the FlameImage Process sensor 8 that onmechanical axis 5, exist X-radiation to use.Onmechanical axis 6, additionally there is touch sensor 9.Be furnished withx-ray source 10 on the opposite ofX ray sensor 7, this x-ray source optionally moves the arrangement that maybe can be fixed on the Y direction.There is transmittedlight source 11 on the opposite of Flame Image Process sensor 8.So design is along X, the Y of coordinate measuring apparatus or the mechanical axis or the slide block of Z axle, make in coordinate measuring apparatus or on the sensor installed can cover whole measured zone on theuniversal stage 2 respectively.

Create new possibility fully by integrated computer tomograph (CT) in the multisensor coordinate measuring apparatus.Make and utilize quick, the harmless perfect measurement of tomograph to combine with the high-acruracy survey of utilizing sense of touch or optical sensing devices to functional dimension.Stipulate according to the present invention at this, X ray sensing device (sensor, radiographic source) can be positioned in coordinate measuring apparatus corresponding to second sensing device (for example Flame Image Process sensor, transmission or reflection source or have the touch sensor of the Flame Image Process sensor that is distributed in case of necessity), just arranges the X ray sensing device with second sensing device of equal valuely.This X ray sensor can with described at least touch sensor and/or optical sensor arrangement on public mechanical axis, perhaps be arranged on the mechanical axis of separation, this separate machine axle is to work with the similar mode of the mechanical axis that is used for sense of touch and/or optical sensor.

Should set forth the principle of work and power of 3D computerised tomograph according to Fig. 2 again.Adopt for the identical Reference numeral of the element that can draw at this from Fig. 1.

Workpiece 3 is placed on theuniversal stage 2 and uses the X ray transmission.For example thesensor 7 with the surface detectors form is used for further processing to the 2D image that radioscopic image is transformed to numeral.Makeobject 3 360 ° of rotations and take radioscopic image at a plurality of position of rotation.Next carry out the 3D reconstruct of measurement point on the basis of 2D image, all workpiece geometries that will measure have been described in this 3D reconstruct.Can expand the usable range of computerised tomograph by integrated one or moreother sensors 8,9.Utilize the FlameImage Process sensor 8 can be with transmitted light and workpiece reflected light all automatic measurement complexity, the contrast extreme difference.The detection system of mentioning can realize the high-acruracy survey to the optical signature that can not arrive.

There is following possibility, promptly with the method for synchronization, just under the situation that keeps same distance each other, adjustsensor 7 andx-ray sources 10 with respect to object 3.The possibility that has the measurement range coupling thus, wherein this measurement range coupling can realize in case of necessity automatically.Can be instead, alsosensor 7 is adjustedobject 3 relatively, so that therefore can be matched with the workpiece size and be matched with accuracy requirement.If adjustobject 3 towardssensor 7, then draw lower enlargement factor, under the situation of adjustingobject 3 towardsx-ray source 10, can obtain high enlargement factor on the contrary.Underx-ray source 10 situation static, also can adjust sensor with respect toobject 3.

Provide following advantage especially according to instruction of the present invention:

In measuring process, detect fully workpiece strictly all rules and geometric configuration freely,

The feature of measuring internal geometry and can not arriving (for example covered edge, side recessed),

Utilize sense of touch or optical sensing devices high-acruracy survey functional dimension,

By the measurement result of many sensing device feedback Laminographics,

In the measurement process, utilize tomograph and other sensor combinations to measure,

2D and 3D to shape, size and position measure,

Be used for wide variety of functions in radioscopic image 2D measurement,

Comparing with the 3D-CAD model, 3D is specified-and actual specific represents as the 3D deviation,

From the CT data that obtained, produce the 3D-CAD data.

Set forth another according to Fig. 6 and had the method for feature of the present invention, can packed data by means of this method, and needn't stand shortcoming about resolution.According to instructing accordingly even having such possibility, promptly surpass original resolution or rather.This sets forth according to the 2D image.

The pixel of square expression 2D image in Fig. 6.For example existing 2D image is converted into the have less Pixel Information lower image of resolution of (pixel is expressed as fork) by from neighbor, averaging.Realize from the corresponding 2D fluoroscopy images of low resolution that then 3D reconstruct is used to calculate three voxel image.After determining this voxel image by in the interpolation between a plurality of voxel images the image that is calculated to be original resolution at the voxel image of from the 2D diagram that Fig. 6 drew, being simulated by fork equally conversely, make in 2D illustrates, to draw once again equally to have foursquare image.There is such possibility in addition, promptly calculates additional voxel, so that reach the high-resolution of voxel image by continuing to use identical embodiment.This represents with circle.

Can calculate fast in this way, because at first can be, and finally needn't stand the loss of resolution, even may surpass this resolution based on lower resolution.

Another the method according to this invention should be illustrated with reference to figure 7, the resolution of tomogram can be improved by this method.Take multiple pictures, sensor moves a segment distance with respect to object or object with respect to sensor between these photos for this reason, and this distance is less than the edge length of the sensitive element of sensor.Therefore the resolution of applied X-ray detector (sensor) characterizes with being marked as foursquare pixel in Fig. 7.In tomography, at each position of rotation not only at being marked as of X-ray detector foursquare position photographic images but also in the position of the circle of representing with X of X-ray detector but also in the position of the circle of representing with Y of X-ray detector but also at the position photographic images of the circle of representing with Z of X-ray detector.All images is become an image by amalgamation and considers as a whole in the tomography restructuring procedure.Therefore reach and compare the resolution that reaches higher with what physics mode drew by detecting device.

Rotation center foruniversal stage 2 among the enlargement factor of determining tomographies aboutx-ray source 10 orsensor 7 and/or Fig. 1 can use a master body, and it is represented with 50 in the embodiment of Fig. 8.The bearing 54 that is made of following material in this principle schematic is a starting point with feet 52, and this material has low absorption to X ray.In support 54, arrange the spheroid 56,58 that at least two materials by the strong absorption X ray (such as steel) constitute.This master body 50 is disposed on the universal stage 60 of tomograph then, and this universal stage is corresponding to theuniversal stage 2 of Fig. 1.Universal stage 60 can be around axle 62 rotations, and this can overlap with the X-axis of coordinate measuring apparatus.Now, be identified in the inner mensuration process of determining the position of tomograph universal stage 62 of coordinate measuring apparatus by different rotary position measurement spheroid 56,58 positions with respect toX ray sensor 7 at spheroid master body 50.

If determine enlargement factor, then need measure to two ofsensor 7 different distances.

In order to reach higher precision, master body 50 can have two other spheroids 64,66.

Should describe below, how determine distance betweenx-ray source 10 andsensor 7 by means of a master body, this master body is made up of four spheroid master bodies in this embodiment, and described four spheroid master bodies comprise four spheroids that are arranged on the square corner.

The interval of known spheroid (calibrating),

Four spheroid master bodies are disposed on the turning axle,

So screw in four spheroid master bodies, make the plane parallel that struts in detecting device,

In image, measure four spheroid positions at position Z1 place,

From four spheroid distances of having measured, calculate average enlargement factor M1,

The specified spheroid distance and the specified pixel size of detecting device,

Turning axle moves on the direction of source source and the detecting device of axle (or perpendicular to),

In image, measure four spheroid positions at position Z2 place,

From four spheroid distances of having measured, calculate average enlargement factor M2,

The specified spheroid distance and the specified pixel size of detecting device,

Calculate the interval of source detecting device according to following equation:

AQD＝dZ*M1*M2/(M2-M2)

Wherein:

AQD: the interval of source detecting device

M1: enlargement factor at position Z1 place

M2: enlargement factor at position Z2 place

DZ: the distance between position Z1 and Z2

The calculating source is to the distance of Z1 from following equation:

D1＝dZ*M2/(M1-M2)

The calculating source is to the distance of Z2 from following equation:

D2＝D1+dZ＝dZ*M1/(M1+M2)

Calculate the position of cone axis (Kegelachse) on detecting device according to following equation:

Pd＝(Pkn1*D1-Pkn2*D2)/dZ

Wherein:

Pd: the bias vector of cone axis position and detector centre

Pkn1: at the position vector of the spheroid n of position Z1 place on detecting device

Pkn2: at the position vector of the spheroid n of position Z2 place on detecting device

From four bias vectors, calculate average bias vector for each spheroid position,

Following realization is used for determining based on four spheroid master bodies with spheroid of being arranged equally the method for the Y position of turning axle mid point on the angle of positive dirction:

The interval of known spheroid (calibrating),

Four spheroid master bodies are disposed on the turning axle,

So screw in four spheroid master bodies, make the plane parallel that struts in detecting device,

In image, measure four spheroid positions,

From four spheroid distances of having measured, calculate average enlargement factor M1,

The specified spheroid distance and the specified pixel size of detecting device,

Make turning axle Rotate 180 °,

In image, measure four spheroid positions,

From four spheroid distances of having measured, calculate average enlargement factor M2,

The specified spheroid distance and the specified pixel size of detecting device,

Y positions according to following equation basis four spheroid position calculation rotation mid points before or after rotation:

Pdyn＝(Pkyn1*M2+Pkyn2*M1)/(M1*M2)

Wherein:

Pdyn: the Y position of turning axle on detecting device for spheroid n,

Pkyn1: in rotation angle is the Y position of 0 ° situation lower sphere n

Pkyn2: in rotation angle is the Y position of 180 ° situation lower sphere n

M1: be average enlargement factor under 0 ° the situation in rotation angle

M1: be average enlargement factor under 180 ° the situation in rotation angle.

From Fig. 3 to Fig. 5, can draw the creative especially in addition feature of instruction according to the present invention.At this, in Fig. 3, on principle, show coordinate measuringapparatus 110 merely equally withshell 112, thisshell 112 comprisesbase plate 114,rear wall 116, sidewall 118,120 androof 122, and roof is also referred to as cover plate.

Use X-axis, Y-axis and the Z axle of Reference numeral 124,126 and 128 denotation coordination measuring instruments in the drawings.Guide piece extends on directions X on theinboard 130 of therear wall 116 ofshell 112, and along described guide piece, just can adjust the support 132 ofuniversal stage 134 on directions X 124, theobject 136 that measure is disposed on this universal stage.In other words,universal stage 134 is disposed on the X-axis 124.

Guide piece extends along Y-axis 126, and bearing 138 can move along thisguide piece.Support 140 can move alongZ axle 128 from these bearing 138s.

In addition,x-ray source 142 is a starting point withbase plate 114, and the object of being arranged 136 is crossed in the X-radiation transmission of described x-ray source on universal stage 134.X-radiation is detected by corresponding suitable sensor (as ccd sensor) in its side, and described sensor is sensitive to X-radiation.

In addition,sensor 144 is starting point, that is to say to be starting point withsupport 140 in this embodiment with Z axle 128.May relate to coordinate measuring apparatus sensor commonly used at this, just for example sense of touch or optical sensor.Therefore not only can be by Laminographic mode but also can be by sense of touch or optical mode, as measuring with Flame Image Process sensor, laser range sensor etc.

Owing to use X ray, require coordinate measuringapparatus 110 conductively-closed in external enough scopes.For this reason, the regulation according to the present invention, several at least support component performance shielding actions.Therefore, forexample base plate 114 and/orrear wall 116 so are determined size or are configured, and make to guarantee desired shielding action.

At this, corresponding wall 114,116 is brought into play simultaneously for the necessary effect of measuring technique structure, just in this embodiment at the guiding of X-axis and Y-axis.

Additional have a this possibility, the supporting walls that does not promptly have enough shielding actions is equipped with thelayer 146 that suppresses radiation in inner surface side and/or outside surface side.Here particularly relate to stereotype.

About supporting walls, particularly bring into play the wall of shielding action, preferably should use admant, (such as grouan) or corresponding material.Also can consider artificial admant (such as polymerization concrete), it can mix the material that absorbs X ray in claimed range, such as magnetic iron ore or similar material.

According to the present invention, theshell 112 of coordinate measuringapparatus 110 or the part of shell play a dual role, the function of the functional part of the function of desired shielding just and measuring technique structure.Therefore draw the structure of a compactness.

In order to realize higher density measurement or only must to tolerate a spot of radiated time in corresponding measuring position, under the situation of not damaging measuring accuracy, according to the diagram of Fig. 4 regulation, (also promptly in each measuring position of object 136) is with different many tomograms of transmission angle shot simultaneously.Therefore, according to the embodiment according to Fig. 3,universal stage 134 is a starting point withbase plate 114, is furnished with the unshowned object that will measure on thisuniversal stage 134, wherein by this object ofX-radiation 150 transmissions fromx-ray radiation source 148 in Fig. 4.In this embodiment, detect this radiation, make the tomogram that in the measuring position of object, produces three different transmission direction by three X ray sensors 152,154,156 altogether.In each measuring position, each angle position read sensor 152,154,156 of universal stage 34 just, and obtain the projected image of tomogram.At this, so design the angle position of sensor 152,154,156, make angle between sensor 152,154,156 differ the integral multiple in the angular separation of in service applied, theuniversal stage 136 of X ray video camera respectively, wherein the second and the 3rd sensor 154,156 is to be arranged with respect to thefirst sensor 152 of front or the mode of second sensor, 154 rotations, 1/3rd angular separation.

In order to take many X-ray photographs wanting measuringobject 136, wherein be changed from the surface at the turningaxle 158 ofuniversal stage 154 and the angle between theX-radiation 150, in the embodiment of Fig. 5, exemplarily become the mode of different angles to arrange three sensors 160,162,164, simulate on the surface the deviation of x-ray radiation source thus to turningaxle 158 with main radiation direction withx-ray radiation source 148.

The double-head arrow of drawing in Fig. 5 166 should symbolically, can adjustuniversal stages 134 along the turningaxle 158 that is parallel to X-axis.

As indicated on principle according to Fig. 9, in tomography, in principle the calibration body of spheroid 300,302 forms is preferably carried out Laminographic together, draw the relative position of the turningaxle 158 ofuniversal stage 134 thus, on this universal stage, be furnished with theobject 136 that to measure.Spheroid 300,302 can be disposed in the fixture 304, and this fixture shows the absorption low to X ray, and spheroid the 300, the 302nd, and is strong that absorb and for example be made of steel.Therefore can no problem ground during Laminographic determine that turningaxle 158 is with respect to the position of coordinate measuring apparatus orx-ray source 10 orsensor 7 and next carry out the mathematics correction.

According to the present invention, in coordinate measuring apparatus, take measurement point on measuring object, and consider to utilize the determined measurement point of X ray sensing device in order to proofread and correct by means of sense of touch and/or optical sensing devices.This also should illustrate according to Figure 11.From this figure, can draw the principle of corresponding bearing calibration.Therefore, at measuring object 400 shown in Figure 11 a, wherein on selected point, measure this measuring object 400 with sense of touch and/or optical mode.Corresponding measurement point is for example represented with reference number 402,404,406.In the Laminographic that next in same coordinate measuring apparatus, carries out, in by the cloud point 408 of Laminographic, obtain because the shape that typical error changed of tomography.This for example may be the typical artefact of Laminographic.On the operational basis that utilizes the measurement point (it is drawn again) that optics and/or touch sensing device accurately measure in Figure 11 b, proofread and correct the position that tegillum is analysed the measurement point of X ray photography.At this, between the measurement point measured, carry out interpolation with sense of touch and optical mode.As a result of obtain then geometric calibration, with the measured cloud point 410 of Laminographic mode, its than the raw data of X-ray photographs better corresponding to the shape of measuring object 400.This illustrates the comparison of Figure 11 b and 11c.

Implement to measure and analysis to measure as a result the time, be used in Flame Image Process sensing device that in the transmitted light method (in case of necessity also in the reflected light method) measure with visible light and be coupled with identical image processing and analyzing unit of X ray sensing device or identical image processing board.Can between two sensors, switch and carry out digitizing with identical hardware and also calculate by the software control mode then.This illustrates by Figure 10 on principle, and Flame ImageProcess sensing device 500 and Xray sensing device 502 are connected with identicalimage processing board 504 in the figure, so that can work by previously described mode.

Claims (105)

1. the coordinate measuring apparatus (110) that is used for measuring object (3,136), described coordinate measuring apparatus (110) have as the X ray sensing device of first sensing device and as sense of touch and/or optical sensor (8,11; 9) second sensing device, described first sensing device comprise that x-ray source (10) and at least one detect the X ray sensor (7) of X ray, and described second sensing device can be positioned with respect to described object on x, the y of coordinate measuring apparatus and/or z direction,

It is characterized in that,

Can be in coordinate measuring apparatus (10) according to second sensing device (8,11; 9) X ray sensing device (7,10) is positioned.

2. according to the coordinate measuring apparatus of claim 1, it is characterized in that, with second sensing device (8,11; 9) arrange X ray sensing device (7,10) of equal valuely.

3. according to the coordinate measuring apparatus of claim 1 or 2, it is characterized in that X ray sensing device (7,10) is with touch sensing device and/or optical sensing devices (8,11) are disposed on the public mechanical axis (5,6) at least.

4. the coordinate measuring apparatus that requires according at least one aforesaid right is characterized in that, X ray sensing device (7,10) is disposed in independently on the mechanical axis, and this mechanical axis is to be similar to sense of touch and/or optical sensing devices (8,11; The mode of mechanical axis 9) (5,6) is worked.

5. the coordinate measuring apparatus that requires according at least one aforesaid right is characterized in that, not only X ray sensing device (7,10) but also second sensing device (8,11; 9) the public-measurement volume of covering object (3,136).

6. the coordinate measuring apparatus that requires according at least one aforesaid right, it is characterized in that coordinate measuring apparatus (110) is equipped with at least with X ray sensing device (7,10) and/or as the optical sensing devices (8,11) of Flame Image Process sensing device and/or the vertical turning axle (18 of operative orientation (y and/or z direction of principal axis) of touch sensing device (9); The x direction of principal axis).

7. according to the coordinate measuring apparatus of claim 6 at least, it is characterized in that turning axle (18,158) is around a vertically extending axle (x axle) rotation.

8. the coordinate measuring apparatus that requires according at least one aforesaid right is characterized in that, the beam axis of the optical axis of optical sensor (9) and/or X ray sensor (8) be level and/or perpendicular to turning axle (18,138; The x axle).

9. the coordinate measuring apparatus that requires according at least one aforesaid right is characterized in that, the radiation source of X ray sensing device and/or Flame Image Process sensing device or light source (10,11) can with the same moved further of the sensor that is distributed (7,8).

10. the coordinate measuring apparatus that requires according at least one aforesaid right is characterized in that the radiation source of X ray sensing device (10) fixed and arranged in the coordinate system of coordinate measuring apparatus (110).

11., it is characterized in that, not only X ray sensing device (7,10) but also second sensing device (8,10 according to the coordinate measuring apparatus of claim 1 at least; 9) to be arranged in respect to the adjustable mode of object (3,136) at least one axle.

12. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that, not only X ray sensing device (7,10) but also second sensing device (8,10; 9) to be arranged at least two axles with respect to the adjustable mode of object (3,136).

13. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that, not only X ray sensing device (7,10) but also second sensing device (8,10; 9) to be arranged at least three axles with respect to the adjustable mode of object (3,136).

14. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that at least one other sensor (8) is arranged in common adjustable mode with X ray sensing device (7,10).

15. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, by being adjusted at the interval between X ray sensor (7) and the radiation source (10) and/or preferably carrying out measurement range coupling automatically by relatively adjust X ray sensor (7,10) for object (3).

16. according to preferred claim 1, have a shielding (114 to X-radiation, 116) coordinate measuring apparatus, it is characterized in that at least one zone of shielding (114,116,118) or described shielding is constructed to the functional part of the desired measuring technique structure of coordinate measuring apparatus (110).

17., it is characterized in that the base plate (114) of coordinate measuring apparatus (110) and/or at least one sidewall or rear wall (116,118) are constructed to shielding according to the coordinate measuring apparatus of claim 16 at least.

18. according to the coordinate measuring apparatus of claim 16 at least, it is characterized in that, for the desired parts of shielding (114,116) by as the stone of grouan construct.

19. according to the coordinate measuring apparatus of claim 16 at least, it is characterized in that, shield or form this shielding parts, as base plate (114) or rear wall or sidewall (116,118) be the installation site of one or more function element, such as the installation site of the mechanical axis of coordinate measuring apparatus (110).

20. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that shielding (114,116) is as at least one mechanical axis of function element or shifting axle and/or as the stationary installation of the element of sensor (114) and so on and/or stationary installation and/or the installation of guiding device position or the installation region of guide piece and/or radiation source or light source (142).

21. the coordinate measuring apparatus according to one of preferred aforesaid right requirement is characterized in that, distributes a plurality of sensors (152,154,156) for x-ray source (142,148), the angle of transmission that sees through object of wherein said sensor has deviation each other.

22. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, in order to measure described object, distribute n the sensor (152,154,156) that applies X-radiation simultaneously for x-ray source (148), x-ray source can be with respect to the basic angle [alpha] of described object adjustment between measurement in succession, and sensor in succession rotates an angle [alpha]/n respectively each other or aims in the inclination mode.

23. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, this device has the sensor (152,154,156,160,162,164) of a plurality of detection X-radiations (150), so arrange described sensor (152,154,156,160,162,164), make and to utilize each sensor respectively with the fluoroscopy images of different irradiating angle reference objects (136).

24. the coordinate measuring apparatus according to preferred at least one aforesaid right requires is characterized in that, can determine the tomogram of object (136) under the situation of the different spectral scope of utilizing X-radiation (150).

25. coordinate measuring apparatus according to preferred at least one aforesaid right requirement, it is characterized in that, when image taking or image transmission and graphical analysis, a plurality of pixel cells of sensor can be merged into a pixel respectively, and the interpolation method by computing machine meets or exceeds the original resolution in volumetric image, wherein calculates this volumetric image from the image of number of pixels with corresponding reduction.

26. the coordinate measuring apparatus according to preferred at least one aforesaid right requires is characterized in that, target rotation (136) and can apply X ray intermittently continuously during measuring.

27. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that, distributes shutter machinery and/or electronics for the exit wound of bullet of x-ray source (148).

28. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that, can high frequency modulated X-radiation (150).

29. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, the straight line that a plurality of sensors (160,162,164) extend along the turning axle that is parallel to object (36) (58), described sensor (160,162,164) become with ejaculation axle with x-ray source (48) deviation each other angle be arranged.

30. coordinate measuring apparatus according to preferred at least one aforesaid right requirement, it is characterized in that, compare the object with low contrast with X-radiation (150) and centered on or encirclement by a kind of material, the X ray absorptivity of described material is greater than the X ray absorptivity of described object.

31. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, this device also is furnished with the other sensor that is used for measuring technique mode detected object (136) except one or more sensor (152,154,156,160,162,164) that detects X-radiation (150), as mechanical detector, laser detector, Flame Image Process sensor.

32. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that, some transducer arrangements in the described sensor are on independently shifting axle or mechanical axis.

33. the coordinate measuring apparatus according at least one aforesaid right requires is characterized in that, the turning axle (18) of described object (3) is arranged in and is used on the shifting axle (1) along turning axle expansion measurement range.

34. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, described object (136) is arranged on turning axle (158) rotatable rotary platform (134), in this universal stage or directly with in the element that this universal stage is connected be furnished with preferably calibration body with at least two calibrated sphere (300,302) form, described calibration body is arranged in such material, and described material and calibration body compare X-radiation and have littler absorption.

35. coordinate measuring apparatus according at least one aforesaid right requirement, it is characterized in that, be used for the Flame Image Process sensing device (500) measured with visible light and be connected with identical image processing and analyzing unit of X ray sensing device (502) or identical image processing board (504).

36. the method for calibration X ray sensing device in particularly according to the coordinate measuring apparatus of one of aforesaid right requirement,

It is characterized in that,

With sense of touch and/or optical sensing devices measure want the gauge point of measuring object and therefrom determine geometric properties, as diameter or interval, described geometric properties is considered for calibrating the X ray sensing device after determining identical geometric properties with the X ray sensing device.

37. method according to claim 36, it is characterized in that, determined by sense of touch and/or optical sensing devices, the measurement result of gauge point is considered for proofreading and correct measurement cloud point that the passing threshold method is produced, that drawn when measuring with X ray sensing device (tomography) from the 3D voxel data.

38. according to claim 36 or 37 one of preferred methods, it is characterized in that, when calculating the 3D reconstruct of X ray (tomography) method, considered by sense of touch and/or the determined measurement result of optical sensing devices to described gauge point.

39. the method according at least one claim in the claim 36 to 38 is characterized in that, measurement point can be instead analyzed in public coordinate system in the mode that detects with touch sensing device, optical sensing devices or X ray sensing device.

40. the method according at least one claim in the claim 36 to 39 is characterized in that, from the calibration mode with calculate the measured point of X ray sensing device, optical sensing devices or touch sensing device geometric properties, as diameter or the interval.

41. method according at least one claim in the claim 36 to 40, it is characterized in that, from being used for further analysis with the determined measurement point of X ray sensing device and/or with the determined measurement point of tactile manner and/or to produce a public cloud point the determined measurement point of optical mode.

42. be used for method by means of the coordinate measuring apparatus measuring object, this coordinate measuring apparatus comprise as first sensing device have x-ray source, at least one detects the X ray sensor of X ray and at the X ray sensing device of the shielding of X-radiation and comprise second sensing device as sense of touch and/or optical sensing devices, described second sensing device is positioned with respect to object on x, the y of coordinate measuring apparatus and/or z direction

It is characterized in that,

The X ray sensing device is positioned in coordinate measuring apparatus according to second sensing device.

43. the method according to claim 42 is characterized in that, arranges the X ray sensing device with second sensing device of equal valuely.

44. the method according to claim 42 or 43 is characterized in that, X ray sensing device or its sensor and touch sensing device at least or its sensor and/or optical sensing devices or its transducer arrangements are on public mechanical axis.

45. the method according at least one claim in the claim 42 to 44 is characterized in that, the X ray sensing device is disposed in independently on the mechanical axis, and described mechanical axis is according to the mechanical axis work of touch sensing device and/or optical sensing devices.

46. the method according at least one claim in the claim 42 to 45 is characterized in that, by X ray sensing device and touch sensing device and/or the public measurement volumes of optical sensing devices covering.

47. method according at least one claim in the claim 42 to 46, it is characterized in that this coordinate measuring apparatus is equipped with at least with the X ray sensing device and/or as the optical sensing devices of Flame Image Process sensing device and/or the vertical axle (Z axle) of the operative orientation of touch sensing device (x and/or y direction).

48. the method according at least one claim in the claim 42 to 47 is characterized in that, makes turning axle center on vertically extending axle rotation.

49. the method according at least one claim in the claim 42 to 48 is characterized in that, the effect axle of optical sensing devices or its sensor and/or X ray sensing device or its sensor or mechanical axis are level or vertical with turning axle.

50. the method according at least one claim in the claim 42 to 49 is characterized in that, makes the radiation source of X ray sensing device and/or Flame Image Process sensing device and the same moved further of sensor of being distributed.

51. the method according at least one claim in the claim 42 to 50 is characterized in that, the radiation source of X ray sensing device is arranged with fixed form in the coordinate system of coordinate measuring apparatus.

52. method according at least one claim in the claim 42 to 51, it is characterized in that, not only make X ray sensor or X ray sensing device and also make optical sensor or optical sensing devices and/or touch sensor or touch sensing device at least one axle to arrange with respect to the adjustable mode of object.

53. the method according at least one claim in the claim 42 to 52 is characterized in that, not only make X ray sensor and also make optical sensor and/or touch sensor at least two axles to arrange with respect to the adjustable mode of object.

54. the method according at least one claim in the claim 42 to 53 is characterized in that, not only make X ray sensor and also make optical sensor and/or touch sensor at least three axles to arrange with respect to the adjustable mode of object.

55. the method according at least one claim in the claim 42 to 54 is characterized in that, at least one other sensor is arranged in common adjustable mode with X ray sensor.

56. the method according at least one claim in the claim 42 to 55 is characterized in that, by being adjusted at the distance between X ray sensor and the radiation source and/or realizing measurement range coupling by adjusting object and X ray sensor toward each other.

57. be used under the situation of applying X-ray sensing device (computerised tomograph), measuring as the structure of the object of workpiece and so on and/or the method for geometric configuration by means of coordinate measuring apparatus, described X ray sensing device comprises x-ray source, at least one detects the sensor of X-radiation and to the shielding of X-radiation, described X ray sensing device is rotated for the X ray sensing device with respect to object, particularly object

It is characterized in that,

At least one functional part of coordinate measuring apparatus is constructed to shielding.

58., it is characterized in that described shielding is constructed to the installation site such as the function element of kinematic axis and/or sensor and/or radiation source or light source of coordinate measuring apparatus according to the method for claim 57 at least.

59., it is characterized in that the base plate of coordinate measuring apparatus and/or sidewall and/or rear wall are constructed to shielding according to the method for claim 57 at least.

60. the method according at least one claim in the claim 57 to 59 is characterized in that, and from measuring technique or static angular is desired compares, is identified for the size of the functional part that shields biglyyer.

61., it is characterized in that according to one of the preferred method of claim 57 to 60, distribute a plurality of sensors to x-ray source, make with each sensor respectively with the angle of transmission shooting fluoroscopy images of phase deviation each other.

62. according to one of the preferred method of claim 57 to 61, it is characterized in that, under the situation of the different spectral scope of utilizing X-radiation, take tomogram from described object.

63. according to one of the preferred method of claim 57 to 62, it is characterized in that, when image taking or image transmission or graphical analysis, a plurality of pixel cells of converter are merged into a corresponding pixel respectively, and the interpolation method by computing machine meets or exceeds the original resolution in volumetric image, wherein calculates this volumetric image from the image of number of pixels with corresponding reduction.

64., it is characterized in that target rotation continuously during measuring (Data Receiving) is wherein only opened x-ray source in short time by means of shutter machinery or electricity according to one of the preferred method of claim 57 to 63.

65. the method according to one of claim 57 to 64 is characterized in that, target rotation and apply X ray intermittently continuously during measuring.

66. according to one of the preferred method of claim 57 to 65, it is characterized in that, many the images (tomogram) of while reference object, wherein a plurality of detecting devices by means of mechanical rotation steering axle or application different angles change in the turning axle of object and the angle between the X-radiation.

67. according to one of the preferred method of claim 57 to 66, its feature exists, take multiple pictures for the resolution that improves tomogram, sensor or object are moved a segment distance between described multiple pictures, and this distance is less than the edge length of the sensor of sensor.

68. according to one of the preferred method of claim 57 to 67, it is characterized in that, make X-radiation parallel.

69. according to one of the preferred method of claim 57 to 68, it is characterized in that, take scope greater than sensor surface by means of the translation relative motion between object and x-ray source or X ray sensor.

70. according to one of the preferred method of claim 57 to 69, it is characterized in that, measure in the following manner by the object that material constituted that X ray is had low contrast, make to center on described object by following material, the X ray absorptivity of described material is greater than the X ray absorptivity of described object.

71. method according at least one claim in the claim 57 to 70, it is characterized in that, except being used to detect one or more sensor of X-radiation, be used for measuring technique mode detected object other sensors, such as mechanical detector, laser detector, Flame Image Process sensor.

72. the method according at least one claim in the claim 57 to 71 is characterized in that, several at least described sensors are arranged independently on the shifting axle.

73. the method according at least one claim in the claim 57 to 72 is characterized in that, take that tomogram turning axle required, that be used for target rotation is disposed on the shifting axle in case on the direction of turning axle the measurement by magnification zone.

74. be used to utilize the method for coordinate measuring apparatus measuring object, this coordinate measuring apparatus comprises that at least one has the X ray sensing device of x-ray source and X-ray detector,

It is characterized in that,

Arrange at the enlargement factor of determining and measurement range once measure after the position of x-ray source and X-ray detector be stored with affiliated calibration data, and stored data like this be not considered when next utilizing the X ray sensing device to measure under the situation about further not recalibrating.

75. the method according to claim 74 is characterized in that, the process of measurement by coordinate measuring apparatus calls the corresponding nextport hardware component NextPort that this equipment was set and located to the enlargement factor measured in advance and measurement range automatically.

76. the method according to claim 74 or 75 is characterized in that, synchronous mobile x-ray source and X-ray detector are so that only change enlargement factor and/or measurement range.

77. the method according at least one claim in the claim 74 to 76 is characterized in that, mobile x-ray source and X-ray detector independently of one another are so that change enlargement factor and/or measurement range.

78. method according at least one claim in the claim 74 to 77, it is characterized in that, measure and store all in advance for the required setting of X-ray measurement (tomography), and no longer need the mensuration process in the process of in corresponding X-ray measurement process, as chromatographical X-ray, taking pictures.

79. the method according at least one claim in the claim 74 to 78 is characterized in that, realizes the adjustment of the rotation mid point of object with software by the corresponding correction of mensuration process and/or the skew of rotation mid point.

80. method according at least one claim in the claim 74 to 79, it is characterized in that, determine the enlargement factor of tomography and/or with respect to the rotation point midway of x-ray source and X-ray detector by means of the master body of forming by at least two spheroids.

81. method according at least one claim in the claim 74 to 80, it is characterized in that, determine the enlargement factor of X-ray measurement (tomography) and/or with respect to the rotation point midway of x-ray source and X-ray detector by means of the master body of forming by four spheroids.

82. the method according at least one claim in the claim 74 to 81 is characterized in that, has the method step that is used for determining at coordinate measuring apparatus the position of rotation center:

-comprise four spheroid master bodies of four spheroids of being arranged at rectangle, as foursquare angle in location on the turning axle, known or calibrated sphere interval each other in this four spheroids master body,

-so rotate four spheroid master bodies, make the plane parallel that is strutted in detecting device,

-measurement four ball positions in the measured zone of detecting device,

Calculate average enlargement factor M1 the specified pixel size of-spheroids distance of having measured from four, specified spheroid distance and detecting device,

-make turning axle Rotate 180 °,

Four the spheroid positions of-measurement in image,

Calculate average enlargement factor M2 the specified pixel value of-spheroids distance of having measured from four, specified spheroid distance and detecting device.

83. according to the method for at least one claim in the claim 74 to 82,

It is characterized in that,

The Y position of calculating the rotation mid point according to following equation according to four spheroid positions before rotation and afterwards: Pdyn=(Pkyn1*M2+Pkyn2+M1)/(M1*M2), Pdyn wherein: the Y position of turning axle on detecting device for spheroid n, Pkyn1: in the anglec of rotation is the Y position of 0 ° situation lower sphere n, Pkyn2: in the anglec of rotation is the Y position of 180 ° situation lower sphere n, M1: in the anglec of rotation average enlargement factor under 0 ° the situation, M2: be average enlargement factor under 180 ° the situation in the anglec of rotation.

84., it is characterized in that the measurement point of having measured on measuring object by means of sense of touch and/or optical sensing devices is considered for proofreading and correct with the determined measurement point of X ray sensing device according to one of the preferred method of claim 74 to 83 in coordinate measuring apparatus.

85. method according at least one claim in the claim 74 to 84, it is characterized in that, by proofread and correct surface elemant with sense of touch and/or measurement point that optical mode was obtained with X ray sensing device or tomography measurement cloud point measured, measuring object or the triangulation of therefrom calculating.

86. according to the method for claim 85 at least, it is characterized in that, between the check point measured, carry out interpolation with sense of touch and/or optical mode.

87. according to the method for claim 86 at least, it is characterized in that, between with sense of touch and/or check point that optical sensing devices obtained, carrying out interpolation and/or carrying out interpolation under the situation of the function curve of considering the cloud point measured by consideration nominal cad model by X-ray measurement or tomography.

88. method according at least one claim in the claim 78 to 87, it is characterized in that, at first by means of X ray (tomography) and with the standard part of sense of touch and/or optical mode sampled measurements object type, from the difference of two kinds of measurements, calculate the corrective network of the measured value that is used to proofread and correct Laminographic, and in the measurement of series part, utilize the corrected value of once determining to revise the measurement of Laminographic.

89. method according at least one claim in the claim 74 to 88, it is characterized in that, the part of having proofreaied and correct of measuring object type is carried out Laminographic and calculate the corrective network of the measured value that is used to proofread and correct Laminographic from the measured deviation when measuring, and in the measurement of series part, utilize the corrected value of having harmonized the in advance Laminographic of harmonizing to measure.

90. according to the method for claim 88 at least, it is characterized in that, when series is partly measured, additionally consider independent with optics and/or the measured check point of tactile manner.

91. the method according to claim 88 at least or 90 is characterized in that, sense of touch that is identified for proofreading and correct by operator's figure ground on the determined cloud point by tomography and/or optical measurement point and measure automatically by coordinate measuring apparatus then.

92. the method according to claim 88 at least or 91 is characterized in that, by operator's figure ground at the sense of touch of wanting to be identified for proofreading and correct on the cad model of measure portion and/or optical measurement point and measure automatically by coordinate measuring apparatus then.

93. the method according to claim 88 at least or 91 is characterized in that, and is approximate even or be evenly distributed on the surface of cad model and by coordinate measuring apparatus and measure automatically the sense of touch that is used to proofread and correct and/or optical measurement point by automatic algorithms.

94. method according at least one claim in the claim 74 to 93, it is characterized in that, on cad model, be identified for sense of touch and/or the optical measurement point proofreaied and correct in advance by the operator, and after loading cad model, measure automatically by coordinate measuring apparatus.

95. method according at least one claim in the claim 74 to 94, it is characterized in that, in the Laminographic process, together the layout of proofreading and correct body, particularly spheroid is carried out Laminographic in principle, and therefrom determine turning axle with respect to coordinate measuring apparatus and/or with respect to x-ray source and/or with respect to the position of X ray sensor and/or effective enlargement factor, and next carry out the mathematics correction.

96., it is characterized in that calibration body, particularly calibrated sphere are positioned in calibration body and compare in the support with low X ray absorption characteristic according to the method for claim 95 at least, and the measuring object on position rotating platform under the situation of considering calibration body.

97. the method according at least one claim in the claim 74 to 96 is characterized in that, determines the position of calibration body on turning axle with optics and/or touch sensor, and the position of turning axle is considered for proofreading and correct.

98. method according at least one claim in the claim 74 to 97, it is characterized in that, on measuring technique, determine the locus of turning axle about x-ray source and X-ray detector with the X ray sensing device and/or with touch sensing device and/or with optical sensing devices.

99. the method according at least one claim in the claim 74 to 98 is characterized in that, by the 2D single image being rotated and/or the turning axle position of departing from nominal position is revised in translation and/or distortion.

100. the method according at least one claim in the claim 74 to 99 is characterized in that, considers the turning axle position of departing from nominal position in restructing algorithm.

101. method according at least one claim in the claim 74 to 100, it is characterized in that, determine the position of measuring object on the universal stage of measuring instrument and so determine position in device coordinate system next on the X ray sensor position of having measured, to utilize image processing method to measure this measuring object by using sense of touch and/or optical sensor and/or tomography by measurer with the 2D transmission mode.

102. method according at least one claim in the claim 74 to 101, it is characterized in that, by device software control X ray sensor or X ray sensing device, wherein during real measurement (Laminographic process), X ray sensor is navigated in the radiation cone of x-ray source, outside during this period of time, make described X ray sensor rest on the outside of radiation cone.

103. method according at least one claim in the claim 74 to 102, it is characterized in that the Flame Image Process sensing device of multisensor coordinate measuring apparatus is equipped with identical Flame Image Process hardware and identical image processing software or wherein a part of with the X ray sensing device.

104. the method according at least one claim in the claim 74 to 103 is characterized in that, the image processing method known by the Flame Image Process sensing device can be used for the X ray sensing device equally.

105. method according at least one claim in the claim 74 to 104, it is characterized in that, before reconstruct, the 2D image is out of shape correction and/or bright signal correction and/or dark signal correction and/or mathematics translation and/or mathematics rotation and/or resampling method and/or linear feature curvature correction and/or image processing filter.

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