CN100355507C - Ink jet head scanning method and apparatus - Google Patents

Abstract

The invention provides a system and methods for manufacturing an optical member, such as a color filter, using a scanning ink-jet head, where all nozzles of the ink-jet head precisely scan formation regions of pixels. In accordance with the invention, the accuracy of discharge position of ink from each nozzle is increased, the utilization of the nozzle (printing efficiency) is heightened, variations in color from pixel to pixel are controlled, and optical characteristics of an optical member is thus made uniform in plan view. In the method for manufacturing a color filter, a plurality ink-jet heads 22, each head having a plurality of nozzles 27, performs a main scan and a sub scan. Further, in accordance with the invention, if W represent the spacing between two closest nozzles at the closest ends of the two adjacent ink-jet heads 22 with one nozzle in one head 22 and the other nozzle in the other head 22, and D represent a constant layout pitch D of the nozzles 27, then the following equation holds: W=mD (m is an integer of 2 or larger). Additionally, if P represent a sub scanning motion pitch of the head 22, then the following equation holds: P=nD (n is an integer of 1 or larger).

Description

Shower nozzle scan method and shower nozzle scanning means

The application's genus is divided an application, and the application number of its female case is 02141207.3, and application number formerly the earliest is JP01-203807, and priority date the earliest is July 4 calendar year 2001.

[technical field]

The present invention relates to the manufacture method and the manufacturing installation of the manufacture method of the manufacture method of the manufacture method of colour filter and manufacturing installation, liquid crystal indicator and manufacturing installation, electroluminescent luminescent layer placement substrate and manufacturing installation, el light emitting device.In addition, on one side the present invention relates to utilize shower nozzle that substrate is scanned, Yi Bian ejecta is ejected into the scan method of the shower nozzle on this matrix material and the scanning means of shower nozzle.In addition, the present invention relates on substrate, form the film build method and the film formation device of film.In addition, the present invention relates to electro-optical device and manufacture method thereof and electronic installation.

[background technology]

In recent years, display unit such as liquid crystal indicator, el light emitting device is widely used in the display part of electronic installations such as mobile phone, portable computer.In addition, use such display unit to make the display part of electronic installation carry out panchromatic demonstration mostly.

For example, pass through colour filter, carry out the panchromatic demonstration of liquid crystal indicator by making light by the liquid crystal layer modulation.By with the colour filter of all kinds unit that is point-like of R (red), G (green) and B (indigo plant) look according to bar shaped arrangement, rounded projections arranged or inlay the aligning method of regulations such as shape is arranged, be configured on the surface of the substrate that constitutes by glass, plastics etc., form such colour filter.

In addition, can carry out the panchromatic demonstration of el light emitting device by such method: for example with the luminescent layer of all kinds that is point-like of R (red), G (green), B (indigo plant) look according to bar shaped arrangement, rounded projections arranged or inlay the aligning method of regulations such as shape is arranged, be configured on the surface of the substrate that constitutes by glass, plastics etc., form electroluminescence plate, luminescent layer with this electroluminescence plate of pair of electrodes clamping, form a plurality of demonstration points, each is shown that point control is added in the curtage on these electrodes, make to show that point sends the light of desired color.

So far, carry out under the situation of composition, perhaps R (red), the G (green) of electroluminescence plate, each luminescent layer of B (indigo plant) look are being carried out adopting photoetching process under the situation of composition in R (red), G (green), B (indigo plant) colour filter of all kinds unit to colour filter., in this photoetching process, need show that point uses the mask of different graphic, expose, numerous and diverse operations such as development, cleaning, simultaneously owing to consume a large amount of material of all kinds and photoresist, so there is problem such as cost up each.

In order to address this problem, propose the employing ink-jet method and be point-like ground injection filter material or luminescent layer formation material etc., form methods such as colour filter unit or luminescent layer.This ink-jet method for example can be carried out with the ink gun that has the piezoelectric film element.

In this ink-jet method, the printing ink that pixel is formed usefulness is stored in the compression chamber of ink gun, utilizes the Volume Changes of the compression chamber that the vibration of above-mentioned piezoelectric element causes, sprays this printing ink, therefore, forms pixel on the substrate of colour filter.If adopt this ink-jet method, then can improve the production efficiency of colour filter etc.In addition, in this ink-jet method owing to can control the height that China ink is measured, so can make the meticulous colour filter of height effectively.

In Figure 25 and Figure 26, illustrated by adopting ink-jet method to be that point-like ground sprays filter material or luminescent layer forms material etc., form one of the method that is colour filter unit that point-like arranges or luminescent layer etc. example.

Use has theink gun 306 that a plurality ofnozzles 304 shown in Figure 25 (c) is arranged in thenozzle rows 305 of row shape, according to ink-jet method, shown in Figure 25 (a), in the interior zone of a plurality ofpanel zones 302 that on the surface of the large-area substrate that constitutes by glass, plastics etc. (so-called motherboard) 301, form, shown in Figure 25 (b), form a plurality ofcolour filter unit 303 be that point-like arranges.

In the case, shown in Figure 25 (b), for example makeink gun 306 along the direction shown in arrow shower nozzle A1 and the arrow shower nozzle A2, apanel zone 302 is carried out repeatedly main scanning, under the situation shown in Figure 25 (b), be twice main scanning, simultaneously between these main scannings selectively from a plurality ofnozzle 304 ink-jets, for example spray filter material, formcolour filter unit 303 in desirable position.

Here, R (red), G (green) and B (indigo plant) are of all kinds to be bar shaped arrangement, rounded projections arranged or to inlay form such as shape arrangement and arrange by making, and forms colour filter unit 303.Therefore, formingcolour filter unit 303 with the ink gun shown in Figure 25 (b) 306 carries out as follows: corresponding to R (red), G (green), three kinds of colors of B (indigo plant), prepare three kinds ofink guns 306 that only spray a kind of color among R (red), G (green), the B (indigo plant) in advance, use theseink guns 306 successively repeatedly corresponding to three kinds of colors, can on amotherboard 301, form R (red), G (green), the arrangement of B (indigo plant) three looks.

, inink gun 306, in general, the ink ejection amount that constitutes a plurality ofnozzles 304 ofnozzle rows 305 has discrete.For example, shown in Figure 26 (a),ink gun 306 often has following characteristics of inkjet Q: the emitted dose corresponding to the position at the both ends ofnozzle rows 305 is many, and its central portion is time many, and the emitted dose of their pars intermedia is few.In addition, the number thatnozzle 304 has been shown in Figure 26 (a) is 180 a situation.

If consider the discrete of such ink ejection amount, then shown in Figure 25 (b), forming byink gun 306 under the situation ofcolour filter unit 303, shown in Figure 26 (b), the formation of thecolour filter unit 303 corresponding zone P1 with the nozzle at the both ends that are arranged inink gun 306 or with the formation zone P2 of the correspondingcolour filter unit 303 of the nozzle that is positioned at central portion, form the big striped of concentration, have the planar light transmissison characteristic or the uneven problem of reflection characteristic of colour filter.In addition, according to different situations, in forming regional P1 and two zones of P2, form the big striped of concentration sometimes.

In addition,, require mobile exactly ink gun adopting such ink-jet method to make under the situation of colour filter, so that the nozzle of ink gun passes through on formation zone pixel, that promptly demonstration is put exactly, and ink-jet in position., present situation is to find the approach that addresses this problem fully.

Specifically describe this problem below.Promptly, when forming colour filter unit or luminescent layer, when forming pixel by ink-jet, drained to another adjacent pixel and form in the zone and colour mixture takes place in order to prevent to enter printing ink that a pixel forms the zone, be necessary to make nozzle from pixel form the zone directly over pass through, make ink droplet as far as possible attached to the center of pixel.Suppose nozzle not pixel form the zone directly over the time, can not be from nozzle ink jet.

This is a kind of ideal situation, on the other hand, the mutual arrangement pitch of the pixel of shower nozzle line feed direction (that is sub scanning direction) (promptly, colour filter unit spacing or pel spacing) and the mutual arrangement pitch (that is injector spacing) of the nozzle of sub scanning direction inconsistent usually.Under this state, when making ink gun only carry out main scanning, occur not by pixel form the zone directly over nozzle, promptly out of use nozzle appears, have the low problem of service efficiency (that is scan efficiency) of nozzle.May not find sufficient solution route to this problem so far.

[summary of the invention]

The present invention finishes in view of the above-mentioned problems, when ink gun scanned when purpose was to make colour filter or electroluminescence plate, can improve the service efficiency (that is printing efficiency) of nozzle exactly by forming the zone of pixel by the whole nozzles that make this ink gun.

In addition, the objective of the invention is to by ink gun is moved with respect to object exactly, can be with the appropriate location of ink jet to the object, the look that prevents each pixel thus is discrete, makes the optical characteristics of optical components such as the characteristics of luminescence of colored display characteristic, the luminescent layer of liquid crystal indicator realize homogenising on the plane.

The result that the inventor etc. study in order to achieve the above object and with keen determination, discovery by make ink gun adjacent in a plurality of ink guns the nozzle of end separately be the space (W) between the mutual immediate nozzle and make printhead (drop injection of material mechanism) along the shower nozzle scanning direction and shower nozzle line feed direction (promptly, direction in length and breadth) the subscan moving interval (P) of line feed direction specifies actual integral multiple into the constant arrangement pitches (D) of nozzle when carrying out main scanning and subscan, can achieve the above object, finish the present invention.Promptly, according to the present invention, provide manufacture method and manufacturing installation, film build method and film formation device, electro-optical device and manufacture method thereof and the electronic installation of the manufacture method of the manufacture method of the manufacture method of following colour filter and manufacturing installation, liquid crystal indicator and manufacturing installation, electroluminescence plate and manufacturing installation, el light emitting device.

(1) manufacture method of colour filter of the present invention is characterised in that: comprising: a plurality of shower nozzles that make according to the rules spacing arrange a plurality of nozzles move along the shower nozzle scanning direction, substrate are carried out the operation of main scanning; Move along the shower nozzle line feed direction moving interval according to the rules that intersects with above-mentioned shower nozzle scanning direction, aforesaid substrate is carried out the operation of subscan; And from above-mentioned a plurality of nozzles filter material is ejected into the operation that colour filter unit on the aforesaid substrate forms the zone, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle in fact satisfy following relational expression

W=mD (in the formula, m is the integer more than 2)

In fact the subscan moving interval (P) of above-mentioned shower nozzle and the constant arrangement pitches (D) of said nozzle satisfy following relational expression

P=nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce that filter material is ejected into possibility on the neighbor no matter whether near the zone that forms pixel, pass through.In addition, in whole main scannings, the nozzle of filter material can be reduced or not have to spray, therefore, the service efficiency (that is printing efficiency) of nozzle can be improved.In addition, can dispose colour filter unit relatively, effectively with the scanning times of shower nozzle.

In addition, only being sprayed by shower nozzle almost is the filter material of necessary amount, can form the colour filter unit in the desirable zone, therefore, complicated step such as the such exposure when not needing through the employing photoetching process, development, cleaning in addition, can reduce and make the use amount that goes up necessary filter material.

(2) in the manufacture method of the colour filter of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and in fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W=mDcos θ (in the formula, m is the integer more than 2)

In addition, in fact the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P=nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then since can make the nozzle arrangement spacing be actually between each colour filter unit of sub scanning direction the interval (promptly, colour filter unit spacing) integral multiple is so can use the interior whole nozzles of drop material shower nozzle (ink gun) effectively, configuration colour filter unit.

(3) in the manufacture method of the colour filter of above-mentioned formation, the above-mentioned colour filter unit that the said nozzle that is positioned at the end of above-mentioned shower nozzle preferably is not ejected into above-mentioned filter material on the aforesaid substrate forms the zone.

If adopt this structure, even then under the situation of the big drop material shower nozzle (ink gun) of the spray distribution characteristic variations of using filter material, also can spray the printing ink of right quantity from drop material shower nozzle (ink gun), therefore, can form the zone in the colour filter of substrate unit, be that pixel forms the colour filter unit that configuration in the zone has uniform in-plane shape and thickness, therefore, the look that can prevent each pixel disperses.

(4) in the manufacture method of the colour filter of above-mentioned formation, can constitute above-mentioned filter material by the liquid material of multiple color, and, a part of color in the above-mentioned multiple color of above-mentioned a plurality of nozzle ejection that above-mentioned a plurality of shower nozzles comprise separately.

Suppose that whole shower nozzles only spray a part of liquid material, then need to use other machinery or change liquid material, adapt to the color that remains kind.Different therewith, if adopt above-mentioned structure, then can make each shower nozzle spray the liquid material of different colours simultaneously, therefore, can improve the colour filter unit that colour filter unit is configured in substrate and form the zone, be service efficiency, the printing efficiency of the nozzle of pixel when forming the zone.

Here,, generally use the printing ink of R (red), G (green) and three kinds of colors of B (indigo plant), but also can use for example printing ink of C (dark blue), M (dark red) and Y colors such as (Huangs) certainly as multiple color.

(5) in the manufacture method of the colour filter of above-mentioned formation, can constitute above-mentioned filter material by the liquid material of multiple color, and, the shades of colour in the above-mentioned multiple color of above-mentioned a plurality of nozzle ejection that above-mentioned a plurality of shower nozzles comprise separately.

Suppose that nozzle only sprays a part of liquid material, spray under the situation of the liquid material of identical type, need to use other machinery or change liquid material, adapt to remaining color at whole shower nozzles.Different therewith, if adopt above-mentioned structure, then can make each nozzle spray versicolor liquid material in the multiple color simultaneously, therefore, form the zone, be that pixel can improve printing efficiency when forming the zone in the colour filter unit that colour filter unit is configured in substrate.

Here,, generally use the printing ink of R (red), G (green) and three kinds of colors of B (indigo plant), but also can use for example printing ink of C (dark blue), M (dark red) and Y colors such as (Huangs) certainly as multiple color.

(6) secondly, the manufacturing installation of colour filter of the present invention is characterised in that: a plurality of nozzles that the filter material of liquid droplets shape is arranged; A plurality of shower nozzles of above-mentioned a plurality of nozzles have been arranged according to constant arrangement pitch (D); The main scanning drive unit that above-mentioned shower nozzle is moved along the shower nozzle scanning direction; And make above-mentioned shower nozzle along the shower nozzle line feed direction mobile subscan drive unit of moving interval (P) according to the rules that intersects with above-mentioned shower nozzle scanning direction, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle in fact can satisfy following relational expression

W=mD (in the formula, m is the integer more than 2)

In fact the subscan moving interval (P) of above-mentioned shower nozzle and the constant arrangement pitches (D) of said nozzle can satisfy following relational expression

P=nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce that filter material is ejected into possibility on the neighbor no matter whether near the zone that forms pixel, pass through.In addition, in whole main scannings, can reduce or not have can not ink-jet nozzle, therefore, can improve the service efficiency (that is printing efficiency) of nozzle.In addition, can dispose colour filter unit relatively, effectively with the scanning times of shower nozzle.

(7) in the manufacturing installation of the colour filter of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and in fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W=mDcos θ (in the formula, m is the integer more than 2)

In addition, in fact the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P=nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then since can make the nozzle arrangement spacing be actually between each colour filter unit of sub scanning direction the interval (promptly, colour filter unit spacing) integral multiple is so can use the interior whole nozzles of drop material shower nozzle (ink gun) effectively, configuration colour filter unit.

(8) secondly, the manufacture method of liquid crystal indicator of the present invention is a kind of manufacture method that comprises the liquid crystal indicator of the operation that forms colour filter, it is characterized in that utilizing the manufacture method of above-described colour filter, forms colour filter.If adopt the manufacture method of this colour filter, then can make the colour filter that has the optical characteristics excellence, the colored display characteristic liquid crystal indicator of homogenising in the plane effectively.

(9) secondly, the manufacturing installation of liquid crystal indicator of the present invention is the manufacturing installation of the liquid crystal indicator of a kind of manufacturing liquid crystal indicator of having colour filter, it is characterized in that having the manufacturing installation of above-described colour filter.If adopt the manufacturing installation of this colour filter, then can make the colour filter that has the optical characteristics excellence, the colored display characteristic liquid crystal indicator of homogenising in the plane effectively.

(10) secondly, the manufacture method of electroluminescence plate of the present invention is characterised in that: comprising: a plurality of shower nozzles that make according to the rules spacing arrange a plurality of nozzles move along the shower nozzle scanning direction, substrate are carried out the operation of main scanning; Move along the shower nozzle line feed direction moving interval according to the rules that intersects with above-mentioned shower nozzle scanning direction, aforesaid substrate is carried out the operation of subscan; And from above-mentioned a plurality of nozzles functional layer is formed injection of material and forms the operation in zone to the functional layer on the aforesaid substrate, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle in fact satisfy following relational expression

W=mD (in the formula, m is the integer more than 2)

In fact the subscan moving interval (P) of above-mentioned shower nozzle and the constant arrangement pitches (D) of said nozzle satisfy following relational expression

P=nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce that functional layer is formed the possibility of injection of material to the adjacent functional layer no matter whether near the zone that forms functional layer, pass through.In addition, in whole main scannings, can reduce or not have can not injection work ergosphere formation material nozzle, therefore, can improve the service efficiency (that is printing efficiency) of nozzle.In addition, can with the scanning times of shower nozzle relatively, configuration feature layer effectively.

In addition, only being sprayed by shower nozzle almost is that the functional layer of necessary amount forms material, can form the functional layer in the desirable zone, therefore, complicated step such as the such exposure when not needing, development, cleaning through the employing photoetching process, in addition, can reduce manufacturing and go up the use amount that the necessary function layer forms material.

(11) in the manufacture method of the electroluminescence plate of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and in fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W=mDcos θ (in the formula, m is the integer more than 2)

In addition, in fact the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P=nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then since can make the nozzle arrangement spacing be actually between each functional layer of sub scanning direction the interval (promptly, the functional layer spacing) integral multiple is so can use the interior whole nozzles of drop material shower nozzle (ink gun), configuration feature layer effectively.

(12) in the manufacture method of the electroluminescence plate of above-mentioned formation, can make the said nozzle of the end that is positioned at above-mentioned shower nozzle the above-mentioned functions layer not formed injection of material and not form the zone to the above-mentioned functions layer on the aforesaid substrate.

If adopt this structure, even then form material, be under the situation of the big drop material shower nozzle (ink gun) of the spray distribution characteristic variations of liquid material at the function of use layer, also can spray the liquid material of right quantity from this drop material shower nozzle (ink gun), therefore, can form the zone in the functional layer of substrate, be that pixel forms in the zone configuration and has the functional layer of uniform in-plane shape and thickness, therefore, can prevent each pixel, be that the look of each functional layer is discrete.In addition, in preventing look discrete color like this, also comprise color with blue series expression such as spectral transmission, spectral reflectance (Yxy).

(13) in the manufacture method of the electroluminescence plate of above-mentioned formation, the above-mentioned functions layer form material preferably luminescent layer form material.

(14) in the manufacture method of the electroluminescence plate of above-mentioned formation, the above-mentioned functions layer forms material and preferably injects transport layer and form material in the hole.

(15) in the manufacture method of the electroluminescence plate of above-mentioned formation, the above-mentioned functions layer forms material and preferably includes from is formed material and hole injection transport layer by luminescent layer and form the material that group that material constitutes is selected.

(16) in the manufacture method of the electroluminescence plate of above-mentioned formation, above-mentioned luminescent layer forms material and preferably comprises the different multiple material of glow color, and each above-mentioned shower nozzle sprays each self-corresponding a kind of material the different multiple material of above-mentioned glow color from said nozzle separately.Suppose that whole shower nozzles only spray a part of luminescent layer and form material, then need to use other machinery or change luminescent layer to form material, adapt to the color that remains kind.Different therewith, if adopt above-mentioned structure, the luminescent layer that then can make each shower nozzle spray different colours simultaneously forms material, therefore, can improve the luminescent layer that luminescent layer is configured in substrate forms the zone, is printing efficiency, the service efficiency of nozzle, the printing efficiency of pixel when forming the zone.

Here, as multiple color, generally use the printing ink of R (red), G (green) and three kinds of colors of B (indigo plant), the luminescent layer of C (dark blue), M (dark red) and Y colors such as (Huangs) forms material but for example also can use certainly.

(17) in the manufacture method of the electroluminescence plate of above-mentioned formation, above-mentioned luminescent layer forms material and preferably comprises the different multiple material of glow color, each self-corresponding a kind of material in the different multiple material of the above-mentioned glow color of each nozzle ejection in above-mentioned a plurality of nozzles.

Suppose that nozzle only sprays a part of luminescent layer and forms material, the luminescent layer that sprays identical type at whole shower nozzles forms under the situation of material, needs to use other machinery or change luminescent layer to form material, adapts to remaining color.Different therewith, if adopt above-mentioned structure, the versicolor luminescent layer that each nozzle is sprayed in the multiple color simultaneously forms material, and therefore, the luminescent layer that luminescent layer is configured in substrate forms the zone, be that pixel can improve printing efficiency when forming the zone.

Here, as multiple color, generally use the luminescent layer of R (red), G (green) and three kinds of colors of B (indigo plant) to form material, but also can use for example C (dark blue), M (dark red) and Y colors such as (Huangs) certainly.

(18) secondly, the manufacturing installation of electroluminescence plate of the present invention is characterised in that: a plurality of nozzles that the functional layer formation material of liquid droplets shape is arranged; A plurality of shower nozzles of above-mentioned a plurality of nozzles have been arranged according to constant arrangement pitch (D); The main scanning drive unit that above-mentioned shower nozzle is moved along the shower nozzle scanning direction; And make above-mentioned shower nozzle along the shower nozzle line feed direction mobile subscan drive unit of moving interval (P) according to the rules that intersects with above-mentioned shower nozzle scanning direction, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle in fact satisfy following relational expression

W=mD (in the formula, m is the integer more than 2)

In addition, in fact the constant arrangement pitches (D) of the subscan moving interval (P) of above-mentioned shower nozzle and said nozzle satisfies following relational expression

P=nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle, no matter whether near the zone that forms functional layer, promptly near the zone that forms pixel, pass through, can both reduce with functional layer form injection of material to the adjacent functional layer, be the possibility on the neighbor.In addition, in whole main scannings, can reduce or not have can not injection work ergosphere formation material nozzle, therefore, can improve the service efficiency (that is printing efficiency) of nozzle.In addition, can with the scanning times of shower nozzle relatively, configuration feature layer effectively.

In addition, only being sprayed by shower nozzle almost is that the functional layer of necessary amount forms material, can form the functional layer in the desirable zone, therefore, complicated step such as the such exposure when not needing, development, cleaning through the employing photoetching process, in addition, can reduce the use amount of making the filter material that goes up necessity.

(19) in the manufacturing installation of the electroluminescence plate of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and in fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W=mDcos θ (in the formula, m is the integer more than 2)

In addition, in fact the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P=nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then since can make the nozzle arrangement spacing be actually between each functional layer of sub scanning direction the interval (promptly, the functional layer spacing) integral multiple is so can use the interior whole nozzles of drop material shower nozzle (ink gun), configuration feature layer effectively.

(20) secondly, the manufacture method of el light emitting device of the present invention is a kind of manufacture method that comprises the el light emitting device of the operation that forms functional layer, it is characterized in that utilizing the manufacture method of above-described electroluminescence plate, forms functional layer.If adopt the manufacture method of this el light emitting device, then can make the electroluminescence plate that has the optical characteristics excellence, the display characteristic el light emitting device of homogenising in the plane effectively.

(21) secondly, the manufacturing installation of el light emitting device of the present invention is the manufacturing installation of the el light emitting device of a kind of manufacturing el light emitting device of having electroluminescence plate, it is characterized in that having the manufacturing installation of above-described electroluminescence plate.If adopt the manufacturing installation of this el light emitting device, then can make the electroluminescence plate that has the optical characteristics excellence, the display characteristic el light emitting device of homogenising in the plane effectively.

(22) secondly, shower nozzle scan method of the present invention is characterised in that: comprising: a plurality of shower nozzles that make according to the rules spacing arrange a plurality of nozzles move along the shower nozzle scanning direction, substrate are carried out the operation of main scanning; Move along the shower nozzle line feed direction moving interval according to the rules that intersects with above-mentioned shower nozzle scanning direction, aforesaid substrate is carried out the operation of subscan; And will spray the operation of injection of material to the aforesaid substrate from above-mentioned a plurality of nozzles, the said nozzle that adjacent shower nozzle is positioned at end separately in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle in fact satisfy following relational expression

W=mD (in the formula, m is the integer more than 2)

In addition, in fact the constant arrangement pitches (D) of the subscan moving interval (P) of above-mentioned shower nozzle and said nozzle satisfies following relational expression

P=nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce that ejecta is ejected into possibility on the adjacent key element no matter whether near the zone of formative element, pass through.In addition, in whole main scannings, the nozzle of ejecta can be reduced or not have to spray, therefore, the service efficiency (that is printing efficiency) of nozzle can be improved.In addition, can dispose ejecta relatively, effectively with the scanning times of shower nozzle.

In addition, only being sprayed by shower nozzle almost is the ejecta of necessary amount, can form the key element in the desirable zone, therefore, complicated step such as the such exposure when not needing through the employing photoetching process, development, cleaning in addition, can reduce and make the use amount that goes up necessary ejecta.The scan method of the shower nozzle of above-mentioned formation can be used for carrying out whole industrial technologies of fine composition on matrix material, for example as an example of its range of application, can consider the formation of various semiconductor elements (for example, thin film transistor (TFT), thin film diode etc.) wiring figure and dielectric film etc.

In addition, according to formed key element, can carry out various selections to ejecta, for example, except above-mentioned filter material, functional layer form material, can consider conductive materials such as silica glass precursor, metallic compound, dielectric substance or semi-conducting material etc. as the one example.

(23) in the shower nozzle scan method of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and in fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W=mDcos θ (in the formula, m is the integer more than 2)

In addition, in fact the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P=nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then owing to can make the nozzle arrangement spacing be actually the integral multiple at the interval between each key element of sub scanning direction, so can use the whole nozzles in the drop material shower nozzle (ink gun) effectively, the configuration ejecta.

(24) in the shower nozzle scan method of above-mentioned formation, the said nozzle that can make the end that is positioned at above-mentioned shower nozzle is not with the ejecta adhering zone of above-mentioned ejection injection of material to the aforesaid substrate.

If adopt this structure, even then under the situation of the big drop material shower nozzle (ink gun) of the spray distribution characteristic variations of using ejecta, also can spray the ejecta of right quantity from this drop material shower nozzle (ink gun), can spray the ejection material, therefore, can form the zone in the key element of substrate, be that pixel forms in the zone configuration and has the key element of uniform in-plane shape and thickness, therefore, can prevent that the characteristic of each key element is discrete.

(25) in the shower nozzle scan method of above-mentioned formation, above-mentioned ejection material preferably comprises the different multiple material of characteristic, and each above-mentioned shower nozzle sprays each self-corresponding a kind of material the different multiple material of above-mentioned characteristic from said nozzle separately.Suppose that whole shower nozzles only spray a kind of ejection material, then need to use other machinery or change printing ink, adapt to the color that remains kind.Different therewith, if adopt above-mentioned structure, then can make each shower nozzle different ejection material of spray characteristic simultaneously, therefore, can improve the key element that key element is configured in substrate and form the zone, be printing efficiency, the service efficiency of nozzle, the printing efficiency of pixel when forming the zone.

(26) in the shower nozzle scan method of above-mentioned formation, above-mentioned ejection material preferably comprises the different multiple material of characteristic, each self-corresponding a kind of material in the different multiple material of the above-mentioned characteristic of each nozzle ejection in above-mentioned a plurality of nozzles.Suppose that nozzle only sprays a kind of ejection material, spray under the situation of the ejection material of identical type, need to use other machinery or change the ejection material, adapt to the color that remains kind at whole shower nozzles.Different therewith, if adopt above-mentioned structure, then can therefore, when forming the zone, the key element that key element is configured in substrate can improve printing efficiency from the different ejection material of a plurality of nozzles while spray characteristics.

(27) secondly, shower nozzle scanning means of the present invention is characterised in that: a plurality of nozzles that the filter material of liquid droplets shape is arranged; A plurality of shower nozzles of a plurality of nozzles have been arranged according to constant arrangement pitch (D); The main scanning drive unit that above-mentioned shower nozzle is moved along the shower nozzle scanning direction; And make above-mentioned shower nozzle along the shower nozzle line feed direction mobile subscan drive unit of moving interval (P) according to the rules that intersects with above-mentioned shower nozzle scanning direction, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle in fact satisfy following relational expression

W=mD (in the formula, m is the integer more than 2)

In fact the subscan moving interval (P) of above-mentioned shower nozzle and the constant arrangement pitches (D) of said nozzle satisfy following relational expression

P=nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce ejecta, the possibility that is ink jet on the adjacent key element no matter whether near the zone of formative element, pass through.In addition, in whole main scannings, the nozzle of ejection material can be reduced or not have to spray, therefore, the service efficiency (that is printing efficiency) of nozzle can be improved.In addition, can dispose key element relatively, effectively with the scanning times of shower nozzle.

In addition, only being sprayed by shower nozzle almost is the ejection material of necessary amount, can form the key element in the desirable zone, therefore, complicated step such as the such exposure when not needing through the employing photoetching process, development, cleaning in addition, can reduce and make the use amount that goes up necessary ejection material.

(28) in the shower nozzle scanning means of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and in fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W=mDcos θ (in the formula, m is the integer more than 2)

In addition, in fact the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P=nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then,, dispose each key element so can use the whole nozzles in the drop material shower nozzle (ink gun) effectively owing to can make the nozzle arrangement spacing be actually the integral multiple at the interval between each key element of sub scanning direction.

(29) secondly, film build method of the present invention is characterised in that: comprise that the spacing that makes according to the rules arranged a plurality of shower nozzles of a plurality of nozzles and moved along the shower nozzle scanning direction, substrate is carried out the operation of main scanning; Move along the shower nozzle line feed direction moving interval according to the rules that intersects with above-mentioned shower nozzle scanning direction, aforesaid substrate is carried out the operation of subscan; And from above-mentioned a plurality of nozzles membrane material is ejected into the operation that film on the aforesaid substrate forms the zone, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle satisfy following relational expression

W ≈ mD (in the formula, m is the integer more than 2)

In addition, the constant arrangement pitches (D) of the subscan moving interval (P) of above-mentioned shower nozzle and said nozzle satisfies following relational expression

P ≈ nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce that membrane material is ejected into possibility on the adjacent injection target area no matter whether near the zone (spraying the target area) of answering the jet film material, pass through to call in the following text.In addition, in whole main scannings, can reduce or not have can not the jet film material nozzle, therefore, can improve the service efficiency (that is printing efficiency) of nozzle.In addition, can form film relatively, effectively with the scanning times of shower nozzle.

In addition, only being sprayed by shower nozzle almost is the membrane material of necessary amount, can form film in desirable zone, therefore, complicated step such as the such exposure when not needing through the employing photoetching process, development, cleaning in addition, can reduce and make the use amount that goes up necessary membrane material.

(30) in the film build method of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W ≈ mDcos θ (in the formula, m is the integer more than 2)

In addition, the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P ≈ nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then owing to making the nozzle arrangement spacing be actually the integral multiple that respectively sprays the interval between the target area of sub scanning direction, so can use the whole nozzles in the drop material shower nozzle (ink gun), jet film material effectively.

(31) in the film build method of above-mentioned formation, can make the said nozzle of the end that is positioned at above-mentioned shower nozzle the film that above-mentioned membrane material is ejected on the aforesaid substrate not formed the zone.

If adopt this structure, even then under the situation of the big drop material shower nozzle (ink gun) of the spray distribution characteristic variations of using membrane material, also can from this drop material shower nozzle (ink gun) spray right quantity membrane material, be liquid material, therefore, can the film on substrate form and form film in the zone with uniform in-plane shape and thickness, therefore, can prevent characteristic the dispersing of film with the position.

(32) in the film build method of above-mentioned formation, above-mentioned membrane material preferably comprises the different multiple membrane material of characteristic, and each above-mentioned shower nozzle sprays each self-corresponding a kind of material the different multiple membrane material of above-mentioned characteristic from said nozzle separately.Suppose that whole shower nozzles only spray a kind of membrane material, then need to use other machinery or change membrane material, adapt to the color of residue kind membrane material.Different therewith, if adopt above-mentioned structure, then can make each shower nozzle spray different types of membrane material simultaneously, therefore, service efficiency, the printing efficiency of the nozzle in the time of improving the film that membrane material is ejected into substrate and form the zone.

(33) in the film build method of above-mentioned formation, above-mentioned membrane material preferably comprises the different multiple material of characteristic, each self-corresponding a kind of material in the different multiple material of the above-mentioned characteristic of each nozzle ejection in above-mentioned a plurality of nozzles.Suppose that nozzle only sprays a kind of membrane material, under the situation of the membrane material that all shower nozzle injection kind is identical, need to use other machinery or change membrane material, adapt to the color that remains kind.Different therewith, if adopt above-mentioned structure, then can spray the various membrane materials in the multiple membrane material simultaneously, therefore, can improve the printing efficiency when membrane material is ejected into film on the substrate and forms the zone.

(34) secondly, film formation device of the present invention is characterised in that: a plurality of nozzles that the membrane material of liquid droplets shape is arranged; A plurality of shower nozzles of above-mentioned a plurality of nozzles have been arranged according to constant arrangement pitch (D); The main scanning drive unit that above-mentioned shower nozzle is moved along the shower nozzle scanning direction; And make above-mentioned shower nozzle along the shower nozzle line feed direction mobile subscan drive unit of moving interval (P) according to the rules that intersects with above-mentioned shower nozzle scanning direction, the said nozzle that adjacent shower nozzle is positioned at separately end in above-mentioned a plurality of shower nozzles each other interval (W) and the constant arrangement pitches (D) of said nozzle satisfy following relational expression

W ≈ mD (in the formula, m is the integer more than 2)

In addition, the constant arrangement pitches (D) of the subscan moving interval (P) of above-mentioned shower nozzle and said nozzle satisfies following relational expression

P ≈ nD (in the formula, n is the integer more than 1)

Utilize this structure, in a main scanning of shower nozzle,, can both reduce that membrane material is ejected into possibility on the adjacent injection target area no matter whether near the zone (spraying the target area) of answering the jet film material, pass through to call in the following text.In addition, in whole main scannings, can reduce or not have can not the jet film material nozzle, therefore, can improve the service efficiency (that is printing efficiency) of nozzle.In addition, can form film relatively, effectively with the scanning times of shower nozzle.

In addition, only being sprayed by shower nozzle almost is the membrane material of necessary amount, can form film in desirable zone, therefore, complicated step such as the such exposure when not needing through the employing photoetching process, development, cleaning in addition, can reduce and make the use amount that goes up necessary membrane material.

(35) in the film formation device of above-mentioned formation, above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction, and the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval (W) and said nozzle each other can satisfy following relational expression along the arrangement pitches (Dcos θ) of above-mentioned shower nozzle line feed direction

W ≈ mDcos θ (in the formula, m is the integer more than 2)

In addition, the arrangement pitches (Dcos θ) of above-mentioned shower nozzle along the subscan moving interval (P) of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction can satisfy following relational expression

P ≈ nDcos θ (in the formula, n is the integer more than 1)

If adopt this structure, then owing to making the nozzle arrangement spacing be actually the integral multiple that respectively sprays the interval between the target area of sub scanning direction, so can use the whole nozzles in the drop material shower nozzle (ink gun), jet film material effectively.

(36) manufacture method of electro-optical device of the present invention is characterised in that: the film build method that adopts the structure of above-mentioned (26).

(37) electro-optical device of the present invention is characterised in that: adopt the manufacture method of electro-optical device of the structure of above-mentioned (33) to make.

(38) electronic installation of the present invention is characterised in that: the electro-optical device that comprises the structure of above-mentioned (34).

(39) electronic installation of the present invention is characterised in that: comprise the liquid crystal indicator that the manufacture method of the liquid crystal indicator of the structure that adopts above-mentioned (8) is made.

(40) a kind of electronic installation of the present invention is characterised in that: comprise the el light emitting device that the manufacture method of the el light emitting device of the structure that adopts above-mentioned (17) is made.

[description of drawings]

Fig. 1 is the plane of master operation of an embodiment of the manufacture method of expression colour filter of the present invention.

Fig. 2 is another embodiment of the manufacture method of colour filter of the present invention, and being expression is provided with the plane of the embodiment when arranging with ink gun (drop material shower nozzle) 22 with respect to shower nozzle line feed direction Y tilt angle theta.

Fig. 3 is the oblique view of an example of the printhead (ink droplet injection of material mechanism) that uses in the manufacturing installation of expression colour filter of the present invention.

Fig. 4 is another routine plane of the printhead (ink droplet injection of material mechanism) that uses in the manufacturing installation of expression colour filter of the present invention.

Fig. 5 represents to utilize the manufacture method of colour filter of the present invention and installs the plane of the flat shape of the colour filter that obtains, and it is overall that particularly (a) expression cuts colour filter motherboard before, (b) represents a colour filter that is cut.

Fig. 6 utilizes the variation of the cross-section structure of colour filter to represent the master operation of the manufacture method of colour filter of the present invention, and each figure expression of expression cross-section structure is along the variation of the cross-section structure of the colour filter of the VII-VII line among Fig. 5 (b).Particularly filter material state is before sprayed in (a) expression, (b) state after the expression injection filter material, and (c) state of colour filter unit has been disposed in expression, (d) represents to have formed the state behind the diaphragm again.

Fig. 7 be expression in the colour filter R (red), G (green) and the demonstration point of three kinds of colors of B (indigo plant) arrange routine plane.

Fig. 8 is the oblique view of an embodiment of ink discharge device (drop injection of material device) of major part of each manufacturing installation of formation of the manufacturing installation of the manufacturing installation of manufacturing installation, liquid crystal indicator of expression colour filter of the present invention and el light emitting device.

Fig. 9 is the oblique view that the major part of device shown in Figure 8 is amplified expression.

Figure 10 is that the major part with device shown in Figure 9 is the oblique view that ink gun (drop material shower nozzle) amplifies expression.

Figure 11 is the oblique view of the change example of expression ink gun (drop material shower nozzle).

Figure 12 is the plane of another change example of expression ink gun (drop material shower nozzle).

Figure 13 is the plane of a change example again of expression ink gun (drop material shower nozzle).

Figure 14 is the plane of a change example again of expression ink gun (drop material shower nozzle).

Figure 15 is the figure of an example of the internal structure of expression ink gun (drop material shower nozzle), (a) is the oblique view of this internal structure being cut open part expression, (b) is the profile of expression along the cross-section structure of the J-J line in (a).

Figure 16 is the plane of a change example again of expression ink gun (drop material shower nozzle).

Figure 17 is the block diagram of the electric control system of use in expression ink gun (the drop material shower nozzle) device shown in Figure 8.

Figure 18 represents the flow chart by the control flow of control system execution shown in Figure 17.

Figure 19 is the oblique view of a change example again of expression ink gun (drop material shower nozzle).

Figure 20 is the process chart of an embodiment of the manufacture method of expression liquid crystal indicator of the present invention.

Figure 21 is an oblique view of representing to utilize an example of the liquid crystal indicator that the manufacture method of liquid crystal indicator of the present invention makes with decomposing state.

Figure 22 is a profile of representing the cross-section structure of liquid crystal indicator along the X-X line among Figure 21.

Figure 23 is the process chart of an embodiment of the manufacture method of expression el light emitting device of the present invention.

Figure 24 is the profile corresponding to the el light emitting device of process chart shown in Figure 23.

Figure 25 is the plane of an example of the manufacture method of the existing colour filter of expression.

Figure 26 is the figure that the characteristic of the existing colour filter of explanation is used.

Figure 27 is the oblique view of expression as the digital camera of an example of electronic installation of the present invention.

The application examples of Figure 28 (A)～(C) expression electronic installation of the present invention (A) is mobile phone, (B) is wrist-watch, (C) is portable information apparatus.

[specific embodiment]

(embodiment of the manufacture method of colour filter)

Below, specifically describe embodiments of the invention with reference to accompanying drawing.Fig. 1 represents the using method of ink gun (drop material shower nozzle) 22 of an embodiment of the manufacture method of colour filter of the present invention.In this embodiment, shown in Fig. 1 (a), use more than one ink gun (drop material shower nozzle) 22 is arranged printhead (the drop injection of material mechanism) 22a that forms with the adjacent spaces of regulation.Each ink gun (drop material shower nozzle) 22 has a plurality ofnozzles 27 that are arranged in the row shape according to constant arrangement pitches D.

Printhead (drop injection of material mechanism) 22a is along the shower nozzle scanning direction (the middle conduct of Fig. 1 (a) is directions X longitudinally) as constant direction,substrate 2 is carried out main scanning, simultaneously,substrate 2 is carried out subscan along the shower nozzle that intersects with this shower nozzle scanning direction X direction (among Fig. 1 (a) as horizontal Y direction) the moving interval P according to the rules that enters a new line.

Each ink gun (drop material shower nozzle) 22 each nozzle from a plurality ofnozzles 27 is as the ink jet filter material, and a plurality of colour filters unit that the filter material of this injection is supplied on thesubstrate 2 selectively formszone 7, is that pixel forms in the zone.In addition, as required, repeatedly carry out the main scanning and the subscan of ink gun (drop material shower nozzle) 22 repeatedly, filter material is formed in thezone 7 attached to the colour filter ofsubstrate 2 is first with the shape of regulation and the thickness of regulation.Therefore, thus thecolour filter unit 3 that forms the thickness of the shape of regulation and regulation onsubstrate 2 forms pixels.

As shown in this embodiment, being equivalent to R (red), G (green), the trichromatic colour filter of B (indigo plant)unit 3 in use carries out under the colored situation about showing, acolour filter unit 3 forms one and shows point, and R (red), G (green), B (indigo plant) three looks show that point constitutes a unit, forms a pixel.

In the present embodiment, the constant arrangement pitches of supposingnozzle 27 is " D ", in a plurality ofnozzles 27 that adjacent ink gun (drop material shower nozzle) 22 is provided with separately between end, mutual immediate nozzle be spaced apart " W " time, setting

W=mD (in the formula, m is the integer more than 2)

That is, constitute according to the size of the integral multiple of the arrangement pitches D ofnozzle 27 at the interval W between theadjacent nozzles 27 between adjacent ink gun (the drop material shower nozzle) 22.

In addition, shown in Fig. 1 (b), suppose that printhead (drop injection of material mechanism) 22a is " P " along the subscan moving interval of shower nozzle line feed direction Y, when the constant arrangement pitches ofnozzle 27 is " D ", sets simultaneously

P=nD (in the formula, n is the integer more than 1)

That is, the moving interval P of the subscan of ink gun (drop material shower nozzle) 22 constitutes according to the integral multiple of the arrangement pitches D ofnozzle 27.

By between the arrangement pitches D of interval W, subscan moving interval P of the nozzle between the adjacent ink gun (drop material shower nozzle) and nozzle, setting above-mentioned relation, when the main scanning of printhead (drop injection of material mechanism) 22a and subscan, can makenozzle 27form zone 7 in opposite directions with whole colour filters are first exactly, above them, pass through, therefore, can improve printing efficiency, and ink-jet in position.Thereby and thecolour filter unit 3 that can form uniform planar shape and uniform thickness thus forms pixel onsubstrate 2.

Fig. 2 represents the using method of ink gun (drop material shower nozzle) 22 of another embodiment of the manufacture method of colour filter of the present invention.In this embodiment, more than one ink gun (drop material shower nozzle) 22 is with respect to shower nozzle line feed direction Y tilt angle theta arrangement respectively.But θ is less than 180 ° angle greater than 0 °.

Be " D " if establish the constant arrangement pitches ofnozzle 27, thennozzle 27 is " Dcos θ " along the arrangement pitches of shower nozzle line feed direction Y.In addition, suppose in a plurality ofnozzles 27 that ink gun adjacent each other (drop material shower nozzle) 22 is provided with separately between end, mutual immediate nozzle be spaced apart " W " time, set

W=mDcos θ (in the formula, m is the integer more than 2)

That is, the interval W in the line feed of the shower nozzle between theadjacent nozzles 27 direction between adjacent ink gun (the drop material shower nozzle) 22 constitutes according to the integral multiple ofnozzle 27 along the arrangement pitches Dcos θ of shower nozzle line feed direction.

In addition, make printhead (drop injection of material mechanism) 22a be the integral multiple ofnozzle 27 simultaneously, promptly along the arrangement pitches Dcos θ of shower nozzle line feed direction Y along the subscan moving interval P (with reference to Fig. 1 (b)) of shower nozzle line feed direction Y

P=nDcos θ (in the formula, n is the integer more than 1)

Utilize this structure, even the interval between colour filter unit 3 (with reference to Fig. 1 (a)) (promptly, colour filter unit spacing) under different with the nozzle arrangement space D situation, also can set to such an extent that makewhole nozzles 27 of ink gun (drop material shower nozzle) 22 form the zone by pixel exactly, therefore, can usewhole nozzles 27 that China ink is ejected into appropriate location on the substrate 2.And the pixel that can improve colour filter thus forms efficient, is printing efficiency.

In addition, in Fig. 1 or printhead (drop injection of material mechanism) 22a shown in Figure 2, more than one ink gun (drop material shower nozzle) 22 is positioned at the more than onenozzle 27 at both ends separately, for example both ends separatelynozzle 27 also can be configured the colour filter unit that filter material is not ejected on thesubstrate 2 and form in thezone 7.

If do like this, even then at ink gun (drop material shower nozzle) 22 along under the big situation of the black spray distribution characteristic variations ofnozzle rows 28, also can dispose colour filter unit in the colour filterunit formation zone 7 separately insubstrate 2 from the China ink of this ink gun (drop material shower nozzle) 22 ejection right quantities with uniform in-plane shape and thickness.

Suppose, using along under the situation of whole 180nozzles 304 of thenozzle rows 305 shown in Figure 26 (a), the thickness thickening of thecolour filter unit 303 that the material that is sprayed by thenozzle 304 from the end forms, transmissivity or reflectivity descend, consequently, in the picture of observing by colour filter, might form the band-like portions of extending along main scanning direction.

Different therewith, as mentioned above, for example in Fig. 1 and Fig. 2, do not spray filter material if be configured so that 10nozzles 27 separately at both ends, ink-jet is carried out in then the number ofnozzle 27 is equal to (180-10-10) individual=160, eachcolour filter unit 3 becomes the colour filter unit with uniform in-plane shape and thickness, and therefore, the colour filter that is obtained forms uniform colour filter on the optics.

In addition, using Fig. 1 or printhead (drop injection of material mechanism) 22a shown in Figure 2 forming on thesubstrate 2 under the situation ofcolour filter unit 3, when constituting filter material by R (red), G (green) and three kinds of printing ink of B (indigo plant), more than one ink gun (drop material shower nozzle) 22 can be distinguished into three kinds, so that a kind of in the ejection of 27 at whole a plurality of nozzles of Pai Lieing R (red), G (green), three kinds of printing ink of B (indigo plant) respectively, form thecolour filter unit 3 of corresponding a kind of color.

In the case, adjacent spaces with regulation in printhead (drop injection of material mechanism) 22a is arranged more than one each ink gun (drop material shower nozzle) 22, by by this printhead (drop injection of material mechanism)22a scanning substrate 2, in a main scanning, can onsubstrate 2, form simultaneously simultaneously corresponding to R (red), G (green), B (indigo plant)colour filter unit 3 of all kinds.Therefore, can improve pixel forms efficient, is printing efficiency.

In addition, constituting under the situation of filter material by R (red), G (green), three kinds of printing ink of B (indigo plant), can adopt such structure: the inside of at least one in a plurality of ink guns (drop material shower nozzle) 22 forms a plurality of, three streams independently for example, and each the different printing ink in R (red), G (green), three kinds of printing ink of B (indigo plant) is imported respectively in each stream of these streams.

In the case, can spray the printing ink of different colours from the nozzle in the same ink gun (drop material shower nozzle) 22 27, adopt that this method also can be sprayed R (red), G (green) simultaneously in a main scanning, B (indigo plant) is of all kinds, can onsubstrate 2, form simultaneously corresponding tocolour filter unit 3 of all kinds.Adopting this method also can improve pixel forms efficient, is printing efficiency.

(embodiment of the manufacturing installation of colour filter)

In Fig. 1, the manufacturing installation of colour filter of the present invention is thecolour filter unit 3 that makes regulation shape and specific thickness, thus the device of thecolour filter 1 that pixel arrangement is constituted onsubstrate 2.

Fig. 1, Fig. 8 and Fig. 9 represent an embodiment of the manufacturing installation of colour filter of the present invention.The control device of the colour filter here has: printhead (the drop injection of material mechanism) 22a (with reference to Fig. 1) that a plurality ofnozzles 27 are arranged; Filter material is supplied with the filter material feedway (not shown) of a plurality ofnozzles 27; Printhead (drop injection of material mechanism) 22a is moved,substrate 2 is carried out the main scanning drive unit 19 (with reference to Fig. 2 and Fig. 3) of main scanning; Printhead (drop injection of material mechanism) 22a is moved,substrate 2 is carried out the subscan drive unit 21 (with reference to Fig. 2 and Fig. 3) of subscan; The nozzle ejection control device (not shown) of the work ofcontrol nozzle 27; The main scanning control device (not shown) of the work of control mainscanning drive unit 19; And the subscan control device (not shown) of the work of control subscan driveunit 21.

In said structure, a plurality ofnozzles 27 are arranged in the more than one ink gun (drop material shower nozzle) 22 of row shape according to constant arrangement pitches D, and so more than one ink gun (drop material shower nozzle) 22 adjacent spaces is according to the rules lined up forms printhead (drop injection of material mechanism) 22a again.In addition, filter material feedway (not shown) is supplied with filter material at a plurality ofnozzles 27 that constitute printhead (drop injection of material mechanism) 22a.Form and be ejected into pixel thezone 7 and form in the zone thereby be ejected into colour filter unit on thesubstrate 2 selectively, form pixels thereby formcolour filter unit 3 from this filter material that thesenozzles 27 will be supplied to.

Mainscanning drive unit 19 makes printhead (drop injection of material mechanism) 22a move along the shower nozzle scanning direction (that is, the vertical X among Fig. 1) as constant direction, andsubstrate 2 is scanned.In addition,subscan drive unit 21 makes printhead (drop injection of material mechanism) 22a move along shower nozzle line feed direction Y moving interval P (with reference to Fig. 1 (b)) according to the rules, andsubstrate 2 is carried out subscan.In addition, not shown above-mentioned nozzle ejection control device is controlled from the emitted dose and the injecting time of the filter material of a plurality ofnozzles 27 injections.

In the manufacturing installation of the colour filter of present embodiment, printhead (drop injection of material mechanism) 22a is moved along the shower nozzle scanning direction (that is, the vertical X among Fig. 1 (a)) as constant direction,substrate 2 is carried out main scanning.And, meanwhile, it is moved along shower nozzle line feed direction Y moving interval P according to the rules,substrate 2 is carried out subscan.

During these main scannings and subscan, from more than one ink gun (drop material shower nozzle) thus a plurality ofnozzles 27 of arranging 22 are ejected into colour filter unit on thesubstrate 2 selectively with filter material to be formed and is ejected into pixel in thezone 7 and forms in the zone.In addition, as required, repeatedly carry out above-mentioned main scanning and subscan repeatedly, form in the zone attached to pixel thereby filter material is formed in thezone 7 attached to the unit of the colour filter on thesubstrate 2 with regulation shape and specific thickness.Therefore, thus with thecolour filter unit 3 of regulation shape and specific thickness with pixel arrangement onsubstrate 2.

In addition, in the manufacturing installation of the colour filter of present embodiment, in Fig. 1, ink gun (drop material shower nozzle) 22 separately end, the space W between the immediate nozzle is the integral multiple of the arrangement pitches D ofnozzle 27 simultaneously, promptly

W=mD (in the formula, m is the integer more than 2)

And simultaneously, printhead (drop injection of material mechanism) 22a is that P is the integral multiple of the constant arrangement pitches D ofnozzle 27 along the subscan moving interval of shower nozzle line feed direction Y, promptly

P=nD (in the formula, n is the integer more than 1)

Fig. 3 represents the example of printhead (the drop injection of material mechanism) 22a in the manufacturing installation of colour filter of the present invention.In this embodiment, printhead (drop injection of material mechanism) 22a has 6 ink guns (drop material shower nozzle) 22, forms in each ink gun (drop material shower nozzle) 22 by a plurality of, thenozzle rows 28 of the linearity that forms of 12nozzles 27 for example.The disposition interval P3 ofnozzle 27 for example is 141 microns, and the diameter D1 ofnozzle 27 for example is 28 microns, and the formation spacing of colour filter unit (thereby, pixel) for example is 141 microns.

In addition, as mentioned above, as shown in Figure 2, ink gun (drop material shower nozzle) 22 can with respect to shower nozzle enter a new line direction Y respectively the cant angle theta angle arrangement is set.This angle θ is less than 180 ° angle greater than 0 °.And in the case, the space W of thenozzle 27 of the adjacent end of adjacent ink gun (drop material shower nozzle) 22 is the integral multiple ofnozzle 27 along the arrangement pitches Dcos θ of shower nozzle line feed direction Y, promptly

W=mDcos θ (in the formula, m is the integer more than 2)

And simultaneously, printhead (drop injection of material mechanism) 22a is the integral multiple ofnozzle 27 along the arrangement pitches Dcos θ of shower nozzle line feed direction Y along the subscan moving interval P (with reference to Fig. 1) of shower nozzle line feed direction Y, promptly

P=nDcos θ (in the formula, n is the integer more than 1)

Fig. 4 represents another example of printhead (the drop injection of material mechanism) 22a in the manufacturing installation of colour filter of the present invention.In this embodiment, printhead (drop injection of material mechanism) 22a has 6 ink guns (drop material shower nozzle) 22, is provided with in each ink gun (drop material shower nozzle) 22 by a plurality of, 12nozzle rows 28 thatnozzle 27 forms for example.Ink gun (drop material ejection shower nozzle) 22 is with the tilt angle theta setting, and this tilt angle theta is set to for example 57.9 °.

In addition, the arrangement pitches ofnozzle 27 for example is 141 microns, and the diameter ofnozzle 27 for example is 28 microns, and the formation spacing of colour filter unit (thereby, pixel) for example is 75 microns.

(example of colour filter)

Below, the colour filter made from the manufacture method and the manufacturing installation thereof of colour filter of the present invention is described.Fig. 5 is the plane of the flat shape of this colour filter of expression, and it is overall that particularly (a) expression cuts each colour filter motherboard before, (b) represents a colour filter that is cut.

Fig. 6 represents the manufacturing process of colour filter according to process sequence, and each figure is equivalent to along the part of the cross-section structure of the colour filter of the VII-VII line among Fig. 5 (b).Particularly in Fig. 6, (a) filter material state is before sprayed in expression, (b) state after the expression injection filter material, and (c) state of colour filter unit has been disposed in expression, (d) represents to have formed the state behind the diaphragm again.

In Fig. 5,colour filter 1 forms like this: a plurality ofcolour filter unit 3 is point-like figure (in Fig. 5 (b), being lattice-like) is configured on the surface of therectangular substrate 2 that is made of glass, plastics etc., shown in Fig. 6 (d), protective layer 4 is layered in above it again.Thecolour filter 1 of the state after in addition, protective layer 4 is removed in Fig. 5 (b) expression.

Shown in Fig. 6 (d), in the zone that is divided into bypartition 6, form colour filter unit 3.The resin material that utilization does not have a light transmission is seen thispartition 6 formed according to the arrow shower nozzle B from Fig. 6 (a) and is latticed figure.Utilize thispartition 6 to form and be a plurality of rectangular region that lattice-like is arranged,, formcolour filter unit 3 by being embedded in these zones with the look material.

In addition, thesecolour filter units 3 are formed by the filter material of a certain color among R (red), G (green) and the B (indigo plant) respectively, and form is according to the rules arranged these colour filter of all kinds units 3.As this arrangement, can be that any one in shape arrangement and the rounded projections arranged etc. arranged, inlayed in the bar shaped shown in Fig. 7 (a)～Fig. 7 (c).

The bar shaped arrangement is that the file of matrix all is the arrangement with a kind of color.Inlaying that shape arranges is the arrangement that three colour filter units arbitrarily of arranging on straight line in length and breadth are R (red), G (green), three kinds of colors of B (indigo plant).And rounded projections arranged is the very big-difference that disposes that makes colour filter unit, and three adjacent colour filter units all are the arrangement of R (red), G (green), three kinds of colors of B (indigo plant) arbitrarily.

In Fig. 5 (b), the big or small T0 ofcolour filter 1 for example is 1.8 inches.In addition, the size of acolour filter unit 3 for example is horizontal * vertical=L0 * L1=30 micron * 100 micron.In addition, the interval between each colour filter unit 3 (spacing between the so-called unit) P4 for example is 75 microns.

In addition, the spacing of the sub scanning direction ofcolour filter 1 is preferably the integral multiple of the arrangement pitches of colour filter unit 3.By such formation, can more effectively formcolour filter unit 3.

Under with the situation ofsuch colour filter 1 as the optical parameter use of panchromatic demonstration usefulness, R (red), G (green), threecolour filter units 3 of B (indigo plant) are formed as one unit a pixel, by R (red), G (green) in the pixel, the combination of any one or they among the B (indigo plant) light is passed through selectively, can carry out panchromatic demonstration.At this moment, thepartition 6 that is formed by the resin material that does not have light transmission has the function as black matrix.

For example, by cutting, can form above-mentionedcolour filter 1 from the large-area mother substrate 12 shown in Fig. 5 (a).Specifically, at first, the a plurality of colour filters that constitute inmother substrate 12 form the figure that formscolour filter 1 part on the surface separately in zone 11, the periphery that forms zone 11 at these colour filters forms the groove that cuts off usefulness, by cutting offmother substrate 12, can formcolour filter 1 one by one again along these grooves.

(manufacture method of colour filter and the embodiment of manufacturing installation thereof)

Below, be example with the situation of thecolour filter 1 shown in the shop drawings 5 (b), be described more specifically the manufacture method and the manufacturing installation thereof of colour filter of the present invention.In addition, in Fig. 6 (a), utilize the resin material that does not have light transmission on the surface ofmother substrate 12, to form and see thepartition 6 that is latticed figure from the direction of arrow shower nozzle B.Thegrid hole part 7 that is latticed figure is the zones that form colour filter unit 3.When the direction of arrow shower nozzle B is seen, the planar dimension that each colour filter unit that is formed by thispartition 6forms zone 7 for example for horizontal * indulge about=30 microns * 100 microns.

Partition 6 has the mobile function of the filter material that stops supply colour filter unit to formzone 7 simultaneously and deceives the function of matrix.In addition, use composition method, for example photoetchingprocess formation partition 6 arbitrarily, more as required, use the heater heated baking.

After formingpartition 6, in Fig. 6 (b),form zone 7, filter material 13 is filled in each colour filter unit forms in thezone 7 by thedrop 8 of filter material is supplied with colour filter unit.In addition, in Fig. 6 (b), show the situation of the filter material 13B of the filter material 13G of filter material 13R, G (green) look that uses R (red) look and B (indigo plant) look.

If the filter material of ormal weight 13 is filled in each colour filter unit and forms in thezone 7, convenientlymother substrate 12 for example is heated to about 70 ℃ with heater, make the solvent evaporation in the filter material 13.By this evaporation, shown in Fig. 6 (c), the volume of filter material 13 reduces.Under the situation that volume sharply reduces, before enough thickness can being obtained, carry out the supply ofdrop 8 of filter material 13 and the heating of thisdrop 8 repeatedly as colour filter.By above processing, at last only stay the solid-state part of filter material 13 and form film, therefore, can form desirable colour filter of allkinds unit 3.

After as above having formedcolour filter unit 3,, carry out the heat treated of stipulated time with the temperature of regulation in order to make thesecolour filter unit 3 bone dries.Then, for example with whirl coating, rolling method, isolate suitable method such as method and form diaphragm 4.Form this diaphragm 4 and mainly be having an even surface in order to protect colour filter unit's 3 grades and to makecolour filter 1.

An embodiment of the ink discharge device (drop injection of material device) of usefulness is handled in the supply that Fig. 8 represents to carry out the filter material 13 shown in Fig. 6 (b).This ink discharge device (drop injection of material device) the 16th as ink droplet, sprays the filter material of a kind of color among R (red), G (green), the B (indigo plant), for example R look and form the device that the assigned positions in the zone 11 are used attached to each colour filter in the mother substrate 12 (with reference to Fig. 5 (a)).Also can prepare the ink discharge device (drop injection of material device) that the filter material of the filter material of G look and B look is used respectively, their structure is identical with structure shown in Figure 8.

In Fig. 8, ink discharge device (drop injection of material device) 16 has: have theejection head unit 26 of arranging more than one ink gun (drop material shower nozzle) 22 printheads that form (drop injection of material mechanism) 22a (with reference to Fig. 1) with the adjacent spaces of regulation; The nozzleposition control device 17 of the position of control printhead (drop injection of material mechanism) 22a; The substrateposition control device 18 of the position ofcontrol mother substrate 12; Make 22 pairs ofmother substrates 12 of ink gun (drop material shower nozzle) carry out the mainscanning drive unit 19 that main scanning is moved; Make 22 pairs ofmother substrates 12 of ink gun (drop material shower nozzle) carry out thesubscan drive unit 21 that subscan is moved;Mother substrate 12 is supplied with thesubstrate feedway 23 of the job position of the regulation in the ink discharge device (drop injection of material device) 16; And thecontrol device 24 that carries out whole controls of ink discharge device (drop injection of material device) 16.

Each device such as nozzleposition control device 17, substrateposition control device 18, mainscanning drive unit 19 and subscan driveunit 21 is set on the pedestal 9.In addition, as required, cover these devices with covering 14.

As shown in figure 10, ink gun (drop material shower nozzle) 22 for example has by a plurality ofnozzles 27 are arranged in thenozzle rows 28 that the row shape forms.The number ofnozzle 27 for example is 180, and the aperture D1 ofnozzle 27 for example is 28 microns, and the injector spacing P3 between thenozzle 27 for example is 141 microns.In addition, with respect to shower nozzle scanning direction (that is, the main scanning direction) X ofcolour filter 1 among Fig. 5 (a) and Fig. 5 (b) andmother substrate 12 and with the sub scanning direction Y of its quadrature, correspond respectively to directions X and Y direction among Figure 10.

In addition, as shown in figure 11, alsonozzle rows 28 can be provided with two row along shower nozzle scanning direction X, utilize twonozzles 27 that are stated from the same main scanning line, filter material be supplied with a colour filter unit form zone 7.At this moment, the arrangement pitches P3 ofnozzle 27 can be set at about 141 microns.

In addition, as shown in figure 12, also can tworow nozzle rows 28 be set, in addition a plurality ofnozzles 27 be arranged to zigzag,, filter material be supplied with colour filter unit form zone 7 (with reference to Fig. 1 (a)) by thesenozzles 27 along shower nozzle scanning direction X.In addition, be 141 microns if make the arrangement pitches D ofnozzle 27 in the case, then the spacing P5 along the reality between the multi-strip scanning line of main scanning direction X extension is its half promptly 70.5 microns.

In addition, as shown in figure 13, along shower nozzle scanning direction X the adjacent a pair ofnozzle rows 28 of many groups is set, the a plurality ofnozzles 27 that comprise in the above-mentioned a pair ofnozzle rows 28 are arranged in zigzag simultaneously, constitute ink gun (drop material shower nozzle) 22, also can filter material be supplied with colour filter unit andform zone 7 with these nozzles 27.In addition, in Figure 13, having drawn two groups has a pair ofnozzle rows 28 that is configured to jagged nozzle 27.In addition, though the arrangement pitches D ofnozzle 27 is 141 microns, the spacing P5 of the reality on the main scanning line that extends along directions X be its half be 70.5 microns.

In addition, as shown in figure 14, also can be along shower nozzle scanning direction X, 1/3 spacing that respectively staggers is provided with 3row nozzle rows 28, filter material is supplied with colour filter unit form zone 7.In the case, though the arrangement pitches D ofnozzle 27 is 141 microns, the spacing P5 of the reality on the main scanning line that extends along directions X be that it 1/3rd is 47 microns.

As shown in Figure 1, ink gun (drop material shower nozzle) 22 constitutes and makes this nozzle rows 28 be positioned at direction with shower nozzle scanning direction X quadrature, in addition, and along with the difference of situation, as shown in Figure 2, be arranged to respect to the tilt angle θ of regulation of the direction of shower nozzle scanning direction X quadrature.This ink gun (drop material shower nozzle) 22 is during the X translation of shower nozzle scanning direction, spray filter material, be printing ink from a plurality of nozzles 27 selectively, filter material is formed among 7 (with reference to Fig. 6 (a)) of zone attached to the unit of the colour filter in the mother substrate 12 (with reference to Fig. 5 (a)).In addition, ink gun (drop material shower nozzle) 22 is by along sub scanning direction Y translation predetermined distance, the interval that can make the main scanning position of ink gun (drop material shower nozzle) 22 stagger regulation.Ink gun (drop material shower nozzle) 22 for example has the internal structure shown in Figure 15 (a) and Figure 15 (b).Specifically, ink gun (drop material shower nozzle) 22 for example has: the nozzle plate 29 of stainless steel; With its oscillating plate 31 in opposite directions; And a plurality of insulating elements 32 that they are interosculated.Between nozzle plate 29 and oscillating plate 31, utilize insulating element 32 to form a plurality of black chambers 33 and reservoir 34.A plurality of black chambers 33 and reservoir 34 interconnect by path 38.Appropriate location at oscillating plate 31 forms ink supply aperture 36, and ink-feeding device 37 is connected on this China ink supply hole 36.This ink-feeding device 37 is supplied with ink supply aperture 36 with the filter material M of a kind of color among R (red), G (green), the B (indigo plant), for example R look.The filter material M that is supplied to is filled in the reservoir 34, is filled in the black chamber 33 by path 38 again.

Be jet-like sprays thenozzle 27 that filter material M uses and is set on thenozzle plate 29 from black chamber 33.In addition,black press body 39 is installed in the back side that forms the face ofblack chamber 33 on theoscillating plate 31 corresponding to black chamber 33.Shown in Figure 15 (b), this Chinaink press body 39 haspiezoelectric element 41 and its pair ofelectrodes 42a of clamping and42b.Piezoelectric element 41 is by toelectrode 42a and 42b energising, and is outstanding and occur bending and deformation towards the outside shown in the arrow shower nozzle C, thereby increases the volume of black chamber 33.So, divide suitable filter material M to flow intoblack chamber 33 bypath 38 fromreservoir 34 with the capacity that increases.

Secondly, in case remove energising topiezoelectric element 41, thispiezoelectric element 41 and oscillatingplate 31 all return original shape.Therefore, original volume is also returned inblack chamber 33, rises so be in the pressure of the filter material M of 33 inside, black chamber, and filter material M becomesdrop 8, sprays towards mother substrate 12 (with reference to Fig. 5 (a)) from nozzle 27.In addition, the obstruction of andnozzle 27 crooked for the trace that prevents drop 8 etc. are provided with the ink-repellent layer 43 that for example is made of Ni-tetrafluoroethene eutectoid coating at the periphery ofnozzle 27.

In Fig. 9, nozzleposition control device 17 has: theα motor 44 that ink gun (drop injection of material mechanism) 22a is planar rotated; Make theβ motor 46 of ink gun (drop injection of material mechanism) 22a around the axis swing rotation that is parallel to sub scanning direction Y; Make theγ motor 47 of ink gun (drop injection of material mechanism) 22a around the axis swing rotation that is parallel to shower nozzle scanning direction X; And make ink gun (drop injection of material mechanism) the22a Z motor 48 of translation along the vertical direction.

As shown in Figure 9, substrateposition control device 18 shown in Figure 8 has: theworkbench 49 of carryingmother substrate 12; And theθ motor 51 that thisworkbench 49 is planar rotated along arrow shower nozzle θ.In addition, as shown in Figure 9, mainscanning drive unit 19 shown in Figure 8 has: along theguide rail 52 of main scanning direction X extension; And theinner slide block 53 that the linear motor of pulsed drive is housed.During inner linear motor work of installing,slide block 53 alongguide rail 52 towards main scanning direction X translation.

In addition, as shown in Figure 9,subscan drive unit 21 shown in Figure 8 has: along theguide rail 54 of sub scanning direction Y extension; And theslide block 56 of the linear motor of built-in pulsed drive.During the work of built-in linear motor,slide block 56 alongguide rail 54 towards sub scanning direction Y translation.

Inslide block 53 orslide block 56, the linear motor of pulsed drive is according to the pulse signal of supplying with motor, can accurately carry out the anglec of rotation control of output shaft, therefore, can highly precisely control the ink gun (drop material shower nozzle) 22 that is supported on theslide block 53 position and the position ofworkbench 49 on sub scanning direction Y etc. on the X of shower nozzle scanning direction.

In addition, the Position Control that the Position Control of printhead (drop injection of material mechanism) 22a andworkbench 49 not only is to use pulse motor to carry out also can adopt the FEEDBACK CONTROL of using servomotor or other control method arbitrarily.

Substrate feedway 23 shown in Figure 8 has: thesubstrate resettlement section 57 of accommodatingmother substrate 12; And themanipulator 58 of carrying mother substrate 12.Manipulator 58 has: be arranged on floor, ground etc.pedestal 59 on the face is set; Liftingshaft 61 with respect topedestal 59 lifting moving; With liftingshaft 61 is thefirst arm 62 of center rotation;Second arm 63 with respect to thefirst arm 62 rotations; And be arranged onabsorption layer 64 below the front end of second arm 63.Absorption layer 64 utilizes air attraction etc., can adsorbmother substrate 12.

In Fig. 8, pressingdevice 76 andcleaning device 77 are configured in by mainscanning drive unit 19 and drive the track below of carrying out printhead (the drop injection of material mechanism) 22a that main scanning moves and on a side position of subscan drive unit 21.In addition, electronic balance 78 is configured on the opposite sideposition.Cleaning device 77 is the devices that are used for cleaning ink gun (drop material shower nozzle) 22.Electronic balance 78 is devices of each nozzle being measured the weight of the ink droplet that each nozzles 27 (with reference to Figure 10) in the ink gun (drop material shower nozzle) 22 spray.And pressingdevice 76 is to be used for preventing the dry device of nozzle 27 (with reference to Figure 10) when ink gun (drop material shower nozzle) 22 is in wait state.

Shower nozzle withvideo camera 81 with the relation that moves with printhead (drop injection of material mechanism) 22a one be configured in this printhead (drop injection of material mechanism) 22a near.In addition, the substrate that is supported on the bracing or strutting arrangement (not shown) that is set on thepedestal 9 is configured on the position that can make a video recording tomother substrate 12 withvideo camera 82.

Control device 24 shown in Figure 8 has: thecomputer body portion 66 of having accommodated processor;Keyboard 67 as input unit; And as CRT (cathode-ray tube)display 68 of display unit.As shown in figure 17, above-mentioned processor has: the CPU (central processing unit) 69 that carries out calculation process; And the memory 71 as information storage medium of storing various information.

As shown in figure 17, each device that drives the shower nozzle drive circuit 72 of the piezoelectric element 41 (with reference to Figure 15 (b)) in nozzleposition control device 17, substrateposition control device 18, mainscanning drive unit 19,subscan drive unit 21 and the ink gun (drop material shower nozzle) shown in Figure 8 22 is connected on the CPU69 by input/output interface 73 and bus 74.In addition, each device such assubstrate feedway 23,input unit 67,display 68, electronic balance 78,cleaning device 77 andpressing device 76 also is connected on the CPU69 by input/output interface 73 and bus 74.

Memory 71 is the notions that comprise external memories such as RAM (random access memory), ROM semiconductor memories such as (read-only storages) or hard disk, CD-ROM reading device, dish-type medium etc., and following memory block is arranged on function: the memory block of storage program software of having recorded and narrated the work control sequence of ink discharge device (drop injection of material device) 16; R (red), the G (green) of R (red), the G (green) that realization is shown in Figure 7, the various arrangement usefulness of B (indigo plant), a kind of color (for example, R1 look) among the B (indigo plant) store the memory block of usefulness as coordinate data with the ejection position in the mother substrate 12 (with reference to Figure 15 (a)); Storage is along memory block that the subscan amount of movement of themother substrate 12 of the sub scanning direction Y among Fig. 9 is used; Zone with function of the workspace used as CPU69 or temporary file etc.; And other various memory blocks.

CPU69 is according to the program software of storage in the memory 71, the control that the position of carry out filter material, to be ink jet stipulating to the surface ofmother substrate 12 is used, function realization portion as concrete has: the cleaning operational part of realizing the computing that cleaning treatment is used; Realize the gland operational part of the computing of gland processing usefulness; Realize the gravimetry operational part of the computing used with the gravimetry that electronic balance 78 (with reference to Fig. 8) carries out; And the operational part of describing that carries out describing computing that filter material uses by ink-jet.

Describing operational part has: describe the starting position operational part with what printhead (drop injection of material mechanism) 22a set that the initial position describe uses; Computing makes printhead (drop injection of material mechanism) 22a scan the main scanning control operational part of the control of mobile usefulness with the speed of regulation along shower nozzle scanning direction X; Computing makesmother substrate 12 along the sub scanning direction Y subscan moving interval according to the rules subscan control operational part of the control that the subscan amount uses that staggers; And control some work in a plurality ofnozzles 27 that make in the ink gun (drop material shower nozzle) 22, ink jet is the various function operational parts such as nozzle ejection control operational part of the computing used of filter material.

In addition, do not use the independent logic circuit of CPU or part or all that electronic circuit is realized above-mentioned various functions in employing, replace using CPU69 to realize with software under part or all the situation of above-mentioned various functions, can replaced C PU69 or except CPU69, use such electronic circuit etc.

Below, the work of the ink discharge device (drop injection of material device) 16 among the Fig. 8 that as above constitutes according to flowchart text shown in Figure 180.

Operating personnel with power connection after, ink discharge device (drop injection of material device) 16 is Once you begin worked, and at first, carries out initial setting in step S1.Specifically, the original state thatejection head unit 26,substrate feedway 23 andcontrol device 24 etc. are arranged to be scheduled to.

Secondly, if arrived weight is measured constantly (in step S2, be), then ejection head unit shown in Figure 9 26 is moved to the position (step S3) of electronic balance shown in Figure 8 78, measure the China ink amount (step S4) of spraying fromnozzle 27 with in 78 pairs ofwhole nozzles 27 of electronic balance each by main scanning drive unit 19.Then, as one man regulate the voltage (step S5) that is added in corresponding on thepiezoelectric element 41 of eachnozzle 27 with the black spray characteristic ofnozzle 27.

Secondly, clean constantly (in step S6 if arrive, be), thenejection head unit 26 is moved to the position (step S7) ofcleaning device 77 by mainscanning drive unit 19, utilize 77 pairs of ink guns of this cleaning device (drop material shower nozzle) 22 to clean (step S8).

At the no show gravimetry (in step S2 and S6, deny) constantly or under the cleaning situation constantly, perhaps under the situation that these processing are through with, in step S9, make substrate feedway shown in Figure 8 23 work,mother substrate 12 is supplied with workbench 49.Specifically, with themother substrate 12 inabsorption layer 64 attractions and the maintenancesubstrate resettlement section 57, secondly,mobile lifting shaft 61, thefirst arm 62 andsecond arm 63,mother substrate 12 is transported on theworkbench 49, touches again and set in advance on the alignment pin 50 (with reference to Fig. 9) of the appropriate location of workbench 49.In addition,, preferably utilize methods such as air attraction,mother substrate 12 is fixed on theworkbench 49 in order to prevent the position skew of themother substrate 12 on theworkbench 49.

Secondly, utilize substrate shown in Figure 8video camera 82, Yi Bian observemother substrate 12, Yi Bian rotate the output shaft ofθ motor 51 shown in Figure 9 with small angular unit, so as to workbench 49 is planar rotated with small angular unit,mother substrate 12 is positioned (step S10).Secondly, utilize shower nozzle shown in Figure 8video camera 81, observemother substrate 12 on one side, determine by ink gun (drop material shower nozzle) 22 positions that begin to describe (step S11) by computing on one side, then, mainscanning drive unit 19 and subscan driveunit 21 are suitably worked, make ink gun (drop material shower nozzle) 22 move (step S12) to describing the starting position.

At this moment, printhead (drop injection of material mechanism) 22a is set as shown in Figure 2 preferably, thereby so that a plurality ofnozzle 27nozzle rows 28 tilt with angle θ with respect to the sub scanning direction Y of printhead (drop injection of material mechanism) 22a.This is the measure of taking for following purpose: under the situation of common ink discharge device (drop injection of material device) 16, as the injector spacing D at the interval between theadjacent nozzles 27 with to be as adjacentcolour filter unit 3 that colour filter unit forms the element spacing at the interval between thezone 7 different mostly, when printhead (drop injection of material mechanism) 22a is moved along shower nozzle scanning direction X, equate with element spacing at the size component that makes injector spacing D geometrically on sub scanning direction Y.

In step S12 shown in Figure 180, ink gun (drop material shower nozzle) 22 is placed in describes the starting position, then, in step S13 shown in Figure 180, begins to carry out the main scanning along shower nozzle scanning direction X, begins ink-jet simultaneously.Specifically, after mainscanning drive unit 19 work shown in Figure 9, printhead (drop injection of material mechanism) 22a carries out linear scanning along shower nozzle scanning direction X with constant speed and moves, in this moves, when answering thenozzle 27 that formszone 7 corresponding to colour filter unit of ink supply to arrive, from thesenozzle 27 ejection filter material, be printing ink.

In addition, ink ejection amount at this moment is not that colour filter unit is formed the amount that whole volumes inzone 7 are buried, but the number of its total amount/one, specifically, is 1/4 amount of total amount.As hereinafter described, this is because rely on from an ink-jet ofnozzle 27 and each colour filterunit formation zone 7 can not be buried, and preferably by repeating for several times ink-jet, for example repeating for 4 times to spray, volume is all buried.

If printhead (drop injection of material mechanism) 22a finishes (in step S14, being) to the main scanning of delegation's part ofmother substrate 12,, return initial position (with reference to Fig. 1 (a)) (step S15) just counter-rotating is moved.Then, printhead (drop injection of material mechanism) 22a is driven bysubscan drive unit 21, moves predetermined subscan moving interval P (step S16) along sub scanning direction Y.

Carry out printhead (drop injection of material mechanism) 22a that subscan moves towards the position shown in Fig. 1 (b) and carry out repeatedly in step S13 that main scanning is moved and ink-jet.In addition, after this, printhead (drop injection of material mechanism) 22a carries out on one side subscan repeatedly and moves and carry out repeatedly on one side that main scanning is moved and ink-jet (step S13～step S16), and therefore, the printing ink that the colour filter ofmother substrate 12 unit forms the 1 row part in zone 11 adheres to processing to be finished.

In addition, in the present embodiment, accept repeatedly, 4 inkjet process for example, the ormal weight i.e. printing ink of regulation thickness is that filter material is supplied with in these whole volumes by full dose.

In addition, whennozzle rows 28 was carried out subscan successively and moved, thenozzle rows 28 of each position and thenozzle rows 28 of other positions butnozzle rows 28 each position between not overlapping along sub scanning direction Y carried out subscan continuously along sub scanning direction Y and moved.Therefore, the thickness of the filter material of ejection is even.

More than, if the colour filter in the mother substrate shown in Fig. 5 (a) 12 forms the ink-jet of the 1 row part in zone 11 and finishes, then ink gun (drop material shower nozzle) 22 driven bysubscan drive unit 21, and the colour filter that is transported to next column forms the initial position (step S19) in zone 11, the colour filter that is listed as is formed zone 11 carry out main scanning, subscan and ink-jet repeatedly, and formation colour filter unit in colour filter unit formation zone 7 (step S13～S16).

After this, if the whole colour filters inmother substrate 12 form thecolour filter unit 3 of a kind of color that the zone formed R (red), G (green) and B (indigo plant) in 11, for example R1 look (in step S17 and S18, be), then in step 20, utilizesubstrate feedway 23 or other conveying device, themother substrate 12 after handling is discharged to the outside.

After this,, just return step S2, anothermother substrate 12 is carried out repeatedly the ink-jet of R1 look and adhere to operation as long as operating personnel do not carry out the indication (in step S21, not) that processing finishes.

If indication from operating personnel's the end of job is arranged (in step S21, be), CPU69 is transported to the position of pressingdevice 76 with printhead (drop injection of material mechanism) 22a in Fig. 8, carries out gland with 76 pairs of printheads of this pressing device (drop injection of material mechanism) 22a and handles (step S22).

More than, the composition of R (red), the G (green) of formation colour filter, first look in B (indigo plant) three looks, for example R look finishes, after this,mother substrate 12 is flowed to the ink discharge device (drop injection of material device) 16 that is filter material with second look among R (red), G (green), the B (indigo plant), for example G look, carry out the composition of G look, flow to the ink discharge device (drop injection of material device) 16 that is filter material with the 3rd look among R (red), G (green), the B (indigo plant), for example B look at last again, carry out the composition of B look.Therefore, can make themother substrate 12 that has formed the colour filter 1 (with reference to Fig. 5 (b)) that a plurality of points with desirable R (red), G (green) such as bar shaped arrangement, B (indigo plant) look arrange.

In addition, under situation about showing for the colour thatcolour filter 1 is used for liquid crystal indicator, multilayer electrode and alignment films etc. on the surface ofcolour filter 1 again.Under these circumstances,, cut outcolour filter 1 one by one, then unusual trouble in the formation operation of electrode afterwards etc. if before multilayer electrode and alignment films etc.,mother substrate 12 is cut off.So, under these circumstances, onmother substrate 12, finished after thecolour filter 1, do not cut offmother substrate 12 at once, be preferably in that electrode forms and the additional process end of necessity such as alignment films formation after cut offmother substrate 12 again.

As mentioned above, eachcolour filter unit 3 in thecolour filter 1 shown in Fig. 5 (b) does not carry out a main scanning by ink gun (drop material shower nozzle) 22 along directions X and forms, but eachcolour filter unit 3 by a plurality ofnozzles 27 that belong to different nozzle sets repeat n time, for example accept ink-jet 4 times, form with the thickness of stipulating.Therefore, even suppose to exist under the discrete situation at ink ejection amount between a plurality ofnozzles 27, it is discrete also to prevent that thickness from taking place between a plurality ofcolour filter unit 3, therefore, can make the optical transmission characteristics of colour filter become even in the plane.

In addition, as mentioned above, the distribution of the ink ejection amount of a plurality ofnozzles 27 of thenozzle rows 28 of formation ink gun (drop material shower nozzle) 22 becomes inhomogeneous, in addition, particularly be present innozzle rows 28 both ends more than one (for example, each 10 at one end)nozzle 27 is especially corresponding to increasing ink ejection amount, as shown in figure 16, forming more than of both ends E (for example about 10) who is present innozzle rows 28 in a plurality ofnozzles 27 of ink gun (drop material shower nozzle) 22 preferably constitutes in advance and does not make the printing ink ejection.For example, be under 180 the situation in the number ofnozzle 27, make to apply voltage etc. and have condition, so that each 10 at two ends, add up to 20nozzle 27 not ink-jets, can be with 160 ink-jets of remaining central portion.

In the above description, though the resin material of use opaqueness is aspartition 6 in Fig. 6, the resin material that also can use light transmission is as partition 6.In the case, also can be betweencolour filter unit 3 corresponding position, above forexample partition 6 orpartition 6 below the metal film of light-proofness or resin material are set in addition as black mask.

In addition,, be not limited to R (red), G (green), B (indigo plant), for example also can use C (dark blue), M (dark red), Y colors such as (Huangs) though used R (red), G (green), B colors such as (indigo plants) as colour filter unit 3.In the case, available filter material with C, M, Y isochrome replaces the filter material of R (red), G (green), B (indigo plant) look.

In the above description, though adopt photoetching process to formpartition 6, the same withcolour filter 3, also can adopt ink-jet method to form.

(the change example of ink gun (drop material shower nozzle))

Figure 19 represents ink gun (the drop injection of material mechanism) 22A that uses among another embodiment of the manufacture method of colour filter of the present invention and manufacturing installation.This ink gun (drop injection of material mechanism) 22A and ink gun (drop material shower nozzle) shown in Figure 10 22 different places are: at the last nozzle rows 28R that sprays the R color ink that forms of an ink gun (drop injection of material mechanism) 22A, spray the nozzle rows 28G of G color ink, and the such three kinds of nozzle rows of nozzle rows 28B of spraying the B color ink, in this each of three kinds, be provided with the ink-jet system shown in Figure 15 (a) and Figure 15 (b), R ink-feeding device 37R is connected on the ink-jet system corresponding to R chromatic nozzle row 28R, G ink-feeding device 37G is connected on the ink-jet system corresponding to G chromatic nozzle row 28G, and B ink-feeding device 37B is connected on the ink-jet system corresponding to B chromatic nozzle row 28B.

(the change example of the manufacture method of colour filter and manufacturing installation)

In addition, for example in the embodiment of the manufacture method of the colour filter of above explanation and manufacturing installation, shown in Fig. 5 (a), formation multiple row colour filter forms zone 11 inmother substrate 12 though show for example, with form regional 11 little ink guns (drop material shower nozzle) 22 than these colour filters, in forming zone 11, each colour filter forms the situation ofcolour filter unit 3, but also can use its length to form zone 11 the length of side but thenozzle rows 28 shorter, formation colour filter unit 3 amother substrate 12 in than one side ofmother substrate 12 than a colour filter.

In addition, inmother substrate 12, constitute the situation that the multiple row colour filter forms zone 11, also can inmother substrate 12, constitute a row colour filter and form zone 11 though show for example.In addition, it is roughly the same or form zone 11 than its much smaller colour filter also can to constitute its size andmother substrate 12 in thismother substrate 12.

In addition, in Fig. 8 and ink discharge device (drop injection of material device) 16 shown in Figure 9, though printhead (drop injection of material mechanism) 22a is moved along directions X,substrate 12 is carried out main scanning, utilizesubscan drive unit 21 thatsubstrate 12 is moved along the Y direction, 22a carries out subscan tosubstrate 12 by printhead (drop injection of material mechanism), but also can be opposite, bysubstrate 12 is moved along the Y direction, carry out main scanning, by ink gun (drop material shower nozzle) 22 is moved along directions X, carry out subscan.

(manufacture method of liquid crystal indicator)

Figure 20 represents an embodiment of the manufacture method of liquid crystal indicator of the present invention with operation figure.In addition, Figure 21 represents to utilize an example of the liquid crystal indicator that this manufacture method makes.In addition, Figure 22 represents along the cross-section structure of the liquid crystal indicator of the X-X line among Figure 21.

In addition, the liquid crystal indicator of explanation is the liquid crystal indicator that carries out the Transflective mode of panchromatic demonstration with the simple matrix mode here.

In Figure 21,liquid crystal indicator 101 forms like this: will be installed on theliquid crystal panel 102 with IC103a and 103b as the driving of semiconductor chip, to be connected on theliquid crystal panel 102 as the FPC (flexible print circuit) 104 of wiring Connection Element, againlighting device 106 is arranged on the back side ofliquid crystal panel 102 as backlight.

Utilize encapsulant 108 that thefirst substrate 107a and thesecond substrate 107b are fit together and form liquid crystal panel 102.For example, utilize methods such as serigraphy, make epoxylite in the form of a ring on the inner surface attached to thefirst substrate 107a or thesecond substrate 107b, form encapsulant 108.In addition, as shown in figure 22, contain theconductive material 109 spherical or cylindraceous that constitutes by conductive material that is dispersity inencapsulant 108 inside.

As shown in figure 22, thefirst substrate 107a has thetabular matrix material 111a that is formed by transparent glass or transparent plastics etc.Go upformation reflectance coating 112 at the inner surface (uper side surface among Figure 22) of thismatrix material 111a, stackeddielectric film 113 on it, ondielectric film 113, form the first electrode 114a, from arrow shower nozzle D direction, this first electrode 114a is strip (with reference to Figure 21), forms alignment films 116a again on the first electrode 114a.In addition, utilize method such as stickup that polarizer 117a is mounted on the outer surface (downside surface of Figure 22) ofmatrix material 111a.

In Figure 21, in order to represent easily the arranging situation of the first electrode 114a expressly, these intervals are depicted as bigger than the width of reality, therefore, the bar number of the first electrode 114a that depicts is few, but in fact can form more the first electrode 114a onmatrix material 111a.

In Figure 22, thesecond substrate 107b has thetabular matrix material 111b that is formed by transparent glass or transparent plastics etc.Go upformation colour filter 118 at the inner surface (downside surface among Figure 22) of thismatrix material 111b, on it, form thesecond electrode 114b, from arrow shower nozzle D direction along with the direction of the above-mentioned first electrode 114a quadrature, thissecond electrode 114b is strip (with reference to Figure 21), formsalignment films 116b again on the second electrode 114b.In addition, utilize method such as stickup thatpolarizer 117b is installed on the outer surface (uper side surface of Figure 22) ofmatrix material 111b.

In Figure 21, in order to represent the arranging situation of thesecond electrode 114b easily expressly, identical with the situation of the first electrode 114a, describe these intervals bigger than actual width, therefore, the bar number of thesecond electrode 114b that depicts is few, but in fact can form more thesecond electrode 114b onmatrix material 111b.

In Figure 22, liquid crystal, for example STN (supertwist is to row) liquid crystal is enclosed in the gap (so-called box crack) that is surrounded by thefirst substrate 107a, thesecond substrate 107b and encapsulant 108.Many smallspherical liners 119 are dispersed on the inner surface of thefirst substrate 107a or thesecond substrate 107b, owing in the box crack, have theseliners 119, so can keep the thickness in this box crack equably.

The first electrode 114a and the configuration of thesecond electrode 114b mutually orthogonal ground, the direction of the arrow shower nozzle D from Figure 22, their crossover arrangement becomes lattice-like.And each crosspoint of this lattice-like constitutes one and shows point.From arrow shower nozzle D direction, with the identical permutation of all kinds of R (red), G (green) and B (indigo plant) become regulation figure, for example bar shaped arrangement, rounded projections arranged, inlay shape and arrange figures, form colour filter 118.Above-mentioned one shows point corresponding to each a kind of color among these R (red), G (green), the B (indigo plant), and three looks of R (red), G (green), B (indigo plant) show that point becomes a unit, constitutes a pixel.

By making a plurality of demonstration points (thereby making pixel) that are arranged in lattice-like luminous selectively, can be at the picture of the outside display text of thesecond substrate 107b ofliquid crystal panel 102, numeral etc.The zone that can show picture like this is an effective pixel area, and in Figure 21 and Figure 22, the rectangular area on the plane of representing with arrow shower nozzle V becomes this effective viewing area V.

In Figure 22,reflectance coating 112 is for example formed by APC alloy, Al light reflective material such as (aluminium), corresponding to showing that as each of the crosspoint of the first electrode 114a and thesecond electrode 114b position of point forms opening 121.As a result, the arrow shower nozzle D direction from Figure 22, opening 121 is identical with the demonstration point, is arranged in lattice-like.

The first electrode 114a and thesecond electrode 114b are for example formed by the ITO as transparent material.In addition, adhere to into the membranaceous of uniform thickness,form alignment films 116a and 116b by making polyimide based resin.By thesealignment films 116a and 116b are carried out friction treatment, determine the initial orientation of the lip-deep liquid crystal molecule of thefirst substrate 107a and thesecond substrate 107b.

In Figure 21, thefirst substrate 107a forms bigger than the area of thesecond substrate 107b, and when making these baseplate-laminatings together withencapsulant 108, thefirst substrate 107a has theextension 107c in the outside that reaches the second substrate 107b.And, on thisextension 107c with suitable composition: the lead-inwire 114c that extends from the first electrode 114a; By being present in the conductive material 109 (with reference to Figure 22) ofencapsulant 108 inside, with the lead-inwire 114d of thesecond electrode 114b conducting on thesecond substrate 107b; Be connected the metal line 114e on the input salient point (that is input terminal) that drives with IC103a; And be connected and drive with the input of IC103b with the various wirings such asmetal line 114f on the salient point.

The lead-inwire 114c that extends from the first electrode 114a and to use the ITO identical with the material of these electrodes with the lead-inwire 114d of thesecond electrode 114b conducting be electroconductive oxide formation.In addition, form by the low metal material of resistance value, for example APC alloy as the metal line 114e and the 114f of driving with the input side wiring of IC103a and 103b.The APC alloy is mainly to contain Ag, the subsidiary alloy that contains Pd and Cu, for example is the alloy that is made of Ag:98%, Pd:1%, Cu:1%.

Driving is with IC103a and drive with IC103b and utilize on the bonding surface that is installed inextension 107c of ACF (anisotropic conductive film) 122.That is, in the present embodiment, form the liquid crystal panel that semiconductor chip is directly installed on so-called COG (chip bonding is the on glass) mode of the structure on the substrate.In the mounting structure of this COG mode, the conducting particles that utilizes ACF122 inside to contain, the input side salient point and metal line 114e and the 114f electric conductivity ground that drive with IC103a and 103b are coupled together, will drive with the outlet side salient point of IC103a and 103b and couple together with going between 114c and 114d electric conductivity.

In Figure 21, FPC104 has:flexible resin film 123, containchip part 124 and thecircuit 126 and themetal line terminal 127 that constitute.Circuit 126 utilizes welding and other electric conductivity methods of attachment to be directly installed on the surface of resin molding 123.In addition,metal line terminal 127 is formed by APC alloy, Cr, Cu and other conductive materials.The part that has formedmetal line terminal 127 among the FPC104 utilizes ACF122 to be connected on the part that has formed metal line 114e andmetal line 114f among the first substrate 107a.And, utilize the effect of the conducting particles that ACF122 inside contains,metal line terminal 127 conductings of the metal line 114e of substrate-side and 114f and FPC side.

End, limit in the opposite side of FPC104 formsexternal connection terminals 131, and thisexternal connection terminals 131 is connected on the not shown external circuit.And, according to signal, drive for the IC103a and the 103b that drive usefulness from the transmission of this external circuit, sweep signal is supplied with a side among the first electrode 114a and thesecond electrode 114b, two sides, data-signal is supplied with the opposing party.Thus, each voltage that shows that point applies that is the lattice-like arrangement in effective viewing area V is controlled respectively, consequently, each is shown the orientation of point control liquid crystal L.

In Figure 21, thelighting device 106 with so-called backlight function has as shown in figure 22: thelight conductor 132 that is made of acrylic resin etc.; Be arranged on thediffusion disk 133 on the light-emittingface 132b of thislight conductor 132; Be arranged on thereflector plate 134 on the face of an opposite side of light-emittingface 132b oflight conductor 132; And as the LED (light emitting diode) 136 of light source.

LED136 is supported on theLED substrate 137, thisLED substrate 137 for example be installed in the integrally formed support portion (not shown) oflight conductor 132on.By LED substrate 137 being installed in the assigned position of support portion, LED136 being positioned at light as the lateral end panel oflight conductor 132 being taken intoface 132a position in opposite directions.In addition,symbol 138 expressions make the impact that is added on theliquid crystal panel 102 obtain cushioning the padded coaming of usefulness.

LED136 is in a single day luminous, just be taken intoface 132a from light and be taken into this light, and import the inside oflight conductor 132, propagate while on the wall ofreflector plate 134 orlight conductor 132, reflect, pass throughdiffusion disk 133 from light-emittingface 132b during this period, shine the outside as planar light.

Because theliquid crystal indicator 101 of present embodiment is by constituting as upper type, so under the situation that exterior light such as sunshine, room light fully become clear, in Figure 22, exterior light is taken into the inside ofliquid crystal panel 102 from thesecond substrate 107b, one side, this light is by behind the liquid crystal L, reflection resupplies liquid crystal L on reflectance coating 112.Liquid crystal L utilizes its electrode 114a of clamping and 114b that R (red), G (green), of all kinds each of B (indigo plant) are shown that point is orientated control, therefore, the light that is supplied to liquid crystal L is modulated each demonstration point, by this modulation, utilize by the light ofpolarizer 117b with not by its light, at the picture of the outside display text ofliquid crystal panel 102, numeral etc.Therefore, can carry out the demonstration of reflection-type.

On the other hand, under the situation of the light quantity that can not obtain exterior light fully, LED136 is luminous, and planar light is from the light-emittingface 132b outgoing oflight conductor 132, and this light is supplied to liquid crystal L by formedopening 121 on the reflectance coating 112.At this moment, identical with the demonstration of reflection-type, utilization is orientated control by the light of being supplied with liquid crystal L modulates each demonstration point, therefore, can show picture to the outside.Carry out the demonstration of transmission-type thus.

Theliquid crystal indicator 101 of above-mentioned formation can adopt the manufacture method and the manufacturing installation manufacturing of liquid crystal indicator of the present invention, specifically, can adopt the manufacture method manufacturing shown in Figure 20.In this manufacture method, the series of processes from operation P1 to operation P6 is the operation that forms thefirst substrate 107a, and the series of processes from operation P11 to operation P14 is the operation that forms the second substrate 107b.First substrate forms operation and second substrate formation operation can be carried out respectively usually by oneself.

At first, form in the operation at first substrate, utilize photoetching process etc. on the surface of the large-area female raw material matrix material that forms by translucent glass, light transmission plastics etc., to form thereflectance coating 112 of a plurality of parts ofliquid crystal panel 102, use well-known film build method again, on it, form dielectric film 113 (operation P1), secondly, with the formation first electrode 114a and connect up 114c, 114d, 114e, 114f (operation P2) such as photoetching processes.

Secondly,, on the first electrode 114a, form alignment films 116a (operation P3), again by this alignment films 116a being carried out friction treatment, the initial orientation (operation P4) of decision liquid crystal by coating, printing etc.Secondly, for example form encapsulant 108 (operation P5) in the form of a ring, morespherical liner 119 is dispersed in (operation P6) above it by serigraphy etc.By above processing, large-area first mother substrate on thefirst substrate 107a of formationliquid crystal panel 102 with a plurality of panel visuals.

Different with above first substrate formation operation, implement second substrate and form operation (the operation P11 among Figure 20 is to operation P14).At first, preparation forms the colour filter 118 (operation P11) of a plurality of parts ofliquid crystal panel 102 in its surface by large-area female raw material matrix material that translucent glass, light transmission plastics etc. forms.Adopt manufacture method shown in Figure 6 to carry out the formation operation of this colour filter, the formation of the R in this manufacture method (red), G (green) and B (indigo plant) colour filter of all kinds unit adopts ink discharge device (drop injection of material device) 16 shown in Figure 8 to carry out.The control method of the manufacture method of these colour filters and ink gun (drop material shower nozzle) is identical with the content that had illustrated.

Shown in Fig. 6 (d),mother substrate 12 be formedcolour filter 1 on female raw material matrix material, becolour filter 118 after, then, adopt photoetching process to form thesecond electrode 114b (operation P12),form alignment films 116b (operation P13) by coating, printing etc. again, again thisalignment films 116b is carried out friction treatment, the initial orientation (operation P14) of decision liquid crystal.By above processing, large-area second mother substrate on thesecond substrate 107b of formationliquid crystal panel 102 with a plurality of panel visuals.

After more than having formed large-area first mother substrate and second mother substrate, be clipped inencapsulant 108 between these mother substrates and carry out fit together mutually after the contraposition (operation P21).Therefore, can form the faceplate part that contains a plurality of parts of liquid crystal panel, do not enclose the panel structure of sky of the state of liquid crystal in addition.

Secondly, forming the line groove at the assigned position place of the panel structure of the sky of having finished, promptly cut off and use groove, is benchmark with this line groove again, panel structure is split, i.e. cut-out (operation P22).Therefore, the liquid crystal that forms theencapsulant 108 of each liquid crystal panel part injects the blank panel structure that is so-called strip of the state that exposes to the outside with opening 110 (with reference to Figure 21).

After this, inject withopening 110 by the liquid crystal that exposes liquid crystal L is injected each liquid crystal panel inside partly, with resin etc. each liquidcrystal injecting port 110 is shut (operation P23) again.Common liquid crystal injects to handle and carries out like this: for example, liquid crystal is stored in the storage container, put into vacuum chamber etc. with having stored the storage container of this liquid crystal and the blank panel of strip, behind the states that are evacuated such as this vacuum chamber, be immersed in the liquid crystal at the blank panel of this internal vacuum chamber strip, then, vacuum chamber is exitted to atmospheric pressure.At this moment, because blank panel inside is vacuum state, so the liquid crystal that is pressurizeed by atmospheric pressure is imported into panel inside by the liquid crystal injection with opening.Because liquid crystal injects the back liquid crystal attached to around the liquid crystal panel structure body, in operation P24, the strip panel after the liquid crystal injection is carried out cleaning treatment.

Then, liquid crystal being injected and the generatrix plate that cleans the strip after finishing forms the line groove at assigned position again, is benchmark with this line groove again, and cut-out strip panel one by one cuts out a plurality of liquid crystal panels (operation P25).As shown in figure 21, be installed on eachliquid crystal panel 102 of such making with IC103a, 103b,lighting device 106 be installed, by connecting FPC104, finished liquid crystal indicator 101 (operation P26) again as target as backlight with driving.

More than the manufacture method of Shuo Ming liquid crystal indicator and manufacturing installation particularly in the stage of making colour filter, can effectively utilize feature that this manufacture method has, so can more effectively make the optical transmission characteristics of colour filter become even in the plane.This situation means in liquid crystal indicator shown in Figure 22 101, can obtain not have the colour of the distinctness of color spot to show.

In addition, in the manufacture method and manufacturing installation of liquid crystal indicator of the present invention, because by using ink discharge device (drop injection of material device) 16 shown in Figure 8, with ink gun (drop material shower nozzle) 22 ink-jets, formcolour filter unit 3, so do not need through adopting the such complicated step of photoetching process, also waste material not.

(example of the manufacture method of electroluminescence plate)

Secondly, the filter material of the manufacture method of electroluminescence plate of the present invention in the manufacture method of the above-mentioned colour filter of function of use layer formation material replacement, have the structure substantially the same with the manufacture method of this colour filter.The embodiment of manufacture method that this electroluminescence plate is described is as follows.Here, functional layer is the layer that comprises hole injection transport layer or luminescent layer, and it is to comprise that hole injection transport layer forms the material of material or luminescent layer formation material that functional layer forms material.

For example, in Fig. 1 (a), with constant arrangement pitches (D) a plurality ofnozzles 27 are arranged in the row shape and constitute more than one ink gun (drop material shower nozzle) 22, and with the adjacent spaces of regulation formation printhead (the drop injection of material mechanism) 22a. that will above-mentioned more than one ink gun (drop material shower nozzle) 22 lines up.And, this printhead (drop injection of material mechanism) 22a is moved along the shower nozzle scanning direction (the vertical X among Fig. 1 (a)) as constant direction,substrate 2 is carried out main scanning.In addition, meanwhile, printhead (drop injection of material mechanism) 22a is moved along shower nozzle line feed direction (the horizontal Y among Fig. 1 (a)) moving interval (P) according to the rules of conduct with the direction of shower nozzle scanning direction quadrature,substrate 2 is carried out subscan.

During carrying out above-mentioned main scanning and subscan, a plurality ofnozzles 27 of arranging from more than one ink gun (drop material shower nozzle) 22 form material with functional layer and are ejected into functional layer on thesubstrate 2 selectively and form on the zone (thereby, show point).In addition, as required, repeatedly carry out main scanning and subscan repeatedly, make functional layer form material and form on the zone with regulation shape and specific thickness functional layer attached to substrate 2.Therefore, each onsubstrate 2 shows the functional layer that forms regulation shape and specific thickness in the point.

In the manufacture method of the electroluminescence plate of present embodiment, the constant arrangement pitches of supposingnozzle 27 is " D ", in a plurality ofnozzles 27 that adjacent ink gun (drop material shower nozzle) 22 is provided with separately between end, mutual immediate nozzle be spaced apart " W " time, set

W=mD (in the formula, m is the integer more than 2)

That is,adjacent nozzles 27 interval W each other constitutes according to the integral multiple of the arrangement pitches D ofnozzle 27 between adjacent ink gun (drop material ejection shower nozzle) 22.

In addition, shown in Fig. 1 (b), suppose that printhead (drop injection of material mechanism) 22a is " P " along the subscan moving interval of shower nozzle line feed direction Y, when the constant arrangement pitches ofnozzle 27 is " D ", sets simultaneously

P=nD (in the formula, n is the integer more than 1)

That is, the moving interval P of the subscan of ink gun (drop material shower nozzle) 22 constitutes according to the integral multiple of the arrangement pitches D ofnozzle 27.

By between the arrangement pitches D of interval W, subscan moving interval P of the nozzle between the adjacent ink gun (drop material shower nozzle) and nozzle, setting above-mentioned relation, when the main scanning of printhead (drop injection of material mechanism) 22a and subscan, can makenozzle 27 form the zone in opposite directions with the repertoire layer exactly, above them, pass through, therefore, can improve printing efficiency, and ink-jet in position.Therefore, thus the functional layer that can form uniform planar shape and uniform thickness forms pixel onsubstrate 2.

In addition, as shown in Figure 2, more than one ink gun (drop material shower nozzle) 22 can with respect to shower nozzle enter a new line direction Y respectively tilt angle theta arrangement is set.At this moment, angle θ is less than 180 ° angle greater than 0 °.

In addition, the more than onenozzle 27 that lays respectively at the both ends of more than one ink gun (drop material shower nozzle) 22 can constitute and functional layer do not formed injection of material and form in the zone to the functional layer on thesubstrate 2.

In addition, can form luminescent layer by the material that presents R (red), G (green) and three kinds of glow colors of B (indigo plant) and form material.In addition, more than one ink gun (drop material shower nozzle) 22 can be got structure for example shown in Figure 15.

(embodiment of the manufacturing installation of electroluminescence plate)

The manufacturing installation of electroluminescence plate of the present invention can constitute equally with the manufacturing installation of above-mentioned colour filter basically.That is, the manufacturing installation of electroluminescence plate of the present invention is to make the device that the functional layer of regulation shape and specific thickness is configured in the electroluminescence plate that constitutes on the substrate.The embodiment of manufacturing installation that this electroluminescence plate now is described is as follows.Here, functional layer is the layer that comprises hole injection transport layer or luminescent layer, and it is to comprise that hole injection transport layer forms the material of material or luminescent layer formation material that functional layer forms material.

For example, in Fig. 1, the manufacturing installation of the electroluminescence plate of present embodiment has with constant arrangement pitches (D) and a plurality ofnozzles 27 is arranged in that the row shape constitutes more than one ink gun (drop material shower nozzle) 22 and with will above-mentioned more than one ink gun (drop material shower nozzle) 22 line up printhead (the drop injection of material mechanism) 22a. of formation of the adjacent spaces of regulation.From a plurality ofnozzles 27 functional layer is formed the functional layer that material is ejected on thesubstrate 2 selectively and form the zone, therefore, onsubstrate 2, form functional layer.

Not shown functional layer forms material feeding apparatus and is connected on the interior a plurality ofnozzles 27 of printhead (drop injection of material mechanism) 22a, and the work by this functional layer formation material feeding apparatus formsmaterial supply nozzle 27 with functional layer.In addition, not shown main scanning drive unit is connected on printhead (the drop injection of material mechanism) 22a, work by this main scanning drive unit, printhead (drop injection of material mechanism) 22a is along as the shower nozzle scanning direction of constant direction (promptly, vertical X among Fig. 1 (a)) moves,substrate 2 is carried out main scanning.

In addition, not shown subscan drive unit is connected on printhead (the drop injection of material mechanism) 22a, work by this subscan drive unit, printhead (drop injection of material mechanism) 22a along as with the shower nozzle line feed direction of the direction of shower nozzle scanning direction quadrature (promptly, horizontal Y among Fig. 1 (a)) moving interval (P) according to the rules moves, andsubstrate 2 is carried out subscan.In addition, the nozzle ejection control device is connected on a plurality ofnozzles 27, and by the work of this nozzle ejection control device, the functional layer that control is sprayed fromnozzle 27 forms the emitted dose and the injecting time of material.

Above-mentioned main scanning drive unit utilization for example comprises that the main scanning control device that CPU constitutes controls its work.In addition, above-mentioned subscan drive unit utilization for example comprises that the subscan control device that CPU constitutes controls its work.

Printhead (drop injection of material mechanism) 22a moves along the shower nozzle scanning direction (that is, the vertical X among Fig. 1 (a)) as constant direction, andsubstrate 2 is carried out main scanning.And simultaneously, printhead (drop injection of material mechanism) 22a moves along shower nozzle line feed direction Y moving interval (P) according to the rules, andsubstrate 2 is carried out subscan.

During above-mentioned main scanning and subscan, a plurality ofnozzles 27 of arranging from more than one ink gun (drop material shower nozzle) 22 form the functional layer that material is ejected on thesubstrate 2 selectively with functional layer and form in the zone.In addition, as required, repeatedly carry out main scanning and subscan repeatedly, make functional layer form material and form in the zone attached to the functional layer on thesubstrate 2 with regulation shape and specific thickness.Therefore, onsubstrate 2, form the functional layer of regulation shape and specific thickness.

In the manufacturing installation of the electroluminescence plate of present embodiment, the constant arrangement pitches of supposingnozzle 27 is " D ", in a plurality ofnozzles 27 that adjacent ink gun (drop material shower nozzle) 22 is provided with separately between end, mutual immediate nozzle be spaced apart " W " time, set

W=mD (in the formula, m is the integer more than 2)

That is,adjacent nozzles 27 interval W each other constitutes according to the integral multiple of the arrangement pitches D ofnozzle 27 between adjacent ink gun (drop material shower nozzle) 22.

In addition, shown in Fig. 1 (b), suppose that printhead (drop injection of material mechanism) 22a is " P " along the subscan moving interval of shower nozzle line feed direction Y, when the constant arrangement pitches ofnozzle 27 is " D ", sets simultaneously

P=nD (in the formula, n is the integer more than 1)

That is, the moving interval P of the subscan of ink gun (drop material shower nozzle) 22 constitutes according to the integral multiple of the arrangement pitches D ofnozzle 27.

By between the arrangement pitches D of interval W, subscan moving interval P of the nozzle between the adjacent ink gun (drop material shower nozzle) and nozzle, setting above-mentioned relation, when the main scanning of printhead (drop injection of material mechanism) 22a and subscan, can makenozzle 27 form the zone in opposite directions with the repertoire layer exactly, above them, pass through, therefore, can improve printing efficiency, and the injection work ergosphere forms material in position.And therefore, thereby the functional layer that can form uniform planar shape and uniform thickness forms pixel onsubstrate 2.

In addition, as shown in Figure 2, more than one ink gun (drop material shower nozzle) 22 can with respect to shower nozzle enter a new line direction Y respectively tilt angle theta arrangement is set.At this moment, angle θ is less than 180 ° angle greater than 0 °.

(the change example of the manufacture method of electroluminescence plate and manufacturing installation)

In addition, for example in the embodiment of the manufacture method of the electroluminescence plate of above explanation and manufacturing installation, a plurality of panel units 11 have been arranged thoughshow mother substrate 12 for example, with the ink gun (drop material shower nozzle) 22 littler than these panel units 11, in each panel unit 11, form the situation of functional layer, but also can use its length than the length of side of a panel unit 11 but thenozzle rows 28 shorter, formation functional layer amother substrate 12 in than one side ofmother substrate 12.

In addition, thoughshow mother substrate 12 for example the situation that has been listed as a plurality of panel units 11 is arranged, it is roughly the same or than its much smaller panel unit 11 also can to constitute its size andmother substrate 12 sometimes in thismother substrate 12.

In addition, in Fig. 8 and ink discharge device (drop injection of material device) 16 shown in Figure 9, though printhead (drop injection of material mechanism) 22a is moved along directions X,substrate 12 is carried out main scanning, utilizesubscan drive unit 21 thatsubstrate 12 is moved along the Y direction, 22a carries out subscan tosubstrate 12 by printhead (drop injection of material mechanism), but also can be conversely, bysubstrate 12 is moved along the Y direction, carry out main scanning, by ink gun (drop material shower nozzle) 22 is moved along directions X, carry out subscan.

(manufacture method of el light emitting device and the embodiment of manufacturing installation)

The manufacture method of el light emitting device of the present invention and the structure of the manufacturing installation situation with the manufacture method of above-mentioned liquid crystal indicator and manufacturing installation basically are identical.That is, in an embodiment of the manufacture method of el light emitting device of the present invention, adopt the manufacture method of above-mentioned electroluminescence plate to make electroluminescence plate, cut out the panel unit of regulation number from the electroluminescence plate that is obtained.

In addition; at the substrate of the electroluminescence plate that is used to this panel unit (promptly; the common electrode substrate) goes up formation protective layer and common electrode; go up simultaneously and form the demonstration point electrode that constitutes pair of electrodes with common electrode in opposite directions at the substrate (that is, showing the point electrode substrate) that constitutes a pair of substrate in opposite directions with above-mentioned common electrode substrate.

In addition, the manufacturing installation of el light emitting device of the present invention be make a substrate is arranged, for example common electrode substrate and with its in opposite directions another substrate, for example show the device of the el light emitting device of point electrode substrate.The functional layer of regulation shape and specific thickness is configured on the common electrode substrate, can form electroluminescence plate thus.In addition, on the common electrode substrate, form protective layer and common electrode again.In addition, with common electrode substrate demonstration point electrode substrate in opposite directions on form the demonstration point electrode that constitutes pair of electrodes with common electrode opposite to each other.

(another embodiment of the manufacture method of el light emitting device and manufacturing installation)

Figure 23 utilizes process chart to represent the process chart of an embodiment of the manufacture method of el light emitting device of the present invention.In addition, Figure 24 represents the cross-section structure of the el light emitting device corresponding with each operation in the process chart shown in Figure 23.Shown in Figure 24 (d), ellight emitting device 201 forms like this:form pixel electrode 202 ontransparency carrier 204, from arrow shower nozzle G direction, between eachpixel electrode 202, be andform embankment 205 latticedly, in these latticed recesses, form the hole and inject transport layer (functional layer) 220, in each latticed recess, form R look luminescent layer (functional layer) 203R, G look luminescent layer (functional layer) 203G, and B look luminescent layer (functional layer) 203B, make from arrow shower nozzle G direction, be predetermined arrangement such as bar shaped arrangement, on them, form oppositeelectrode 213 again.

Under the situation of the active component drivingpixel electrodes 202 of utilizing two ends types such as TFD (thin film diode) element,, be strip ground and form above-mentionedopposite electrode 213 from arrow shower nozzle G direction.Thin film transistor (TFT)) etc. in addition, (Thin Film Transistor: the active component of three terminal type drives under the situation ofpixel electrode 202, forms above-mentionedopposite electrode 213 as single electrode utilizing TFT.

Zone by eachpixel electrode 202 and eachopposite electrode 213 clamping becomes a demonstration point, and R (red), G (green) and B (indigo plant) three looks show that point becomes a unit, forms a pixel.Flow through the electric current that each shows point by control, make in a plurality of demonstration points desirable demonstration point luminous selectively, therefore, can show desirable panchromatic picture along arrow shower nozzle H direction.

For example, adopt manufacture method shown in Figure 23, can make above-mentioned el light emitting device 201.That is, shown in operation P51 and Figure 24 (a), on the surface oftransparency carrier 204, form active components such as TFD element and TFT element,form pixel electrode 202 again.As the formation method, for example can adopt: photoetching process, vacuum vapour deposition, sputtering method, fusion glue method etc.As the material of pixel electrode, can adopt: the composite oxides of ITO (tin indium oxide), tin oxide, indium oxide and zinc oxide etc.

Secondly, shown in operation P52 and Figure 24 (a), adopting well-known patterning process, for example photoetching process to form partition isembankment 205, utilizes thisembankment 205 to bury between each transparency electrode 202.Therefore, can improve contrast, prevent that functional layer from forming the material colour mixture, prevent from light leak between pixel and the pixel etc.Material asembankment 205, if functional layer is formed the material that the solvent of material has durability, then be not particularly limited, but, material that can fluororesinization, for example organic materials such as acrylic resin, epoxy resin, photosensitive polyimide are arranged preferably by the fluorocarbon gas plasma treatment.

Secondly, inject transport layer in the coating hole and form material (functional layer formation material) before,substrate 204 is carried out continuously the continuumpiston of oxygen and fluorocarbon gas plasma and handle (operation P53).Therefore, polyimide surface is by hydrophobization, and the ITO surface is by hydrophiling, can make ink-jet drop carry out the control of being stained with lubricant nature of the substrate-side that fine composition uses.As the device that plasma takes place, can be the device that plasma takes place in a vacuum, also can be the device that plasma takes place in atmosphere.

Secondly, shown in operation P54 and Figure 24 (a), inject transport layer from ink gun (drop material shower nozzle) the 22 ejection holes of ink discharge device shown in Figure 8 (drop injection of material device) 16 and form material (functional layer formation material), on eachpixel electrode 202, carry out the composition coating.The control method of concrete ink gun (drop material shower nozzle) can adopt above-mentioned method.After this coating, in vacuum (for example, ltorr) in, remove desolvate (operation P55) under the room temperature, 20 minutes condition, then, in atmosphere with 20 ℃ (for example, on heating plate) carry out 10 minutes heat treated, form and form the immiscible hole of material (functional layer formation material) with luminescent layer and inject transport layer (functional layer) 220 (operation P56).Thickness is about 40nm.

Secondly, shown in operation P57 and Figure 24 (b), with ink ejecting method the R luminescent layer is formed material (functional layer formation material) and G luminescent layer and form material (functional layer formation material) and be coated on the holeinjection transport layer 220 each color fildtering zone territory in.Here, also the ink gun (drop material shower nozzle) 22 from ink discharge device shown in Figure 8 (drop injection of material device) 16 sprays each luminescent layer formation material (functional layer formation material), can also use the control method of said method as ink gun (drop material shower nozzle).If the employing ink-jetting style then can be easily and carry out fine composition at short notice.In addition, by changing the concentration and the emitted dose of the solid state component in the ink component, can change thickness.

After luminescent layer forms material (functional layer formation material) coating, in vacuum (for example, ltorr) in, remove desolvate (operation P58) under the room temperature, 20 minutes condition, then in blanket of nitrogen, with 150 ℃ of heat treatments of carrying out about 4 hours, carry out conjugation, form R look luminescent layer (functional layer) 203R and G look luminescent layer (functional layer) 203G (operation P59).Thickness is about 50nm.By heat treatment conjugation luminescent layer be insoluble to solvent.

In addition, also can before forming luminescent layer, inject the continuumpiston processing thattransport layer 220 is carried out oxygen and fluorocarbon gas plasma to the hole.Therefore, injecttransport layer 220 in the hole and form fluoride layer,,, can provide luminous efficiency high Organnic electroluminescent device so the hole injection efficiency increases because ionization potential increases.

Secondly, shown in operation P60 and Figure 24 (c), overlap R lookluminescent layer 203R, the G lookluminescent layer 203G and the hole that respectively show in the point and inject formation B lookluminescent layer 203B on the transport layer 220.Therefore, form R (red), G (green), B (indigo plant) three primary colors incessantly, and the step of R lookluminescent layer 203R, G lookluminescent layer 203G andembankment 205 can be buried and planarization.Therefore, can prevent short circuit between the upper/lower electrode reliably.By adjusting the thickness of B lookluminescent layer 203B, B lookluminescent layer 203B with the laminated construction of R lookluminescent layer 203R and G lookluminescent layer 203G in, play electronics injection transport layer and do not send out B coloured light.

Formation method as above such B lookluminescent layer 203B for example also can adopt general whirl coating as damp process, can also adopt the same ink-jet method of formation method with R lookluminescent layer 203R and G look luminescent layer 203G.Then, shown in operation P61 and Figure 24 (d),, can make ellight emitting device 201 as target by forming opposite electrode 213.Atopposite electrode 213 is under the situation of face electrode, for example with Mg, Ag, Al, Li etc. as material, adopt film build methods such as vapour deposition method, sputtering method to form opposite electrode 213.In addition, be under the situation of strip electrode atopposite electrode 213, can adopt the electrode layer after patterning process such as photoetching process forms film forming.

If adopt the manufacture method and the manufacturing installation of the el light emitting device of above explanation, then, can adopt above-mentioned control method as the control method of ink gun (drop material shower nozzle).Therefore, suppose between a plurality ofnozzles 27, exist under the discrete situation, also can prevent between a plurality of demonstration points, to produce the discrete of thickness even form the injection of material amount in functional layer, therefore, can make the luminous distribution character of the light-emitting area of el light emitting device become even in the plane.This means in the ellight emitting device 201 shown in Figure 24 (d), can obtain not have the colour of the distinctness of color spot to show.

In addition, in the manufacture method and manufacturing installation of el light emitting device of the present invention, owing to use ink discharge device (drop injection of material device) 16 shown in Figure 8, by using printhead (drop injection of material mechanism) 22a to carry out the injection that functional layer forms material, form R (red), G (green), B (indigo plant) demonstration point of all kinds, so do not need through adopting the such complicated procedures of forming of photoetching process, also waste material not.

(embodiment of film build method and film formation device)

Film formation device of the present invention can constitute with ink discharge device shown in Figure 8 (drop injection of material device) 16.In addition, ink gun (drop material shower nozzle) 22 as using in the ink discharge device (drop injection of material device) 16 can use Fig. 1, Fig. 2, Fig. 3, Fig. 4, Figure 10, Figure 11, Figure 12, Figure 13, Figure 14, Figure 15, Figure 16 or ink gun (drop material shower nozzle) shown in Figure 19.

But under the situation of present embodiment, the China ink that sprays from thenozzle 27 of these ink guns (drop material shower nozzle) 22 grades is a membrane material.According to the kind of the film of wanting on substrate, to form, suitably select this membrane material.In addition, during 22 pairs of substrates of ink gun (drop material shower nozzle) carry out main scanning and subscan, by thenozzle 27 of suitably controlling the jet film material, freely the apperance of selective membrane, be figure.

In addition, use control circuit shown in Figure 17,, control ink discharge device shown in Figure 8 (drop injection of material device) 16, can realize film build method of the present invention according to control program shown in Figure 180.But in the case, the printing ink that sprays from ink gun (drop material shower nozzle) 22 also is the membrane material of selecting according to the kind of the film of desiring to form at substrate.

(embodiment of electronic installation)

Below, the example of use as the electronic installation of the liquid crystal indicator of the invention described above of electro-optical device of the present invention is shown.Here, though show the electronic installation of the liquid crystal indicator that uses the invention described above, but be not limited to this, electronic installation of the present invention also can be to use the el light emitting device of the invention described above or the electronic installation of the electro-optical device made with above-mentioned film build method of the present invention

(1) digital camera

The digital camera that uses theliquid crystal indicator 1100 of the fourth embodiment of the present invention in the view finder now is described.Figure 27 is the oblique view of the structure of this digital camera of expression, also shows the method that is connected with external device (ED) in addition simply.

The be taken light image of body of common camera utilization makes light reaching the film, and different therewith,digital camera 2000 is to utilize CCD (charge-coupled image sensor) imaging apparatus of etc.ing, and the light image of the body that is taken is carried out light-to-current inversion, the camera of generation image pickup signal.Here, be provided with the liquid crystal panel of above-mentionedliquid crystal indicator 1100 on the back side of thecasing 2202 of digital camera 2000 (being the front among Figure 27), the image pickup signal according to being produced by CCD shows.Therefore,liquid crystal indicator 1100 has as the be taken function of view finder of body of demonstration.In addition, on the front of casing 2202 (being the back side among Figure 27), be provided with thelight receiving unit 2204 that comprises optical lens and CCD etc.

Here, after the cameraman confirms the body image that is taken shown in theliquid crystal indicator 1100, if pressshutter release button 2206, just then the image pickup signal of the CCD in this moment is transmitted in the memory that is stored in circuit substrate 2208.In addition, in thisdigital camera 2000, be provided with the input andoutput terminal 2214 that videosignal output terminal 2212 and data communication are used in the side of casing 2202.And as shown in figure 27, as required,televimonitor 2300 is connected on the former videosignal output terminal 2212, and in addition,personal computer 2400 is connected on the input andoutput terminal 2214 that the latter's data communication uses.In addition, by the operation of regulation, the image pickup signal that is stored in the memory ofcircuit substrate 2208 is exported to televimonitor 2300 orpersonal computer 2400.

(2) mobile phone, other electronic installations

Figure 28 (A), (B) and (C) be the outside drawing of the example of expression other electronic installations of using liquid crystal indicator as electro-optical device of the present invention.Figure 28 (A) is amobile phone 3000, hasliquid crystal indicator 1100 above its front.Figure 28 (B) is a wrist-watch 4000, is provided with the display part of useliquid crystal indicator 1100 in the front surface central authorities of body.Figure 28 (C) is aportable information apparatus 5000, has the display part and theinput part 5100 that are made ofliquid crystal indicator 1100.

These electronic installations are exceptliquid crystal indicator 1100, though not shown among the figure, comprising: show the information output source, show various circuit such as information-processing circuit, clock generating circuit and the demonstration signal generating unit that constitutes by power circuit etc. of electric power being supplied with these circuit.For example under the situation ofportable information apparatus 5000, according to from the information ofinput part 5100 inputs etc., will can form display image by showing that the demonstration signal that the signal generating unit generates supplies with display part.

As the electronic installation thatliquid crystal indicator 1100 of the present invention is installed, be not limited to digital camera, mobile phone, wrist-watch, and portable information apparatus, can also consider: electronic memo, beeper, the POS terminal, IC-card, the minidisk phonograph, liquid crystal projection apparatus, personal computer of multimedia correspondence (PC) and engineering work station (EWS), notebook-PC, word processor, television set, find a view type or monitor direct viewing type video tape recorder, electronic memo, desktop computer, the vehicle guidance device, have the device of touch panel, various electronic installations such as clock and watch.

(other embodiment)

The present invention is not limited to the foregoing description, can be used for carrying out on matrix material whole industrial technologies of fine composition.For example, the formation etc. that can consider various semiconductor elements (for example, thin film transistor (TFT), thin film diode etc.), wiring figure and dielectric film utilizes an example of scope as it.

In addition, in the present invention, as the ejection material, can carry out all selections according to the key element that forms, for example, except above-mentioned filter material, functional layer form material, film formation material, it is also conceivable that conductive materials such as silica glass precursor, metallic compound, dielectric substance or semi-conducting material etc. are as the one example.In addition, adopt the present invention, for example can also form metal line on the substrate or on the film that is provided with on the substrate.

In addition, in the above-described embodiments, in order to distinguish mutually with other structural elements, though be called " ink gun (drop material shower nozzle) ", but the ejecta that sprays from this ink gun (drop material shower nozzle) is not limited to printing ink, much less, for example be that above-mentioned functional layer forms conductive material, dielectric substance or semi-conducting materials etc. such as material, silica glass precursor, metallic compound.

In addition, in the above-described embodiment, though used the ink gun (drop material shower nozzle) of flexural deformation ink-jet (liquid material) structure of utilizing piezoelectric element, but also can use the ink gun (drop material shower nozzle) of other arbitrary structures, for example use the ink gun (drop material shower nozzle) of the hot ink-jetting style of the thermal expansion that has utilized printing ink (liquid material).

In addition, the invention is not restricted to electro-optical devices such as liquid-crystal apparatus and el light emitting device, also can be applicable to the so-called electro-optical device that need on substrate, form various films such as colour filter, metal line.The present invention can be applicable to for example inorganic EL device, plasm display device (PDP/ plasma scope), electrophoretic display apparatus (EPD/ electrophoretic display device (EPD)), field emission display device electro-optical devices such as (FED/ Field Emission Displays).

In addition, though the liquid crystal indicator as an example of electro-optical device shown in Figure 21 is the liquid crystal indicator of simple matrix mode, the present invention also can be applicable to the structure that TFD two ends such as (thin film diodes) type switch element is used as active component the active matrix mode electro-optical device or with the electro-optical device of such as TFT (thin film transistor (TFT)) the three terminal type switch element of etc.ing as the active matrix mode of the structure of active component use.

As mentioned above, if adopt the present invention, then during printhead (drop injection of material mechanism) scanning, can be as whole nozzles of the inscape of ink gun (drop material shower nozzle) exactly by forming the zone of pixel.Therefore, the printing efficiency height, and ink gun (drop material ejection shower nozzle) is moved, object is scanned, so that ink-jet in position.

In addition, can prevent that each color of pixel is discrete, can make the optical characteristics homogenising in the plane of optical components such as the characteristics of luminescence of colored display characteristic, the functional layer of optical transmission characteristics, the liquid crystal indicator of colour filter.

Claims (7)

1. shower nozzle scan method is characterized in that:

Comprise:

The a plurality of shower nozzles that make according to the rules spacing arrange a plurality of nozzles move along the shower nozzle scanning direction, substrate are carried out the operation of main scanning;

Move along the shower nozzle line feed direction moving interval according to the rules that intersects with above-mentioned shower nozzle scanning direction, aforesaid substrate is carried out the operation of subscan; And

To spray the operation of injection of material to the aforesaid substrate from above-mentioned a plurality of nozzles,

The said nozzle that adjacent shower nozzle is positioned at end separately in above-mentioned a plurality of shower nozzle each other interval W and the constant arrangement pitches D of said nozzle in fact satisfy following relational expression:

In the W=mD formula, m is the integer more than 2,

In fact the constant arrangement pitches D of the subscan moving interval P of above-mentioned shower nozzle and said nozzle satisfies following relational expression:

In the P=nD formula, n is the integer more than 1.

2. shower nozzle scan method as claimed in claim 1 is characterized in that:

Above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction,

In fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval W and said nozzle each other satisfy following relational expression along the arrangement pitches Dcos θ of above-mentioned shower nozzle line feed direction:

In the W=mDcos θ formula, m is the integer more than 2,

In fact the arrangement pitches Dcos θ of above-mentioned shower nozzle along the subscan moving interval P of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction satisfy following relational expression:

In the P=nDcos θ formula, n is the integer more than 1.

3. scan method as claimed in claim 1 or 2 is characterized in that:

The said nozzle of end that is positioned at above-mentioned shower nozzle is not with the ejecta adhering zone of above-mentioned ejection injection of material to the aforesaid substrate.

4. scan method as claimed in claim 1 or 2 is characterized in that:

Above-mentioned ejection material is made of the liquid material of multiple color,

A part of color in the above-mentioned multiple color of above-mentioned a plurality of nozzle ejection that comprises in each above-mentioned a plurality of shower nozzle.

5. shower nozzle scan method as claimed in claim 1 or 2 is characterized in that:

Above-mentioned ejection material comprises the different multiple material of characteristic, each self-corresponding a kind of material in the different multiple material of the above-mentioned characteristic of each nozzle ejection in above-mentioned a plurality of nozzles.

6. shower nozzle scanning means is characterized in that:

Have:

A plurality of nozzles of the ejection material of liquid droplets shape;

A plurality of shower nozzles of a plurality of nozzles have been arranged according to constant arrangement pitch D;

The main scanning drive unit that above-mentioned shower nozzle is moved along the shower nozzle scanning direction; And

The subscan drive unit that above-mentioned shower nozzle is moved along the shower nozzle line feed direction moving interval P according to the rules that intersects with above-mentioned shower nozzle scanning direction,

The said nozzle that adjacent shower nozzle is positioned at end separately in above-mentioned a plurality of shower nozzle each other interval W and the constant arrangement pitches D of said nozzle in fact satisfy following relational expression:

In the W=mD formula, m is the integer more than 2,

In fact the constant arrangement pitches D of the subscan moving interval P of above-mentioned shower nozzle and said nozzle satisfies following relational expression:

In the P=nD formula, n is the integer more than 1.

7. shower nozzle scanning means as claimed in claim 6 is characterized in that:

Above-mentioned shower nozzle is arranged with the angle of 0 °＜θ＜180 ° with respect to above-mentioned shower nozzle line feed direction,

In fact the said nozzle that above-mentioned adjacent shower nozzle is positioned at separately end interval W and said nozzle each other satisfy following relational expression along the arrangement pitches Dcos θ of above-mentioned shower nozzle line feed direction:

In the W=mDcos θ formula, m is the integer more than 2,

In fact the arrangement pitches Dcos θ of above-mentioned shower nozzle along the subscan moving interval P of above-mentioned shower nozzle line feed direction and said nozzle along above-mentioned shower nozzle line feed direction satisfy following relational expression:

In the P=nDcos θ formula, n is the integer more than 1.

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