CA1021207A - Chemical vapor deposition of coatings - Google Patents

Chemical vapor deposition of coatings

Info

Publication number: CA1021207A
Authority: CA; Canada
Prior art keywords: coatings; vapor deposition; chemical vapor; chemical; deposition
Prior art date: 1972-12-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Inventor

John F. Sopko

Krishna Simhan

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

PPG Industries Inc

Original Assignee

PPG Industries Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1972-12-15

Filing date

1973-09-18

Publication date

1977-11-22

1973-09-18Application filed by PPG Industries IncfiledCriticalPPG Industries Inc

1977-11-22Application grantedgrantedCritical

1977-11-22Publication of CA1021207ApublicationCriticalpatent/CA1021207A/en

StatusExpiredlegal-statusCriticalCurrent

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/217—FeOx, CoOx, NiOx
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/219—CrOx, MoOx, WOx
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/23—Mixtures
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
General Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Geochemistry & Mineralogy (AREA)
Life Sciences & Earth Sciences (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Chemical Vapour Deposition (AREA)
Surface Treatment Of Glass (AREA)

CA181,305A1972-12-151973-09-18Chemical vapor deposition of coatingsExpiredCA1021207A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US00315393AUS3850679A (en)	1972-12-15	1972-12-15	Chemical vapor deposition of coatings

Publications (1)

Publication Number	Publication Date
CA1021207Atrue CA1021207A (en)	1977-11-22

Family

ID=23224199

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA181,305AExpiredCA1021207A (en)	1972-12-15	1973-09-18	Chemical vapor deposition of coatings

Country Status (4)

Country	Link
US (1)	US3850679A (en)
CA (1)	CA1021207A (en)
GB (1)	GB1454377A (en)
ZA (1)	ZA737109B (en)

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US4761269A (en)*	1986-06-12	1988-08-02	Crystal Specialties, Inc.	Apparatus for depositing material on a substrate
US4834023A (en)*	1986-12-19	1989-05-30	Canon Kabushiki Kaisha	Apparatus for forming deposited film
US4793282A (en)*	1987-05-18	1988-12-27	Libbey-Owens-Ford Co.	Distributor beam for chemical vapor deposition on glass
US4924936A (en)*	1987-08-05	1990-05-15	M&T Chemicals Inc.	Multiple, parallel packed column vaporizer
GB8824104D0 (en)*	1988-10-14	1988-11-23	Pilkington Plc	Process for coating glass
US5129360A (en)*	1990-01-24	1992-07-14	The United States Of America As Represented By The Secretary Of The Air Force	Actively cooled effusion cell for chemical vapor deposition
US5356672A (en)*	1990-05-09	1994-10-18	Jet Process Corporation	Method for microwave plasma assisted supersonic gas jet deposition of thin films
FR2672518B1 (en)*	1991-02-13	1995-05-05	Saint Gobain Vitrage Int	NOZZLE WITH DISSYMMETRIC SUPPLY FOR THE FORMATION OF A COATING LAYER ON A TAPE OF GLASS, BY PYROLYSIS OF A GAS MIXTURE.
US5356673A (en)*	1991-03-18	1994-10-18	Jet Process Corporation	Evaporation system and method for gas jet deposition of thin film materials
US5225031A (en)*	1991-04-10	1993-07-06	Martin Marietta Energy Systems, Inc.	Process for depositing an oxide epitaxially onto a silicon substrate and structures prepared with the process
US5482003A (en)*	1991-04-10	1996-01-09	Martin Marietta Energy Systems, Inc.	Process for depositing epitaxial alkaline earth oxide onto a substrate and structures prepared with the process
US5393563A (en)*	1991-10-29	1995-02-28	Ellis, Jr.; Frank B.	Formation of tin oxide films on glass substrates
US5298073A (en)*	1992-02-28	1994-03-29	Libbey-Owens-Ford Co.	Two sensor for determining spacing between surfaces
US5534314A (en)*	1994-08-31	1996-07-09	University Of Virginia Patent Foundation	Directed vapor deposition of electron beam evaporant
US5571332A (en)*	1995-02-10	1996-11-05	Jet Process Corporation	Electron jet vapor deposition system
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1972
- 1972-12-15USUS00315393Apatent/US3850679A/ennot_activeExpired - Lifetime
1973
- 1973-09-05ZAZA00737109Apatent/ZA737109B/enunknown
- 1973-09-18CACA181,305Apatent/CA1021207A/ennot_activeExpired
- 1973-12-10GBGB5706273Apatent/GB1454377A/ennot_activeExpired

Also Published As

Publication number	Publication date
US3850679A (en)	1974-11-26
ZA737109B (en)	1975-04-30
GB1454377A (en)	1976-11-03

Publication	Publication Date	Title
CA1021207A (en)	1977-11-22	Chemical vapor deposition of coatings
CA998887A (en)	1976-10-26	Nozzle for chemical vapor deposition of coatings
CA919035A (en)	1973-01-16	Chemical vapor deposition coatings on titanium
AU472118B2 (en)	1976-05-13	Method for increasing rate of coating using vaporized reactants
CA992811A (en)	1976-07-13	Coating of workpieces by vapor deposition
AU481742B2 (en)	1976-03-18	Organic coating of metallic substrates
CA935336A (en)	1973-10-16	Method of depositing inorganic coatings from vapour phase
AU466835B2 (en)	1975-11-13	Coating process
CA1022807A (en)	1977-12-20	Coating composition vaporizer
MY7300233A (en)	1973-12-31	Vapor deposition of insulating coatings
AU6071373A (en)	1975-03-27	Chemical vapor deposition of coatings
CA999789A (en)	1976-11-16	Glassware coating process
AU487013B2 (en)	1975-03-27	Chemical vapor deposition of coatings
CA960922A (en)	1975-01-14	Vapor deposition process
CA890378A (en)	1972-01-11	Vapor deposition of insulating coatings
CA964531A (en)	1975-03-18	Vapour deposition coatings
CA1000569A (en)	1976-11-30	Immersed vapor feed coating process
CA902469A (en)	1972-06-13	Chemical vapor deposition of dielectric thin films of rutile
CA860270A (en)	1971-01-05	Chemical deposition formation of anodes
CA926280A (en)	1973-05-15	Method of siliconizing by vapor deposition
CA872956A (en)	1971-06-08	Process of depositing organic coatings
CA901405A (en)	1972-05-30	Vapor deposition method
CA889265A (en)	1971-12-28	Method of coating substrates by vapour deposition
CA979752A (en)	1975-12-16	Method for vapor deposition of materials
CA910740A (en)	1972-09-26	Coating of glass

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