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AU7304098A - Solid state laser system for ultra-violet micro-lithography - Google Patents

Solid state laser system for ultra-violet micro-lithography

Info

Publication number
AU7304098A
AU7304098AAU73040/98AAU7304098AAU7304098AAU 7304098 AAU7304098 AAU 7304098AAU 73040/98 AAU73040/98 AAU 73040/98AAU 7304098 AAU7304098 AAU 7304098AAU 7304098 AAU7304098 AAU 7304098A
Authority
AU
Australia
Prior art keywords
lithography
ultra
solid state
laser system
state laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU73040/98A
Inventor
Henry Shields
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JMAR Technology Co
Original Assignee
JMAR Technology Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/755,166external-prioritypatent/US5940418A/en
Application filed by JMAR Technology CofiledCriticalJMAR Technology Co
Publication of AU7304098ApublicationCriticalpatent/AU7304098A/en
Abandonedlegal-statusCriticalCurrent

Links

Classifications

Landscapes

AU73040/98A1996-11-221997-11-21Solid state laser system for ultra-violet micro-lithographyAbandonedAU7304098A (en)

Applications Claiming Priority (3)

Application NumberPriority DateFiling DateTitle
US08/7551661996-11-22
US08/755,166US5940418A (en)1996-06-131996-11-22Solid-state laser system for ultra-violet micro-lithography
PCT/US1997/021786WO1998022997A2 (en)1996-11-221997-11-21Solid state laser system for ultra-violet micro-lithography

Publications (1)

Publication NumberPublication Date
AU7304098Atrue AU7304098A (en)1998-06-10

Family

ID=25038000

Family Applications (1)

Application NumberTitlePriority DateFiling Date
AU73040/98AAbandonedAU7304098A (en)1996-11-221997-11-21Solid state laser system for ultra-violet micro-lithography

Country Status (2)

CountryLink
AU (1)AU7304098A (en)
WO (1)WO1998022997A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN112421361A (en)*2020-11-262021-02-26中国林业科学研究院木材工业研究所 A UV Ultrafast Laser for Wood Processing
CN112636140B (en)*2020-12-172021-11-05武汉安扬激光技术股份有限公司Femtosecond laser with power and pulse width simultaneously locked
CN116799110B (en)*2022-03-012024-04-26珠海东辉半导体装备有限公司Method for removing and repairing Mini LED chip

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US5457707A (en)*1993-08-241995-10-10Spectra-Physics Lasers, Inc.Master optical parametric oscillator/power optical parametric oscillator

Also Published As

Publication numberPublication date
WO1998022997A2 (en)1998-05-28
WO1998022997A3 (en)1998-08-13

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