| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9602735 | 1996-03-05 | ||
| FR9602735 | 1996-03-05 | ||
| PCT/EP1997/001146WO1997033094A1 (en) | 1996-03-05 | 1997-03-05 | Micro-machined membrane valve |
| Publication Number | Publication Date |
|---|---|
| AU2024897Atrue AU2024897A (en) | 1997-09-22 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU20248/97AAbandonedAU2024897A (en) | 1996-03-05 | 1997-03-05 | Micro-machined membrane valve |
| Country | Link |
|---|---|
| AU (1) | AU2024897A (en) |
| WO (1) | WO1997033094A1 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2817604B1 (en)* | 2000-12-01 | 2004-04-23 | Biomerieux Sa | VALVES ACTIVATED BY ELECTRO-ACTIVE POLYMERS OR BY SHAPE MEMORY MATERIALS, DEVICE CONTAINING SUCH VALVES AND METHOD FOR IMPLEMENTING |
| FR3090792B1 (en)* | 2018-12-21 | 2021-01-22 | Commissariat Energie Atomique | Non-return fluidic valve device |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4869282A (en)* | 1988-12-09 | 1989-09-26 | Rosemount Inc. | Micromachined valve with polyimide film diaphragm |
| DE3917423C1 (en)* | 1989-05-29 | 1990-05-31 | Buerkert Gmbh & Co Werk Ingelfingen, 7118 Ingelfingen, De | |
| US5082242A (en)* | 1989-12-27 | 1992-01-21 | Ulrich Bonne | Electronic microvalve apparatus and fabrication |
| DE4139668A1 (en)* | 1991-12-02 | 1993-06-03 | Kernforschungsz Karlsruhe | MICROVALVE AND METHOD FOR THE PRODUCTION THEREOF |
| CN1133080A (en)* | 1993-09-24 | 1996-10-09 | 罗斯芒特分析公司 | Micromachined valve apparatus |
| Publication number | Publication date |
|---|---|
| WO1997033094A1 (en) | 1997-09-12 |
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