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AU2001261619A1 - System for precision control of the position of an atmospheric plasma jet - Google Patents

System for precision control of the position of an atmospheric plasma jet

Info

Publication number
AU2001261619A1
AU2001261619A1AU2001261619AAU6161901AAU2001261619A1AU 2001261619 A1AU2001261619 A1AU 2001261619A1AU 2001261619 AAU2001261619 AAU 2001261619AAU 6161901 AAU6161901 AAU 6161901AAU 2001261619 A1AU2001261619 A1AU 2001261619A1
Authority
AU
Australia
Prior art keywords
plasma jet
precision control
atmospheric plasma
atmospheric
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001261619A
Inventor
Lynn David Bollinger
Iskander Tokmouline
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jetek Inc
Original Assignee
Jetek Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jetek IncfiledCriticalJetek Inc
Publication of AU2001261619A1publicationCriticalpatent/AU2001261619A1/en
Abandonedlegal-statusCriticalCurrent

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Classifications

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AU2001261619A2000-05-152001-05-15System for precision control of the position of an atmospheric plasma jetAbandonedAU2001261619A1 (en)

Applications Claiming Priority (3)

Application NumberPriority DateFiling DateTitle
US20410300P2000-05-152000-05-15
US602041032000-05-15
PCT/US2001/015678WO2001088220A1 (en)2000-05-152001-05-15System for precision control of the position of an atmospheric plasma jet

Publications (1)

Publication NumberPublication Date
AU2001261619A1true AU2001261619A1 (en)2001-11-26

Family

ID=22756627

Family Applications (1)

Application NumberTitlePriority DateFiling Date
AU2001261619AAbandonedAU2001261619A1 (en)2000-05-152001-05-15System for precision control of the position of an atmospheric plasma jet

Country Status (3)

CountryLink
US (1)US6492613B2 (en)
AU (1)AU2001261619A1 (en)
WO (1)WO2001088220A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US6955991B2 (en)*1999-11-012005-10-18Jetek, Inc.Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holes
US6762136B1 (en)*1999-11-012004-07-13Jetek, Inc.Method for rapid thermal processing of substrates
US7960670B2 (en)2005-05-032011-06-14Kla-Tencor CorporationMethods of and apparatuses for measuring electrical parameters of a plasma process
AU2003221300A1 (en)*2002-03-282003-10-13Apit Corp. S.A.Atmospheric plasma surface treatment method and device for same
US6815246B2 (en)*2003-02-132004-11-09Rwe Schott Solar Inc.Surface modification of silicon nitride for thick film silver metallization of solar cell
NL1023491C2 (en)*2003-05-212004-11-24Otb Groep B V Cascade source.
US7375039B2 (en)*2005-05-242008-05-20International Business Machines CorporationLocal plasma processing
WO2007079488A2 (en)*2006-01-032007-07-12Victor BarinovControlled electrospinning of fibers
FR2897748B1 (en)*2006-02-202008-05-16Snecma Services Sa THERMAL BARRIER DEPOSITION METHOD BY PLASMA TORCH
US9040120B2 (en)*2011-08-052015-05-26Frito-Lay North America, Inc.Inorganic nanocoating primed organic film
US9267011B2 (en)2012-03-202016-02-23Frito-Lay North America, Inc.Composition and method for making a cavitated bio-based film
US9162421B2 (en)2012-04-252015-10-20Frito-Lay North America, Inc.Film with compostable heat seal layer
US9284104B2 (en)2012-06-232016-03-15Frito-Lay North America, Inc.Deposition of ultra-thin inorganic oxide coatings on packaging
US9090021B2 (en)2012-08-022015-07-28Frito-Lay North America, Inc.Ultrasonic sealing of packages
US9149980B2 (en)2012-08-022015-10-06Frito-Lay North America, Inc.Ultrasonic sealing of packages
CN114900940B (en)*2022-05-092024-12-27西安电子科技大学 A plasma jet electromagnetic control system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
BE763709A (en)*1971-03-031971-08-02Soudure Autogene Elect CURTAIN PLASMA.
US5235160A (en)*1990-03-221993-08-10Matsushita Electric Industrial Co., Ltd.Heat-plasma-jet generator capable of conducting plasma spray or heat-plasma cvd coating in a relatively wide area
RU2030811C1 (en)*1991-05-241995-03-10Инженерный центр "Плазмодинамика"Solid body plasma processing plant
RU2032280C1 (en)1992-02-181995-03-27Инженерный центр "Плазмодинамика"Method of control over plasma flux and plasma device
US5565249A (en)*1992-05-071996-10-15Fujitsu LimitedMethod for producing diamond by a DC plasma jet
US5767627A (en)1997-01-091998-06-16Trusi Technologies, LlcPlasma generation and plasma processing of materials

Also Published As

Publication numberPublication date
US6492613B2 (en)2002-12-10
WO2001088220A1 (en)2001-11-22
US20020030038A1 (en)2002-03-14
WO2001088220A8 (en)2002-02-07

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