| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT736264AAT258664B (en) | 1964-08-25 | 1964-08-25 | Device for producing and / or breaking down layers by means of electrical gas discharges |
| DE1515297ADE1515297C3 (en) | 1964-08-25 | 1965-01-09 | Process for producing thin layers and apparatus for carrying out the process |
| SE11018/65ASE317235B (en) | 1964-08-25 | 1965-08-24 | |
| GB36586/65AGB1125444A (en) | 1964-08-25 | 1965-08-25 | Method and apparatus for the preparation of thin layers |
| NL6511079ANL6511079A (en) | 1964-08-25 | 1965-08-25 | |
| US00195792AUS3736246A (en) | 1964-08-25 | 1971-11-04 | Apparatus for the preparation and treatment of thin layers |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT736264AAT258664B (en) | 1964-08-25 | 1964-08-25 | Device for producing and / or breaking down layers by means of electrical gas discharges |
| Publication Number | Publication Date |
|---|---|
| AT258664Btrue AT258664B (en) | 1967-12-11 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT736264AAT258664B (en) | 1964-08-25 | 1964-08-25 | Device for producing and / or breaking down layers by means of electrical gas discharges |
| Country | Link |
|---|---|
| US (1) | US3736246A (en) |
| AT (1) | AT258664B (en) |
| DE (1) | DE1515297C3 (en) |
| GB (1) | GB1125444A (en) |
| NL (1) | NL6511079A (en) |
| SE (1) | SE317235B (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3894926A (en)* | 1973-02-09 | 1975-07-15 | Lee Jau Yien | In-out transporter for an enclosed chamber |
| US3956093A (en)* | 1974-12-16 | 1976-05-11 | Airco, Inc. | Planar magnetron sputtering method and apparatus |
| FR2371524A1 (en)* | 1976-11-18 | 1978-06-16 | Alsthom Atlantique | PROCESS FOR DEPOSITING A THIN LAYER BY DECOMPOSITION OF A GAS IN A PLASMA |
| AU530905B2 (en)* | 1977-12-22 | 1983-08-04 | Canon Kabushiki Kaisha | Electrophotographic photosensitive member |
| US4151064A (en)* | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Apparatus for sputtering cylinders |
| DE3331707A1 (en)* | 1983-09-02 | 1985-03-21 | Leybold-Heraeus GmbH, 5000 Köln | METHOD AND DEVICE FOR REACTIVELY SPRAYING CONNECTIONS FROM METALS AND SEMICONDUCTORS |
| DE3347036C2 (en)* | 1983-12-24 | 1986-04-24 | Fr. Kammerer GmbH, 7530 Pforzheim | Process for coating substrates with metals |
| Publication number | Publication date |
|---|---|
| NL6511079A (en) | 1966-02-28 |
| DE1515297B2 (en) | 1978-12-07 |
| SE317235B (en) | 1969-11-10 |
| GB1125444A (en) | 1968-08-28 |
| US3736246A (en) | 1973-05-29 |
| DE1515297A1 (en) | 1969-06-12 |
| DE1515297C3 (en) | 1979-08-02 |
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