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| Semiconductor device fabrication |
|---|
| MOSFET scaling (process nodes) |
The130 nanometer (130 nm) process is a level ofsemiconductor process technology that was reached in the 2000–2001 timeframe by such leading semiconductor companies asIntel,Texas Instruments,IBM, andTSMC.
The origin of the 130 nm value is historical, as it reflects a trend of 70% scaling every 2–3 years. The naming is formally determined by theInternational Technology Roadmap for Semiconductors (ITRS).
Some of the firstCPUs manufactured with this process includeIntelTualatin family of Pentium III processors.
| Preceded by 180 nm | CMOS manufacturing processes | Succeeded by 90 nm |
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