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From WikiChip
16 µm lithography process
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The16 µm lithography process was thesemiconductor process technology used by semiconductor companies during the late 1960s. This process had an effective channel length of roughly 16 µm between the source and drain (Poly-SI channel implant). The typicalwafer size for this process was 1.1-inch (28 mm). The standard transistor packages those years were theTO-5 andTO-18 (Transistor Outline) metal-can packages.
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