The sensor and actuator properties of piezoelectric materials make them well suited for applications in a variety of microelectromechanical systems (MEMS). Simulating the response of piezoelectric devices requires solving coupled electrical and mechanical partial differential equations. In this paper, we have implemented a meshless point collocation method (PCM) to solve the governing equations. Interpolation functions are constructed from a reproducing kernel approximation, and the governing equations are discretized using a collocation approach. PCM is implemented using either a relaxation algorithm or a fully-coupled algorithm. Comparisons between the two algorithms are given. To demonstrate the performance of PCM, the behavior of two static single-layer problems and a piezoelectric bimorph have been modeled. The bimorph analysis is extended to model a prototype MEMS device.

Authors and Affiliations

1. Department of General Engineering, Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, , , , ,

   R. R. Ohs & N. R. Aluru

Received: 6 June 2000

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