doi: 10.1364/oe.15.016712.
Compact 90 degrees trench-based splitter for silicon-on-insulator rib waveguides
- PMID:19550958
- DOI: 10.1364/oe.15.016712
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Compact 90 degrees trench-based splitter for silicon-on-insulator rib waveguides
Yusheng Qian et al. Opt Express..
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Abstract
Compact silicon-on-insulator (SOI) rib waveguide 90 degrees splitters based on narrow, high-aspect ratio (~10:1) trenches are designed and experimentally demonstrated. The splitter area is only 11 mum x 11 mum. Splitter optical performance is investigated as a function of both trench width and refractive index of the trench fill material. We examine three trench fill materials, air (n=1.0), SU8 (n=1.57), and index matching fluid (n=1.733), and find good agreement between experimental measurement and three dimensional (3D) finite difference time domain (FDTD) simulation. A splitting ratio of 49/51 (reflection/transmission) is measured for an index fluid-filled trench 82nm wide.
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