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ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals
femfinite-elementspiezofinite-element-analysismultiphysicsfeasiliconmemsfinite-element-methodsansysthin-filmpiezoelectricznopiezo-sensorpztpiezoelectric-materialspiezoelectric-sensorsalnsiliziumvibrit
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Jan 25, 2025 - Roff
🧮 Telegram bot for math task solution training
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Jan 7, 2023 - JavaScript
Papers, Publications & oral presentations
sensortransducersfinite-elementssensorspapersfinite-element-analysistransducersiliconmemsfinite-element-methodsansyssiliciumpapers-collectionznopiezo-sensorpiezo-actuatorpiezoelectric-materialspiezoelectric-sensorssiliziumzinkoxid
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Sep 15, 2024 - TeX
FASENS-Messprotokolle: optische POLYTEC + elektrische Impedanz/GAIN-PHASE Messungen an Silizium-Strukturen
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Jan 10, 2025
FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3
experimentalsensorfrequency-analysisresonancesiliconmemspressure-sensorznobosch-sensormicrosystemsresonant-frequencyzinkoxid
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Apr 17, 2024 - Pascal
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