#
aln
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ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals
femfinite-elementspiezofinite-element-analysismultiphysicsfeasiliconmemsfinite-element-methodsansysthin-filmpiezoelectricznopiezo-sensorpztpiezoelectric-materialspiezoelectric-sensorsalnsiliziumvibrit
- Updated
Jan 25, 2025 - Roff
Modélisation ab-initio des processus de diffusion lors de la croissance des films minces de nitrures métalliques: TiN et AlN
- Updated
Dec 30, 2021
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