Yttrium oxyfluoride is aninorganic chemical compound with the formulaYOF.^[2] Under normal conditions, the compound is a colorless solid.^[3]

Yttrium oxyfluoride may be formed in the decomposition of crystalline hydrate ofyttrium fluoride upon heating to 900 °C in a vacuum:

${\displaystyle \mathsf{2}\mathsf{Y}{\mathsf{F}}_{\mathsf{3}}\cdot \mathsf{1}\mathsf{/}\mathsf{2}{\mathsf{H}}_{\mathsf{2}}\mathsf{O}\stackrel{\tau \mathsf{,}{\mathsf{900}}^{\mathsf{o}}\mathsf{C}}{\to }\mathsf{Y}\mathsf{O}\mathsf{F}\mathsf{+}\mathsf{Y}{\mathsf{F}}_{\mathsf{3}}\mathsf{+}\mathsf{2}\mathsf{H}\mathsf{F}}$

Yttrium oxyfluoride can also be made by hydrolysis of yttrium fluoride withsuperheated steam at 800 °C:

${\displaystyle \mathsf{2}\mathsf{Y}{\mathsf{F}}_{\mathsf{3}}\mathsf{+}{\mathsf{H}}_{\mathsf{2}}\mathsf{O}\stackrel{{\mathsf{800}}^{\mathsf{o}}\mathsf{C}}{\to }\mathsf{Y}\mathsf{O}\mathsf{F}\mathsf{+}\mathsf{2}\mathsf{H}\mathsf{F}}$

Yttrium oxyfluoride forms colorless crystals oftetragonal crystal system; its cell parameters are:a = 0.3910 nm,c = 0.5431 nm. According tohexagonal crystal family, the cell parameters are:a = 0.38727 nm,c = 1.897 nm,Z = 6.

Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.^[4][5]

• Yttrium compounds
• Oxyfluorides

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