Semiconductor device fabrication
MOSFET scaling (process nodes)
020 μm – 1968 010 μm – 1971 006 μm – 1974 003 μm – 1977  1.5 μm – 1981 001 μm – 1984 800 nm – 1987 600 nm – 1990 350 nm – 1993 250 nm – 1996 180 nm – 1999 130 nm – 2001 090 nm – 2003 065 nm – 2005 045 nm – 2007 032 nm – 2009 028 nm – 2010 022 nm – 2012 014 nm – 2014 010 nm – 2016 007 nm – 2018 005 nm – 2020 003 nm – 2022
Future 002 nm ~ 2025 001 nm ~ 2027
Half-nodes Density CMOS Device (multi-gate) Moore's law Transistor count Semiconductor Industry Nanoelectronics
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The"32 nm" node is the step following the"45 nm" process inCMOS (MOSFET)semiconductor device fabrication. "32-nanometre" refers to the average half-pitch (i.e., half the distance between identical features) of amemory cell at this technology level.

Toshiba produced commercial 32 GiBNAND flash memory chips with the "32 nm" process in 2009.^[1]Intel andAMD produced commercial microchips using the "32 nm" process in the early 2010s. IBM and theCommon Platform also developed a "32 nm"high-κ metal gate process.^[2] Intel began selling its first "32 nm" processors using theWestmere architecture on 7 January 2010.

Since at least 1997, "process nodes" have been named purely on a marketing basis, and have no relation to the dimensions on the integrated circuit;^[3] neither gate length, nor metal pitch, nor gate pitch on a "32nm" device is thirty-two nanometers.^[4][5][6][7]

The"28 nm" node is an intermediate half-nodedie shrink based on the "32 nm" process.

The "32 nm" process was superseded by commercial"22 nm" technology in 2012.^[8][9]

Prototypes using "32 nm" technology first emerged in the mid-2000s. In 2004,IBM demonstrated a 0.143 μm²SRAM cell with a poly gate pitch of 135 nm, produced usingelectron-beam lithography andphotolithography on the same layer. It was observed that the cell's sensitivity to input voltage fluctuations degraded significantly at such a small scale.^[10] In October 2006, theInteruniversity Microelectronics Centre (IMEC) demonstrated a 32 nm flash patterning capability based ondouble patterning andimmersion lithography.^[11] The necessity of introducing double patterning andhyper-NA tools to reduce memory cell area offset some of the cost advantages of moving to this node from the 45 nm node.^[12]TSMC similarly used double patterning combined with immersion lithography to produce a "32 nm" node 0.183 μm² six-transistor SRAM cell in 2005.^[13]

Intel Corporation revealed its first "32 nm" test chips to the public on 18 September 2007 at the Intel Developer Forum. The test chips had a cell size of 0.182 μm², used a second-generationhigh-κ gate dielectric and metal gate, and contained almost two billion transistors. 193 nm immersion lithography was used for the critical layers, while 193 nm or 248 nm dry lithography was used on less critical layers. The critical pitch was 112.5 nm.^[14]

In January 2011, Samsung completed development of the industry's firstDDR4SDRAM module using a process technology with a size between 30 nm and 39 nm. The module could reportedly achieve data transfer rates of 2.133 Gbit/s at 1.2V, compared to 1.35V and 1.5V DDR3 DRAM at an equivalent "30 nm-class" process technology with speeds of up to 1.6 Gbit/s. The module used pseudo open drain (POD) technology, specially adapted to allow DDR4 SDRAM to consume just half the current ofDDR3 when reading and writing data.^[15]

Intel's Core i3 and i5 processors, released in January 2010, were among the first mass-produced processors to use "32 nm" technology.^[16] Intel's second-generation Core processors, codenamedSandy Bridge, also used the "32 nm" manufacturing process. Intel's 6-core processor, codenamedGulftown and built on theWestmere architecture, was released on 16 March 2010 as the Core i7 980x Extreme Edition, retailing for approximately US$1,000.^[17]Intel's lower-end 6-core, the i7-970, was released in late July 2010, priced at approximately US$900. Intel's "32nm" process has a transistor density of 7.11 million transistors per square millimeter (MTr/mm2).^[18]

AMD also released "32 nm" SOI processors in the early 2010s. AMD's FX Series processors, codenamed Zambezi and based on AMD'sBulldozer architecture, were released in October 2011. The technology utilised a "32 nm" SOI process, two CPU cores per module, and up to four modules, ranging from a quad-core design costing approximately US$130 to a $280 eight-core design.

In September 2011,Ambarella Inc. announced the availability of the "32 nm"-based A7Lsystem-on-a-chip circuit for digital still cameras, providing1080p60 high-definition video capabilities.^[19]

The successor to "32 nm" technology was the "22 nm" node, per theInternational Technology Roadmap for Semiconductors. Intel began mass production of "22 nm" semiconductors in late 2011,^[20] and announced the release of its first commercial "22 nm" devices in April 2012.^[8][21]TSMC bypassed "32 nm", jumping from "40 nm" in 2008 to "28 nm" in 2011.^[22]

• Steen, S.; et al. (2006). "Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes".Microelectronic Engineering.83 (4–9):754–761.doi:10.1016/j.mee.2006.01.181.

• Chipmakers gear up for manufacturing hurdles
• Sony, IBM, and Toshiba partnering on semiconductor research
• IBM and AMD partnering on semiconductor researchArchived 2006-07-16 at theWayback Machine
• Slashdot discussion
• Intel 32 nm process
• Samsung self-aligned double patterning technology^{[permanent dead link]}

• International Technology Roadmap for Semiconductors lithography nodes

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